Zirconium, hafnium, titanium precursors and deposition of group 4 containing films using the same

ABSTRACT

Group 4 transition metal-containing film forming compositions are disclosed comprising Group 4 transition metal precursors having the formula: 
                         
wherein M is Ti, Zr, or Hf; each A is independently N, Si, B or P; each E is independently C, Si, B or P; m and n is independently 0, 1 or 2; m+n&gt;1; each R is independently a H or a C 1 -C 4  hydrocarbon group; each L is independently a −1 anionic ligand selected from the group consisting of NR′ 2 , OR′, Cp, amidinate, β-diketonate, or keto-iminate, wherein R′ is a H or a C 1 -C 4  hydrocarbon group; and L′ is NR″ or O, wherein R″ is a H or a C 1 -C 4  hydrocarbon group. Also disclosed are methods of synthesizing and using the disclosed precursors to deposit Group 4 transition metal-containing films on one or more substrates via vapor deposition processes.

TECHNICAL FIELD

Disclosed are Group 4 transition metal-containing film formingcompositions comprising Group 4 transition metal precursors having thefollowing chemical formula L₂-M-C₄AR₃-3-[(ER₂)_(m)-(ER₂)_(n)-L′]-,L₂-M-(C₃(m-A₂)R₂-4-[(ER₂)_(m)-(ER₂)_(n)-L′]-,L₂-M-(C₅AR₄-4-[(ER₂)_(m)-(ER₂)_(n)-L′], andL₂-M-(C₄(m-A₂)R₃-4-[(ER₂)_(m)-(ER₂)_(n)-L′]-, wherein M is Ti, Zr, or Hfbonded in an η⁵ or η⁶ bonding mode to the five- or six-membered aromaticring group; each A is independently N, Si, B or P; each E isindependently C, Si, B or P; m and n is independently 0, 1 or 2; m+n>1;each R is independently a H or C₁-C₄ hydrocarbon group; adjacent Rs maybe joined to form a hydrocarbyl ring; each L is independently a −1anionic ligand selected from the group consisting of NR′₂, OR′, Cp,amidinate, β-diketonate, or keto-iminate, wherein R′ is a H or a C₁-C₄hydrocarbon group and adjacent R′s may be joined to form a hydrocarbylring; and L′ is NR″ or O, wherein R″ is a H or a C₁-C₄ hydrocarbongroup. Also disclosed are methods of synthesizing and using thedisclosed precursors to deposit Group 4 transition metal-containingfilms on one or more substrates via vapor deposition processes.

BACKGROUND

With the scaling down of semiconductor devices, new materials with highdielectric constant are required. Chemical Vapor Deposition (CVD) andAtomic Layer Deposition (ALD) have become the main deposition techniquesfor such thin films since CVD and ALD may provide different films(metal, oxide, nitride, etc.) having a finely defined thickness and highstep coverage. In CVD and ALD, the precursor molecule plays a criticalrole to obtain high quality films with high conformality and lowimpurities.

Among high-k dielectrics, Group 4 based materials, such as Group 4oxides TiO₂, HfO₂ or ZrO₂, are very promising, whether used as pure ormixed oxides or in laminates. In addition, Group 4 metal-containingfilms, such as TiN, may be used for electrode and/or Cu diffusionbarrier applications. The Group 4 oxides may also be used for their etchresistance properties in lithography applications, such as for hardmasks or spacer-defined multiple patterning applications.

Cyclopentadienyl (Cp) bridged Group 4 metal compounds have been used asprecursors for CVD and/or ALD of Group 4 metal-containing films. Forexample, U.S. Pat. No. 8,946,096 to Ahn et al. discloses group 4metalorganic compounds utilized in CVD or ALD having the formula

wherein M is Ti, Zr or Hf, R¹ is C₁ to C₄ alkyl, R² and R³ areindependently C₁ to C₆ alkyl. US 2015/0255276 to Cho et al. discloses anorganometallic precursor, used as a deposition source in CVD and ALDprocesses, represented by a chemical formula ofX_(n)(M)(R¹)_(m)(R²)_(k), wherein M is Ti, Zr or Hf. X is a ligand of Mand one of 6,6-dimethylfulvenyl, indenyl, cyclopentadienyl andcyclopentadienyl substituted with an amino group. R¹ and R² are ligandsof M, and each independently an amino group or an ethylenediamino group.Each n, m and k is a positive integer, and n+m+k=3 or 4.KR10-2014-0078534 to Castle et al. discloses metal precursors andmetal-containing thin film prepared with the metal precursors includingGroup 4 complexes having the structure formula:

wherein M is selected from the group consisting of Zr, Hf and Ti, X_(a)and X_(b) are each independently NR_(a)R_(b) or OR_(c), X_(c) is(NR_(d)) or O, R_(a) to R_(d) are each independently a hydrogen atom ora C₁ to C₅ alkyl group, R are each independently a hydrogen atom or a C₁to C₅ alkyl group, and m is an integer of 0 to 4. Kang et al. discloseforming TiO₂ thin films using (CpN)Ti(NMe₂)₂ and oxygen remote plasma(Kang et al., “Growth behavior and structural characteristics of TiO₂thin films using (CpN)Ti(NMe₂)₂ and oxygen remote Plasma”, Phys. StatusSolidi A, 2014, 212, No. 3, p 674-679).

Some Cp bridged Group 4 metal compounds are synthesized and used forcatalysts or other purposes. For example, J Okuda discloses metalorganiccatalysts having linked amido-cyclopentadienyl ligands such asTi(R-Cp-SiMe₂-NR—)(NR₂)₂ (J Okuda, “Linked Amido-CyclopentadienylComplexes of Group 3 and 4 Metals: The First “Post-Metallocenes”Metalorganic Catalysts for Synthesis and Polymerization, pp 200-211,1999). Herrmann et al. disclose Cp(CH₂CH₂—O—)Zr(NMe₂)₂ prepared aspotential catalysts (Herrmann et al., “Doubly Bridged vac-Metallocenesof Zirconium and Hafnium”, Angewandte. Chem. Int. Ed. Eng, 1994, 33(19),p 1946-1949). Kim et al. disclose synthesis of (Me₄Cp-CH₂—NtBu)Zr(NEt₂)₂and (1,3-Me₂C₅H₂—CHPh-NtBu-κN)Zr(NMe₂)₂ (Kim et al., “sp³-C¹-Bridged1,3-Me₂Cp/Amido Titanium and Zirconium Complexes and Their Reactivitiestowards Ethylene Polymerization”, Eur. J. Inorg. Chem. 2004, p1522-1529). Jesus Cano and Klaus Kunz disclose syntheses of some P, C,Si contained Cp-amino bridged compounds (Jesus Cano, Klaus Kunz, “How tosynthesize a constrained geometry catalyst (CGC)—A survey”, Journal ofOrganometallic Chemistry 692, 2007, p 4411-4423). Syntheses ofcarbon-bridged cyclopentadienyl amido Group 4 metal complexes werereported in Piet-Jan Sinnema's PhD dissertation in 1999 (Piet-JanSinnema, “Carbon-Bridged Cyclopentadienyl Amido Group 4 MetalComplexes”, University of Groningen, 1999).

Accordingly, those skilled in the art continue to seek highly thermallystable, Group 4 compounds suitable for vapor phase thin film depositionwith controlled thickness and composition at high temperature.

SUMMARY

Group 4 transition metal-containing film forming compositions aredisclosed. The Group 4 transition metal-containing film formingcompositions comprise Group 4 transition metal precursors having thefollowing formula: L₂-M-(A-containing five-membered aromaticring-(ER₂)_(m)-(ER₂)_(n)-L′)- and L₂-M-(A-containing six-memberedaromatic ring-(ER₂)_(m)-(ER₂)_(n)-L′)-, wherein M is Ti, Zr, or Hfbonded in an η⁵ or η⁶ bonding mode to the five- or six-membered aromaticring group; each A is independently N, Si, B or P; each E isindependently C, Si, B or P; m and n is independently 0, 1 or 2; m+n>1;each R is independently a H or a C₁-C₄ hydrocarbon group; adjacent Rsmay be joined to form a hydrocarbyl ring; each L is independently −1anionic ligand selected from the group consisting of NR′₂, OR′, Cp,amidinate, β-diketonate, or keto-iminate, wherein R′ is a H or a C₁-C₄hydrocarbon group and adjacent R′s may be joined to form a hydrocarbylring; and L′ is NR″ or O, wherein R″ is a H or a C₁-C₄ hydrocarbongroup.

The Group 4 transition metal-containing film forming compositionsfurther comprise the Group 4 transition metal precursors having thefollowing chemical formula:L₂-M-C₄AR₃-3-[(ER₂)_(m)-(ER₂)_(n)-L′]-,L₂-M-C₃A₂R₂-4-[(ER₂)_(m)(ER₂)_(n)-L′]-,L₂-M-C₅AR₄-4-[(ER₂)_(m)-(ER₂)_(n)-L′]-, andL₂-M-C₄A₂R₃-4-[(ER₂)_(m)-(ER₂)_(n)-L′]-,referring to the following structure formula, respectively:

wherein M is Ti, Zr, or Hf bonded in an η⁵ or η⁶ bonding mode to thefive- or six-membered aromatic ring group; each A is independently N,Si, B or P; each E is independently C, Si, B or P; m and n isindependently 0, 1 or 2; m+n>1; each R is independently a H or a C₁-C₄hydrocarbon group; adjacent Rs may be joined to form a hydrocarbyl ring;each L is independently −1 anionic ligand selected from the groupconsisting of NR′₂, OR′, Cp, amidinate, β-diketonate, or keto-iminate,wherein R′ is a H or a C₁-C₄ hydrocarbon group and adjacent R′s may bejoined to form a hydrocarbyl ring; and L′ is NR″ or O, wherein R″ is a Hor a C₁-C₄ hydrocarbon group.

The disclosed Group 4 transition metal-containing film formingcompositions may further include one or more of the following aspects:

-   -   M being Ti;    -   M being Zr;    -   M being Hf;    -   Each A being N, Si, B or P;    -   A being N;    -   A being Si;    -   A being B;    -   A being P;    -   Each E being C, Si, B or P;    -   E being C;    -   E being Si;    -   E being B;    -   E being P;    -   m being 0, 1, or 2;    -   n being 0, 1, or 2;    -   m+n being >1;    -   m being 0;    -   m being 1;    -   m being 2;    -   n being 0;    -   n being 1;    -   n being 2;    -   m being 1 and n being 1;    -   m being 2 and n being 1;    -   Each R independently being H, Me, Et, ^(n)Pr, ^(i)Pr, ^(n)Bu,        ^(s)Bu, ^(i)Bu, or ^(t)Bu;    -   R being H;    -   R being Me;    -   R being Et;    -   R being ^(n)Pr;    -   R being ^(i)Pr;    -   R being ^(n)Bu;    -   R being ^(i)Bu;    -   R being ^(s)Bu;    -   R being ^(t)Bu;    -   L being NH₂;    -   L being NMe₂;    -   L being NEt₂    -   L being N^(n)Pr₂;    -   L being N^(i)Pr₂;    -   L being N^(n)Bu₂;    -   L being N^(i)Bu₂;    -   L being N^(s)Bu₂;    -   L being N^(t)Bu₂;    -   L being NHMe;    -   L being NHEt;    -   L being NH^(n)Pr;    -   L being NH^(i)Pr;    -   L being NH^(n)Bu;    -   L being NH^(i)Bu;    -   L being NH^(s)Bu;    -   L being NH^(t)Bu;    -   L being NMeEt;    -   L being NMe^(n)Pr;    -   L being NMe^(i)Pr;    -   L being NMe^(n)Bu;    -   L being NMe^(i)Bu;    -   L being NMe^(s)Bu;    -   L being NMe^(t)Bu;    -   L being NEt^(n)Pr;    -   L being NEt^(i)Pr;    -   L being NEt^(n)Bu;    -   L being NEt^(i)Bu;    -   L being NEt^(s)Bu;    -   L being NEt^(t)Bu;    -   L being N^(n)Pr^(i)Pr;    -   L being N^(n)Pr^(n)Bu;    -   L being N^(n)Pr^(i)Bu;    -   L being N^(n)Pr^(s)Bu;    -   L being N^(n)Pr^(t)Bu;    -   L being N^(i)Pr^(n)Bu;    -   L being N^(i)Pr^(i)Bu;    -   L being N^(i)Pr^(s)Bu;    -   L being N^(i)Pr^(t)Bu;    -   L being N^(n)Bu^(i)Bu;    -   L being N^(n)Bu^(s)Bu;    -   L being N^(n)Bu^(t)Bu;    -   L being N^(i)Bu^(s)Bu;    -   L being N^(i)Bu^(t)Bu;    -   L being N^(s)Bu^(t)Bu;    -   L being OH;    -   L being OMe;    -   L being OEt;    -   L being O^(n)Pr;    -   L being O^(i)Pr;    -   L being O^(n)Bu;    -   L being O^(i)Bu;    -   L being O^(s)Bu;    -   L being O^(t)Bu;    -   L being Cp;    -   L being amidinate;    -   L being β-diketonate;    -   L being keto-iminate;    -   L′ being NH;    -   L′ being NMe;    -   L′ being NEt;    -   L′ being N^(n)Pr;    -   L′ being N^(i)Pr;    -   L′ being N^(n)Bu;    -   L′ being N^(i)Bu;    -   L′ being N^(s)Bu;    -   L′ being N^(t)Bu;    -   L′ being O;    -   the five-membered aromatic group being a heterocyclic group        containing N, Si, B, P or O;    -   the five-membered aromatic group being a heterocyclic group        having a symmetric or asymmetric structure;    -   the five-membered aromatic group containing two As at 1,2        positions;    -   the five-membered aromatic group containing two As at 1,3        positions;    -   the five-membered aromatic group being pyrrole;    -   the five-membered aromatic group being pyrazole;    -   the five-membered aromatic group being imidazole;    -   the five-membered aromatic group being silacyclopentadienide;    -   the five-membered aromatic group being borole;    -   the five-membered aromatic group being phosphole;    -   the six-membered aromatic group being a heterocyclic group        containing N, Si, B, P or O;    -   the six-membered aromatic group being a heterocyclic group        having a symmetric or asymmetric structure;    -   the six-membered aromatic group containing two As at 1,2        positions;    -   the six-membered aromatic group containing two As at 1,3        positions;    -   the six-membered aromatic group containing two As at 1,4        positions;    -   the six-membered aromatic group being pyridine;    -   the six-membered aromatic group being pyrimidine;    -   the six-membered aromatic group being silabenzene;    -   the six-membered aromatic group being borobenzene;    -   the Group 4 transition metal precursor being        (NMe₂)₂-Ti-Pyrrole-(CH₂—CH₂—NMe)-;    -   the Group 4 transition metal precursor being        (NMe₂)₂-Ti-Pyrazole-(CH₂—CH₂—NMe)-;    -   the Group 4 transition metal precursor being        (NMe₂)₂-Ti-Imidazole-(CH₂—CH₂—NMe)-;    -   the Group 4 transition metal precursor being        (NMe₂)(Cp)-Ti-Pyrrole-(CH₂—CH₂—NMe)-;    -   the Group 4 transition metal precursor being        (NMe₂)(Cp)-Ti-Pyrazole-(CH₂—CH₂—NMe)-;    -   the Group 4 transition metal precursor being        (NMe₂)(Cp)-Ti-Imidazole-(CH₂—CH₂—NMe)-;    -   the Group 4 transition metal precursor being        (NMe₂)₂-Zr-Pyrrole-(CH₂—CH₂—NMe)-;    -   the Group 4 transition metal precursor being        (NMe₂)₂-Zr-Pyrazole-(CH₂—CH₂—NMe)-;    -   the Group 4 transition metal precursor being        (NMe₂)₂-Zr-Imidazole-(CH₂—CH₂—NMe)-;    -   the Group 4 transition metal precursor being        (NMe₂)(Cp)-Zr-Pyrrole-(CH₂—CH₂—NMe)-;    -   the Group 4 transition metal precursor being        (NMe₂)(Cp)-Zr-Pyrazole-(CH₂—CH₂—NMe)-;    -   the Group 4 transition metal precursor being        (NMe₂)(Cp)-Zr-Imidazole-(CH₂—CH₂—NMe)-;    -   the Group 4 transition metal precursor being        (NMe₂)₂-Hf-Pyrrole-(CH₂—CH₂—NMe)-;    -   the Group 4 transition metal precursor being        (NMe₂)₂-Hf-Pyrazole-(CH₂—CH₂—NMe)-;    -   the Group 4 transition metal precursor being        (NMe₂)₂-Hf-Imidazole-(CH₂—CH₂—NMe)-;    -   the Group 4 transition metal precursor being        (NMe₂)(Cp)-Hf-Pyrrole-(CH₂—CH₂—NMe)-;    -   the Group 4 transition metal precursor being        (NMe₂)(Cp)-Hf-Pyrazole-(CH₂—CH₂—NMe)-;    -   the Group 4 transition metal precursor being        (NMe₂)(Cp)-Hf-Imidazole-(CH₂—CH₂—NMe)-;    -   the Group 4 transition metal-containing film forming composition        comprising between approximately 0.1 molar % and approximately        50 molar % of the Group 4 transition metal precursor;    -   the Group 4 transition metal-containing film forming composition        having a viscosity between approximately 1 and approximately 20        cps, preferably between approximately 1 and approximately 5 cps,        preferably around 3 cps;    -   the Group 4 transition metal-containing film forming composition        comprising between approximately 95% w/w to approximately 100%        w/w of the Group 4 transition metal precursors;    -   the Group 4 transition metal-containing film forming composition        comprising between approximately 99% w/w to approximately 100%        w/w of the Group 4 transition metal precursor;    -   the Group 4 transition metal-containing film forming composition        further comprising a solvent;    -   the Group 4 transition metal-containing film forming composition        comprising between approximately 0% w/w and 5% w/w of a        hydrocarbon solvent;    -   the solvent being selected from the group consisting of C₁-C₁₆        hydrocarbons, whether saturated or unsaturated, ketones, ethers,        glymes, esters, tetrahydrofuran (THF), dimethyl oxalate (DMO),        and combinations thereof;    -   the solvent being a C₁-C₁₆ hydrocarbon;    -   the solvent being tetrahydrofuran (THF);    -   the solvent being DMO;    -   the solvent being an ether;    -   the solvent being a glyme; and    -   the difference between the boiling point of the Group 4        transition metal precursor and the solvent being less than 100°        C.

Also disclosed are Group 4 transition metal-containing film formingcomposition delivery devices comprising a canister having an inletconduit and an outlet conduit and containing any of the Group 4transition metal-containing film forming compositions disclosed above.The disclosed delivery devices may include one or more of the followingaspects:

-   -   the Group 4 transition metal-containing film forming composition        having a total concentration of non Group 4 metal contaminants        of less than 10 ppmw;    -   an end of the inlet conduit located above a surface of the Group        4 transition metal-containing film forming composition and an        end of the outlet conduit located above the surface of the Group        4 transition metal-containing film forming composition;    -   an end of the inlet conduit end located above a surface of the        Group 4 transition metal-containing film forming composition and        an end of the outlet conduit located below the surface of the        Group 4 transition metal-containing film forming composition;    -   an end of the inlet conduit end located below a surface of the        Group 4 transition metal-containing film forming composition and        an end of the outlet conduit located above the surface of the        Group 4 transition metal-containing film forming composition.

Also disclosed are processes for the deposition of Group 4 transitionmetal-containing films on one or more substrates. At least one Group 4transition metal-containing film forming compositions disclosed above isintroduced into a reactor having at least one substrate disposedtherein. At least part of the Group 4 transition metal precursor isdeposited onto the substrate(s) to form the Group 4 transitionmetal-containing film. The disclosed processes may further include oneor more of the following aspects:

-   -   introducing at least one reactant into the reactor;    -   the reactant being plasma-treated;    -   the reactant being remote plasma-treated;    -   the reactant not being plasma-treated;    -   the reactant being selected from the group consisting of H₂,        NH₃, hydrazines (such as N₂H₄, MeHNNH₂, MeHNNHMe), organic        amines (such as NMeH₂, NEtH₂, NMe₂H, NEt₂H, NMe₃, NEt₃, cyclic        amines like pyrrolidine or pyrimidine), diamines (such as        ethylene diamine, dimethylethylene diamine, tetramethylethylene        diamine), aminoalcohols (such as ethanolamine [HO—CH₂—CH₂—NH₂],        bis ethanolamine [HN(C₂H₅OH)₂] or tris        ethanolamine[N(C₂H₅OH)₃]), pyrazoline, and pyridine;    -   the reactant being selected from the group consisting of        (SiH₃)₃N, hydridosilanes (such as SiH₄, Si₂H₆, Si₃H₈, Si₄H₁₀,        Si₅H₁₀, Si₆H₁₂), chlorosilanes and chloropolysilanes (such as        SiHCl₃, SiH₂Cl₂, SiH₃Cl, Si₂Cl₆, Si₂HCl₅, Si₃Cl₈), alkylsilanes        (such as Me₂SiH₂, Et₂SiH₂, MeSiH₃, EtSiH₃), and aminosilanes        (such as tris-dimethylaminosilane, bis-diethylaminosilane,        di-isopropylaminosilane and other mono, dis or tris        aminosilanes);    -   the reactant being selected from the group consisting of NH₃,        N(SiH₃₎₃, aminosilanes, and mixtures thereof;    -   the reactant being selected from trialkylaluminum,        dialkylaluminum halide, alkylamino and alkoxy derivatives of        aluminum, and mixtures thereof;    -   the reactant being NH₃;    -   the reactant being selected from the group consisting of: O₂,        O₃, H₂O, H₂O₂, NO, N₂O, NO₂, an alcohol, a diol (such as        ethylene glycol), oxygen radicals thereof, and mixtures thereof;    -   the reactant being H₂O;    -   the reactant being O₂;    -   the reactant being plasma treated O₂;    -   the reactant being O₃;    -   the Group 4 transition metal-containing film forming composition        and the reactant being introduced into the reactor        simultaneously;    -   the reactor being configured for chemical vapor deposition;    -   the reactor being configured for plasma enhanced chemical vapor        deposition;    -   the Group 4 transition metal-containing film forming composition        and the reactant being introduced into the chamber sequentially;    -   the reactor being configured for atomic layer deposition;    -   the reactor being configured for plasma enhanced atomic layer        deposition;    -   the reactor being configured for spatial atomic layer        deposition;    -   the Group 4 transition metal-containing film being a Group 4        transition metal oxide (M_(n)O_(m), wherein M is the Group 4        transition metal and each of n and m is an integer which        inclusively range from 1 to 6);    -   the Group 4 transition metal-containing film being TiO₂, ZrO₂ or        HfO₂;    -   the Group 4 transition metal-containing film being MM′_(i)O_(x),        wherein i ranges from 0 to 1; x ranges from 1 to 6; and M is        selected from a Group 3 element, a different Group 4 element        (i.e., MM), a Group 5 element, a lanthanide, Si, Al, B, P or Ge;        and    -   the Group 4 transition metal-containing film being        MM′_(i)N_(y)O_(x), wherein i ranges from 0 to 1; x and y range        from 1 to 6; and M is selected from a Group 3 element, a        different Group 4 element (i.e., MM), a Group 5 element, a        lanthanide, Si, Al, B, P or Ge.

Notation and Nomenclature

Certain abbreviations, symbols, and terms are used throughout thefollowing description and claims, and include:

As used in the disclosed embodiments, the indefinite article “a” or “an”means one or more.

As used in the disclosed embodiments, “about” or “around” or“approximately” in the text or in a claim means±10% of the value stated.

As used in the disclosed embodiments, the term “independently” when usedin the context of describing R groups should be understood to denotethat the subject R group is not only independently selected relative toother R groups bearing the same or different subscripts or superscripts,but is also independently selected relative to any additional species ofthat same R group. For example in the formula MR¹ _(x)(NR²R³)_((4-x)),wherein x is 2 or 3, the two or three R¹ groups may, but need not beidentical to each other or to R² or to R³. Further, it should beunderstood that unless specifically stated otherwise, values of R groupsare independent of each other when used in different formulas.

As used in the disclosed embodiments, the term “hydrocarbyl group”refers to a functional group containing carbon and hydrogen; the term“alkyl group” refers to saturated functional groups containingexclusively carbon and hydrogen atoms. The hydrocarbyl group may besaturated or unsaturated. Either term refers to linear, branched, orcyclic groups. Examples of linear alkyl groups include withoutlimitation, methyl groups, ethyl groups, propyl groups, butyl groups,etc. Examples of branched alkyls groups include without limitation,t-butyl. Examples of cyclic alkyl groups include without limitation,cyclopropyl groups, cyclopentyl groups, cyclohexyl groups, etc.

As used in the disclosed embodiments, the abbreviation “Me” refers to amethyl group; the abbreviation “Et” refers to an ethyl group; theabbreviation “Pr” refers to a propyl group; the abbreviation “^(n)Pr”refers to a “normal” or linear propyl group; the abbreviation “^(i)Pr”refers to an isopropyl group; the abbreviation “Bu” refers to a butylgroup; the abbreviation “^(n)Bu” refers to a “normal” or linear butylgroup; the abbreviation “^(t)Bu” refers to a tert-butyl group, alsoknown as 1,1-dimethylethyl; the abbreviation “^(s)Bu” refers to asec-butyl group, also known as 1-methylpropyl; the abbreviation “^(i)Bu”refers to an iso-butyl group, also known as 2-methylpropyl; theabbreviation “Cp” refers to cyclopentadienyl; the abbreviation “Cp*”refers to pentamethylcyclopentadienyl.

As used in the disclosed embodiments, the abbreviation “ortho-” or “o-”refers to an aromatic ring having carbon replacements at 1,2 positions;the abbreviation “meta-” or “m-” refers to an aromatic ring havingcarbon replacements at 1,3 positions; the abbreviation “para-” or “p-”refers to an six-membered aromatic ring having carbon replacements at1,4 positions. For example, the compounds shown in following structureformula are represented by L₂-Zr—C₄(m-A₂)R₃-4-[(ER₂)_(m)-(ER₂)_(n)-L′]-,

wherein M is Ti, Zr, or Hf bonded in an η⁶ bonding mode to thesix-membered aromatic ring group; each A is independently N, Si, B or P;each E is independently C, Si, B or P; m and n is independently 0, 1 or2; m+n>1; and each R is independently a H or a C₁-C₄ hydrocarbon group;adjacent Rs may be joined to form a hydrocarbyl ring; each L isindependently −1 anionic ligand selected from the group consisting ofNR′₂, OR′, Cp, amidinate, β-diketonate, or keto-iminate, wherein R′ is aH or a C₁-C₄ hydrocarbon group and adjacent R′s may be joined to form ahydrocarbyl ring; and L′ is NR″ or O, wherein R″ is a H or a C₁-C₄hydrocarbon group. Herein η⁶ is the hapticity of the above compoundsrepresenting six contiguous atoms of the aromatic ring group bonded tothe M atom.

As used in the disclosed embodiments, the chemical formulaL₂-M-C₄AR₃-3-[(ER₂)_(m)-(ER₂)_(n))-L′]- andL₂-M-(C₃(m-A₂)R₂-4-[(ER₂)_(m)-(ER₂)_(n))-L′]- refer to the compoundshaving the following structure formula, respectively:

wherein M is Ti, Zr, or Hf bonded in an η⁵ bonding mode to thefive-membered aromatic ring group; each A is independently N, Si, B orP; each E is independently C, Si, B or P; m and n is independently 0, 1or 2; m+n>1; each R is independently a H or a C₁-C₄ hydrocarbon group;adjacent Rs may be joined to form a hydrocarbyl ring; each L isindependently −1 anionic ligand selected from the group consisting ofNR′₂, OR′, Cp, amidinate, β-diketonate, or keto-iminate, wherein R′ is aH or a C₁-C₄ hydrocarbon group and adjacent R′s may be joined to form ahydrocarbyl ring; and L′ is NR″ or O, wherein R″ is a H or a C₁-C₄hydrocarbon group. Herein η⁵ is the hapticity of the above compoundsrepresenting five contiguous atoms of the aromatic ring group bonded tothe M atom.

As used in the disclosed embodiments, the chemical formulaL₂-M-C₅AR₄-4-[(ER₂)_(m)-(ER₂)_(n)-L′]- andL₂-M-C₄(m-A₂)R₃-4-[(ER₂)_(m)-(ER₂)_(n)-L′]- refer to the compoundshaving the following structure formula, respectively:

wherein M is Ti, Zr, or Hf bonded in an η⁶ bonding mode to thesix-membered aromatic ring group; each A is independently N, Si, B or P;each E is independently C, Si, B or P; m and n is independently 0, 1 or2; m+n>1; each R is independently a H or a C₁-C₄ hydrocarbon group;adjacent Rs may be joined to form a hydrocarbyl ring; each L isindependently −1 anionic ligand selected from the group consisting ofNR′₂, OR′, Cp, amidinate, β-diketonate, or keto-iminate, wherein R′ is aH or a C₁-C₄ hydrocarbon group and adjacent R′s may be joined to form ahydrocarbyl ring; and L′ is NR″ or O, wherein R″ is a H or a C₁-C₄hydrocarbon group. Herein η⁶ is the hapticity of the above compoundsrepresenting six contiguous atoms of the aromatic ring group bonded tothe M atom.

The standard abbreviations of the elements from the periodic table ofelements are used in the disclosed embodiments. It should be understoodthat elements may be referred to by these abbreviations (e.g., Mn refersto manganese, Si refers to silicon, C refers to carbon, etc.).Additionally, Group 3 refers to Group 3 of the Periodic Table (i.e., Sc,Y, La, or Ac). Similarly, Group 4 refers to Group 4 of the PeriodicTable (i.e., Ti, Zr, or Hf) and Group 5 refers to Group 5 of thePeriodic Table (i.e., V, Nb, or Ta).

Any and all ranges recited in the disclosed embodiments are inclusive oftheir endpoints (i.e., x=1 to 4 or x ranges from 1 to 4 includes x=1,x=4, and x=any number in between), irrespective of whether the term“inclusively” is used.

Please note that the films or layers deposited, such as silicon oxide orsilicon nitride, may be listed throughout the specification and claimswithout reference to their proper stoichiometry (i.e., SiO₂, Si₃N₄). Thelayers may include pure (Si) layers, carbide (Si_(o)C_(p)) layers,nitride (Si_(k)N_(l)) layers, oxide (Si_(n)O_(m)) layers, or mixturesthereof, wherein k, l, m, n, o, and p inclusively range from 1 to 6. Forinstance, silicon oxide is Si_(n)O_(m), wherein n ranges from 0.5 to 1.5and m ranges from 1.5 to 3.5. More preferably, the silicon oxide layeris SiO₂ or SiO₃. These films may also contain Hydrogen, typically from 0at % to 15 at %. However, since not routinely measured, any filmcompositions given ignore their H content, unless explicitly statedotherwise.

BRIEF DESCRIPTION OF THE FIGURES

For a further understanding of the nature and objects of the presentinvention, reference should be made to the following detaileddescription, taken in conjunction with the accompanying figures wherein:

FIG. 1 is a side view of one embodiment of a liquid Group 4 transitionmetal-containing film forming composition delivery device 1;

FIG. 2 is a side view of a second embodiment of the Group 4 transitionmetal-containing film forming composition delivery device 1; and

FIG. 3 is an exemplary embodiment of a solid precursor sublimator 100for subliming solid Group 4 transition metal-containing film formingcompositions.

DESCRIPTION OF PREFERRED EMBODIMENTS

Group 4 transition metal-containing film forming compositions aredisclosed. The Group 4 transition metal-containing film formingcompositions comprise Group 4 transition metal precursors having thefollowing chemical formula:

L₂-M-(A-containing five-membered aromaticring)-[(ER₂)_(m)-(ER₂)_(n)-L′)]- or L₂-M-(A-containing six-memberedaromatic ring)-[(ER₂)_(m)-(ER₂)_(n)-L′)]-, wherein M is Ti, Zr, or Hfbonded in an η⁵ or η⁶ bonding mode to the five- or six-membered aromaticgroup; A-containing five-membered aromatic group contains one or two Aswherein the two As are at ortho- or meta-positions; A-containingsix-membered aromatic group contains one or two As wherein the two Asare at ortho- or meta- or para-positions; each A is independently N, Si,B or P; each E is independently C, Si, B or P; m and n is independently0, 1 or 2; m+n>1; each R is independently hydrogen or a C₁-C₄hydrocarbon group and adjacent R′s may be joined to form a hydrocarbylring; each L is independently a −1 anionic ligand selected from thegroup consisting of NR′₂, OR′, Cp, amidinate, β-diketonate, orketo-iminate, wherein R′ is a H or a C₁-C₄ hydrocarbon group andadjacent R′s may be joined to form a hydrocarbyl ring; and L′ is NR″ orO, wherein R″ is a H or a C₁-C₄ hydrocarbon group. One of ordinary skillin the art would recognize that the A-containing five- or six-memberedaromatic group is a heterocyclic group containing N, Si, B, P or O andmay have a symmetric or asymmetric structure.

The Group 4 transition metal-containing film forming compositionsfurther comprise the Group 4 transition metal precursors having thefollowing chemical formula:L₂-M-C₄AR₃-3-[(ER₂)_(m)-(ER₂)_(n)-L′]-,L₂-M-(C₃(m-A₂)R₂-4-[(ER₂)_(m)-(ER₂)_(n)-L′]-,L₂-M-(C₅AR₄-4-[(ER₂)_(m)-(ER₂)_(n)-L′]-, orL₂-M-(C₄(m-A₂)R₃-4-[(ER₂)_(m)-(ER₂)_(n)-L′]-,referring to the following structure formula, respectively:

wherein M is Ti, Zr, or Hf bonded in an η⁵ or η⁶ bonding mode to thefive- or six-membered aromatic group; each A is independently N, Si, Bor P; each E is independently C, Si, B or P; m and n is independently 0,1 or 2; m+n>1; each R is independently a H or a C₁-C₄ hydrocarbon group;adjacent Rs may be joined to form a hydrocarbyl ring; each L isindependently −1 anionic ligand selected from the group consisting ofNR′₂, OR′, Cp, amidinate, β-diketonate, or keto-iminate, wherein R′ is aH or a C₁-C₄ hydrocarbon group and adjacent R′s may be joined to form ahydrocarbyl ring; and L′ is NR″ or O, wherein R″ is a H or a C₁-C₄hydrocarbon group.

Exemplary aromatic groups of the Group 4 transition metal precursorsinclude pyrrole, pyrazole, imidazole, pyridine, pyrimidine,silacyclopentadienide, silabenzene, borole, borobenzene, phosphole,etc., or at least one methyl or isopropyl substituted pyrrole, pyrazole,imidazole, pyridine, pyrimidine, silacyclopentadienide, silabenzene,borobenzene, phosphininyl, borole, phosphole, etc.; each R is hydrogen,methyl, ethyl, propyl, butyl, (including isomers), etc.

Exemplary Group 4 transition metal precursors wherein each E is C; A isN; m+n=2; and each R is independently hydrogen or a hydrocarbon grouphaving up to 4 carbon atoms include but are not limited to(Me₂N)₂-M-C₄NH₃-3-[(CH₂)₂—NMe]-, (Et₂N)₂-M-C₄NH₃-3-[(CH₂)₂—NMe]-,(^(n)Pr₂N)₂-M-C₄NH₃-3-[(CH₂)₂—NMe]-,(^(i)Pr₂N)₂-M-C₄NH₃-3-[(CH₂)₂—NMe]-,(^(n)Bu₂N)₂-M-C₄NH₃-3-[(CH₂)₂—NMe]-,(^(i)Bu₂N)₂-M-C₄NH₃-3-[(CH₂)₂—NMe]-,(^(s)Bu₂N)₂-M-C₄NH₃-3-[(CH₂)₂—NMe]-,(^(t)Bu₂N)₂-M-C₄NH₃-3-[(CH₂)₂—NMe]-, (Me₂N)(Cp)-M-C₄NH₃-3-[(CH₂)₂—NMe]-,(Et₂N)(Cp)-M-C₄NH₃-3-[(CH₂)₂—NMe]-,(^(n)Pr₂N)(Cp)-M-C₄NH₃-3-[(CH₂)₂—NMe]-,(^(i)Pr₂N)(Cp)-M-C₄NH₃-3-[(CH₂)₂—NMe]-,(^(n)Bu₂N)(Cp)-M-C₄NH₃-3-[(CH₂)₂—NMe]-,(^(i)Bu₂N)(Cp)-M-C₄NH₃-3-[(CH₂)₂—NMe]-,(^(s)Bu₂N)(Cp)-M-C₄NH₃-3-[(CH₂)₂—NMe]-,(^(t)Bu₂N)(Cp)-M-C₄NH₃-3-[(CH₂)₂—NMe]-, (MeO)₂-M-C₄NH₃-3-[(CH₂)₂—NMe]-,(EtO)₂-M-C₄NH₃-3-[(CH₂)₂—NMe]-, (^(n)PrO)₂-M-C₄NH₃-3-[(CH₂)₂—NMe]-,(^(i)PrO)₂-M-C₄NH₃-3-[(CH₂)₂—NMe]-, (^(n)BuO)₂-M-C₄NH₃-3-[(CH₂)₂—NMe]-,(^(i)BuO)₂-M-C₄NH₃-3-[(CH₂)₂—NMe]-, (^(s)BuO)₂-M-C₄NH₃-3-[(CH₂)₂—NMe]-,(^(t)BuO)₂-M-C₄NH₃-3-[(CH₂)₂—NMe]-, (Me₂N)₂-M-C₄NH₃-3-[(CH₂)₂—NEt]-,(Et₂N)₂-M-C₄NH₃-3-[(CH₂)₂—NEt]-, (^(n)Pr₂N)₂-M-C₄NH₃-3-[(CH₂)₂—NEt]-,(^(i)Pr₂N)₂-M-C₄NH₃-3-[(CH₂)₂—NEt]-,(^(n)Bu₂N)₂-M-C₄NH₃-3-[(CH₂)₂—NEt]-,(^(i)Bu₂N)₂-M-C₄NH₃-3-[(CH₂)₂—NEt]-,(^(s)Bu₂N)₂-M-C₄NH₃-3-[(CH₂)₂—NEt]-,(^(t)Bu₂N)₂-M-C₄NH₃-3-[(CH₂)₂—NEt]-, (Me₂N)(Cp)-M-C₄NH₃-3-[(CH₂)₂—NEt]-,(Et₂N)(Cp)-M-C₄NH₃-3-[(CH₂)₂—NEt]-,(^(n)Pr₂N)(Cp)-M-C₄NH₃-3-[(CH₂)₂—NEt]-,(^(i)Pr₂N)(Cp)-M-C₄NH₃-3-[(CH₂)₂—NEt]-,(^(n)Bu₂N)(Cp)-M-C₄NH₃-3-[(CH₂)₂—NEt]-,(^(i)Bu₂N)(Cp)-M-C₄NH₃-3-[(CH₂)₂—NEt]-,(^(s)Bu₂N)(Cp)-M-C₄NH₃-3-[(CH₂)₂—NEt]-,(^(t)Bu₂N)(Cp)-M-C₄NH₃-3-[(CH₂)₂—NEt]-, (MeO)₂-M-C₄NH₃-3-[(CH₂)₂—NEt]-,(EtO)₂-M-C₄NH₃-3-[(CH₂)₂—NEt]-, (^(n)PrO)₂-M-C₄NH₃-3-[(CH₂)₂—NEt]-,(^(i)PrO)₂-M-C₄NH₃-3-[(CH₂)₂—NEt]-, (^(n)BuO)₂-M-C₄NH₃-3-[(CH₂)₂—NEt]-,(^(i)BuO)₂-M-C₄NH₃-3-[(CH₂)₂—NEt]-, (^(s)BuO)₂-M-C₄NH₃-3-[(CH₂)₂—NEt]-,(^(t)BuO)₂-M-C₄NH₃-3-[(CH₂)₂—NEt]-, (Me₂N)₂-M-C₄NH₃-3-[(CH₂)₂—N^(n)Pr]—,(Et₂N)₂-M-C₄NH₃-3-[(CH₂)₂—N^(n)Pr]—,(^(n)Pr₂N)₂-M-C₄NH₃-3-[(CH₂)₂—N^(n)Pr]—,(^(i)Pr₂N)₂-M-C₄NH₃-3-[(CH₂)₂—N^(n)Pr]—,(^(n)Bu₂N)₂-M-C₄NH₃-3-[(CH₂)₂—N^(n)Pr]—,(^(i)Bu₂N)₂-M-C₄NH₃-3-[(CH₂)₂—N^(n)Pr]—,(^(s)Bu₂N)₂-M-C₄NH₃-3-[(CH₂)₂—N^(n)Pr]—,(^(t)Bu₂N)₂-M-C₄NH₃-3-[(CH₂)₂—N^(n)Pr]—,(Me₂N)(Cp)-M-C₄NH₃-3-[(CH₂)₂—N^(n)Pr]—,(Et₂N)(Cp)-M-C₄NH₃-3-[(CH₂)₂—N^(n)Pr]—,(^(n)Pr₂N)(Cp)-M-C₄NH₃-3-[(CH₂)₂—N^(n)Pr]—,(^(i)Pr₂N)(Cp)-M-C₄NH₃-3-[(CH₂)₂—N^(n)Pr]—,(^(n)Bu₂N)(Cp)-M-C₄NH₃-3-[(CH₂)₂—N^(n)Pr]—,(^(t)Bu₂N)(Cp)-M-C₄NH₃-3-[(CH₂)₂—N^(n)Pr]—,(^(s)Bu₂N)(Cp)-M-C₄NH₃-3-[(CH₂)₂—N^(n)Pr]—,(^(t)Bu₂N)(Cp)-M-C₄NH₃-3-[(CH₂)₂—N^(n)Pr]—,(MeO)₂-M-C₄NH₃-3-[(CH₂)₂—N^(n)Pr]—, (EtO)₂-M-C₄NH₃-3-[(CH₂)₂—N^(n)Pr]—,(^(n)PrO)₂-M-C₄NH₃-3-[(CH₂)₂—N^(n)Pr]—,(^(i)PrO)₂-M-C₄NH₃-3-[(CH₂)₂—N^(n)Pr]—,(^(n)BuO)₂-M-C₄NH₃-3-[(CH₂)₂—N^(n)Pr]—,(^(i)BuO)₂-M-C₄NH₃-3-[(CH₂)₂—N^(n)Pr]—,(^(s)BuO)₂-M-C₄NH₃-3-[(CH₂)₂—N^(n)Pr]—,(^(t)BuO)₂-M-C₄NH₃-3-[(CH₂)₂—N^(n)Pr]—,(Me₂N)₂-M-C₄NH₃-3-[(CH₂)₂—N^(i)Pr]—, (Et₂N)₂M-C₄NH₃-3-[(CH₂)₂—N^(i)Pr]—,(^(n)Pr₂N)₂-M-C₄NH₃-3-[(CH₂)₂—N^(i)Pr]—,(^(i)Pr₂N)₂-M-C₄NH₃-3-[(CH₂)₂—N^(i)Pr]—,(^(n)Bu₂N)₂-M-C₄NH₃-3-[(CH₂)₂—N^(i)Pr]—,(^(i)Bu₂N)₂-M-C₄NH₃-3-[(CH₂)₂—N^(i)Pr]—,(^(s)Bu₂N)₂-M-C₄NH₃-3-[(CH₂)₂—N^(i)Pr]—,(^(t)Bu₂N)₂-M-C₄NH₃-3-[(CH₂)₂—N^(i)Pr]—,(Me₂N)(Cp)-M-C₄NH₃-3-[(CH₂)₂—N^(i)Pr]—,(Et₂N)(Cp)-M-C₄NH₃-3-[(CH₂)₂—N^(i)Pr]—,(^(n)Pr₂N)(Cp)-M-C₄NH₃-3-[(CH₂)₂—N^(i)Pr]—,(^(i)Pr₂N)(Cp)-M-C₄NH₃-3-[(CH₂)₂—N^(i)Pr]—,(^(n)Bu₂N)(Cp)-M-C₄NH₃-3-[(CH₂)₂—N^(i)Pr]—,(^(t)Bu₂N)(Cp)-M-C₄NH₃-3-[(CH₂)₂—N^(i)Pr]—,(^(s)Bu₂N)(Cp)-M-C₄NH₃-3-[(CH₂)₂—N^(i)Pr]—,(^(t)Bu₂N)(Cp)-M-C₄NH₃-3-[(CH₂)₂—N^(i)Pr]—,(MeO)₂-M-C₄NH₃-3-[(CH₂)₂—N^(i)Pr]—, (EtO)₂-M-C₄NH₃-3-[(CH₂)₂—N^(i)Pr]—,(^(n)PrO)₂-M-C₄NH₃-3-[(CH₂)₂—N^(i)Pr]—,(^(i)PrO)₂-M-C₄NH₃-3-[(CH₂)₂—N^(i)Pr]—,(^(n)BuO)₂-M-C₄NH₃-3-[(CH₂)₂—N^(i)Pr]—,(^(i)BuO)₂-M-C₄NH₃-3-[(CH₂)₂—N^(i)Pr]—,(^(s)BuO)₂-M-C₄NH₃-3-[(CH₂)₂—N^(i)Pr]—,(^(t)BuO)₂-M-C₄NH₃-3-[(CH₂)₂—N^(i)Pr]—,(Me₂N)₂-M-C₄NH₃-3-[(CH₂)₂—N^(n)Bu]-,(Et₂N)₂-M-C₄NH₃-3-[(CH₂)₂—N^(n)Bu]-,(^(n)Pr₂N)₂-M-C₄NH₃-3-[(CH₂)₂—N^(n)Bu]-,(^(i)Pr₂N)₂-M-C₄NH₃-3-[(CH₂)₂—N^(n)Bu]-,(^(n)Bu₂N)₂-M-C₄NH₃-3-[(CH₂)₂—N^(n)Bu]-,(^(i)Bu₂N)₂-M-C₄NH₃-3-[(CH₂)₂—N^(n)Bu]-,(^(s)Bu₂N)₂-M-C₄NH₃-3-[(CH₂)₂—N^(n)Bu]-,(^(t)Bu₂N)₂-M-C₄NH₃-3-[(CH₂)₂—N^(n)Bu]-,(Me₂N)(Cp)-M-C₄NH₃-3-[(CH₂)₂—N^(n)Bu]-,(Et₂N)(Cp)-M-C₄NH₃-3-[(CH₂)₂—N^(n)Bu]-,(^(n)Pr₂N)(Cp)-M-C₄NH₃-3-[(CH₂)₂—N^(n)Bu]-,(^(i)Pr₂N)(Cp)-M-C₄NH₃-3-[(CH₂)₂—N^(n)Bu]-,(^(n)Bu₂N)(Cp)-M-C₄NH₃-3-[(CH₂)₂—N^(n)Bu]-,(^(i)Bu₂N)(Cp)-M-C₄NH₃-3-[(CH₂)₂—N^(n)Bu]-,(^(s)Bu₂N)(Cp)-M-C₄NH₃-3-[(CH₂)₂—N^(n)Bu]-,(^(t)Bu₂N)(Cp)-M-C₄NH₃-3-[(CH₂)₂—N^(n)Bu]-,(MeO)₂-M-C₄NH₃-3-[(CH₂)₂—N^(n)Bu]-, (EtO)₂-M-C₄NH₃-3-[(CH₂)₂—N^(n)Bu]-,(^(n)PrO)₂-M-C₄NH₃-3-[(CH₂)₂—N^(n)Bu]-,(^(i)PrO)₂-M-C₄NH₃-3-[(CH₂)₂—N^(n)Bu]-,(^(n)BuO)₂-M-C₄NH₃-3-[(CH₂)₂—N^(n)Bu]-,(^(i)BuO)₂-M-C₄NH₃-3-[(CH₂)₂—N^(n)Bu]-,(^(s)BuO)₂-M-C₄NH₃-3-[(CH₂)₂—N^(n)Bu]-,(^(t)BuO)₂-M-C₄NH₃-3-[(CH₂)₂—N^(n)Bu]-,(Me₂N)₂-M-C₄NH₃-3-[(CH₂)₂—N^(i)Bu], (Et₂N)₂-M-C₄NH₃-3-[(CH₂)₂—N^(i)Bu]-,(^(n)Pr₂N)₂-M-C₄NH₃-3-[(CH₂)₂—N^(i)Bu],(^(i)Pr₂N)₂-M-C₄NH₃-3-[(CH₂)₂—N^(i)Bu]-,(^(n)Bu₂N)₂-M-C₄NH₃-3-[(CH₂)₂—N^(i)Bu]-,(^(i)Bu₂N)₂-M-C₄NH₃-3-[(CH₂)₂—N^(i)Bu]-,(^(s)Bu₂N)₂-M-C₄NH₃-3-[(CH₂)₂—N^(i)Bu],(^(t)Bu₂N)₂-M-C₄NH₃-3-[(CH₂)₂—N^(i)Bu],(Me₂N)(Cp)-M-C₄NH₃-3-[(CH₂)₂—N^(i)Bu]-,(Et₂N)(Cp)-M-C₄NH₃-3-[(CH₂)₂—N^(i)Bu]-,(^(n)Pr₂N)(Cp)-M-C₄NH₃-3-[(CH₂)₂—N^(i)Bu],(^(i)Pr₂N)(Cp)-M-C₄NH₃-3-[(CH₂)₂—N^(i)Bu]-,(^(n)Bu₂N)(Cp)-M-C₄NH₃-3-[(CH₂)₂—N^(i)Bu],(^(i)Bu₂N)(Cp)-M-C₄NH₃-3-[(CH₂)₂—N^(i)Bu]-,(^(s)Bu₂N)(Cp)-M-C₄NH₃-3-[(CH₂)₂—N^(i)Bu],(^(t)Bu₂N)(Cp)-M-C₄NH₃-3-[(CH₂)₂—N^(i)Bu],(MeO)₂-M-C₄NH₃-3-[(CH₂)₂—N^(i)Bu]-, (EtO)₂-M-C₄NH₃-3-[(CH₂)₂—N^(i)Bu]-,(^(n)PrO)₂-M-C₄NH₃-3-[(CH₂)₂—N^(i)Bu]-,(^(i)PrO)₂-M-C₄NH₃-3-[(CH₂)₂—N^(i)Bu]-,(^(n)BuO)₂-M-C₄NH₃-3-[(CH₂)₂—N^(i)Bu]-,(^(i)BuO)₂-M-C₄NH₃-3-[(CH₂)₂—N^(i)Bu]-,(^(s)BuO)₂-M-C₄NH₃-3-[(CH₂)₂—N^(i)Bu]-,(^(t)BuO)₂-M-C₄NH₃-3-[(CH₂)₂—N^(i)Bu]-,(Me₂N)₂-M-C₄NH₃-3-[(CH₂)₂—N^(s)Bu]-,(Et₂N)₂-M-C₄NH₃-3-[(CH₂)₂—N^(s)Bu]-,(^(n)Pr₂N)₂-M-C₄NH₃-3-[(CH₂)₂—N^(s)Bu]-,(^(i)Pr₂N)₂-M-C₄NH₃-3-[(CH₂)₂—N^(s)Bu]-,(^(n)Bu₂N)₂-M-C₄NH₃-3-[(CH₂)₂—N^(s)Bu]-,(^(i)Bu₂N)₂-M-C₄NH₃-3-[(CH₂)₂—N^(s)Bu]-,(^(s)Bu₂N)₂-M-C₄NH₃-3-[(CH₂)₂—N^(s)Bu]-,(^(i)Bu₂N)₂-M-C₄NH₃-3-[(CH₂)₂—N^(s)Bu]-,(Me₂N)(Cp)-M-C₄NH₃-3-[(CH₂)₂—N^(s)Bu]-,(Et₂N)(Cp)-M-C₄NH₃-3-[(CH₂)₂—N^(s)Bu]-,(^(n)Pr₂N)(Cp)-M-C₄NH₃-3-[(CH₂)₂—N^(s)Bu]-,(^(i)Pr₂N)(Cp)-M-C₄NH₃-3-[(CH₂)₂—N^(s)Bu]-,(^(n)Bu₂N)(Cp)-M-C₄NH₃-3-[(CH₂)₂—N^(s)Bu]-,(^(i)Bu₂N)(Cp)-M-C₄NH₃-3-[(CH₂)₂—N^(s)Bu]-,(^(s)Bu₂N)(Cp)-M-C₄NH₃-3-[(CH₂)₂—N^(s)Bu]-,(^(t)Bu₂N)(Cp)-M-C₄NH₃-3-[(CH₂)₂—N^(s)Bu]-,(MeO)₂-M-C₄NH₃-3-[(CH₂)₂—N^(s)Bu]-, (EtO)₂-M-C₄NH₃-3-[(CH₂)₂—N^(s)Bu]-,(^(n)PrO)₂-M-C₄NH₃-3-[(CH₂)₂—N^(s)Bu]-,(^(i)PrO)₂-M-C₄NH₃-3-[(CH₂)₂—N^(s)Bu]-,(^(n)BuO)₂-M-C₄NH₃-3-[(CH₂)₂—N^(s)Bu]-,(^(i)BuO)₂-M-C₄NH₃-3-[(CH₂)₂—N^(s)Bu]-,(^(s)BuO)₂-M-C₄NH₃-3-[(CH₂)₂—N^(s)Bu]-,(^(t)BuO)₂-M-C₄NH₃-3-[(CH₂)₂—N^(s)Bu]-,(Me₂N)₂-M-C₄NH₃-3-[(CH₂)₂—N^(t)Bu]-,(Et₂N)₂-M-C₄NH₃-3-[(CH₂)₂—N^(t)Bu]-,(^(n)Pr₂N)₂-M-C₄NH₃-3-[(CH₂)₂—N^(t)Bu]-,(^(i)Pr₂N)₂-M-C₄NH₃-3-[(CH₂)₂—N^(t)Bu]-,(^(n)Bu₂N)₂-M-C₄NH₃-3-[(CH₂)₂—N^(t)Bu]-,(^(i)Bu₂N)₂-M-C₄NH₃-3-[(CH₂)₂—N^(t)Bu]-,(^(s)Bu₂N)₂-M-C₄NH₃-3-[(CH₂)₂—N^(t)Bu]-,(^(t)Bu₂N)₂-M-C₄NH₃-3-[(CH₂)₂—N^(t)Bu]-,(Me₂N)(Cp)-M-C₄NH₃-3-[(CH₂)₂—N^(t)Bu]-,(Et₂N)(Cp)-M-C₄NH₃-3-[(CH₂)₂—N^(t)Bu]-,(^(n)Pr₂N)(Cp)-M-C₄NH₃-3-[(CH₂)₂—N^(t)Bu]-,(^(i)Pr₂N)(Cp)-M-C₄NH₃-3-[(CH₂)₂—N^(t)Bu]-,(^(n)Bu₂N)(Cp)-M-C₄NH₃-3-[(CH₂)₂—N^(t)Bu]-,(^(i)Bu₂N)(Cp)-M-C₄NH₃-3-[(CH₂)₂—N^(t)Bu]-,(^(s)Bu₂N)(Cp)-M-C₄NH₃-3-[(CH₂)₂—N^(t)Bu]-,(^(t)Bu₂N)(Cp)-M-C₄NH₃-3-[(CH₂)₂—N^(t)Bu]-,(MeO)₂-M-C₄NH₃-3-[(CH₂)₂—N^(t)Bu]-, (EtO)₂-M-C₄NH₃-3-[(CH₂)₂—N^(t)Bu]-,(^(n)PrO)₂-M-C₄NH₃-3-[(CH₂)₂—N^(t)Bu]-,(^(i)PrO)₂-M-C₄NH₃-3-[(CH₂)₂—N^(t)Bu]-,(^(n)BuO)₂-M-C₄NH₃-3-[(CH₂)₂—N^(t)Bu]-,(^(i)BuO)₂-M-C₄NH₃-3-[(CH₂)₂—N^(t)Bu]-,(^(s)BuO)₂-M-C₄NH₃-3-[(CH₂)₂—N^(t)Bu]-,(^(t)BuO)₂-M-C₄NH₃-3-[(CH₂)₂—N^(t)Bu]-, (Me₂N)₂-M-C₄NH₃-3-[(CH₂)₂—O]—,(Et₂N)₂M-C₄NH₃-3-[(CH₂)₂—O]—, (^(n)Pr₂N)₂M-C₄NH₃-3-[(CH₂)₂—O]—,(^(i)Pr₂N)₂-M-C₄NH₃-3-[(CH₂)₂—O]—, (^(n)Bu₂N)₂-M-C₄NH₃-3-[(CH₂)₂—O]—,(^(i)Bu₂N)₂-M-C₄NH₃-3-[(CH₂)₂—O]—, (^(s)Bu₂N)₂-M-C₄NH₃-3-[(CH₂)₂—O]—,(^(t)Bu₂N)₂M-C₄NH₃-3-[(CH₂)₂—O]—, (Me₂N)(Cp)-M-C₄NH₃-3-[(CH₂)₂—O]—,(Et₂N)(Cp)-M-C₄NH₃-3-[(CH₂)₂—O]—, (^(n)Pr₂N)(Cp)-M-C₄NH₃-3-[(CH₂)₂—O]—,(^(i)Pr₂N)(Cp)-M-C₄NH₃-3-[(CH₂)₂—O]—,(^(n)Bu₂N)(Cp)-M-C₄NH₃-3-[(CH₂)₂—O]—,(^(i)Bu₂N)(Cp)-M-C₄NH₃-3-[(CH₂)₂—O]—,(^(s)Bu₂N)(Cp)-M-C₄NH₃-3-[(CH₂)₂—O]—,(^(t)Bu₂N)(Cp)-M-C₄NH₃-3-[(CH₂)₂—O]—, (MeO)₂-M-C₄NH₃-3-[(CH₂)₂—O]—,(EtO)₂-M-C₄NH₃-3-[(CH₂)₂—O]—, (^(n)PrO)₂-M-C₄NH₃-3-[(CH₂)₂—O]—,(^(i)PrO)₂-M-C₄NH₃-3-[(CH₂)₂—O]—, (^(n)BuO)₂-M-C₄NH₃-3-[(CH₂)₂—O]—,(^(i)BuO)₂-M-C₄NH₃-3-[(CH₂)₂—O]—, (^(s)BuO)₂-M-C₄NH₃-3-[(CH₂)₂—O]—,(^(t)BuO)₂-M-C₄NH₃-3-[(CH₂)₂—O]—, (Me₂N)₂-M-C₄NH₃-3-[(CMe₂)₂-NMe]-,(Et₂N)₂-M-C₄NH₃-3-[(CMe₂)₂-NMe]-, (^(n)Pr₂N)₂-M-C₄NH₃-3-[(CMe₂)₂-NMe]-,(^(i)Pr₂N)₂-M-C₄NH₃-3-[(CMe₂)₂-NMe]-,(^(n)Bu₂N)₂-M-C₄NH₃-3-[(CMe₂)₂-NMe]-,(^(i)Bu₂N)₂-M-C₄NH₃-3-[(CMe₂)₂-NMe]-,(^(s)Bu₂N)₂-M-C₄NH₃-3-[(CMe₂)₂-NMe]-,(^(t)Bu₂N)₂-M-C₄NH₃-3-[(CMe₂)₂-NMe]-,(Me₂N)(Cp)-M-C₄NH₃-3-[(CMe₂)₂-NMe]-,(Et₂N)(Cp)-M-C₄NH₃-3-[(CMe₂)₂-NMe]-,(^(n)Pr₂N)(Cp)-M-C₄NH₃-3-[(CMe₂)₂-NMe]-,(^(i)Pr₂N)(Cp)-M-C₄NH₃-3-[(CMe₂)₂-NMe]-,(^(n)Bu₂N)(Cp)-M-C₄NH₃-3-[(CMe₂)₂-NMe]-,(^(i)Bu₂N)(Cp)-M-C₄NH₃-3-[(CMe₂)₂-NMe]-,(^(s)Bu₂N)(Cp)-M-C₄NH₃-3-[(CMe₂)₂-NMe]-,(^(t)Bu₂N)(Cp)-M-C₄NH₃-3-[(CMe₂)₂-NMe]-,(MeO)₂-M-C₄NH₃-3-[(CMe₂)₂-NMe]-, (EtO)₂-M-C₄NH₃-3-[(CMe₂)₂-NMe]-,(^(n)PrO)₂-M-C₄NH₃-3-[(CMe₂)₂-NMe]-,(^(i)PrO)₂-M-C₄NH₃-3-[(CMe₂)₂-NMe]-,(^(n)BuO)₂-M-C₄NH₃-3-[(CMe₂)₂-NMe]-,(^(i)BuO)₂-M-C₄NH₃-3-[(CMe₂)₂-NMe]-,(^(s)BuO)₂-M-C₄NH₃-3-[(CMe₂)₂-NMe]-,(^(t)BuO)₂-M-C₄NH₃-3-[(CMe₂)₂-NMe]-, (Me₂N)₂-M-C₄NH₃-3-[(CMe₂)₂-NEt]-,(Et₂N)₂-M-C₄NH₃-3-[(CMe₂)₂-NEt]-, (^(n)Pr₂N)₂-M-C₄NH₃-3-[(CMe₂)₂-NEt]-,(^(i)Pr₂N)₂-M-C₄NH₃-3-[(CMe₂)₂-NEt]-,(^(n)Bu₂N)₂-M-C₄NH₃-3-[(CMe₂)₂-NEt]-,(^(i)Bu₂N)₂-M-C₄NH₃-3-[(CMe₂)₂-NEt]-,(^(s)Bu₂N)₂-M-C₄NH₃-3-[(CMe₂)₂-NEt]-,(^(t)Bu₂N)₂-M-C₄NH₃-3-[(CMe₂)₂-NEt]-,(Me₂N)(Cp)-M-C₄NH₃-3-[(CMe₂)₂-NEt]-,(Et₂N)(Cp)-M-C₄NH₃-3-[(CMe₂)₂-NEt]-,(^(n)Pr₂N)(Cp)-M-C₄NH₃-3-[(CMe₂)₂-NEt]-,(^(i)Pr₂N)(Cp)-M-C₄NH₃-3-[(CMe₂)₂-NEt]-,(^(n)Bu₂N)(Cp)-M-C₄NH₃-3-[(CMe₂)₂-NEt]-,(^(i)Bu₂N)(Cp)-M-C₄NH₃-3-[(CMe₂)₂-NEt]-,(^(s)Bu₂N)(Cp)-M-C₄NH₃-3-[(CMe₂)₂-NEt]-,(^(t)Bu₂N)(Cp)-M-C₄NH₃-3-[(CMe₂)₂-NEt]-,(MeO)₂-M-C₄NH₃-3-[(CMe₂)₂-NEt]-, (EtO)₂M-C₄NH₃-3-[(CMe₂)₂-NEt]-,(^(n)PrO)₂M-C₄NH₃-3-[(CMe₂)₂-NEt]-, (^(i)PrO)₂-M-C₄NH₃-3-[(CMe₂)₂-NEt]-,(^(n)BuO)₂-M-C₄NH₃-3-[(CMe₂)₂-NEt]-,(^(i)BuO)₂-M-C₄NH₃-3-[(CMe₂)₂-NEt]-,(^(s)BuO)₂-M-C₄NH₃-3-[(CMe₂)₂-NEt]-,(^(t)BuO)₂-M-C₄NH₃-3-[(CMe₂)₂-NEt]-,(Me₂N)₂-M-C₄NH₃-3-[(CMe₂)₂-N^(n)Pr]—,(Et₂N)₂-M-C₄NH₃-3-[(CMe₂)₂-N^(n)Pr]—,(^(n)Pr₂N)₂-M-C₄NH₃-3-[(CMe₂)₂-N^(n)Pr]—,(^(i)Pr₂N)₂-M-C₄NH₃-3-[(CMe₂)₂-N^(n)Pr]—,(^(n)Bu₂N)₂-M-C₄NH₃-3-[(CMe₂)₂-N^(n)Pr]—,(^(i)Bu₂N)₂-M-C₄NH₃-3-[(CMe₂)₂-N^(n)Pr]—,(^(s)Bu₂N)₂-M-C₄NH₃-3-[(CMe₂)₂-N^(n)Pr]—,(^(t)Bu₂N)₂-M-C₄NH₃-3-[(CMe₂)₂-N^(n)Pr]—,(Me₂N)(Cp)-M-C₄NH₃-3-[(CMe₂)₂-N^(n)Pr]—,(Et₂N)(Cp)-M-C₄NH₃-3-[(CMe₂)₂-N^(n)Pr]—,(^(n)Pr₂N)(Cp)-M-C₄NH₃-3-[(CMe₂)₂-N^(n)Pr]—,(^(i)Pr₂N)(Cp)-M-C₄NH₃-3-[(CMe₂)₂-N^(n)Pr]—,(^(n)Bu₂N)(Cp)-M-C₄NH₃-3-[(CMe₂)₂-N^(n)Pr]—,(^(i)Bu₂N)(Cp)-M-C₄NH₃-3-[(CMe₂)₂-N^(n)Pr]—,(^(s)Bu₂N)(Cp)-M-C₄NH₃-3-[(CMe₂)₂-N^(n)Pr]—,(^(t)Bu₂N)(Cp)-M-C₄NH₃-3-[(CMe₂)₂-N^(n)Pr]—,(MeO)₂-M-C₄NH₃-3-[(CMe₂)₂-N^(n)Pr]—,(EtO)₂-M-C₄NH₃-3-[(CMe₂)₂-N^(n)Pr]—,(^(n)PrO)₂-M-C₄NH₃-3-[(CMe₂)₂-N^(n)Pr]—,(^(i)PrO)₂-M-C₄NH₃-3-[(CMe₂)₂-N^(n)Pr]—,(^(n)BuO)₂-M-C₄NH₃-3-[(CMe₂)₂-N^(n)Pr]—,(^(i)BuO)₂-M-C₄NH₃-3-[(CMe₂)₂-N^(n)Pr]—,(^(s)BuO)₂-M-C₄NH₃-3-[(CMe₂)₂-N^(n)Pr]—,(^(t)BuO)₂-M-C₄NH₃-3-[(CMe₂)₂-N^(n)Pr]—,(Me₂N)₂-M-C₄NH₃-3-[(CMe₂)₂-N^(i)Pr]—,(Et₂N)₂-M-C₄NH₃-3-[(CMe₂)₂-N^(i)Pr]—,(^(n)Pr₂N)₂-M-C₄NH₃-3-[(CMe₂)₂-N^(i)Pr]—,(^(i)Pr₂N)₂-M-C₄NH₃-3-[(CMe₂)₂-N^(i)Pr]—,(^(n)Bu₂N)₂-M-C₄NH₃-3-[(CMe₂)₂-N^(i)Pr]—,(^(i)Bu₂N)₂-M-C₄NH₃-3-[(CMe₂)₂-N^(i)Pr]—,(^(s)Bu₂N)₂-M-C₄NH₃-3-[(CMe₂)₂-N^(i)Pr]—,(^(t)Bu₂N)₂-M-C₄NH₃-3-[(CMe₂)₂-N^(i)Pr]—,(Me₂N)(Cp)-M-C₄NH₃-3-[(CMe₂)₂-N^(i)Pr]—,(Et₂N)(Cp)-M-C₄NH₃-3-[(CMe₂)₂-N^(i)Pr]—,(^(n)Pr₂N)(Cp)-M-C₄NH₃-3-[(CMe₂)₂-N^(i)Pr]—,(^(i)Pr₂N)(Cp)-M-C₄NH₃-3-[(CMe₂)₂-N^(i)Pr]—,(^(n)Bu₂N)(Cp)-M-C₄NH₃-3-[(CMe₂)₂-N^(i)Pr]—,(^(i)Bu₂N)(Cp)-M-C₄NH₃-3-[(CMe₂)₂-N^(i)Pr]—,(^(s)Bu₂N)(Cp)-M-C₄NH₃-3-[(CMe₂)₂-N^(i)Pr]—,(^(t)Bu₂N)(Cp)-M-C₄NH₃-3-[(CMe₂)₂-N^(i)Pr]—,(MeO)₂-M-C₄NH₃-3-[(CMe₂)₂-N^(i)Pr]—,(EtO)₂-M-C₄NH₃-3-[(CMe₂)₂-N^(i)Pr]—,(^(n)PrO)₂-M-C₄NH₃-3-[(CMe₂)₂-N^(i)Pr]—,(^(i)PrO)₂-M-C₄NH₃-3-[(CMe₂)₂-N^(i)Pr]—,(^(n)BuO)₂-M-C₄NH₃-3-[(CMe₂)₂-N^(i)Pr]—,(^(i)BuO)₂-M-C₄NH₃-3-[(CMe₂)₂-N^(i)Pr]—,(^(s)BuO)₂-M-C₄NH₃-3-[(CMe₂)₂-N^(i)Pr]—,(^(t)BuO)₂-M-C₄NH₃-3-[(CMe₂)₂-N^(i)Pr]—,(Me₂N)₂-M-C₄NH₃-3-[(CMe₂)₂-N^(n)Bu]-,(Et₂N)₂-M-C₄NH₃-3-[(CMe₂)₂-N^(n)Bu]-,(^(n)Pr₂N)₂-M-C₄NH₃-3-[(CMe₂)₂-N^(n)Bu]-,(^(i)Pr₂N)₂-M-C₄NH₃-3-[(CMe₂)₂-N^(n)Bu]-,(^(n)Bu₂N)₂-M-C₄NH₃-3-[(CMe₂)₂-N^(n)Bu]-,(^(i)Bu₂N)₂-M-C₄NH₃-3-[(CMe₂)₂-N^(n)Bu]-,(^(s)Bu₂N)₂-M-C₄NH₃-3-[(CMe₂)₂-N^(n)Bu]-,(^(t)Bu₂N)₂-M-C₄NH₃-3-[(CMe₂)₂-N^(n)Bu]-,(Me₂N)(Cp)-M-C₄NH₃-3-[(CMe₂)₂-N^(n)Bu]-,(Et₂N)(Cp)-M-C₄NH₃-3-[(CMe₂)₂-N^(n)Bu]-,(^(n)Pr₂N)(Cp)-M-C₄NH₃-3-[(CMe₂)₂-N^(n)Bu]-,(^(i)Pr₂N)(Cp)-M-C₄NH₃-3-[(CMe₂)₂-N^(n)Bu]-,(^(n)Bu₂N)(Cp)-M-C₄NH₃-3-[(CMe₂)₂-N^(n)Bu]-,(^(i)Bu₂N)(Cp)-M-C₄NH₃-3-[(CMe₂)₂-N^(n)Bu]-,(^(s)Bu₂N)(Cp)-M-C₄NH₃-3-[(CMe₂)₂-N^(n)Bu]-,(^(t)Bu₂N)(Cp)-M-C₄NH₃-3-[(CMe₂)₂-N^(n)Bu]-,(MeO)₂-M-C₄NH₃-3-[(CMe₂)₂-N^(n)Bu]-,(EtO)₂-M-C₄NH₃-3-[(CMe₂)₂-N^(n)Bu]-,(^(n)PrO)₂-M-C₄NH₃-3-[(CMe₂)₂-N^(n)Bu]-,(^(i)PrO)₂-M-C₄NH₃-3-[(CMe₂)₂-N^(n)Bu]-,(^(n)BuO)₂-M-C₄NH₃-3-[(CMe₂)₂-N^(n)Bu]-,(^(i)BuO)₂-M-C₄NH₃-3-[(CMe₂)₂-N^(n)Bu]-,(^(s)BuO)₂-M-C₄NH₃-3-[(CMe₂)₂-N^(n)Bu]-,(^(t)BuO)₂-M-C₄NH₃-3-[(CMe₂)₂-N^(n)Bu]-,(Me₂N)₂-M-C₄NH₃-3-[(CMe₂)₂-N^(i)Bu]-,(Et₂N)₂-M-C₄NH₃-3-[(CMe₂)₂-N^(i)Bu]-,(^(n)Pr₂N)₂-M-C₄NH₃-3-[(CMe₂)₂-N^(i)Bu]-,(^(i)Pr₂N)₂-M-C₄NH₃-3-[(CMe₂)₂-N^(i)Bu]-,(^(n)Bu₂N)₂-M-C₄NH₃-3-[(CMe₂)₂-N^(i)Bu]-,(^(i)Bu₂N)₂-M-C₄NH₃-3-[(CMe₂)₂-N^(i)Bu]-,(^(s)Bu₂N)₂-M-C₄NH₃-3-[(CMe₂)₂-N^(i)Bu]-,(^(t)Bu₂N)₂-M-C₄NH₃-3-[(CMe₂)₂-N^(i)Bu]-,(Me₂N)(Cp)-M-C₄NH₃-3-[(CMe₂)₂-N^(i)Bu]-,(Et₂N)(Cp)-M-C₄NH₃-3-[(CMe₂)₂-N^(i)Bu]-,(^(n)Pr₂N)(Cp)-M-C₄NH₃-3-[(CMe₂)₂-N^(i)Bu]-,(^(i)Pr₂N)(Cp)-M-C₄NH₃-3-[(CMe₂)₂-N^(i)Bu]-,(^(n)Bu₂N)(Cp)-M-C₄NH₃-3-[(CMe₂)₂-N^(i)Bu]-,(^(i)Bu₂N)(Cp)-M-C₄NH₃-3-[(CMe₂)₂-N^(i)Bu]-,(^(s)Bu₂N)(Cp)-M-C₄NH₃-3-[(CMe₂)₂-N^(i)Bu]-,(^(t)Bu₂N)(Cp)-M-C₄NH₃-3-[(CMe₂)₂-N^(i)Bu]-,(MeO)₂-M-C₄NH₃-3-[(CMe₂)₂-N^(i)Bu]-,(EtO)₂-M-C₄NH₃-3-[(CMe₂)₂-N^(i)Bu]-,(^(n)PrO)₂-M-C₄NH₃-3-[(CMe₂)₂-N^(i)Bu]-,(^(i)PrO)₂-M-C₄NH₃-3-[(CMe₂)₂-N^(i)Bu]-,(^(n)BuO)₂-M-C₄NH₃-3-[(CMe₂)₂-N^(i)Bu]-,(^(i)BuO)₂-M-C₄NH₃-3-[(CMe₂)₂-N^(i)Bu]-,(^(s)BuO)₂-M-C₄NH₃-3-[(CMe₂)₂-N^(i)Bu]-,(^(t)BuO)₂-M-C₄NH₃-3-[(CMe₂)₂-N^(i)Bu]-,(Me₂N)₂-M-C₄NH₃-3-[(CMe₂)₂-N^(s)Bu]-,(Et₂N)₂-M-C₄NH₃-3-[(CMe₂)₂-N^(s)Bu]-,(^(n)Pr₂N)₂-M-C₄NH₃-3-[(CMe₂)₂-N^(s)Bu]-,(^(i)Pr₂N)₂-M-C₄NH₃-3-[(CMe₂)₂-N^(s)Bu]-,(^(n)Bu₂N)₂-M-C₄NH₃-3-[(CMe₂)₂-N^(s)Bu]-,(^(i)Bu₂N)₂-M-C₄NH₃-3-[(CMe₂)₂-N^(s)Bu]-,(^(s)Bu₂N)₂-M-C₄NH₃-3-[(CMe₂)₂-N^(s)Bu]-,(^(t)Bu₂N)₂-M-C₄NH₃-3-[(CMe₂)₂-N^(s)Bu]-,(Me₂N)(Cp)-M-C₄NH₃-3-[(CMe₂)₂-N^(s)Bu]-,(Et₂N)(Cp)-M-C₄NH₃-3-[(CMe₂)₂-N^(s)Bu]-,(^(n)Pr₂N)(Cp)-M-C₄NH₃-3-[(CMe₂)₂-N^(s)Bu]-,(^(i)Pr₂N)(Cp)-M-C₄NH₃-3-[(CMe₂)₂-N^(s)Bu]-,(^(n)Bu₂N)(Cp)-M-C₄NH₃-3-[(CMe₂)₂-N^(s)Bu]-,(^(i)Bu₂N)(Cp)-M-C₄NH₃-3-[(CMe₂)₂-N^(s)Bu]-,(^(s)Bu₂N)(Cp)-M-C₄NH₃-3-[(CMe₂)₂-N^(s)Bu]-,(^(t)Bu₂N)(Cp)-M-C₄NH₃-3-[(CMe₂)₂-N^(s)Bu]-,(MeO)₂-M-C₄NH₃-3-[(CMe₂)₂-N^(s)Bu]-,(EtO)₂-M-C₄NH₃-3-[(CMe₂)₂-N^(s)Bu]-,(^(n)PrO)₂-M-C₄NH₃-3-[(CMe₂)₂-N^(s)Bu]-,(^(i)PrO)₂-M-C₄NH₃-3-[(CMe₂)₂-N^(s)Bu]-,(^(n)BuO)₂-M-C₄NH₃-3-[(CMe₂)₂-N^(s)Bu]-,(^(i)BuO)₂-M-C₄NH₃-3-[(CMe₂)₂-N^(s)Bu]-,(^(s)BuO)₂-M-C₄NH₃-3-[(CMe₂)₂-N^(s)Bu]-,(^(t)BuO)₂-M-C₄NH₃-3-[(CMe₂)₂-N^(s)Bu]-,(Me₂N)₂-M-C₄NH₃-3-[(CMe₂)₂-N^(t)Bu]-,(Et₂N)₂-M-C₄NH₃-3-[(CMe₂)₂-N^(t)Bu]-,(^(n)Pr₂N)₂M-C₄NH₃-3-[(CMe₂)₂-N^(t)Bu]-,(^(i)Pr₂N)₂-M-C₄NH₃-3-[(CMe₂)₂-N^(t)Bu]-,(^(n)Bu₂N)₂-M-C₄NH₃-3-[(CMe₂)₂-N^(t)Bu]-,(^(i)Bu₂N)₂-M-C₄NH₃-3-[(CMe₂)₂-N^(t)Bu]-,(^(s)Bu₂N)₂-M-C₄NH₃-3-[(CMe₂)₂-N^(t)Bu]-,(^(t)Bu₂N)₂-M-C₄NH₃-3-[(CMe₂)₂-N^(t)Bu]-,(Me₂N)(Cp)-M-C₄NH₃-3-[(CMe₂)₂-N^(t)Bu]-,(Et₂N)(Cp)-M-C₄NH₃-3-[(CMe₂)₂-N^(t)Bu]-,(^(n)Pr₂N)(Cp)-M-C₄NH₃-3-[(CMe₂)₂-N^(t)Bu]-,(^(i)Pr₂N)(Cp)-M-C₄NH₃-3-[(CMe₂)₂-N^(t)Bu]-,(^(n)Bu₂N)(Cp)-M-C₄NH₃-3-[(CMe₂)₂-N^(t)Bu]-,(^(i)Bu₂N)(Cp)-M-C₄NH₃-3-[(CMe₂)₂-N^(t)Bu]-,(^(s)Bu₂N)(Cp)-M-C₄NH₃-3-[(CMe₂)₂-N^(t)Bu]-,(^(t)Bu₂N)(Cp)-M-C₄NH₃-3-[(CMe₂)₂-N^(t)Bu]-,(MeO)₂-M-C₄NH₃-3-[(CMe₂)₂-N^(t)Bu]-,(EtO)₂-M-C₄NH₃-3-[(CMe₂)₂-N^(t)Bu]-,(^(n)PrO)₂-M-C₄NH₃-3-[(CMe₂)₂-N^(t)Bu]-,(^(i)PrO)₂-M-C₄NH₃-3-[(CMe₂)₂-N^(t)Bu]-,(^(n)BuO)₂-M-C₄NH₃-3-[(CMe₂)₂-N^(t)Bu]-,(^(i)BuO)₂-M-C₄NH₃-3-[(CMe₂)₂-N^(t)Bu]-,(^(s)BuO)₂-M-C₄NH₃-3-[(CMe₂)₂-N^(t)Bu]-,(^(t)BuO)₂-M-C₄NH₃-3-[(CMe₂)₂-N^(t)Bu]-, (Me₂N)₂-M-C₄NH₃-3-[(CMe₂)₂-O]—,(Et₂N)₂-M-C₄NH₃-3-[(CMe₂)₂-O]—, (^(n)Pr₂N)₂-M-C₄NH₃-3-[(CMe₂)₂-O]—,(^(i)Pr₂N)₂-M-C₄NH₃-3-[(CMe₂)₂-O]—, (^(n)Bu₂N)₂-M-C₄NH₃-3-[(CMe₂)₂-O]—,(^(i)Bu₂N)₂-M-C₄NH₃-3-[(CMe₂)₂-O]—, (^(s)Bu₂N)₂-M-C₄NH₃-3-[(CMe₂)₂-O]—,(^(t)Bu₂N)₂-M-C₄NH₃-3-[(CMe₂)₂-O]—, (Me₂N)(Cp)-M-C₄NH₃-3-[(CMe₂)₂-O]—,(Et₂N)(Cp)-M-C₄NH₃-3-[(CMe₂)₂-O]—,(^(n)Pr₂N)(Cp)-M-C₄NH₃-3-[(CMe₂)₂-O]—,(^(i)Pr₂N)(Cp)-M-C₄NH₃-3-[(CMe₂)₂-O]—,(^(n)Bu₂N)(Cp)-M-C₄NH₃-3-[(CMe₂)₂-O]—,(^(i)Bu₂N)(Cp)-M-C₄NH₃-3-[(CMe₂)₂-O]—,(^(s)Bu₂N)(Cp)-M-C₄NH₃-3-[(CMe₂)₂-O]—,(^(t)Bu₂N)(Cp)-M-C₄NH₃-3-[(CMe₂)₂-O]—, (MeO)₂-M-C₄NH₃-3-[(CMe₂)₂-O]—,(EtO)₂-M-C₄NH₃-3-[(CMe₂)₂-O]—, (^(n)PrO)₂-M-C₄NH₃-3-[(CMe₂)₂-O]—,(^(i)PrO)₂-M-C₄NH₃-3-[(CMe₂)₂-O]—, (^(n)BuO)₂-M-C₄NH₃-3-[(CMe₂)₂-O]—,(^(i)BuO)₂-M-C₄NH₃-3-[(CMe₂)₂-O]—, (^(s)BuO)₂-M-C₄NH₃-3-[(CMe₂)₂-O]—,(^(t)BuO)₂-M-C₄NH₃-3-[(CMe₂)₂-O]—, (Me₂N)₂-M-C₄NMe₃-3-[(CH₂)₂—NMe]-,(Et₂N)₂-M-C₄NMe₃-3-[(CH₂)₂—NMe]-, (^(n)Pr₂N)₂-M-C₄NMe₃-3-[(CH₂)₂—NMe]-,(^(i)Pr₂N)₂-M-C₄NMe₃-3-[(CH₂)₂—NMe]-,(^(n)Bu₂N)₂-M-C₄NMe₃-3-[(CH₂)₂—NMe]-,(^(i)Bu₂N)₂-M-C₄NMe₃-3-[(CH₂)₂—NMe]-,(^(s)Bu₂N)₂-M-C₄NMe₃-3-[(CH₂)₂—NMe]-,(^(t)Bu₂N)₂-M-C₄NMe₃-3-[(CH₂)₂—NMe]-,(Me₂N)(Cp)-M-C₄NMe₃-3-[(CH₂)₂—NMe]-,(Et₂N)(Cp)-M-C₄NMe₃-3-[(CH₂)₂—NMe]-,(^(n)Pr₂N)(Cp)-M-C₄NMe₃-3-[(CH₂)₂—NMe]-,(^(i)Pr₂N)(Cp)-M-C₄NMe₃-3-[(CH₂)₂—NMe]-,(^(n)Bu₂N)(Cp)-M-C₄NMe₃-3-[(CH₂)₂—NMe]-,(^(i)Bu₂N)(Cp)-M-C₄NMe₃-3-[(CH₂)₂—NMe]-,(^(s)Bu₂N)(Cp)-M-C₄NMe₃-3-[(CH₂)₂—NMe]-,(^(t)Bu₂N)(Cp)-M-C₄NMe₃-3-[(CH₂)₂—NMe]-,(MeO)₂-M-C₄NMe₃-3-[(CH₂)₂—NMe]-, (EtO)₂-M-C₄NMe₃-3-[(CH₂)₂—NMe]-,(^(n)PrO)₂-M-C₄NMe₃-3-[(CH₂)₂—NMe]-,(^(i)PrO)₂-M-C₄NMe₃-3-[(CH₂)₂—NMe]-,(^(n)BuO)₂-M-C₄NMe₃-3-[(CH₂)₂—NMe]-,(^(i)BuO)₂-M-C₄NMe₃-3-[(CH₂)₂—NMe]-,(^(s)BuO)₂-M-C₄NMe₃-3-[(CH₂)₂—NMe]-,(^(t)BuO)₂-M-C₄NMe₃-3-[(CH₂)₂—NMe]-, (Me₂N)₂-M-C₄NMe₃-3-[(CH₂)₂—NEt]-,(Et₂N)₂M-C₄NMe₃-3-[(CH₂)₂—NEt]-, (^(n)Pr₂N)₂M-C₄NMe₃-3-[(CH₂)₂—NEt]-,(^(i)Pr₂N)₂M-C₄NMe₃-3-[(CH₂)₂—NEt]-,(^(n)Bu₂N)₂-M-C₄NMe₃-3-[(CH₂)₂—NEt]-,(^(i)Bu₂N)₂-M-C₄NMe₃-3-[(CH₂)₂—NEt]-,(^(s)Bu₂N)₂-M-C₄NMe₃-3-[(CH₂)₂—NEt]-,(^(t)Bu₂N)₂-M-C₄NMe₃-3-[(CH₂)₂—NEt]-,(Me₂N)(Cp)-M-C₄NMe₃-3-[(CH₂)₂—NEt]-,(Et₂N)(Cp)-M-C₄NMe₃-3-[(CH₂)₂—NEt]-,(^(n)Pr₂N)(Cp)-M-C₄NMe₃-3-[(CH₂)₂—NEt]-,(^(i)Pr₂N)(Cp)-M-C₄NMe₃-3-[(CH₂)₂—NEt]-,(^(n)Bu₂N)(Cp)-M-C₄NMe₃-3-[(CH₂)₂—NEt]-,(^(i)Bu₂N)(Cp)-M-C₄NMe₃-3-[(CH₂)₂—NEt]-,(^(s)Bu₂N)(Cp)-M-C₄NMe₃-3-[(CH₂)₂—NEt]-,(^(t)Bu₂N)(Cp)-M-C₄NMe₃-3-[(CH₂)₂—NEt]-, (MeO)₂M-C₄NMe₃-3-[(CH₂)₂—NEt]-,(EtO)₂M-C₄NMe₃-3-[(CH₂)₂—NEt], (^(n)PrO)₂-M-C₄NMe₃-3-[(CH₂)₂—NEt]-,(^(i)PrO)₂-M-C₄NMe₃-3-[(CH₂)₂—NEt]-,(^(n)BuO)₂-M-C₄NMe₃-3-[(CH₂)₂—NEt]-,(^(i)BuO)₂-M-C₄NMe₃-3-[(CH₂)₂—NEt]-,(^(s)BuO)₂-M-C₄NMe₃-3-[(CH₂)₂—NEt]-,(^(t)BuO)₂-M-C₄NMe₃-3-[(CH₂)₂—NEt]-,(Me₂N)₂-M-C₄NMe₃-3-[(CH₂)₂—N^(n)Pr]—,(Et₂N)₂-M-C₄NMe₃-3-[(CH₂)₂—N^(n)Pr]—,(^(n)Pr₂N)₂-M-C₄NMe₃-3-[(CH₂)₂—N^(n)Pr]—,(^(i)Pr₂N)₂-M-C₄NMe₃-3-[(CH₂)₂—N^(n)Pr]—,(^(n)Bu₂N)₂-M-C₄NMe₃-3-[(CH₂)₂—N^(n)Pr]—,(^(i)Bu₂N)₂-M-C₄NMe₃-3-[(CH₂)₂—N^(n)Pr]—,(^(s)Bu₂N)₂-M-C₄NMe₃-3-[(CH₂)₂—N^(n)Pr]—,(^(t)Bu₂N)₂-M-C₄NMe₃-3-[(CH₂)₂—N^(n)Pr]—,(Me₂N)(Cp)-M-C₄NMe₃-3-[(CH₂)₂—N^(n)Pr]—,(Et₂N)(Cp)-M-C₄NMe₃-3-[(CH₂)₂—N^(n)Pr]—,(^(n)Pr₂N)(Cp)-M-C₄NMe₃-3-[(CH₂)₂—N^(n)Pr]—,(^(i)Pr₂N)(Cp)-M-C₄NMe₃-3-[(CH₂)₂—N^(n)Pr]—,(^(n)Bu₂N)(Cp)-M-C₄NMe₃-3-[(CH₂)₂—N^(n)Pr]—,(^(i)Bu₂N)(Cp)-M-C₄NMe₃-3-[(CH₂)₂—N^(n)Pr]—,(^(s)Bu₂N)(Cp)-M-C₄NMe₃-3-[(CH₂)₂—N^(n)Pr]—,(^(t)Bu₂N)(Cp)-M-C₄NMe₃-3-[(CH₂)₂—N^(n)Pr]—,(MeO)₂-M-C₄NMe₃-3-[(CH₂)₂—N^(n)Pr]—,(EtO)₂-M-C₄NMe₃-3-[(CH₂)₂—N^(n)Pr]—,(^(n)PrO)₂-M-C₄NMe₃-3-[(CH₂)₂—N^(n)Pr]—,(^(i)PrO)₂-M-C₄NMe₃-3-[(CH₂)₂—N^(n)Pr]—,(^(n)BuO)₂-M-C₄NMe₃-3-[(CH₂)₂—N^(n)Pr]—,(^(i)BuO)₂-M-C₄NMe₃-3-[(CH₂)₂—N^(n)Pr]—,(^(s)BuO)₂-M-C₄NMe₃-3-[(CH₂)₂—N^(n)Pr]—,(^(t)BuO)₂-M-C₄NMe₃-3-[(CH₂)₂—N^(n)Pr]—,(Me₂N)₂-M-C₄NMe₃-3-[(CH₂)₂—N^(i)Pr]—,(Et₂N)₂-M-C₄NMe₃-3-[(CH₂)₂—N^(i)Pr]—,(^(n)Pr₂N)₂-M-C₄NMe₃-3-[(CH₂)₂—N^(i)Pr]—,(^(i)Pr₂N)₂-M-C₄NMe₃-3-[(CH₂)₂—N^(i)Pr]—,(^(n)Bu₂N)₂-M-C₄NMe₃-3-[(CH₂)₂—N^(i)Pr]—,(^(i)Bu₂N)₂-M-C₄NMe₃-3-[(CH₂)₂—N^(i)Pr]—,(^(s)Bu₂N)₂-M-C₄NMe₃-3-[(CH₂)₂—N^(i)Pr]—,(^(t)Bu₂N)₂-M-C₄NMe₃-3-[(CH₂)₂—N^(i)Pr]—,(Me₂N)(Cp)-M-C₄NMe₃-3-[(CH₂)₂—N^(i)Pr]—,(Et₂N)(Cp)-M-C₄NMe₃-3-[(CH₂)₂—N^(i)Pr]—,(^(n)Pr₂N)(Cp)-M-C₄NMe₃-3-[(CH₂)₂—N^(i)Pr]—,(^(i)Pr₂N)(Cp)-M-C₄NMe₃-3-[(CH₂)₂—N^(i)Pr]—,(^(n)Bu₂N)(Cp)-M-C₄NMe₃-3-[(CH₂)₂—N^(i)Pr]—,(^(i)Bu₂N)(Cp)-M-C₄NMe₃-3-[(CH₂)₂—N^(i)Pr]—,(^(s)Bu₂N)(Cp)-M-C₄NMe₃-3-[(CH₂)₂—N^(i)Pr]—,(^(t)Bu₂N)(Cp)-M-C₄NMe₃-3-[(CH₂)₂—N^(i)Pr]—,(MeO)₂-M-C₄NMe₃-3-[(CH₂)₂—N^(i)Pr]—,(EtO)₂-M-C₄NMe₃-3-[(CH₂)₂—N^(i)Pr]—,(^(n)PrO)₂-M-C₄NMe₃-3-[(CH₂)₂—N^(i)Pr]—,(^(i)PrO)₂-M-C₄NMe₃-3-[(CH₂)₂—N^(i)Pr]—,(^(n)BuO)₂-M-C₄NMe₃-3-[(CH₂)₂—N^(i)Pr]—,(^(i)BuO)₂-M-C₄NMe₃-3-[(CH₂)₂—N^(i)Pr]—,(^(s)BuO)₂-M-C₄NMe₃-3-[(CH₂)₂—N^(i)Pr]—, (^(tBuO))₂M-C₄NMe₃-3-[(CH₂)₂—N^(i)Pr]—, (Me₂N)₂M-C₄NMe₃-3-[(CH₂)₂—N^(n)Bu]-,(Et₂N)₂-M-C₄NMe₃-3-[(CH₂)₂—N^(n)Bu]-,(^(n)Pr₂N)₂-M-C₄NMe₃-3-[(CH₂)₂—N^(n)Bu]-,(^(i)Pr₂N)₂-M-C₄NMe₃-3-[(CH₂)₂—N^(n)Bu]-,(^(n)Bu₂N)₂-M-C₄NMe₃-3-[(CH₂)₂—N^(n)Bu]-,(^(t)Bu₂N)₂-M-C₄NMe₃-3-[(CH₂)₂—N^(n)Bu]-,(^(s)Bu₂N)₂-M-C₄NMe₃-3-[(CH₂)₂—N^(n)Bu]-,(^(t)Bu₂N)₂-M-C₄NMe₃-3-[(CH₂)₂—N^(n)Bu]-,(Me₂N)(Cp)-M-C₄NMe₃-3-[(CH₂)₂—N^(n)Bu]-,(Et₂N)(Cp)-M-C₄NMe₃-3-[(CH₂)₂—N^(n)Bu]-,(^(n)Pr₂N)(Cp)-M-C₄NMe₃-3-[(CH₂)₂—N^(n)Bu]-,(^(i)Pr₂N)(Cp)-M-C₄NMe₃-3-[(CH₂)₂—N^(n)Bu]-,(^(n)Bu₂N)(Cp)-M-C₄NMe₃-3-[(CH₂)₂—N^(n)Bu]-,(^(i)Bu₂N)(Cp)-M-C₄NMe₃-3-[(CH₂)₂—N^(n)Bu]-,(^(s)Bu₂N)(Cp)-M-C₄NMe₃-3-[(CH₂)₂—N^(n)Bu]-,(^(t)Bu₂N)(Cp)-M-C₄NMe₃-3-[(CH₂)₂—N^(n)Bu]-,(MeO)₂-M-C₄NMe₃-3-[(CH₂)₂—N^(n)Bu]-,(EtO)₂-M-C₄NMe₃-3-[(CH₂)₂—N^(n)Bu]-,(^(n)PrO)₂-M-C₄NMe₃-3-[(CH₂)₂—N^(n)Bu]-,(^(i)PrO)₂-M-C₄NMe₃-3-[(CH₂)₂—N^(n)Bu]-,(^(n)BuO)₂-M-C₄NMe₃-3-[(CH₂)₂—N^(n)Bu]-,(^(i)BuO)₂-M-C₄NMe₃-3-[(CH₂)₂—N^(n)Bu]-,(^(s)BuO)₂-M-C₄NMe₃-3-[(CH₂)₂—N^(n)Bu]-,(^(t)BuO)₂-M-C₄NMe₃-3-[(CH₂)₂—N^(n)Bu]-,(Me₂N)₂-M-C₄NMe₃-3-[(CH₂)₂—N^(i)Bu]-,(Et₂N)₂-M-C₄NMe₃-3-[(CH₂)₂—N^(i)Bu]-,(^(n)Pr₂N)₂-M-C₄NMe₃-3-[(CH₂)₂—N^(i)Bu]-,(^(i)Pr₂N)₂-M-C₄NMe₃-3-[(CH₂)₂—N^(i)Bu]-,(^(n)Bu₂N)₂-M-C₄NMe₃-3-[(CH₂)₂—N^(i)Bu]-,(^(i)Bu₂N)₂-M-C₄NMe₃-3-[(CH₂)₂—N^(i)Bu],(^(s)Bu₂N)₂-M-C₄NMe₃-3-[(CH₂)₂—N^(i)Bu]-,(^(t)Bu₂N)₂-M-C₄NMe₃-3-[(CH₂)₂—N^(i)Bu]-,(Me₂N)(Cp)-M-C₄NMe₃-3-[(CH₂)₂—N^(i)Bu]-,(Et₂N)(Cp)-M-C₄NMe₃-3-[(CH₂)₂—N^(i)Bu]-,(^(n)Pr₂N)(Cp)-M-C₄NMe₃-3-[(CH₂)₂—N^(i)Bu]-,(^(i)Pr₂N)(Cp)-M-C₄NMe₃-3-[(CH₂)₂—N^(i)Bu]-,(^(n)Bu₂N)(Cp)-M-C₄NMe₃-3-[(CH₂)₂—N^(i)Bu]-,(^(i)Bu₂N)(Cp)-M-C₄NMe₃-3-[(CH₂)₂—N^(i)Bu]-,(^(s)Bu₂N)(Cp)-M-C₄NMe₃-3-[(CH₂)₂—N^(i)Bu]-,(^(t)Bu₂N)(Cp)-M-C₄NMe₃-3-[(CH₂)₂—N^(i)Bu],(MeO)₂-M-C₄NMe₃-3-[(CH₂)₂—N^(i)Bu]-, (EtO)₂-M-C₄NMe₃-3-[(CH₂)₂—N^(i)Bu],(^(n)PrO)₂-M-C₄NMe₃-3-[(CH₂)₂—N^(i)Bu]-,(^(i)PrO)₂-M-C₄NMe₃-3-[(CH₂)₂—N^(i)Bu]-,(^(n)BuO)₂-M-C₄NMe₃-3-[(CH₂)₂—N^(i)Bu]-,(^(i)BuO)₂-M-C₄NMe₃-3-[(CH₂)₂—N^(i)Bu]-,(^(s)BuO)₂-M-C₄NMe₃-3-[(CH₂)₂—N^(i)Bu]-,(^(t)BuO)₂-M-C₄NMe₃-3-[(CH₂)₂—N^(i)Bu]-,(Me₂N)₂-M-C₄NMe₃-3-[(CH₂)₂—N^(s)Bu]-,(Et₂N)₂-M-C₄NMe₃-3-[(CH₂)₂—N^(s)Bu]-,(^(n)Pr₂N)₂-M-C₄NMe₃-3-[(CH₂)₂—N^(s)Bu]-,(^(i)Pr₂N)₂-M-C₄NMe₃-3-[(CH₂)₂—N^(s)Bu]-,(^(n)Bu₂N)₂-M-C₄NMe₃-3-[(CH₂)₂—N^(s)Bu]-,(^(i)Bu₂N)₂-M-C₄NMe₃-3-[(CH₂)₂—N^(s)Bu]-,(^(s)Bu₂N)₂-M-C₄NMe₃-3-[(CH₂)₂—N^(s)Bu]-,(^(i)Bu₂N)₂-M-C₄NMe₃-3-[(CH₂)₂—N^(s)Bu]-,(Me₂N)(Cp)-M-C₄NMe₃-3-[(CH₂)₂—N^(s)Bu]-,(Et₂N)(Cp)-M-C₄NMe₃-3-[(CH₂)₂—N^(s)Bu]-,(^(n)Pr₂N)(Cp)-M-C₄NMe₃-3-[(CH₂)₂—N^(s)Bu]-,(^(i)Pr₂N)(Cp)-M-C₄NMe₃-3-[(CH₂)₂—N^(s)Bu]-,(^(n)Bu₂N)(Cp)-M-C₄NMe₃-3-[(CH₂)₂—N^(s)Bu]-,(^(i)Bu₂N)(Cp)-M-C₄NMe₃-3-[(CH₂)₂—N^(s)Bu]-,(^(s)Bu₂N)(Cp)-M-C₄NMe₃-3-[(CH₂)₂—N^(s)Bu]-,(^(t)Bu₂N)(Cp)-M-C₄NMe₃-3-[(CH₂)₂—N^(s)Bu]-,(MeO)₂M-C₄NMe₃-3-[(CH₂)₂—N^(s)Bu]-, (EtO)₂M-C₄NMe₃-3-[(CH₂)₂—N^(s)Bu]-,(^(n)PrO)₂-M-C₄NMe₃-3-[(CH₂)₂—N^(s)Bu]-,(^(i)PrO)₂-M-C₄NMe₃-3-[(CH₂)₂—N^(s)Bu]-,(^(n)BuO)₂-M-C₄NMe₃-3-[(CH₂)₂—N^(s)Bu]-,(^(i)BuO)₂-M-C₄NMe₃-3-[(CH₂)₂—N^(s)Bu]-,(^(s)BuO)₂-M-C₄NMe₃-3-[(CH₂)₂—N^(s)Bu]-,(^(t)BuO)₂-M-C₄NMe₃-3-[(CH₂)₂—N^(s)Bu]-,(Me₂N)₂-M-C₄NMe₃-3-[(CH₂)₂—N^(t)Bu]-,(Et₂N)₂-M-C₄NMe₃-3-[(CH₂)₂—N^(t)Bu]-,(^(n)Pr₂N)₂-M-C₄NMe₃-3-[(CH₂)₂—N^(t)Bu]-,(^(i)Pr₂N)₂-M-C₄NMe₃-3-[(CH₂)₂—N^(t)Bu]-,(^(n)Bu₂N)₂-M-C₄NMe₃-3-[(CH₂)₂—N^(t)Bu]-,(^(i)Bu₂N)₂-M-C₄NMe₃-3-[(CH₂)₂—N^(t)Bu]-,(^(s)Bu₂N)₂-M-C₄NMe₃-3-[(CH₂)₂—N^(t)Bu]-,(^(t)Bu₂N)₂-M-C₄NMe₃-3-[(CH₂)₂—N^(t)Bu]-,(Me₂N)(Cp)-M-C₄NMe₃-3-[(CH₂)₂—N^(t)Bu]-,(Et₂N)(Cp)-M-C₄NMe₃-3-[(CH₂)₂—N^(t)Bu]-,(^(n)Pr₂N)(Cp)-M-C₄NMe₃-3-[(CH₂)₂—N^(t)Bu]-,(^(i)Pr₂N)(Cp)-M-C₄NMe₃-3-[(CH₂)₂—N^(t)Bu]-,(^(n)Bu₂N)(Cp)-M-C₄NMe₃-3-[(CH₂)₂—N^(t)Bu]-,(^(i)Bu₂N)(Cp)-M-C₄NMe₃-3-[(CH₂)₂—N^(t)Bu]-,(^(s)Bu₂N)(Cp)-M-C₄NMe₃-3-[(CH₂)₂—N^(t)Bu]-,(^(t)Bu₂N)(Cp)-M-C₄NMe₃-3-[(CH₂)₂—N^(t)Bu]-, (MeO)₂-M-C₄NMe₃-3-[(CH₂)₂—N^(t)Bu]-, (EtO)₂M-C₄NMe₃-3-[(CH₂)₂—N^(t)Bu]-,(^(n)PrO)₂M-C₄NMe₃-3-[(CH₂)₂—N^(t)Bu]-,(^(i)PrO)₂-M-C₄NMe₃-3-[(CH₂)₂—N^(t)Bu]-,(^(n)BuO)₂-M-C₄NMe₃-3-[(CH₂)₂—N^(t)Bu]-,(^(i)BuO)₂-M-C₄NMe₃-3-[(CH₂)₂—N^(t)Bu]-,(^(s)BuO)₂-M-C₄NMe₃-3-[(CH₂)₂—N^(t)Bu]-,(^(t)BuO)₂-M-C₄NMe₃-3-[(CH₂)₂—N^(t)Bu]-, (Me₂N)₂-M-C₄NMe₃-3-[(CH₂)₂—O]—,(Et₂N)₂-M-C₄NMe₃-3-[(CH₂)₂—O]—, (^(n)Pr₂N)₂-M-C₄NMe₃-3-[(CH₂)₂—O]—,(^(i)Pr₂N)₂-M-C₄NMe₃-3-[(CH₂)₂—O]—, (^(n)Bu₂N)₂-M-C₄NMe₃-3-[(CH₂)₂—O]—,(^(i)Bu₂N)₂-M-C₄NMe₃-3-[(CH₂)₂—O]—, (^(s)Bu₂N)₂-M-C₄NMe₃-3-[(CH₂)₂—O]—,(^(t)Bu₂N)₂-M-C₄NMe₃-3-[(CH₂)₂—O]—, (Me₂N)(Cp)-M-C₄NMe₃-3-[(CH₂)₂—O]—,(Et₂N)(Cp)-M-C₄NMe₃-3-[(CH₂)₂—O]—,(^(n)Pr₂N)(Cp)-M-C₄NMe₃-3-[(CH₂)₂—O]—,(^(i)Pr₂N)(Cp)-M-C₄NMe₃-3-[(CH₂)₂—O]—,(^(n)Bu₂N)(Cp)-M-C₄NMe₃-3-[(CH₂)₂—O]—,(^(i)Bu₂N)(Cp)-M-C₄NMe₃-3-[(CH₂)₂—O]—,(^(s)Bu₂N)(Cp)-M-C₄NMe₃-3-[(CH₂)₂—O]—,(^(t)Bu₂N)(Cp)-M-C₄NMe₃-3-[(CH₂)₂—O]—, (MeO)₂-M-C₄NMe₃-3-[(CH₂)₂—O]—,(EtO)₂-M-C₄NMe₃-3-[(CH₂)₂—O]—, (^(n)PrO)₂-M-C₄NMe₃-3-[(CH₂)₂—O]—,(^(i)PrO)₂-M-C₄NMe₃-3-[(CH₂)₂—O]—, (^(n)BuO)₂-M-C₄NMe₃-3-[(CH₂)₂—O]—,(^(i)BuO)₂-M-C₄NMe₃-3-[(CH₂)₂—O]—, (^(s)BuO)₂-M-C₄NMe₃-3-[(CH₂)₂—O]—,(^(t)BuO)₂-M-C₄NMe₃-3-[(CH₂)₂—O]—, (Et₂N)₂-M-C₄NMe₃-3-[(CMe₂)₂-NMe]-,(^(n)Pr₂N)₂-M-C₄NMe₃-3-[(CMe₂)₂-NMe]-,(^(i)Pr₂N)₂-M-C₄NMe₃-3-[(CMe₂)₂-NMe]-,(^(n)Bu₂N)₂-M-C₄NMe₃-3-[(CMe₂)₂-NMe]-,(^(i)Bu₂N)₂-M-C₄NMe₃-3-[(CMe₂)₂-NMe]-,(^(s)Bu₂N)₂-M-C₄NMe₃-3-[(CMe₂)₂-NMe]-,(^(t)Bu₂N)₂-M-C₄NMe₃-3-[(CMe₂)₂-NMe]-,(Me₂N)(Cp)-M-C₄NMe₃-3-[(CMe₂)₂-NMe]-,(Et₂N)(Cp)-M-C₄NMe₃-3-[(CMe₂)₂-NMe]-,(^(n)Pr₂N)(Cp)-M-C₄NMe₃-3-[(CMe₂)₂-NMe]-,(^(i)Pr₂N)(Cp)-M-C₄NMe₃-3-[(CMe₂)₂-NMe]-,(^(n)Bu₂N)(Cp)-M-C₄NMe₃-3-[(CMe₂)₂-NMe]-,(^(i)Bu₂N)(Cp)-M-C₄NMe₃-3-[(CMe₂)₂-NMe]-,(^(s)Bu₂N)(Cp)-M-C₄NMe₃-3-[(CMe₂)₂-NMe]-,(^(t)Bu₂N)(Cp)-M-C₄NMe₃-3-[(CMe₂)₂-NMe]-,(MeO)₂-M-C₄NMe₃-3-[(CMe₂)₂-NMe]-, (EtO)₂-M-C₄NMe₃-3-[(CMe₂)₂-NMe]-,(^(n)PrO)₂-M-C₄NMe₃-3-[(CMe₂)₂-NMe]-,(^(i)PrO)₂-M-C₄NMe₃-3-[(CMe₂)₂-NMe]-,(^(n)BuO)₂-M-C₄NMe₃-3-[(CMe₂)₂-NMe]-,(^(i)BuO)₂-M-C₄NMe₃-3-[(CMe₂)₂-NMe]-,(^(s)BuO)₂-M-C₄NMe₃-3-[(CMe₂)₂-NMe]-,(^(t)BuO)₂-M-C₄NMe₃-3-[(CMe₂)₂-NMe]-, (Me₂N)₂-M-C₄NMe₃-3-[(CMe₂)₂-NEt]-,(Et₂N)₂-M-C₄NMe₃-3-[(CMe₂)₂-NEt]-,(^(n)Pr₂N)₂-M-C₄NMe₃-3-[(CMe₂)₂-NEt]-,(^(i)Pr₂N)₂-M-C₄NMe₃-3-[(CMe₂)₂-NEt]-,(^(n)Bu₂N)₂-M-C₄NMe₃-3-[(CMe₂)₂-NEt]-,(^(i)Bu₂N)₂-M-C₄NMe₃-3-[(CMe₂)₂-NEt]-,(^(s)Bu₂N)₂-M-C₄NMe₃-3-[(CMe₂)₂-NEt]-,(^(t)Bu₂N)₂-M-C₄NMe₃-3-[(CMe₂)₂-NEt]-,(Me₂N)(Cp)-M-C₄NMe₃-3-[(CMe₂)₂-NEt]-,(Et₂N)(Cp)-M-C₄NMe₃-3-[(CMe₂)₂-NEt]-,(^(n)Pr₂N)(Cp)-M-C₄NMe₃-3-[(CMe₂)₂-NEt]-,(^(i)Pr₂N)(Cp)-M-C₄NMe₃-3-[(CMe₂)₂-NEt]-,(^(n)Bu₂N)(Cp)-M-C₄NMe₃-3-[(CMe₂)₂-NEt]-,(^(i)Bu₂N)(Cp)-M-C₄NMe₃-3-[(CMe₂)₂-NEt]-,(^(s)Bu₂N)(Cp)-M-C₄NMe₃-3-[(CMe₂)₂-NEt]-,(^(t)Bu₂N)(Cp)-M-C₄NMe₃-3-[(CMe₂)₂-NEt]-,(MeO)₂-M-C₄NMe₃-3-[(CMe₂)₂-NEt]-, (EtO)₂-M-C₄NMe₃-3-[(CMe₂)₂-NEt]-,(^(n)PrO)₂-M-C₄NMe₃-3-[(CMe₂)₂-NEt]-,(^(i)PrO)₂-M-C₄NMe₃-3-[(CMe₂)₂-NEt]-,(^(n)BuO)₂-M-C₄NMe₃-3-[(CMe₂)₂-NEt]-,(^(i)BuO)₂-M-C₄NMe₃-3-[(CMe₂)₂-NEt]-,(^(s)BuO)₂-M-C₄NMe₃-3-[(CMe₂)₂-NEt]-,(^(t)BuO)₂-M-C₄NMe₃-3-[(CMe₂)₂-NEt]-,(Me₂N)₂-M-C₄NMe₃-3-[(CMe₂)₂-N^(n)Pr]—,(Et₂N)₂-M-C₄NMe₃-3-[(CMe₂)₂-N^(n)Pr]—,(^(n)Pr₂N)₂-M-C₄NMe₃-3-[(CMe₂)₂-N^(n)Pr]—,(^(i)Pr₂N)₂-M-C₄NMe₃-3-[(CMe₂)₂-N^(n)Pr]—,(^(n)Bu₂N)₂-M-C₄NMe₃-3-[(CMe₂)₂-N^(n)Pr]—,(^(i)Bu₂N)₂-M-C₄NMe₃-3-[(CMe₂)₂-N^(n)Pr]—,(Me₂N)(Cp)-M-C₄NMe₃-3-[(CMe₂)₂-N^(n)Pr]—,(Et₂N)(Cp)-M-C₄NMe₃-3-[(CMe₂)₂-N^(n)Pr]—,(^(n)Pr₂N)(Cp)-M-C₄NMe₃-3-[(CMe₂)₂-N^(n)Pr]—,(^(i)Pr₂N)(Cp)-M-C₄NMe₃-3-[(CMe₂)₂-N^(n)Pr]—,(^(n)Bu₂N)(Cp)-M-C₄NMe₃-3-[(CMe₂)₂-N^(n)Pr]—,(^(i)Bu₂N)(Cp)-M-C₄NMe₃-3-[(CMe₂)₂-N^(n)Pr]—,(^(s)Bu₂N)(Cp)-M-C₄NMe₃-3-[(CMe₂)₂-N^(n)Pr]—,(^(i)Bu₂N)(Cp)-M-C₄NMe₃-3-[(CMe₂)₂-N^(n)Pr]—,(MeO)₂-M-C₄NMe₃-3-[(CMe₂)₂-N^(n)Pr]—,(EtO)₂-M-C₄NMe₃-3-[(CMe₂)₂-N^(n)Pr]—,(^(n)PrO)₂-M-C₄NMe₃-3-[(CMe₂)₂-N^(n)Pr]—,(^(i)PrO)₂-M-C₄NMe₃-3-[(CMe₂)₂-N^(n)Pr]—,(^(n)BuO)₂-M-C₄NMe₃-3-[(CMe₂)₂-N^(n)Pr]—,(^(i)BuO)₂-M-C₄NMe₃-3-[(CMe₂)₂-N^(n)Pr]—,(^(s)BuO)₂-M-C₄NMe₃-3-[(CMe₂)₂-N^(n)Pr]—,(^(t)BuO)₂-M-C₄NMe₃-3-[(CMe₂)₂-N^(n)Pr]—,(Me₂N)₂-M-C₄NMe₃-3-[(CMe₂)₂-N^(i)Pr]—,(Et₂N)₂-M-C₄NMe₃-3-[(CMe₂)₂-N^(i)Pr]—,(^(n)Pr₂N)₂-M-C₄NMe₃-3-[(CMe₂)₂-N^(i)Pr]—,(^(i)Pr₂N)₂-M-C₄NMe₃-3-[(CMe₂)₂-N^(i)Pr]—,(^(n)Bu₂N)₂-M-C₄NMe₃-3-[(CMe₂)₂-N^(i)Pr]—,(^(i)Bu₂N)₂-M-C₄NMe₃-3-[(CMe₂)₂-N^(i)Pr]—,(^(s)Bu₂N)₂-M-C₄NMe₃-3-[(CMe₂)₂-N^(i)Pr]—,(^(t)Bu₂N)₂-M-C₄NMe₃-3-[(CMe₂)₂-N^(i)Pr]—,(Me₂N)(Cp)-M-C₄NMe₃-3-[(CMe₂)₂-N^(i)Pr]—,(Et₂N)(Cp)-M-C₄NMe₃-3-[(CMe₂)₂-N^(i)Pr]—,(^(n)Pr₂N)(Cp)-M-C₄NMe₃-3-[(CMe₂)₂-N^(i)Pr]—,(^(i)Pr₂N)(Cp)-M-C₄NMe₃-3-[(CMe₂)₂-N^(i)Pr]—,(^(n)Bu₂N)(Cp)-M-C₄NMe₃-3-[(CMe₂)₂-N^(i)Pr]—,(^(i)Bu₂N)(Cp)-M-C₄NMe₃-3-[(CMe₂)₂-N^(i)Pr]—,(^(s)Bu₂N)(Cp)-M-C₄NMe₃-3-[(CMe₂)₂-N^(i)Pr]—,(^(i)Bu₂N)(Cp)-M-C₄NMe₃-3-[(CMe₂)₂-N^(i)Pr]—,(MeO)₂-M-C₄NMe₃-3-[(CMe₂)₂-N^(i)Pr]—,(EtO)₂-M-C₄NMe₃-3-[(CMe₂)₂-N^(i)Pr]—,(^(n)PrO)₂-M-C₄NMe₃-3-[(CMe₂)₂-N^(i)Pr]—,(^(i)PrO)₂-M-C₄NMe₃-3-[(CMe₂)₂-N^(i)Pr]—,(^(n)BuO)₂-M-C₄NMe₃-3-[(CMe₂)₂-N^(i)Pr]—,(^(i)BuO)₂-M-C₄NMe₃-3-[(CMe₂)₂-N^(i)Pr]—,(^(s)BuO)₂-M-C₄NMe₃-3-[(CMe₂)₂-N^(i)Pr]—,(^(t)BuO)₂-M-C₄NMe₃-3-[(CMe₂)₂-N^(i)Pr]—,(Me₂N)₂-M-C₄NMe₃-3-[(CMe₂)₂-N^(n)Bu]-,(Et₂N)₂-M-C₄NMe₃-3-[(CMe₂)₂-N^(n)Bu]-,(^(n)Pr₂N)₂-M-C₄NMe₃-3-[(CMe₂)₂-N^(n)Bu]-,(^(i)Pr₂N)₂-M-C₄NMe₃-3-[(CMe₂)₂-N^(n)Bu]-,(^(n)Bu₂N)₂-M-C₄NMe₃-3-[(CMe₂)₂-N^(n)Bu]-,(^(i)Bu₂N)₂-M-C₄NMe₃-3-[(CMe₂)₂-N^(n)Bu]-,(^(s)Bu₂N)₂-M-C₄NMe₃-3-[(CMe₂)₂-N^(n)Bu]-,(^(t)Bu₂N)₂-M-C₄NMe₃-3-[(CMe₂)₂-N^(n)Bu]-,(Me₂N)(Cp)-M-C₄NMe₃-3-[(CMe₂)₂-N^(n)Bu]-,(Et₂N)(Cp)-M-C₄NMe₃-3-[(CMe₂)₂-N^(n)Bu]-,(^(n)Pr₂N)(Cp)-M-C₄NMe₃-3-[(CMe₂)₂-N^(n)Bu]-,(^(i)Pr₂N)(Cp)-M-C₄NMe₃-3-[(CMe₂)₂-N^(n)Bu]-,(^(n)Bu₂N)(Cp)-M-C₄NMe₃-3-[(CMe₂)₂-N^(n)Bu]-,(^(i)Bu₂N)(Cp)-M-C₄NMe₃-3-[(CMe₂)₂-N^(n)Bu]-,(^(s)Bu₂N)(Cp)-M-C₄NMe₃-3-[(CMe₂)₂-N^(n)Bu]-,(^(t)Bu₂N)(Cp)-M-C₄NMe₃-3-[(CMe₂)₂-N^(n)Bu]-,(MeO)₂M-C₄NMe₃-3-[(CMe₂)₂-N^(n)Bu]-,(EtO)₂-M-C₄NMe₃-3-[(CMe₂)₂-N^(n)Bu]-,(^(n)PrO)₂-M-C₄NMe₃-3-[(CMe₂)₂-N^(n)Bu]-,(^(i)PrO)₂-M-C₄NMe₃-3-[(CMe₂)₂-N^(n)Bu]-,(^(n)BuO)₂-M-C₄NMe₃-3-[(CMe₂)₂-N^(n)Bu]-,(^(i)BuO)₂-M-C₄NMe₃-3-[(CMe₂)₂-N^(n)Bu]-,(^(s)BuO)₂-M-C₄NMe₃-3-[(CMe₂)₂-N^(i)Bu]-,(Et₂N)₂-M-C₄NMe₃-3-[(CMe₂)₂-N^(n)Bu]-,(Me₂N)₂-M-C₄NMe₃-3-[(CMe₂)₂-N^(i)Bu]-,(Et₂N)₂-M-C₄NMe₃-3-[(CMe₂)₂-N^(i)Bu]-,(^(n)Pr₂N)₂-M-C₄NMe₃-3-[(CMe₂)₂-N^(i)Bu]-,(^(i)Pr₂N)₂-M-C₄NMe₃-3-[(CMe₂)₂-N^(i)Bu]-,(^(n)Bu₂N)₂-M-C₄NMe₃-3-[(CMe₂)₂-N^(i)Bu]-,(^(i)Bu₂N)₂-M-C₄NMe₃-3-[(CMe₂)₂-N^(i)Bu]-,(^(s)Bu₂N)₂-M-C₄NMe₃-3-[(CMe₂)₂-N^(i)Bu]-,(^(t)Bu₂N)₂M-C₄NMe₃-3-[(CMe₂)₂-N^(i)Bu]-,(Me₂N)(Cp)-M-C₄NMe₃-3-[(CMe₂)₂-N^(i)Bu]-,(Et₂N)(Cp)-M-C₄NMe₃-3-[(CMe₂)₂-N^(i)Bu]-,(^(n)Pr₂N)(Cp)-M-C₄NMe₃-3-[(CMe₂)₂-N^(i)Bu]-,(^(i)Pr₂N)(Cp)-M-C₄NMe₃-3-[(CMe₂)₂-N^(i)Bu]-,(^(n)Bu₂N)(Cp)-M-C₄NMe₃-3-[(CMe₂)₂-N^(i)Bu]-,(^(i)Bu₂N)(Cp)-M-C₄NMe₃-3-[(CMe₂)₂-N^(i)Bu]-,(^(s)Bu₂N)(Cp)-M-C₄NMe₃-3-[(CMe₂)₂-N^(i)Bu]-,(^(t)Bu₂N)(Cp)-M-C₄NMe₃-3-[(CMe₂)₂-N^(i)Bu]-,(MeO)₂-M-C₄NMe₃-3-[(CMe₂)₂-N^(i)Bu]-,(EtO)₂-M-C₄NMe₃-3-[(CMe₂)₂-N^(i)Bu]-,(^(n)PrO)₂-M-C₄NMe₃-3-[(CMe₂)₂-N^(i)Bu]-,(^(i)PrO)₂-M-C₄NMe₃-3-[(CMe₂)₂-N^(i)Bu]-,(^(n)BuO)₂-M-C₄NMe₃-3-[(CMe₂)₂-N^(i)Bu]-,(^(i)BuO)₂-M-C₄NMe₃-3-[(CMe₂)₂-N^(i)Bu]-,(^(s)BuO)₂-M-C₄NMe₃-3-[(CMe₂)₂-N^(i)Bu]-,(^(t)BuO)₂M-C₄NMe₃-3-[(CMe₂)₂-N^(i)Bu]-,(Me₂N)₂-M-C₄NMe₃-3-[(CMe₂)₂-N^(s)Bu]-,(Et₂N)₂M-C₄NMe₃-3-[(CMe₂)₂-N^(s)Bu]-,(^(n)Pr₂N)₂-M-C₄NMe₃-3-[(CMe₂)₂-N^(s)Bu]-,(^(i)Pr₂N)₂-M-C₄NMe₃-3-[(CMe₂)₂-N^(s)Bu]-,(^(n)Bu₂N)₂-M-C₄NMe₃-3-[(CMe₂)₂-N^(s)Bu]-,(^(i)Bu₂N)₂-M-C₄NMe₃-3-[(CMe₂)₂-N^(s)Bu]-,(^(s)Bu₂N)₂-M-C₄NMe₃-3-[(CMe₂)₂-N^(s)Bu]-,(^(t)Bu₂N)₂-M-C₄NMe₃-3-[(CMe₂)₂-N^(s)Bu]-,(Me₂N)(Cp)-M-C₄NMe₃-3-[(CMe₂)₂-N^(s)Bu]-,(Et₂N)(Cp)-M-C₄NMe₃-3-[(CMe₂)₂-N^(s)Bu]-,(^(n)Pr₂N)(Cp)-M-C₄NMe₃-3-[(CMe₂)₂-N^(s)Bu]-,(^(i)Pr₂N)(Cp)-M-C₄NMe₃-3-[(CMe₂)₂-N^(s)Bu]-,(^(n)Bu₂N)(Cp)-M-C₄NMe₃-3-[(CMe₂)₂-N^(s)Bu]-,(^(i)Bu₂N)(Cp)-M-C₄NMe₃-3-[(CMe₂)₂-N^(s)Bu]-,(^(s)Bu₂N)(Cp)-M-C₄NMe₃-3-[(CMe₂)₂-N^(s)Bu]-,(^(t)Bu₂N)(Cp)-M-C₄NMe₃-3-[(CMe₂)₂-N^(s)Bu]-,(MeO)₂-M-C₄NMe₃-3-[(CMe₂)₂-N^(s)Bu]-,(EtO)₂-M-C₄NMe₃-3-[(CMe₂)₂-N^(s)Bu]-,(^(n)PrO)₂-M-C₄NMe₃-3-[(CMe₂)₂-N^(s)Bu]-,(^(i)PrO)₂-M-C₄NMe₃-3-[(CMe₂)₂-N^(s)Bu]-,(^(n)BuO)₂-M-C₄NMe₃-3-[(CMe₂)₂-N^(s)Bu]-,(^(i)BuO)₂-M-C₄NMe₃-3-[(CMe₂)₂-N^(s)Bu]-,(^(s)BuO)₂-M-C₄NMe₃-3-[(CMe₂)₂-N^(s)Bu]-,(^(t)BuO)₂-M-C₄NMe₃-3-[(CMe₂)₂-N^(s)Bu]-,(Me₂N)₂-M-C₄NMe₃-3-[(CMe₂)₂-N^(t)Bu]-,(Et₂N)₂-M-C₄NMe₃-3-[(CMe₂)₂-N^(t)Bu]-,(^(n)Pr₂N)₂-M-C₄NMe₃-3-[(CMe₂)₂-N^(t)Bu]-,(^(i)Pr₂N)₂-M-C₄NMe₃-3-[(CMe₂)₂-N^(t)Bu]-,(^(n)Bu₂N)₂-M-C₄NMe₃-3-[(CMe₂)₂-N^(t)Bu]-,(^(i)Bu₂N)₂-M-C₄NMe₃-3-[(CMe₂)₂-N^(t)Bu]-,(^(s)Bu₂N)₂-M-C₄NMe₃-3-[(CMe₂)₂-N^(t)Bu]-,(^(t)Bu₂N)₂-M-C₄NMe₃-3-[(CMe₂)₂-N^(t)Bu]-,(Me₂N)(Cp)-M-C₄NMe₃-3-[(CMe₂)₂-N^(t)Bu]-,(Et₂N)(Cp)-M-C₄NMe₃-3-[(CMe₂)₂-N^(t)Bu]-,(^(n)Pr₂N)(Cp)-M-C₄NMe₃-3-[(CMe₂)₂-N^(t)Bu]-,(^(i)Pr₂N)(Cp)-M-C₄NMe₃-3-[(CMe₂)₂-N^(t)Bu]-,(^(n)Bu₂N)(Cp)-M-C₄NMe₃-3-[(CMe₂)₂-N^(t)Bu]-,(^(i)Bu₂N)(Cp)-M-C₄NMe₃-3-[(CMe₂)₂-N^(t)Bu]-,(^(s)Bu₂N)(Cp)-M-C₄NMe₃-3-[(CMe₂)₂-N^(t)Bu]-,(^(t)Bu₂N)(Cp)-M-C₄NMe₃-3-[(CMe₂)₂-N^(t)Bu]-,(MeO)₂-M-C₄NMe₃-3-[(CMe₂)₂-N^(t)Bu]-,(EtO)₂-M-C₄NMe₃-3-[(CMe₂)₂-N^(t)Bu]-,(^(n)PrO)₂-M-C₄NMe₃-3-[(CMe₂)₂-N^(t)Bu]-,(^(i)PrO)₂-M-C₄NMe₃-3-[(CMe₂)₂-N^(t)Bu]-,(^(n)BuO)₂-M-C₄NMe₃-3-[(CMe₂)₂-N^(t)Bu]-,(^(i)BuO)₂-M-C₄NMe₃-3-[(CMe₂)₂-N^(t)Bu]-,(^(s)BuO)₂-M-C₄NMe₃-3-[(CMe₂)₂-N^(t)Bu]-,(^(t)BuO)₂-M-C₄NMe₃-3-[(CMe₂)₂-N^(t)Bu]-,(Me₂N)₂-M-C₄NMe₃-3-[(CMe₂)₂-O]—, (Et₂N)₂-M-C₄NMe₃-3-[(CMe₂)₂-O]—,(^(n)Pr₂N)₂-M-C₄NMe₃-3-[(CMe₂)₂-O]—,(^(i)Pr₂N)₂-M-C₄NMe₃-3-[(CMe₂)₂-O]—,(^(n)Bu₂N)₂-M-C₄NMe₃-3-[(CMe₂)₂-O]—,(^(i)Bu₂N)₂-M-C₄NMe₃-3-[(CMe₂)₂-O]—,(^(s)Bu₂N)₂-M-C₄NMe₃-3-[(CMe₂)₂-O]—,(^(t)Bu₂N)₂-M-C₄NMe₃-3-[(CMe₂)₂-O]—, (Me₂N)(Cp)-M-C₄NMe₃-3-[(CMe₂)₂-O]—,(Et₂N)(Cp)-M-C₄NMe₃-3-[(CMe₂)₂-O]—,(^(n)Pr₂N)(Cp)-M-C₄NMe₃-3-[(CMe₂)₂-O]—,(^(i)Pr₂N)(Cp)-M-C₄NMe₃-3-[(CMe₂)₂-O]—,(^(n)Bu₂N)(Cp)-M-C₄NMe₃-3-[(CMe₂)₂-O]—,(^(i)Bu₂N)(Cp)-M-C₄NMe₃-3-[(CMe₂)₂-O]—,(^(s)Bu₂N)(Cp)-M-C₄NMe₃-3-[(CMe₂)₂-O]—,(^(t)Bu₂N)(Cp)-M-C₄NMe₃-3-[(CMe₂)₂-O]—, (MeO)₂-M-C₄NMe₃-3-[(CMe₂)₂-O]—,(EtO)₂-M-C₄NMe₃-3-[(CMe₂)₂-O]—, (^(n)PrO)₂-M-C₄NMe₃-3-[(CMe₂)₂-O]—,(^(i)PrO)₂M-C₄NMe₃-3-[(CMe₂)₂-O]—, (^(n)BuO)₂M-C₄NMe₃-3-[(CMe₂)₂-O]—,(^(i)BuO)₂-M-C₄NMe₃-3-[(CMe₂)₂-O]—, (^(s)BuO)₂-M-C₄NMe₃-3-[(CMe₂)₂-O]—,(^(t)BuO)₂-M-C₄NMe₃-3-[(CMe₂)₂-O]—,(Me₂N)₂-M-C₃(m-N₂)H₂-4-[(CH₂)₂—NMe]-,(Et₂N)₂-M-C₃(m-N₂)H₂-4-[(CH₂)₂—NMe]-,(^(n)Pr₂N)₂-M-C₃(m-N₂)H₂-4-[(CH₂)₂—NMe]-,(^(i)Pr₂N)₂-M-C₃(m-N₂)H₂-4-[(CH₂)₂—NMe]-,(^(n)Bu₂N)₂-M-C₃(m-N₂)H₂-4-[(CH₂)₂—NMe]-,(^(i)Bu₂N)₂-M-C₃(m-N₂)H₂-4-[(CH₂)₂—NMe]-,(^(s)Bu₂N)₂-M-C₃(m-N₂)H₂-4-[(CH₂)₂—NMe]-,(^(t)Bu₂N)₂-M-C₃(m-N₂)H₂-4-[(CH₂)₂—NMe]-,(Me₂N)(Cp)-M-C₃(m-N₂)H₂-4-[(CH₂)₂—NMe]-,(Et₂N)(Cp)-M-C₃(m-N₂)H₂-4-[(CH₂)₂—NMe]-,(^(n)Pr₂N)(Cp)-M-C₃(m-N₂)H₂-4-[(CH₂)₂—NMe]-,(^(i)Pr₂N)(Cp)-M-C₃(m-N₂)H₂-4-[(CH₂)₂—NMe]-,(^(n)Bu₂N)(Cp)-M-C₃(m-N₂)H₂-4-[(CH₂)₂—NMe]-,(^(i)Bu₂N)(Cp)-M-C₃(m-N₂)H₂-4-[(CH₂)₂—NMe]-,(^(s)Bu₂N)(Cp)-M-C₃(m-N₂)H₂-4-[(CH₂)₂—NMe]-,(^(t)Bu₂N)(Cp)-M-C₃(m-N₂)H₂-4-[(CH₂)₂—NMe]-,(MeO)₂-M-C₃(m-N₂)H₂-4-[(CH₂)₂—NMe]-,(EtO)₂-M-C₃(m-N₂)H₂-4-[(CH₂)₂—NMe]-,(^(n)PrO)₂-M-C₃(m-N₂)H₂-4-[(CH₂)₂—NMe]-,(^(i)PrO)₂-M-C₃(m-N₂)H₂-4-[(CH₂)₂—NMe]-,(^(n)BuO)₂-M-C₃(m-N₂)H₂-4-[(CH₂)₂—NMe]-,(^(i)BuO)₂-M-C₃(m-N₂)H₂-4-[(CH₂)₂—NMe]-,(^(s)BuO)₂-M-C₃(m-N₂)H₂-4-[(CH₂)₂—NMe]-,(^(t)BuO)₂-M-C₃(m-N₂)H₂-4-[(CH₂)₂—NMe]-,(Me₂N)₂-M-C₃(m-N₂)H₂-4-[(CH₂)₂—NEt]-,(Et₂N)₂-M-C₃(m-N₂)H₂-4-[(CH₂)₂—NEt]-,(^(n)Pr₂N)₂-M-C₃(m-N₂)H₂-4-[(CH₂)₂—NEt]-,(^(i)Pr₂N)₂-M-C₃(m-N₂)H₂-4-[(CH₂)₂—NEt]-,(^(n)Bu₂N)₂-M-C₃(m-N₂)H₂-4-[(CH₂)₂—NEt]-,(^(i)Bu₂N)₂-M-C₃(m-N₂)H₂-4-[(CH₂)₂—NEt]-,(^(s)Bu₂N)₂-M-C₃(m-N₂)H₂-4-[(CH₂)₂—NEt]-,(^(t)Bu₂N)₂-M-C₃(m-N₂)H₂-4-[(CH₂)₂—NEt]-,(Me₂N)(Cp)-M-C₃(m-N₂)H₂-4-[(CH₂)₂—NEt]-,(Et₂N)(Cp)-M-C₃(m-N₂)H₂-4-[(CH₂)₂—NEt]-,(^(n)Pr₂N)(Cp)-M-C₃(m-N₂)H₂-4-[(CH₂)₂—NEt]-,(^(i)Pr₂N)(Cp)-M-C₃(m-N₂)H₂-4-[(CH₂)₂—NEt]-,(^(n)Bu₂N)(Cp)-M-C₃(m-N₂)H₂-4-[(CH₂)₂—NEt]-,(^(i)Bu₂N)(Cp)-M-C₃(m-N₂)H₂-4-[(CH₂)₂—NEt]-,(^(s)Bu₂N)(Cp)-M-C₃(m-N₂)H₂-4-[(CH₂)₂—NEt]-,(^(t)Bu₂N)(Cp)-M-C₃(m-N₂)H₂-4-[(CH₂)₂—NEt]-,(MeO)₂-M-C₃(m-N₂)H₂-4-[(CH₂)₂—NEt]-,(EtO)₂-M-C₃(m-N₂)H₂-4-[(CH₂)₂—NEt]-,(^(n)PrO)₂-M-C₃(m-N₂)H₂-4-[(CH₂)₂—NEt]-,(^(i)PrO)₂-M-C₃(m-N₂)H₂-4-[(CH₂)₂—NEt]-,(^(n)BuO)₂-M-C₃(m-N₂)H₂-4-[(CH₂)₂—NEt]-,(^(i)BuO)₂-M-C₃(m-N₂)H₂-4-[(CH₂)₂—NEt]-,(^(s)BuO)₂-M-C₃(m-N₂)H₂-4-[(CH₂)₂—NEt]-,(^(t)BuO)₂-M-C₃(m-N₂)H₂-4-[(CH₂)₂—NEt]-,(Me₂N)₂-M-C₃(m-N₂)H₂-4-[(CH₂)₂—N^(n)Pr]—,(Et₂N)₂-M-C₃(m-N₂)H₂-4-[(CH₂)₂—N^(n)Pr]—,(^(n)Pr₂N)₂-M-C₃(m-N₂)H₂-4-[(CH₂)₂—N^(n)Pr]—,(^(i)Pr₂N)₂-M-C₃(m-N₂)H₂-4-[(CH₂)₂—N^(n)Pr]—,(^(n)Bu₂N)₂-M-C₃(m-N₂)H₂-4-[(CH₂)₂—N^(n)Pr]—,(^(i)Bu₂N)₂-M-C₃(m-N₂)H₂-4-[(CH₂)₂—N^(n)Pr]—,(^(s)Bu₂N)₂-M-C₃(m-N₂)H₂-4-[(CH₂)₂—N^(n)Pr]—,(^(t)Bu₂N)₂-M-C₃(m-N₂)H₂-4-[(CH₂)₂—N^(n)Pr]—,(Me₂N)(Cp)-M-C₃(m-N₂)H₂-4-[(CH₂)₂—N^(n)Pr]—,(Et₂N)(Cp)-M-C₃(m-N₂)H₂-4-[(CH₂)₂—N^(n)Pr]—,(^(n)Pr₂N)(Cp)-M-C₃(m-N₂)H₂-4-[(CH₂)₂—N^(n)Pr]—,(^(i)Pr₂N)(Cp)-M-C₃(m-N₂)H₂-4-[(CH₂)₂—N^(n)Pr]—,(^(n)Bu₂N)(Cp)-M-C₃(m-N₂)H₂-4-[(CH₂)₂—N^(n)Pr]—,(^(i)Bu₂N)(Cp)-M-C₃(m-N₂)H₂-4-[(CH₂)₂—N^(n)Pr]—,(^(s)Bu₂N)(Cp)-M-C₃(m-N₂)H₂-4-[(CH₂)₂—N^(n)Pr]—,(^(t)Bu₂N)(Cp)-M-C₃(m-N₂)H₂-4-[(CH₂)₂—N^(n)Pr]—,(MeO)₂-M-C₃(m-N₂)H₂-4-[(CH₂)₂—N^(n)Pr]—,(EtO)₂-M-C₃(m-N₂)H₂-4-[(CH₂)₂—N^(n)Pr]—,(^(n)PrO)₂-M-C₃(m-N₂)H₂-4-[(CH₂)₂—N^(n)Pr]—,(^(i)PrO)₂-M-C₃(m-N₂)H₂-4-[(CH₂)₂—N^(n)Pr]—,(^(n)BuO)₂-M-C₃(m-N₂)H₂-4-[(CH₂)₂—N^(n)Pr]—,(^(i)BuO)₂-M-C₃(m-N₂)H₂-4-[(CH₂)₂—N^(n)Pr]—,(^(s)BuO)₂-M-C₃(m-N₂)H₂-4-[(CH₂)₂—N^(n)Pr]—,(^(t)BuO)₂-M-C₃(m-N₂)H₂-4-[(CH₂)₂—N^(n)Pr]—,(Me₂N)₂-M-C₃(m-N₂)H₂-4-[(CH₂)₂—N^(i)Pr]—,(Et₂N)₂-M-C₃(m-N₂)H₂-4-[(CH₂)₂—N^(i)Pr]—,(^(n)Pr₂N)₂-M-C₃(m-N₂)H₂-4-[(CH₂)₂—N^(i)Pr]—,(^(i)Pr₂N)₂-M-C₃(m-N₂)H₂-4-[(CH₂)₂—N^(i)Pr]—,(^(n)Bu₂N)₂-M-C₃(m-N₂)H₂-4-[(CH₂)₂—N^(i)Pr]—,(^(i)Bu₂N)₂-M-C₃(m-N₂)H₂-4-[(CH₂)₂—N^(i)Pr]—,(^(s)Bu₂N)₂-M-C₃(m-N₂)H₂-4-[(CH₂)₂—N^(i)Pr]—,(^(t)Bu₂N)₂-M-C₃(m-N₂)H₂-4-[(CH₂)₂—N^(i)Pr]—,(Me₂N)(Cp)-M-C₃(m-N₂)H₂-4-[(CH₂)₂—N^(i)Pr]—,(Et₂N)(Cp)-M-C₃(m-N₂)H₂-4-[(CH₂)₂—N^(i)Pr]—,(^(n)Pr₂N)(Cp)-M-C₃(m-N₂)H₂-4-[(CH₂)₂—N^(i)Pr]—,(^(i)Pr₂N)(Cp)-M-C₃(m-N₂)H₂-4-[(CH₂)₂—N^(i)Pr]—,(^(n)Bu₂N)(Cp)-M-C₃(m-N₂)H₂-4-[(CH₂)₂—N^(i)Pr]—,(^(t)Bu₂N)(Cp)-M-C₃(m-N₂)H₂-4-[(CH₂)₂—N^(i)Pr]—,(^(s)Bu₂N)(Cp)-M-C₃(m-N₂)H₂-4-[(CH₂)₂—N^(i)Pr]—,(^(t)Bu₂N)(Cp)-M-C₃(m-N₂)H₂-4-[(CH₂)₂—N^(i)Pr]—,(MeO)₂-M-C₃(m-N₂)H₂-4-[(CH₂)₂—N^(i)Pr]—,(EtO)₂-M-C₃(m-N₂)H₂-4-[(CH₂)₂—N^(i)Pr]—,(^(n)PrO)₂-M-C₃(m-N₂)H₂-4-[(CH₂)₂—N^(i)Pr]—,(^(i)PrO)₂-M-C₃(m-N₂)H₂-4-[(CH₂)₂—N^(i)Pr]—,(^(n)BuO)₂-M-C₃(m-N₂)H₂-4-[(CH₂)₂—N^(i)Pr]—,(^(i)BuO)₂-M-C₃(m-N₂)H₂-4-[(CH₂)₂—N^(i)Pr]—,(^(s)BuO)₂-M-C₃(m-N₂)H₂-4-[(CH₂)₂—N^(i)Pr]—,(^(t)BuO)₂-M-C₃(m-N₂)H₂-4-[(CH₂)₂—N^(i)Pr]—,(Me₂N)₂-M-C₃(m-N₂)H₂-4-[(CH₂)₂—N^(n)Bu]-,(Et₂N)₂-M-C₃(m-N₂)H₂-4-[(CH₂)₂—N^(n)Bu]-,(^(n)Pr₂N)₂-M-C₃(m-N₂)H₂-4-[(CH₂)₂—N^(n)Bu]-, (^(i)Pr₂N)₂-M-C₃(m-N₂)H₂-4-[(CH₂)₂—N^(n)Bu]-, (^(n)Bu₂N)₂-M-C₃(m-N₂)H₂-4-[(CH₂)₂—N^(n)Bu]-,(^(t)Bu₂N)₂-M-C₃(m-N₂)H₂-4-[(CH₂)₂—N^(n)Bu]-,(^(s)Bu₂N)₂-M-C₃(m-N₂)H₂-4-[(CH₂)₂—N^(n)Bu]-,(^(t)Bu₂N)₂-M-C₃(m-N₂)H₂-4-[(CH₂)₂—N^(n)Bu]-,(Me₂N)(Cp)-M-C₃(m-N₂)H₂-4-[(CH₂)₂—N^(n)Bu]-,(Et₂N)(Cp)-M-C₃(m-N₂)H₂-4-[(CH₂)₂—N^(n)Bu]-,(^(n)Pr₂N)(Cp)-M-C₃(m-N₂)H₂-4-[(CH₂)₂—N^(n)Bu]-,(^(i)Pr₂N)(Cp)-M-C₃(m-N₂)H₂-4-[(CH₂)₂—N^(n)Bu]-,(^(n)Bu₂N)(Cp)-M-C₃(m-N₂)H₂-4-[(CH₂)₂—N^(n)Bu]-,(^(t)Bu₂N)(Cp)-M-C₃(m-N₂)H₂-4-[(CH₂)₂—N^(n)Bu]-,(^(s)Bu₂N)(Cp)-M-C₃(m-N₂)H₂-4-[(CH₂)₂—N^(n)Bu]-,(^(t)Bu₂N)(Cp)-M-C₃(m-N₂)H₂-4-[(CH₂)₂—N^(n)Bu]-,(MeO)₂-M-C₃(m-N₂)H₂-4-[(CH₂)₂—N^(n)Bu]-,(EtO)₂-M-C₃(m-N₂)H₂-4-[(CH₂)₂—N^(n)Bu]-,(^(n)PrO)₂-M-C₃(m-N₂)H₂-4-[(CH₂)₂—N^(n)Bu]-,(^(i)PrO)₂-M-C₃(m-N₂)H₂-4-[(CH₂)₂—N^(n)Bu]-,(^(n)BuO)₂-M-C₃(m-N₂)H₂-4-[(CH₂)₂—N^(n)Bu]-,(^(i)BuO)₂-M-C₃(m-N₂)H₂-4-[(CH₂)₂—N^(n)Bu]-,(^(s)BuO)₂-M-C₃(m-N₂)H₂-4-[(CH₂)₂—N^(n)Bu]-,(^(t)BuO)₂-M-C₃(m-N₂)H₂-4-[(CH₂)₂—N^(n)Bu]-,(Me₂N)₂-M-C₃(m-N₂)H₂-4-[(CH₂)₂—N^(i)Bu]-,(Et₂N)₂-M-C₃(m-N₂)H₂-4-[(CH₂)₂—N^(i)Bu]-,(^(n)Pr₂N)₂-M-C₃(m-N₂)H₂-4-[(CH₂)₂—N^(i)Bu]-,(^(i)Pr₂N)₂-M-C₃(m-N₂)H₂-4-[(CH₂)₂—N^(i)Bu]-, (^(i)Bu₂N)₂-M-C₃(m-N₂)H₂-4-[(CH₂)₂—N^(i)Bu]-,(^(i)Bu₂N)₂-M-C₃(m-N₂)H₂-4-[(CH₂)₂—N^(i)Bu]-, (^(s)Bu₂N)₂-M-C₃(m-N₂)H₂-4-[(CH₂)₂—N^(i)Bu]-,(^(t)Bu₂N)₂-M-C₃(m-N₂)H₂-4-[(CH₂)₂—N^(i)Bu]-,(Me₂N)(Cp)-M-C₃(m-N₂)H₂-4-[(CH₂)₂—N^(i)Bu]-,(Et₂N)(Cp)-M-C₃(m-N₂)H₂-4-[(CH₂)₂—N^(i)Bu]-,(^(n)Pr₂N)(Cp)-M-C₃(m-N₂)H₂-4-[(CH₂)₂—N^(i)Bu]-,(^(i)Pr₂N)(Cp)-M-C₃(m-N₂)H₂-4-[(CH₂)₂—N^(i)Bu]-,(^(n)Bu₂N)(Cp)-M-C₃(m-N₂)H₂-4-[(CH₂)₂—N^(i)Bu]-,(^(i)Bu₂N)(Cp)-M-C₃(m-N₂)H₂-4-[(CH₂)₂—N^(i)Bu]-,(^(s)Bu₂N)(Cp)-M-C₃(m-N₂)H₂-4-[(CH₂)₂—N^(i)Bu]-,(^(t)Bu₂N)(Cp)-M-C₃(m-N₂)H₂-4-[(CH₂)₂—N^(i)Bu]-,(MeO)₂-M-C₃(m-N₂)H₂-4-[(CH₂)₂—N^(i)Bu]-,(EtO)₂-M-C₃(m-N₂)H₂-4-[(CH₂)₂—N^(i)Bu]-,(^(n)PrO)₂-M-C₃(m-N₂)H₂-4-[(CH₂)₂—N^(i)Bu]-,(^(i)PrO)₂-M-C₃(m-N₂)H₂-4-[(CH₂)₂—N^(i)Bu]-,(^(n)BuO)₂-M-C₃(m-N₂)H₂-4-[(CH₂)₂—N^(i)Bu]-,(^(i)BuO)₂-M-C₃(m-N₂)H₂-4-[(CH₂)₂—N^(i)Bu]-,(^(s)BuO)₂-M-C₃(m-N₂)H₂-4-[(CH₂)₂—N^(i)Bu]-,(^(t)BuO)₂-M-C₃(m-N₂)H₂-4-[(CH₂)₂—N^(i)Bu]-,(Me₂N)₂-M-C₃(m-N₂)H₂-4-[(CH₂)₂—N^(s)Bu]-,(Et₂N)₂-M-C₃(m-N₂)H₂-4-[(CH₂)₂—N^(s)Bu]-,(^(n)Pr₂N)₂-M-C₃(m-N₂)H₂-4-[(CH₂)₂—N^(s)Bu]-, (^(i)Pr₂N)₂-M-C₃(m-N₂)H₂-4-[(CH₂)₂—N^(s)Bu]-,(^(n)Bu₂N)₂-M-C₃(m-N₂)H₂-4-[(CH₂)₂—N^(s)Bu]-,(^(i)Bu₂N)₂-M-C₃(m-N₂)H₂-4-[(CH₂)₂—N^(s)Bu]-,(^(s)Bu₂N)₂-M-C₃(m-N₂)H₂-4-[(CH₂)₂—N^(s)Bu]-,(^(t)Bu₂N)₂-M-C₃(m-N₂)H₂-4-[(CH₂)₂—N^(s)Bu]-,(Me₂N)(Cp)-M-C₃(m-N₂)H₂-4-[(CH₂)₂—N^(s)Bu]-,(Et₂N)(Cp)-M-C₃(m-N₂)H₂-4-[(CH₂)₂—N^(s)Bu]-,(^(n)Pr₂N)(Cp)-M-C₃(m-N₂)H₂-4-[(CH₂)₂—N^(s)Bu]-,(^(i)Pr₂N)(Cp)-M-C₃(m-N₂)H₂-4-[(CH₂)₂—N^(s)Bu]-,(^(n)Bu₂N)(Cp)-M-C₃(m-N₂)H₂-4-[(CH₂)₂—N^(s)Bu]-,(^(i)Bu₂N)(Cp)-M-C₃(m-N₂)H₂-4-[(CH₂)₂—N^(s)Bu]-,(^(s)Bu₂N)(Cp)-M-C₃(m-N₂)H₂-4-[(CH₂)₂—N^(s)Bu]-,(^(t)Bu₂N)(Cp)-M-C₃(m-N₂)H₂-4-[(CH₂)₂—N^(s)Bu]-,(MeO)₂-M-C₃(m-N₂)H₂-4-[(CH₂)₂—N^(s)Bu]-,(EtO)₂-M-C₃(m-N₂)H₂-4-[(CH₂)₂—N^(s)Bu]-,(^(n)PrO)₂-M-C₃(m-N₂)H₂-4-[(CH₂)₂—N^(s)Bu]-,(^(i)PrO)₂-M-C₃(m-N₂)H₂-4-[(CH₂)₂—N^(s)Bu]-,(^(n)BuO)₂-M-C₃(m-N₂)H₂-4-[(CH₂)₂—N^(s)Bu]-,(^(i)BuO)₂-M-C₃(m-N₂)H₂-4-[(CH₂)₂—N^(s)Bu]-,(^(s)BuO)₂-M-C₃(m-N₂)H₂-4-[(CH₂)₂—N^(s)Bu]-,(^(t)BuO)₂-M-C₃(m-N₂)H₂-4-[(CH₂)₂—N^(s)Bu]-,(Me₂N)₂-M-C₃(m-N₂)H₂-4-[(CH₂)₂—N^(t)Bu]-,(Et₂N)₂-M-C₃(m-N₂)H₂-4-[(CH₂)₂—N^(t)Bu]-,(^(n)Pr₂N)₂-M-C₃(m-N₂)H₂-4-[(CH₂)₂—N^(t)Bu]-,(^(i)Pr₂N)₂-M-C₃(m-N₂)H₂-4-[(CH₂)₂—N^(t)Bu]-,(^(n)Bu₂N)₂-M-C₃(m-N₂)H₂-4-[(CH₂)₂—N^(t)Bu]-,(^(i)Bu₂N)₂-M-C₃(m-N₂)H₂-4-[(CH₂)₂—N^(t)Bu]-,(^(s)Bu₂N)₂-M-C₃(m-N₂)H₂-4-[(CH₂)₂—N^(t)Bu]-,(^(t)Bu₂N)₂-M-C₃(m-N₂)H₂-4-[(CH₂)₂—N^(t)Bu]-,(Me₂N)(Cp)-M-C₃(m-N₂)H₂-4-[(CH₂)₂—N^(t)Bu]-,(Et₂N)(Cp)-M-C₃(m-N₂)H₂-4-[(CH₂)₂—N^(t)Bu]-,(^(n)Pr₂N)(Cp)-M-C₃(m-N₂)H₂-4-[(CH₂)₂—N^(t)Bu]-,(^(i)Pr₂N)(Cp)-M-C₃(m-N₂)H₂-4-[(CH₂)₂—N^(t)Bu]-,(^(n)Bu₂N)(Cp)-M-C₃(m-N₂)H₂-4-[(CH₂)₂—N^(t)Bu]-,(^(t)Bu₂N)(Cp)-M-C₃(m-N₂)H₂-4-[(CH₂)₂—N^(t)Bu]-,(^(s)Bu₂N)(Cp)-M-C₃(m-N₂)H₂-4-[(CH₂)₂—N^(t)Bu]-,(^(t)Bu₂N)(Cp)-M-C₃(m-N₂)H₂-4-[(CH₂)₂—N^(t)Bu]-,(MeO)₂-M-C₃(m-N₂)H₂-4-[(CH₂)₂—N^(t)Bu]-,(EtO)₂-M-C₃(m-N₂)H₂-4-[(CH₂)₂—N^(t)Bu]-,(^(n)PrO)₂-M-C₃(m-N₂)H₂-4-[(CH₂)₂—N^(t)Bu]-,(^(i)PrO)₂-M-C₃(m-N₂)H₂-4-[(CH₂)₂—N^(t)Bu]-,(^(n)BuO)₂-M-C₃(m-N₂)H₂-4-[(CH₂)₂—N^(t)Bu]-,(^(t)BuO)₂-M-C₃(m-N₂)H₂-4-[(CH₂)₂—N^(t)Bu]-,(^(s)BuO)₂-M-C₃(m-N₂)H₂-4-[(CH₂)₂—N^(t)Bu]-,(^(t)BuO)₂-M-C₃(m-N₂)H₂-4-[(CH₂)₂—N^(t)Bu]-,(Me₂N)₂-M-C₃(m-N₂)H₂-4-[(CH₂)₂—O]—, (Et₂N)₂-M-C₃(m-N₂)H₂-4-[(CH₂)₂—O]—,(^(n)Pr₂N)₂-M-C₃(m-N₂)H₂-4-[(CH₂)₂—O]—,(^(i)Pr₂N)₂-M-C₃(m-N₂)H₂-4-[(CH₂)₂—O]—,(^(n)Bu₂N)₂-M-C₃(m-N₂)H₂-4-[(CH₂)₂—O]—,(^(i)Bu₂N)₂-M-C₃(m-N₂)H₂-4-[(CH₂)₂—O]—,(^(s)Bu₂N)₂-M-C₃(m-N₂)H₂-4-[(CH₂)₂—O]—,(^(t)Bu₂N)₂-M-C₃(m-N₂)H₂-4-[(CH₂)₂—O]—,(Me₂N)(Cp)-M-C₃(m-N₂)H₂-4-[(CH₂)₂—O]—,(Et₂N)(Cp)-M-C₃(m-N₂)H₂-4-[(CH₂)₂—O]—,(^(n)Pr₂N)(Cp)-M-C₃(m-N₂)H₂-4-[(CH₂)₂—O]—,(^(i)Pr₂N)(Cp)-M-C₃(m-N₂)H₂-4-[(CH₂)₂—O]—,(^(n)Bu₂N)(Cp)-M-C₃(m-N₂)H₂-4-[(CH₂)₂—O]—,(^(i)Bu₂N)(Cp)-M-C₃(m-N₂)H₂-4-[(CH₂)₂—O]—,(^(s)Bu₂N)(Cp)-M-C₃(m-N₂)H₂-4-[(CH₂)₂—O]—,(^(t)Bu₂N)(Cp)-M-C₃(m-N₂)H₂-4-[(CH₂)₂—O]—,(MeO)₂-M-C₃(m-N₂)H₂-4-[(CH₂)₂—O]—, (EtO)₂-M-C₃(m-N₂)H₂-4-[(CH₂)₂—O]—,(^(n)PrO)₂-M-C₃(m-N₂)H₂-4-[(CH₂)₂—O]—,(^(i)PrO)₂-M-C₃(m-N₂)H₂-4-[(CH₂)₂—O]—,(^(n)BuO)₂-M-C₃(m-N₂)H₂-4-[(CH₂)₂—O]—,(^(i)BuO)₂-M-C₃(m-N₂)H₂-4-[(CH₂)₂—O]—,(^(s)BuO)₂-M-C₃(m-N₂)H₂-4-[(CH₂)₂—O]—,(^(t)BuO)₂-M-C₂(m-N₂)H₂-4-[(CH₂)₂—O]—,(Me₂N)₂M-C₃(m-N₂)H₂-4-[(CMe₂)₂-NMe]-,(Et₂N)₂-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-NMe]-,(^(n)Pr₂N)₂-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-NMe]-,(^(i)Pr₂N)₂-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-NMe]-,(^(n)Bu₂N)₂-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-NMe]-,(^(i)Bu₂N)₂-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-NMe]-,(^(s)Bu₂N)₂-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-NMe]-,(^(t)Bu₂N)₂-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-NMe]-,(Me₂N)(Cp)-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-NMe]-,(Et₂N)(Cp)-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-NMe]-,(^(n)Pr₂N)(Cp)-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-NMe]-,(^(i)Pr₂N)(Cp)-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-NMe]-,(^(n)Bu₂N)(Cp)-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-NMe]-,(^(i)Bu₂N)(Cp)-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-NMe]-,(^(s)Bu₂N)(Cp)-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-NMe]-,(^(t)Bu₂N)(Cp)-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-NMe]-,(MeO)₂-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-NMe]-,(EtO)₂-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-NMe]-,(^(n)PrO)₂-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-NMe]-,(^(i)PrO)₂-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-NMe]-,(^(n)BuO)₂-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-NMe]-,(^(i)BuO)₂-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-NMe]-,(^(s)BuO)₂-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-NMe]-,(^(t)BuO)₂-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-NMe]-,(Me₂N)₂-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-NEt]-,(Et₂N)₂-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-NEt]-,(^(n)Pr₂N)₂-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-NEt]-,(^(i)Pr₂N)₂-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-NEt]-,(^(n)Bu₂N)₂-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-NEt]-,(^(i)Bu₂N)₂-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-NEt]-,(^(s)Bu₂N)₂-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-NEt]-,(^(t)Bu₂N)₂-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-NEt]-,(Me₂N)(Cp)-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-NEt]-,(Et₂N)(Cp)-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-NEt]-,(^(n)Pr₂N)(Cp)-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-NEt]-,(^(i)Pr₂N)(Cp)-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-NEt]-,(^(n)Bu₂N)(Cp)-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-NEt]-,(^(i)Bu₂N)(Cp)-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-NEt]-,(^(s)Bu₂N)(Cp)-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-NEt]-,(^(t)Bu₂N)(Cp)-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-NEt]-,(MeO)₂-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-NEt]-,(EtO)₂-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-NEt]-,(^(n)PrO)₂-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-NEt]-,(^(i)PrO)₂-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-NEt]-,(^(n)BuO)₂-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-NEt]-,(^(i)BuO)₂-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-NEt]-,(^(s)BuO)₂-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-NEt]-,(^(t)BuO)₂-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-NEt]-,(Me₂N)₂-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-N^(n)Pr]—,(Et₂N)₂-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-N^(n)Pr]—,(^(n)Pr₂N)₂-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-N^(n)Pr]—,(^(i)Pr₂N)₂-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-N^(n)Pr]—,(^(s)Bu₂N)₂-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-N^(n)Pr]—,(^(t)Bu₂N)₂-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-N^(n)Pr]—,(^(n)Bu₂N)₂-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-N^(n)Pr]—,(Bu₂N)₂-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-N^(n)Pr]—,(Me₂N)(Cp)-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-N^(n)Pr]—,(Et₂N)(Cp)-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-N^(n)Pr]—,(^(n)Pr₂N)(Cp)-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-N^(n)Pr]—,(^(i)Pr₂N)(Cp)-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-N^(n)Pr]—,(^(n)Bu₂N)(Cp)-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-N^(n)Pr]—,(^(i)Bu₂N)(Cp)-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-N^(n)Pr]—,(^(s)Bu₂N)(Cp)-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-N^(n)Pr]—,(^(t)Bu₂N)(Cp)-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-N^(n)Pr]—,(MeO)₂-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-N^(n)Pr]—,(EtO)₂-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-N^(n)Pr]—,(^(n)PrO)₂-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-N^(n)Pr]—,(^(i)PrO)₂-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-N^(n)Pr]—,(^(n)BuO)₂-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-N^(n)Pr]—,(^(i)BuO)₂-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-N^(n)Pr]—,(^(s)BuO)₂-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-N^(n)Pr]—,(^(t)BuO)₂-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-N^(n)Pr]—,(Me₂N)₂-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-N^(i)Pr]—,(Et₂N)₂-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-N^(i)Pr]—,(^(n)Pr₂N)₂-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-N^(i)Pr]—,(^(i)Pr₂N)₂-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-N^(i)Pr]—,(^(n)Bu₂N)₂-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-N^(i)Pr]—,(^(i)Bu₂N)₂-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-N^(i)Pr]—,(^(s)Bu₂N)₂-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-N^(i)Pr]—,(^(t)Bu₂N)₂-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-N^(i)Pr]—,(Me₂N)(Cp)-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-N^(i)Pr]—,(Et₂N)(Cp)-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-N^(i)Pr]—,(^(n)Pr₂N)(Cp)-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-N^(i)Pr]—,(^(i)Pr₂N)(Cp)-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-N^(i)Pr]—,(^(n)Bu₂N)(Cp)-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-N^(i)Pr]—,(^(i)Bu₂N)(Cp)-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-N^(i)Pr]—,(^(s)Bu₂N)(Cp)-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-N^(i)Pr]—,(^(t)Bu₂N)(Cp)-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-N^(i)Pr]—,(MeO)₂-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-N^(i)Pr]—,(EtO)₂-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-N^(i)Pr]—,(^(n)PrO)₂-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-N^(i)Pr]—,(^(i)PrO)₂-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-N^(i)Pr]—,(^(n)BuO)₂-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-N^(i)Pr]—,(^(i)BuO)₂-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-N^(i)Pr]—,(^(s)BuO)₂-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-N^(i)Pr]—,(^(t)BuO)₂M-C₃(m-N₂)H₂-4-[(CMe₂)₂-N^(i)Pr]—,(Me₂N)₂-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-N^(n)Bu]-,(Et₂N)₂M-C₃(m-N₂)H₂-4-[(CMe₂)₂-N^(n)Bu]-,(^(n)Pr₂N)₂-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-N^(n)Bu]-,(^(i)Pr₂N)₂-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-N^(n)Bu]-,(^(n)Bu₂N)₂-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-N^(n)Bu]-,(^(i)Bu₂N)₂-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-N^(n)Bu]-,(^(s)Bu₂N)₂-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-N^(n)Bu]-,(^(i)Bu₂N)₂-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-N^(n)Bu]-,(Me₂N)(Cp)-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-N^(n)Bu]-,(Et₂N)(Cp)-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-N^(n)Bu]-,(^(n)Pr₂N)(Cp)-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-N^(n)Bu]-,(^(i)Pr₂N)(Cp)-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-N^(n)Bu]-,(^(n)Bu₂N)(Cp)-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-N^(n)Bu]-,(^(i)Bu₂N)(Cp)-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-N^(n)Bu]-,(^(s)Bu₂N)(Cp)-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-N^(n)Bu]-,(^(t)Bu₂N)(Cp)-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-N^(n)Bu]-,(MeO)₂-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-N^(n)Bu]-,(EtO)₂-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-N^(n)Bu]-,(^(n)PrO)₂-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-N^(n)Bu]-,(^(i)PrO)₂-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-N^(n)Bu]-,(^(n)BuO)₂-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-N^(n)Bu]-,(^(i)BuO)₂-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-N^(n)Bu]-,(^(s)BuO)₂-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-N^(n)Bu]-,(^(t)BuO)₂-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-N^(n)Bu]-,(Me₂N)₂-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-N^(i)Bu]-,(Et₂N)₂-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-N^(i)Bu]-,(^(n)Pr₂N)₂-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-N^(i)Bu]-,(^(i)Pr₂N)₂-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-N^(i)Bu]-,(^(n)Bu₂N)₂-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-N^(i)Bu]-,(^(i)Bu₂N)₂-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-N^(i)Bu]-,(^(s)Bu₂N)₂-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-N^(i)Bu]-,(^(t)Bu₂N)₂-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-N^(i)Bu]-,(Me₂N)(Cp)-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-N^(i)Bu]-,(Et₂N)(Cp)-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-N^(i)Bu]-,(^(n)Pr₂N)(Cp)-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-N^(i)Bu]-,(^(i)Pr₂N)(Cp)-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-N^(i)Bu]-,(^(n)Bu₂N)(Cp)-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-N^(i)Bu]-,(^(i)Bu₂N)(Cp)-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-N^(i)Bu]-,(^(s)Bu₂N)(Cp)-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-N^(i)Bu]-,(^(t)Bu₂N)(Cp)-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-N^(i)Bu]-,(MeO)₂-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-N^(i)Bu]-,(EtO)₂-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-N^(i)Bu]-,(^(n)PrO)₂-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-N^(i)Bu]-,(^(i)PrO)₂-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-N^(i)Bu]-,(^(n)BuO)₂-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-N^(i)Bu]-,(^(i)BuO)₂-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-N^(i)Bu]-,(^(s)BuO)₂-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-N^(i)Bu]-,(^(t)BuO)₂-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-N^(i)Bu]-,(Me₂N)₂-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-N^(s)Bu]-,(Et₂N)₂-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-N^(s)Bu]-,(^(n)Pr₂N)₂-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-N^(s)Bu]-,(^(i)Pr₂N)₂-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-N^(s)Bu]-,(^(n)Bu₂N)₂-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-N^(s)Bu]-,(^(i)Bu₂N)₂-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-N^(s)Bu]-,(^(s)Bu₂N)₂-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-N^(s)Bu]-,(^(t)Bu₂N)₂-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-N^(s)Bu]-,(Me₂N)(Cp)-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-N^(s)Bu]-,(Et₂N)(Cp)-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-N^(s)Bu]-,(^(n)Pr₂N)(CP)-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-N^(s)Bu]-,(^(i)Pr₂N)(Cp)-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-N^(s)Bu]-,(^(n)Bu₂N)(Cp)-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-N^(s)Bu]-,(^(i)Bu₂N)(Cp)-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-N^(s)Bu]-,(^(s)Bu₂N)(Cp)-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-N^(s)Bu]-,(^(t)Bu₂N)(Cp)-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-N^(s)Bu]-,(MeO)₂-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-N^(s)Bu]-,(EtO)₂-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-N^(s)Bu]-,(^(n)PrO)₂-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-N^(s)Bu]-,(^(i)PrO)₂-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-N^(s)Bu]-,(^(n)BuO)₂-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-N^(s)Bu]-,(^(i)BuO)₂-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-N^(s)Bu]-,(^(s)BuO)₂-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-N^(s)Bu]-,(^(t)BuO)₂-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-N^(s)Bu]-,(Me₂N)₂-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-N^(t)Bu]-,(Et₂N)₂-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-N^(t)Bu]-,(^(n)Pr₂N)₂-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-N^(t)Bu]-,(^(i)Pr₂N)₂-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-N^(t)Bu]-,(^(n)Bu₂N)₂-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-N^(t)Bu]-,(^(i)Bu₂N)₂-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-N^(t)Bu]-,(^(s)Bu₂N)₂-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-N^(t)Bu]-,(^(t)Bu₂N)₂-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-N^(t)Bu]-,(Me₂N)(Cp)-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-N^(t)Bu]-,(Et₂N)(Cp)-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-N^(t)Bu]-,(^(n)Pr₂N)(Cp)-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-N^(t)Bu]-,(^(i)Pr₂N)(Cp)-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-N^(t)Bu]-,(^(n)Bu₂N)(Cp)-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-N^(t)Bu]-,(^(i)Bu₂N)(Cp)-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-N^(t)Bu]-,(^(s)Bu₂N)(Cp)-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-N^(t)Bu]-,(^(t)Bu₂N)(Cp)-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-N^(t)Bu]-,(MeO)₂-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-N^(t)Bu]-,(EtO)₂-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-N^(t)Bu]-,(^(n)PrO)₂-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-N^(t)Bu]-,(^(i)PrO)₂-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-N^(t)Bu]-,(^(n)BuO)₂-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-N^(t)Bu]-,(^(i)BuO)₂-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-N^(t)Bu]-,(^(s)BuO)₂-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-N^(t)Bu]-,(^(t)BuO)₂-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-N^(t)Bu]-,(Me₂N)₂-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-O]—,(Et₂N)₂-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-O]—,(^(n)Pr₂N)₂-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-O]—,(^(i)Pr₂N)₂-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-O]—,(^(n)Bu₂N)₂-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-O]—,(^(i)Bu₂N)₂-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-O]—,(^(s)Bu₂N)₂-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-O]—,(^(t)Bu₂N)₂-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-O]—,(Me₂N)(Cp)-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-O]—,(Et₂N)(Cp)-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-O]—,(^(n)Pr₂N)(Cp)-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-O]—,(^(i)Pr₂N)(Cp)-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-O]—,(^(n)Bu₂N)(Cp)-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-O]—,(^(i)Bu₂N)(Cp)-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-O]—,(^(s)Bu₂N)(Cp)-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-O]—,(^(t)Bu₂N)(Cp)-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-O]—,(MeO)₂-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-O]—, (EtO)₂-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-O]—,(^(n)PrO)₂-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-O]—,(^(i)PrO)₂-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-O]—,(^(n)BuO)₂-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-O]—,(^(i)BuO)₂-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-O]—,(^(s)BuO)₂-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-O]—,(^(t)BuO)₂-M-C₃(m-N₂)H₂-4-[(CMe₂)₂-O]—,(Me₂N)₂-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—NMe]-,(Et₂N)₂-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—NMe]-,(^(n)Pr₂N)₂-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—NMe]-,(^(i)Pr₂N)₂-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—NMe]-,(^(n)Bu₂N)₂-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—NMe]-,(^(i)Bu₂N)₂-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—NMe]-,(^(s)Bu₂N)₂-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—NMe]-,(^(i)Bu₂N)₂-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—NMe]-,(Me₂N)(Cp)-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—NMe]-,(Et₂N)(Cp)-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—NMe]-,(^(n)Pr₂N)(Cp)-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—NMe]-,(^(i)Pr₂N)(Cp)-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—NMe]-,(^(n)Bu₂N)(Cp)-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—NMe]-,(^(i)Bu₂N)(Cp)-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—NMe]-,(^(s)Bu₂N)(Cp)-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—NMe]-,(^(t)Bu₂N)(Cp)-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—NMe]-,(MeO)₂-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—NMe]-,(EtO)₂-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—NMe]-,(^(n)PrO)₂-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—NMe]-,(^(i)PrO)₂-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—NMe]-,(^(n)BuO)₂-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—NMe]-,(^(i)BuO)₂-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—NMe]-,(^(s)BuO)₂-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—NMe]-,(^(t)BuO)₂-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—NMe]-,(Me₂N)₂-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—NEt]-,(Et₂N)₂-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—NEt]-,(^(n)Pr₂N)₂-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—NEt]-,(^(i)Pr₂N)₂-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—NEt]-,(^(n)Bu₂N)₂-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—NEt]-,(^(i)Bu₂N)₂-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—NEt]-,(^(s)Bu₂N)₂-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—NEt]-,(^(t)Bu₂N)₂-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—NEt]-,(Me₂N)(Cp)-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—NEt]-,(Et₂N)(Cp)-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—NEt]-,(^(n)Pr₂N)(Cp)-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—NEt]-,(^(i)Pr₂N)(Cp)-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—NEt]-,(^(n)Bu₂N)(Cp)-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—NEt]-,(^(i)Bu₂N)(Cp)-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—NEt]-,(^(s)Bu₂N)(Cp)-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—NEt]-,(^(t)Bu₂N)(Cp)-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—NEt]-,(MeO)₂-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—NEt]-,(EtO)₂-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—NEt]-,(^(n)PrO)₂-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—NEt]-,(^(i)PrO)₂-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—NEt]-,(^(n)BuO)₂-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—NEt]-,(^(i)BuO)₂-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—NEt]-,(^(s)BuO)₂-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—NEt]-,(^(t)BuO)₂-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—NEt]-,(Me₂N)₂-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—N^(n)Pr]—,(Et₂N)₂-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—N^(n)Pr]—,(^(n)Pr₂N)₂-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—N^(n)Pr]—,(^(i)Pr₂N)₂-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—N^(n)Pr]—,(^(n)Bu₂N)₂-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—N^(n)Pr]—,(^(t)Bu₂N)₂-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—N^(n)Pr]—,(^(s)Bu₂N)₂-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—N^(n)Pr]—,(^(i)Bu₂N)₂-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—N^(n)Pr]—,(Me₂N)(Cp)-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—N^(n)Pr]—,(Et₂N)(Cp)-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—N^(n)Pr]—,(^(n)Pr₂N)(Cp)-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—N^(n)Pr]—,(^(i)Pr₂N)(Cp)-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—N^(n)Pr]—,(^(n)Bu₂N)(Cp)-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—N^(n)Pr]—,(^(i)Bu₂N)(Cp)-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—N^(n)Pr]—,(^(s)Bu₂N)(Cp)-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—N^(n)Pr]—,(^(t)Bu₂N)(Cp)-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—N^(n)Pr]—,(MeO)₂-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—N^(n)Pr]—,(EtO)₂-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—N^(n)Pr]—,(^(n)PrO)₂-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—N^(n)Pr]—,(^(i)PrO)₂-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—N^(n)Pr]—,(^(n)BuO)₂-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—N^(n)Pr]—,(^(i)BuO)₂-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—N^(n)Pr]—,(^(s)BuO)₂-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—N^(n)Pr]—,(^(t)BuO)₂-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—N^(n)Pr]—,(Me₂N)₂-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—N^(i)Pr]—,(Et₂N)₂-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—N^(i)Pr]—,(^(n)Pr₂N)₂-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—N^(i)Pr]—,(^(i)Pr₂N)₂-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—N^(i)Pr]—,(^(n)Bu₂N)₂-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—N^(i)Pr]—,(^(i)Bu₂N)₂-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—N^(i)Pr]—,(^(s)Bu₂N)₂-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—N^(i)Pr]—,(^(i)Bu₂N)₂-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—N^(i)Pr]—,(Me₂N)(Cp)-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—N^(i)Pr]—,(Et₂N)(Cp)-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—N^(i)Pr]—,(^(n)Pr₂N)(Cp)-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—N^(i)Pr]—,(^(i)Pr₂N)(Cp)-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—N^(i)Pr]—,(^(n)Bu₂N)(Cp)-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—N^(i)Pr]—,(^(i)Bu₂N)(Cp)-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—N^(i)Pr]—,(^(s)Bu₂N)(Cp)-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—N^(i)Pr]—,(^(t)Bu₂N)(Cp)-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—N^(i)Pr]—,(MeO)₂-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—N^(i)Pr]—,(EtO)₂-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—N^(i)Pr]—,(^(n)PrO)₂-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—N^(i)Pr]—,(^(i)PrO)₂-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—N^(i)Pr]—,(^(n)BuO)₂-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—N^(i)Pr]—,(^(i)BuO)₂-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—N^(i)Pr]—,(^(s)BuO)₂-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—N^(i)Pr]—,(^(t)BuO)₂-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—N^(i)Pr]—,(Me₂N)₂-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—N^(n)Bu]-,(Et₂N)₂-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—N^(n)Bu]-,(^(n)Pr₂N)₂-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—N^(n)Bu]-,(^(i)Pr₂N)₂-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—N^(n)Bu]-,(^(n)Bu₂N)₂-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—N^(n)Bu]-,(^(i)Bu₂N)₂-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—N^(n)Bu]-,(^(s)Bu₂N)₂-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—N^(n)Bu]-,(^(t)Bu₂N)₂-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—N^(n)Bu]-,(Me₂N)(Cp)-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—N^(n)Bu]-,(Et₂N)(Cp)-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—N^(n)Bu]-,(^(n)Pr₂N)(Cp)-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—N^(n)Bu]-,(^(i)Pr₂N)(Cp)-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—N^(n)Bu]-,(^(n)Bu₂N)(Cp)-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—N^(n)Bu]-,(^(i)Bu₂N)(Cp)-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—N^(n)Bu]-,(^(s)Bu₂N)(Cp)-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—N^(n)Bu]-,(^(t)Bu₂N)(Cp)-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—N^(n)Bu]-,(MeO)₂-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—N^(n)Bu]-,(EtO)₂-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—N^(n)Bu]-,(^(n)PrO)₂-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—N^(n)Bu]-,(^(i)PrO)₂-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—N^(n)Bu]-,(^(n)BuO)₂-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—N^(n)Bu]-,(^(i)BuO)₂-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—N^(n)Bu]-,(^(s)BuO)₂M-C₃(m-N₂)Me₂-4-[(CH₂)₂—N^(n)Bu]-,(^(t)BuO)₂-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—N^(n)Bu]-,(Me₂N)₂-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—N^(i)Bu]-,(Et₂N)₂-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—N^(i)Bu]-,(^(n)Pr₂N)₂-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—N^(i)Bu]-,(^(i)Pr₂N)₂-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—N^(i)Bu]-,(^(n)Bu₂N)₂-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—N^(i)Bu]-,(^(i)Bu₂N)₂-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—N^(i)Bu]-,(^(s)Bu₂N)₂-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—N^(i)Bu]-,(^(i)Bu₂N)₂-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—N^(i)Bu]-,(Me₂N)(Cp)-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—N^(i)Bu]-,(Et₂N)(Cp)-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—N^(i)Bu]-,(^(n)Pr₂N)(Cp)-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—N^(i)Bu]-,(^(i)Pr₂N)(Cp)-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—N^(i)Bu]-,(^(n)Bu₂N)(Cp)-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—N^(i)Bu]-,(^(i)Bu₂N)(Cp)-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—N^(i)Bu]-,(^(s)Bu₂N)(Cp)-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—N^(i)Bu]-,(^(t)Bu₂N)(Cp)-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—N^(i)Bu]-,(MeO)₂-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—N^(i)Bu]-,(EtO)₂-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—N^(i)Bu]-,(^(n)PrO)₂-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—N^(i)Bu]-,(^(i)PrO)₂-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—N^(i)Bu]-,(^(n)BuO)₂-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—N^(i)Bu]-,(^(i)BuO)₂-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—N^(i)Bu]-,(^(s)BuO)₂-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—N^(i)Bu]-,(^(t)BuO)₂-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—N^(i)Bu]-,(Me₂N)₂-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—N^(s)Bu]-,(Et₂N)₂-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—N^(s)Bu]-,(^(n)Pr₂N)₂-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—N^(s)Bu]-,(^(i)Pr₂N)₂-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—N^(s)Bu]-,(^(n)Bu₂N)₂-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—N^(s)Bu]-,(^(i)Bu₂N)₂-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—N^(s)Bu]-,(^(s)Bu₂N)₂-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—N^(s)Bu]-,(^(t)Bu₂N)₂-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—N^(s)Bu]-,(Me₂N)(Cp)-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—N^(s)Bu]-,(Et₂N)(Cp)-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—N^(s)Bu]-,(^(n)Pr₂N)(Cp)-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—N^(s)Bu]-,(^(i)Pr₂N)(Cp)-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—N^(s)Bu]-,(^(n)Bu₂N)(Cp)-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—N^(s)Bu]-,(^(i)Bu₂N)(Cp)-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—N^(s)Bu]-,(^(s)Bu₂N)(Cp)-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—N^(s)Bu]-,(^(t)Bu₂N)(Cp)-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—N^(s)Bu]-,(MeO)₂-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—N^(s)Bu]-,(EtO)₂-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—N^(s)Bu]-,(^(n)PrO)₂-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—N^(s)Bu]-,(^(i)PrO)₂-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—N^(s)Bu]-,(^(n)BuO)₂-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—N^(s)Bu]-,(^(i)BuO)₂-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—N^(s)Bu]-,(^(s)BuO)₂-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—N^(s)Bu]-,(^(t)BuO)₂-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—N^(s)Bu]-,(Me₂N)₂-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—N^(t)Bu]-,(Et₂N)₂-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—N^(t)Bu]-,(^(n)Pr₂N)₂-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—N^(t)Bu]-,(^(i)Pr₂N)₂-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—N^(t)Bu]-,(^(n)Bu₂N)₂-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—N^(t)Bu]-,(^(t)Bu₂N)₂-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—N^(t)Bu]-,(^(s)Bu₂N)₂-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—N^(t)Bu]-,(^(t)Bu₂N)₂-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—N^(t)Bu]-,(Me₂N)(Cp)-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—N^(t)Bu]-,(Et₂N)(Cp)-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—N^(t)Bu]-,(^(n)Pr₂N)(Cp)-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—N^(t)Bu]-,(^(i)Pr₂N)(Cp)-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—N^(t)Bu]-,(^(n)Bu₂N)(Cp)-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—N^(t)Bu]-,(^(i)Bu₂N)(Cp)-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—N^(t)Bu]-,(^(s)Bu₂N)(Cp)-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—N^(t)Bu]-,(^(t)Bu₂N)(Cp)-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—N^(t)Bu]-,(MeO)₂-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—N^(t)Bu]-,(EtO)₂-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—N^(t)Bu]-,(^(n)PrO)₂-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—N^(t)Bu]-,(^(i)PrO)₂-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—N^(t)Bu]-,(^(n)BuO)₂-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—N^(t)Bu]-,(^(i)BuO)₂-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—N^(t)Bu]-,(^(s)BuO)₂-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—N^(t)Bu]-,(^(t)BuO)₂-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—N^(t)Bu]-,(Me₂N)₂-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—O]—,(Et₂N)₂-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—O]—,(^(n)Pr₂N)₂-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—O]—,(^(i)Pr₂N)₂-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—O]—,(^(n)Bu₂N)₂-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—O]—,(^(i)Bu₂N)₂-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—O]—,(^(s)Bu₂N)₂-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—O]—,(^(t)Bu₂N)₂-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—O]—,(Me₂N)(Cp)-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—O]—,(Et₂N)(Cp)-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—O]—,(^(n)Pr₂N)(Cp)-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—O]—,(^(i)Pr₂N)(Cp)-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—O]—,(^(n)Bu₂N)(Cp)-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—O]—,(^(i)Bu₂N)(Cp)-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—O]—,(^(s)Bu₂N)(Cp)-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—O]—,(^(t)Bu₂N)(Cp)-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—O]—,(MeO)₂-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—O]—, (EtO)₂-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—O]—,(^(n)PrO)₂-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—O]—,(^(i)PrO)₂-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—O]—,(^(n)BuO)₂-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—O]—,(^(i)BuO)₂-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—O]—,(^(s)BuO)₂-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—O]—,(^(t)BuO)₂-M-C₃(m-N₂)Me₂-4-[(CH₂)₂—O]—,(H₂N)₂-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-NMe]-,(Me₂N)₂-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-NMe]-,(Et₂N)₂-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-NMe]-,(^(n)Pr₂N)₂-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-NMe]-,(^(i)Pr₂N)₂-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-NMe]-,(^(n)Bu₂N)₂-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-NMe]-,(^(i)Bu₂N)₂-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-NMe]-,(^(s)Bu₂N)₂-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-NMe]-,(^(t)Bu₂N)₂-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-NMe]-,(H₂N)(Cp)-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-NMe]-,(Me₂N)(Cp)-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-NMe]-,(Et₂N)(Cp)-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-NMe]-,(^(n)Pr₂N)(Cp)-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-NMe]-,(^(i)Pr₂N)(Cp)-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-NMe]-,(^(n)Bu₂N)(Cp)-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-NMe]-,(^(i)Bu₂N)(Cp)-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-NMe]-,(^(s)Bu₂N)(Cp)-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-NMe]-,(^(i)Bu₂N)(Cp)-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-NMe]-,(MeO)₂-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-NMe]-,(EtO)₂-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-NMe]-,(^(n)PrO)₂-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-NMe]-,(^(i)PrO)₂-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-NMe]-,(^(n)BuO)₂-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-NMe]-,(^(i)BuO)₂-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-NMe]-,(^(s)BuO)₂-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-NMe]-,(^(t)BuO)₂-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-NMe]-,(H₂N)₂-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-NEt]-,(Me₂N)₂-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-NEt]-,(Et₂N)₂-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-NEt]-,(^(n)Pr₂N)₂-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-NEt]-,(^(i)Pr₂N)₂-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-NEt]-,(^(n)Bu₂N)₂-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-NEt]-,(^(i)Pr₂N)₂-M-C₃(m-N₂)Me₂-4-N₂)Me₂-4-[(CMe₂)₂-NEt]-,(^(s)Bu₂N)₂-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-NEt]-,(^(t)Bu₂N)₂-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-NEt]-,(H₂N)(Cp)-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-NEt]-,(Me₂N)(Cp)-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-NEt]-,(Et₂N)(Cp)-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-NEt]-,(^(n)Pr₂N)(Cp)-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-NEt]-,(^(i)Pr₂N)(Cp)-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-NEt]-,(^(n)Bu₂N)(Cp)-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-NEt]-,(^(i)Bu₂N)(Cp)-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-NEt]-,(^(s)Bu₂N)(Cp)-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-NEt]-,(^(t)Bu₂N)(Cp)-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-NEt]-,(MeO)₂-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-NEt]-,(EtO)₂-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-NEt]-,(^(n)PrO)₂-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-NEt]-,(^(i)PrO)₂-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-NEt]-,(^(n)BuO)₂-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-NEt]-,(^(i)BuO)₂-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-NEt]-,(^(s)BuO)₂-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-NEt]-,(^(t)BuO)₂-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-NEt]-,(H₂N)₂-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-N^(n)Pr]—,(Me₂N)₂-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-N^(n)Pr]—,(Et₂N)₂-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-N^(n)Pr]—,(^(n)Pr₂N)₂-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-N^(n)Pr]—,(^(i)Pr₂N)₂-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-N^(n)Pr]—,(^(n)Bu₂N)₂-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-N^(n)Pr]—,(^(i)Bu₂N)₂-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-N^(n)Pr]—,(^(s)Bu₂N)₂-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-N^(n)Pr]—,(^(t)Bu₂N)₂-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-N^(n)Pr]—,(H₂N)(Cp)-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-N^(n)Pr]—,(Me₂N)(Cp)-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-N^(n)Pr]—,(Et₂N)(Cp)-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-N^(n)Pr]—,(^(n)Pr₂N)(Cp)-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-N^(n)Pr]—,(^(i)Pr₂N)(Cp)-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-N^(n)Pr]—,(^(n)Bu₂N)(Cp)-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-N^(n)Pr]—,(^(i)Bu₂N)(Cp)-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-N^(n)Pr]—,(^(s)Bu₂N)(Cp)-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-N^(n)Pr]—,(^(t)Bu₂N)(Cp)-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-N^(n)Pr]—,(MeO)₂-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-N^(n)Pr]—,(EtO)₂-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-N^(n)Pr]—,(^(n)PrO)₂-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-N^(n)Pr]—,(^(i)PrO)₂-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-N^(n)Pr]—,(^(n)BuO)₂-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-N^(n)Pr]—,(^(i)BuO)₂-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-N^(n)Pr]—,(^(s)BuO)₂-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-N^(n)Pr]—,(^(t)BuO)₂-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-N^(n)Pr]—,(H₂N)₂-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-N^(i)Pr]—,(Me₂N)₂-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-N^(i)Pr]—,(Et₂N)₂-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-N^(i)Pr]—,(^(n)Pr₂N)₂-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-N^(i)Pr]—,(^(i)Pr₂N)₂-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-N^(i)Pr]—,(^(n)Bu₂N)₂-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-N^(i)Pr]—,(^(i)Bu₂N)₂-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-N^(i)Pr]—,(^(s)Bu₂N)₂-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-N^(i)Pr]—,(^(t)Bu₂N)₂-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-N^(i)Pr]—,(H₂N)(Cp)-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-N^(i)Pr]—,(Me₂N)(Cp)-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-N^(i)Pr]—,(Et₂N)(Cp)-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-N^(i)Pr]—,(^(n)Pr₂N)(Cp)-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-N^(i)Pr]—,(^(i)Pr₂N)(Cp)-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-N^(i)Pr]—,(^(n)Bu₂N)(Cp)-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-N^(i)Pr]—,(^(i)Bu₂N)(Cp)-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-N^(i)Pr]—,(^(s)Bu₂N)(Cp)-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-N^(i)Pr]—,(^(t)Bu₂N)(Cp)-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-N^(i)Pr]—,(MeO)₂-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-N^(i)Pr]—,(EtO)₂-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-N^(i)Pr]—,(^(n)PrO)₂-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-N^(i)Pr]—,(^(i)PrO)₂-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-N^(i)Pr]—,(^(n)BuO)₂-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-N^(i)Pr]—,(^(i)BuO)₂-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-N^(i)Pr]—,(^(s)BuO)₂-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-N^(i)Pr]—,(^(t)BuO)₂-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-N^(i)Pr]—,(H₂N)₂-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-N^(n)Bu]-,(Me₂N)₂-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-N^(n)Bu]-,(Et₂N)₂-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-N^(n)Bu]-,(^(n)Pr₂N)₂-M-C₂(m-N₂)Me₂-4-[(CMe₂)₂-N^(n)Bu]-,(^(i)Pr₂N)₂-M-C₂(m-N₂)Me₂-4-[(CMe₂)₂-N^(n)Bu]-,(^(n)Bu₂N)₂-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-N^(n)Bu]-,(^(t)Bu₂N)₂-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-N^(n)Bu]-,(^(s)Bu₂N)₂-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-N^(n)Bu]-,(^(t)Bu₂N)₂M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-N^(n)Bu]-,(H₂N)(Cp)-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-N^(n)Bu]-,(Me₂N)(Cp)-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-N^(n)Bu]-,(Et₂N)(Cp)-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-N^(n)Bu]-,(^(n)Pr₂N)(Cp)-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-N^(n)Bu]-,(^(i)Pr₂N)(Cp)-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-N^(n)Bu]-,(^(n)Bu₂N)(Cp)-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-N^(n)Bu]-,(^(i)Bu₂N)(Cp)-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-N^(n)Bu]-,(^(s)Bu₂N)(Cp)-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-N^(n)Bu]-,(^(i)Bu₂N)(Cp)-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-N^(n)Bu]-,(MeO)₂-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-N^(n)Bu]-,(EtO)₂-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-N^(n)Bu]-,(^(n)PrO)₂-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-N^(n)Bu]-,(^(i)PrO)₂-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-N^(n)Bu]-,(^(n)BuO)₂-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-N^(n)Bu]-,(^(i)BuO)₂-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-N^(n)Bu]-,(^(s)BuO)₂-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-N^(n)Bu]-,(^(t)BuO)₂-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-N^(n)Bu]-,(H₂N)₂-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-N^(i)Bu]-,(Me₂N)₂-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-N^(i)Bu]-,(Et₂N)₂-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-N^(i)Bu]-,(^(n)Pr₂N)₂-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-N^(i)Bu]-,(^(i)Pr₂N)₂-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-N^(i)Bu]-,(^(n)Bu₂N)₂-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-N^(i)Bu]-,(^(i)Bu₂N)₂-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-N^(i)Bu]-,(^(s)Bu₂N)₂-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-N^(i)Bu]-,(^(t)Bu₂N)₂-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-N^(i)Bu]-,(H₂N)(Cp)-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-N^(i)Bu]-,(Me₂N)(Cp)-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-N^(i)Bu]-,(Et₂N)(Cp)-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-N^(i)Bu]-,(^(n)Pr₂N)(Cp)-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-N^(i)Bu]-,(^(i)Pr₂N)(Cp)-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-N^(i)Bu]-,(^(n)Bu₂N)(Cp)-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-N^(i)Bu]-,(^(i)Bu₂N)(Cp)-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-N^(i)Bu]-,(^(s)Bu₂N)(Cp)-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-N^(i)Bu]-,(^(t)Bu₂N)(Cp)-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-N^(i)Bu]-,(MeO)₂-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-N^(i)Bu]-,(EtO)₂-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-N^(i)Bu]-,(^(n)PrO)₂-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-N^(i)Bu]-,(^(i)PrO)₂-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-N^(i)Bu]-,(^(n)BuO)₂-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-N^(i)Bu]-,(^(i)BuO)₂-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-N^(i)Bu]-,(^(s)BuO)₂-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-N^(i)Bu]-,(^(t)BuO)₂-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-N^(i)Bu]-,(H₂N)₂-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-N^(s)Bu]-,(Me₂N)₂-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-N^(s)Bu]-,(Et₂N)₂-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-N^(s)Bu]-,(^(n)Pr₂N)₂-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-N^(s)Bu]-,(^(i)Pr₂N)₂-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-N^(s)Bu]-,(^(n)Bu₂N)₂-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-N^(s)Bu]-,(^(i)Bu₂N)₂-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-N^(s)Bu]-,(^(s)Bu₂N)₂-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-N^(s)Bu]-,(^(t)Bu₂N)₂-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-N^(s)Bu]-,(H₂N)(Cp)-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-N^(s)Bu]-,(Me₂N)(Cp)-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-N^(s)Bu]-,(Et₂N)(Cp)-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-N^(s)Bu]-,(^(n)Pr₂N)(Cp)-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-N^(s)Bu]-,(^(i)Pr₂N)(Cp)-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-N^(s)Bu]-,(^(n)Bu₂N)(Cp)-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-N^(s)Bu]-,(^(i)Bu₂N)(Cp)-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-N^(s)Bu]-,(^(s)Bu₂N)(Cp)-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-N^(s)Bu]-,(^(t)Bu₂N)(Cp)-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-N^(s)Bu]-,(MeO)₂-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-N^(s)Bu]-,(EtO)₂-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-N^(s)Bu]-,(^(n)PrO)₂-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-N^(s)Bu]-,(^(i)PrO)₂-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-N^(s)Bu]-,(^(n)BuO)₂-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-N^(s)Bu]-,(^(i)BuO)₂-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-N^(s)Bu]-,(^(s)BuO)₂-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-N^(s)Bu]-,(^(t)BuO)₂-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-N^(s)Bu]-,(H₂N)₂-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-N^(t)Bu]-,(Me₂N)₂-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-N^(t)Bu]-,(Et₂N)₂-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-N^(t)Bu]-,(^(n)Pr₂N)₂-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-N^(t)Bu]-,(^(i)Pr₂N)₂-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-N^(t)Bu]-,(^(n)Bu₂N)₂-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-N^(t)Bu]-,(^(i)Bu₂N)₂-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-N^(t)Bu]-,(^(s)Bu₂N)₂-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-N^(t)Bu]-,(^(i)Bu₂N)₂-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-N^(t)Bu]-,(H₂N)(Cp)-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-N^(t)Bu]-,(Me₂N)(Cp)-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-N^(t)Bu]-,(Et₂N)(Cp)-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-N^(t)Bu]-,(^(n)Pr₂N)(Cp)-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-N^(t)Bu]-,(^(i)Pr₂N)(Cp)-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-N^(t)Bu]-,(^(n)Bu₂N)(Cp)-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-N^(t)Bu]-,(^(i)Bu₂N)(Cp)-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-N^(t)Bu]-,(^(s)Bu₂N)(Cp)-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-N^(t)Bu]-,(^(t)Bu₂N)(Cp)-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-N^(t)Bu]-,(MeO)₂-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-N^(t)Bu]-,(EtO)₂-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-N^(t)Bu]-,(^(n)PrO)₂-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-N^(t)Bu]-,(^(i)PrO)₂-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-N^(t)Bu]-,(^(n)BuO)₂-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-N^(t)Bu]-,(^(i)BuO)₂-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-N^(t)Bu]-,(^(s)BuO)₂-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-N^(t)Bu]-,(^(t)BuO)₂-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-N^(t)Bu]-,(H₂N)₂-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-O]—,(Me₂N)₂-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-O]—,(Et₂N)₂-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-O]—,(^(n)Pr₂N)₂-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-O]—,(^(i)Pr₂N)₂-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-O]—,(^(n)Bu₂N)₂-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-O]—,(^(i)Bu₂N)₂-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-O]—,(^(s)Bu₂N)₂-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-O]—,(^(t)Bu₂N)₂-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-O]—,(H₂N)(Cp)-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-O]—,(Me₂N)(Cp)-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-O]—,(Et₂N)(Cp)-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-O]—,(^(n)Pr₂N)(Cp)-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-O]—,(^(i)Pr₂N)(Cp)-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-O]—,(^(n)Bu₂N)(Cp)-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-O]—,(^(i)Bu₂N)(Cp)-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-O]—,(^(s)Bu₂N)(Cp)-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-O]—,(^(t)Bu₂N)(Cp)-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-O]—,(MeO)₂-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-O]—,(EtO)₂-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-O]—,(^(n)PrO)₂-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-O]—,(^(i)PrO)₂-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-O]—,(^(n)BuO)₂-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-O]—,(^(i)BuO)₂-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-O]—,(^(s)BuO)₂-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-O]—,(^(t)BuO)₂-M-C₃(m-N₂)Me₂-4-[(CMe₂)₂-O]—,(Me₂N)₂-M-C₅NH₄-4-[(CH₂)₂—NMe]-, (Et₂N)₂-M-C₅NH₄-4-[(CH₂)₂—NMe]-,(^(n)Pr₂N)₂-M-C₅NH₄-4-[(CH₂)₂—NMe]-,(^(i)Pr₂N)₂-M-C₅NH₄-4-[(CH₂)₂—NMe]-,(^(n)Bu₂N)₂-M-C₅NH₄-4-[(CH₂)₂—NMe]-,(^(i)Bu₂N)₂-M-C₅NH₄-4-[(CH₂)₂—NMe]-,(^(s)Bu₂N)₂-M-C₅NH₄-4-[(CH₂)₂—NMe]-,(^(t)Bu₂N)₂-M-C₅NH₄-4-[(CH₂)₂—NMe]-, (H₂N)(Cp)-M-C₅NH₄-4-[(CH₂)₂—NMe]-,(Me₂N)(Cp)-M-C₅NH₄-4-[(CH₂)₂—NMe]-, (Et₂N)(Cp)-M-C₅NH₄-4-[(CH₂)₂—NMe]-,(^(n)Pr₂N)(Cp)-M-C₅NH₄-4-[(CH₂)₂—NMe]-,(^(i)Pr₂N)(Cp)-M-C₅NH₄-4-[(CH₂)₂—NMe]-,(^(n)Bu₂N)(Cp)-M-C₅NH₄-4-[(CH₂)₂—NMe]-,(^(i)Bu₂N)(Cp)-M-C₅NH₄-4-[(CH₂)₂—NMe]-,(^(s)Bu₂N)(Cp)-M-C₅NH₄-4-[(CH₂)₂—NMe]-,(^(t)Bu₂N)(Cp)-M-C₅NH₄-4-[(CH₂)₂—NMe]-, (MeO)₂-M-C₅NH₄-4-[(CH₂)₂—NMe]-,(EtO)₂-M-C₅NH₄-4-[(CH₂)₂—NMe]-, (^(n)PrO)₂M-C₅NH₄-4-[(CH₂)₂—NMe]-,(^(i)PrO)₂-M-C₅NH₄-4-[(CH₂)₂—NMe]-, (^(n)BuO)₂-M-C₅NH₄-4-[(CH₂)₂—NMe]-,(^(i)BuO)₂-M-C₅NH₄-4-[(CH₂)₂—NMe]-, (^(s)BuO)₂-M-C₅NH₄-4-[(CH₂)₂—NMe]-,(^(t)BuO)₂-M-C₅NH₄-4-[(CH₂)₂—NMe]-, (H₂N)₂-M-C₅NH₄-4-[(CH₂)₂—NEt]-,(Me₂N)₂-M-C₅NH₄-4-[(CH₂)₂—NEt]-, (Et₂N)₂-M-C₅NH₄-4-[(CH₂)₂—NEt]-,(^(n)Pr₂N)₂-M-C₅NH₄-4-[(CH₂)₂—NEt]-,(^(i)Pr₂N)₂-M-C₅NH₄-4-[(CH₂)₂—NEt]-,(^(n)Bu₂N)₂-M-C₅NH₄-4-[(CH₂)₂—NEt]-,(^(i)Bu₂N)₂-M-C₅NH₄-4-[(CH₂)₂—NEt]-,(^(s)Bu₂N)₂-M-C₅NH₄-4-[(CH₂)₂—NEt]-,(^(t)Bu₂N)₂-M-C₅NH₄-4-[(CH₂)₂—NEt]-, (H₂N)(Cp)-M-C₅NH₄-4-[(CH₂)₂—NEt]-,(Me₂N)(Cp)-M-C₅NH₄-4-[(CH₂)₂—NEt]-, (Et₂N)(Cp)-M-C₅NH₄-4-[(CH₂)₂—NEt]-,(^(n)Pr₂N)(Cp)-M-C₅NH₄-4-[(CH₂)₂—NEt]-,(^(i)Pr₂N)(Cp)-M-C₅NH₄-4-[(CH₂)₂—NEt]-,(^(n)Bu₂N)(Cp)-M-C₅NH₄-4-[(CH₂)₂—NEt]-,(^(i)Bu₂N)(Cp)-M-C₅NH₄-4-[(CH₂)₂—NEt]-,(^(s)Bu₂N)(Cp)-M-C₅NH₄-4-[(CH₂)₂—NEt]-,(^(t)Bu₂N)(Cp)-M-C₅NH₄-4-[(CH₂)₂—NEt]-, (MeO)₂-M-C₅NH₄-4-[(CH₂)₂—NEt]-,(EtO)₂-M-C₅NH₄-4-[(CH₂)₂—NEt]-, (^(n)PrO)₂-M-C₅NH₄-4-[(CH₂)₂—NEt]-,(^(i)PrO)₂-M-C₅NH₄-4-[(CH₂)₂—NEt]-, (^(n)BuO)₂-M-C₅NH₄-4-[(CH₂)₂—NEt]-,(^(i)BuO)₂-M-C₅NH₄-4-[(CH₂)₂—NEt]-, (^(s)BuO)₂-M-C₅NH₄-4-[(CH₂)₂—NEt]-,(^(t)BuO)₂-M-C₅NH₄-4-[(CH₂)₂—NEt]-, (H₂N)₂-M-C₅NH₄-4-[(CH₂)₂—N^(n)Pr]—,(Me₂N)₂-M-C₅NH₄-4-[(CH₂)₂—N^(n)Pr]—,(Et₂N)₂-M-C₅NH₄-4-[(CH₂)₂—N^(n)Pr]—,(^(n)Pr₂N)₂-M-C₅NH₄-4-[(CH₂)₂—N^(n)Pr]—,(^(i)Pr₂N)₂-M-C₅NH₄-4-[(CH₂)₂—N^(n)Pr]—,(^(n)Bu₂N)₂-M-C₅NH₄-4-[(CH₂)₂—N^(n)Pr]—,(^(i)Bu₂N)₂-M-C₅NH₄-4-[(CH₂)₂—N^(n)Pr]—,(^(s)Bu₂N)₂-M-C₅NH₄-4-[(CH₂)₂—N^(n)Pr]—,(^(t)Bu₂N)₂-M-C₅NH₄-4-[(CH₂)₂—N^(n)Pr]—,(H₂N)(Cp)-M-C₅NH₄-4-[(CH₂)₂—N^(n)Pr]—,(Me₂N)(Cp)-M-C₅NH₄-4-[(CH₂)₂—N^(n)Pr]—,(Et₂N)(Cp)-M-C₅NH₄-4-[(CH₂)₂—N^(n)Pr]—,(^(n)Pr₂N)(Cp)-M-C₅NH₄-4-[(CH₂)₂—N^(n)Pr]—,(^(i)Pr₂N)(Cp)-M-C₅NH₄-4-[(CH₂)₂—N^(n)Pr]—,(^(n)Bu₂N)(Cp)-M-C₅NH₄-4-[(CH₂)₂—N^(n)Pr]—,(^(t)Bu₂N)(Cp)-M-C₅NH₄-4-[(CH₂)₂—N^(n)Pr]—,(^(s)Bu₂N)(Cp)-M-C₅NH₄-4-[(CH₂)₂—N^(n)Pr]—,(^(t)Bu₂N)(Cp)-M-C₅NH₄-4-[(CH₂)₂—N^(n)Pr]—,(MeO)₂-M-C₅NH₄-4-[(CH₂)₂—N^(n)Pr]—, (EtO)₂-M-C₅NH₄-4-[(CH₂)₂—N^(n)Pr]—,(^(n)PrO)₂-M-C₅NH₄-4-[(CH₂)₂—N^(n)Pr]—, (^(i)PrO)₂-M-C₅NH₄-4-[(CH₂)₂—N^(n)Pr]—, (^(n)BuO)₂-M-C₅NH₄-4-[(CH₂)₂—N^(n)Pr]—,(^(i)BuO)₂-M-C₅NH₄-4-[(CH₂)₂—N^(n)Pr]—,(^(s)BuO)₂-M-C₅NH₄-4-[(CH₂)₂—N^(n)Pr]—,(^(t)BuO)₂-M-C₅NH₄-4-[(CH₂)₂—N^(n)Pr]—,(H₂N)₂-M-C₅NH₄-4-[(CH₂)₂—N^(i)Pr]—, (Me₂N)₂-M-C₅NH₄-4-[(CH₂)₂—N^(i)Pr]—,(Et₂N)₂-M-C₅NH₄-4-[(CH₂)₂—N^(i)Pr]—,(^(n)Pr₂N)₂-M-C₅NH₄-4-[(CH₂)₂—N^(i)Pr]—, (^(i)Pr₂N)₂-M-C₅NH₄-4-[(CH₂)₂—N^(i)Pr]—, (^(n)Bu₂N)₂-M-C₅NH₄-4-[(CH₂)₂—N^(i)Pr]—,(^(i)Bu₂N)₂-M-C₅NH₄-4-[(CH₂)₂—N^(i)Pr]—,(^(s)Bu₂N)₂-M-C₅NH₄-4-[(CH₂)₂—N^(i)Pr]—,(^(t)Bu₂N)₂-M-C₅NH₄-4-[(CH₂)₂—N^(i)Pr]—,(H₂N)(Cp)-M-C₅NH₄-4-[(CH₂)₂—N^(i)Pr]—,(Me₂N)(Cp)-M-C₅NH₄-4-[(CH₂)₂—N^(i)Pr]—,(Et₂N)(Cp)-M-C₅NH₄-4-[(CH₂)₂—N^(i)Pr]—,(^(n)Pr₂N)(Cp)-M-C₅NH₄-4-[(CH₂)₂—N^(i)Pr]—,(^(i)Pr₂N)(Cp)-M-C₅NH₄-4-[(CH₂)₂—N^(i)Pr]—,(^(n)Bu₂N)(Cp)-M-C₅NH₄-4-[(CH₂)₂—N^(i)Pr]—,(^(i)Bu₂N)(Cp)-M-C₅NH₄-4-[(CH₂)₂—N^(i)Pr]—,(^(s)Bu₂N)(Cp)-M-C₅NH₄-4-[(CH₂)₂—N^(i)Pr]—,(^(t)Bu₂N)(Cp)-M-C₅NH₄-4-[(CH₂)₂—N^(i)Pr]—,(MeO)₂-M-C₅NH₄-4-[(CH₂)₂—N^(i)Pr]—, (EtO)₂-M-C₅NH₄-4-[(CH₂)₂—N^(i)Pr]—,(^(n)PrO)₂-M-C₅NH₄-4-[(CH₂)₂—N^(i)Pr]—, (^(i)PrO)₂-M-C₅NH₄-4-[(CH₂)₂—N^(i)Pr]—, (^(n)BuO)₂-M-C₅NH₄-4-[(CH₂)₂—N^(i)Pr]—,(^(i)BuO)₂-M-C₅NH₄-4-[(CH₂)₂—N^(i)Pr]—,(^(s)BuO)₂-M-C₅NH₄-4-[(CH₂)₂—N^(i)Pr]—,(^(t)BuO)₂-M-C₅NH₄-4-[(CH₂)₂—N^(i)Pr]—,(H₂N)₂-M-C₅NH₄-4-[(CH₂)₂—N^(n)Bu]-, (Me₂N)₂-M-C₅NH₄-4-[(CH₂)₂—N^(n)Bu]-,(Et₂N)₂-M-C₅NH₄-4-[(CH₂)₂—N^(n)Bu]-,(^(n)Pr₂N)₂-M-C₅NH₄-4-[(CH₂)₂—N^(n)Bu]-,(^(i)Pr₂N)₂-M-C₅NH₄-4-[(CH₂)₂—N^(n)Bu]-,(Bu₂N)₂-M-C₅NH₄-4-[(CH₂)₂—N^(n)Bu]-,(^(i)Bu₂N)₂-M-C₅NH₄-4-[(CH₂)₂—N^(n)Bu]-,(^(s)Bu₂N)₂-M-C₅NH₄-4-[(CH₂)₂—N^(n)Bu]-,(^(t)Bu₂N)₂-M-C₅NH₄-4-[(CH₂)₂—N^(n)Bu]-,(H₂N)(Cp)-M-C₅NH₄-4-[(CH₂)₂—N^(n)Bu]-,(Me₂N)(Cp)-M-C₅NH₄-4-[(CH₂)₂—N^(n)Bu]-,(Et₂N)(Cp)-M-C₅NH₄-4-[(CH₂)₂—N^(n)Bu]-,(^(n)Pr₂N)(Cp)-M-C₅NH₄-4-[(CH₂)₂—N^(n)Bu]-,(^(i)Pr₂N)(Cp)-M-C₅NH₄-4-[(CH₂)₂—N^(n)Bu]-,(^(n)Bu₂N)(Cp)-M-C₅NH₄-4-[(CH₂)₂—N^(n)Bu]-,(^(i)Bu₂N)(Cp)-M-C₅NH₄-4-[(CH₂)₂—N^(n)Bu]-,(^(s)Bu₂N)(Cp)-M-C₅NH₄-4-[(CH₂)₂—N^(n)Bu]-,(^(t)Bu₂N)(Cp)-M-C₅NH₄-4-[(CH₂)₂—N^(n)Bu]-,(MeO)₂-M-C₅NH₄-4-[(CH₂)₂—N^(n)Bu]-, (EtO)₂-M-C₅NH₄-4-[(CH₂)₂—N^(n)Bu]-,(^(n)PrO)₂-M-C₅NH₄-4-[(CH₂)₂—N^(n)Bu]-,(^(i)PrO)₂-M-C₅NH₄-4-[(CH₂)₂—N^(n)Bu]-,(^(n)BuO)₂-M-C₅NH₄-4-[(CH₂)₂—N^(n)Bu]-,(^(i)BuO)₂-M-C₅NH₄-4-[(CH₂)₂—N^(n)Bu]-,(^(s)BuO)₂-M-C₅NH₄-4-[(CH₂)₂—N^(n)Bu]-,(^(t)BuO)₂-M-C₅NH₄-4-[(CH₂)₂—N^(n)Bu]-,(H₂N)₂-M-C₅NH₄-4-[(CH₂)₂—N^(i)Bu]-, (Me₂N)₂-M-C₅NH₄-4-[(CH₂)₂—N^(i)Bu]-,(Et₂N)₂-M-C₅NH₄-4-[(CH₂)₂—N^(i)Bu]-,(^(n)Pr₂N)₂-M-C₅NH₄-4-[(CH₂)₂—N^(i)Bu]-,(^(i)Pr₂N)₂-M-C₅NH₄-4-[(CH₂)₂—N^(i)Bu]-,(^(n)Bu₂N)₂-M-C₅NH₄-4-[(CH₂)₂—N^(i)Bu]-,(^(i)Bu₂N)₂-M-C₅NH₄-4-[(CH₂)₂—N^(i)Bu]-,(^(s)Bu₂N)₂-M-C₅NH₄-4-[(CH₂)₂—N^(i)Bu]-,(^(t)Bu₂N)₂-M-C₅NH₄-4-[(CH₂)₂—N^(i)Bu]-,(H₂N)(Cp)-M-C₅NH₄-4-[(CH₂)₂—N^(i)Bu]-,(Me₂N)(Cp)-M-C₅NH₄-4-[(CH₂)₂—N^(i)Bu]-,(Et₂N)(Cp)-M-C₅NH₄-4-[(CH₂)₂—N^(i)Bu]-,(^(n)Pr₂N)(Cp)-M-C₅NH₄-4-[(CH₂)₂—N^(i)Bu]-,(^(i)Pr₂N)(Cp)-M-C₅NH₄-4-[(CH₂)₂—N^(i)Bu]-,(^(n)Bu₂N)(Cp)-M-C₅NH₄-4-[(CH₂)₂—N^(i)Bu]-,(^(i)Bu₂N)(Cp)-M-C₅NH₄-4-[(CH₂)₂—N^(i)Bu]-,(^(s)Bu₂N)(Cp)-M-C₅NH₄-4-[(CH₂)₂—N^(i)Bu]-,(^(t)Bu₂N)(Cp)-M-C₅NH₄-4-[(CH₂)₂—N^(i)Bu]-,(MeO)₂-M-C₅NH₄-4-[(CH₂)₂—N^(i)Bu]-, (EtO)₂-M-C₅NH₄-4-[(CH₂)₂—N^(i)Bu]-,(^(n)PrO)₂-M-C₅NH₄-4-[(CH₂)₂—N^(i)Bu]-,(^(i)PrO)₂-M-C₅NH₄-4-[(CH₂)₂—N^(i)Bu]-,(^(n)BuO)₂-M-C₅NH₄-4-[(CH₂)₂—N^(i)Bu]-,(^(i)BuO)₂-M-C₅NH₄-4-[(CH₂)₂—N^(i)Bu]-,(^(s)BuO)₂-M-C₅NH₄-4-[(CH₂)₂—N^(i)Bu]-,(^(t)BuO)₂-M-C₅NH₄-4-[(CH₂)₂—N^(i)Bu]-,(H₂N)₂-M-C₅NH₄-4-[(CH₂)₂—N^(s)Bu]-, (Me₂N)₂-M-C₅NH₄-4-[(CH₂)₂—N^(s)Bu]-,(Et₂N)₂-M-C₅NH₄-4-[(CH₂)₂—N^(s)Bu]-,(^(n)Pr₂N)₂-M-C₅NH₄-4-[(CH₂)₂—N^(s)Bu]-,(^(i)Pr₂N)₂-M-C₅NH₄-4-[(CH₂)₂—N^(s)Bu]-,(^(n)Bu₂N)₂-M-C₅NH₄-4-[(CH₂)₂—N^(s)Bu]-,(^(i)Bu₂N)₂-M-C₅NH₄-4-[(CH₂)₂—N^(s)Bu]-,(^(s)Bu₂N)₂-M-C₅NH₄-4-[(CH₂)₂—N^(s)Bu]-,(^(t)Bu₂N)₂-M-C₅NH₄-4-[(CH₂)₂—N^(s)Bu]-,(H₂N)(Cp)-M-C₅NH₄-4-[(CH₂)₂—N^(s)Bu]-,(Me₂N)(Cp)-M-C₅NH₄-4-[(CH₂)₂—N^(s)Bu]-,(Et₂N)(Cp)-M-C₅NH₄-4-[(CH₂)₂—N^(s)Bu]-,(^(n)Pr₂N)(Cp)-M-C₅NH₄-4-[(CH₂)₂—N^(s)Bu]-,(^(i)Pr₂N)(Cp)-M-C₅NH₄-4-[(CH₂)₂—N^(s)Bu]-,(^(n)Bu₂N)(Cp)-M-C₅NH₄-4-[(CH₂)₂—N^(s)Bu]-,(^(i)Bu₂N)(Cp)-M-C₅NH₄-4-[(CH₂)₂—N^(s)Bu]-,(^(s)Bu₂N)(Cp)-M-C₅NH₄-4-[(CH₂)₂—N^(s)Bu]-,(^(t)Bu₂N)(Cp)-M-C₅NH₄-4-[(CH₂)₂—N^(s)Bu]-,(MeO)₂-M-C₅NH₄-4-[(CH₂)₂—N^(s)Bu]-, (EtO)₂-M-C₅NH₄-4-[(CH₂)₂—N^(s)Bu]-,(^(n)PrO)₂-M-C₅NH₄-4-[(CH₂)₂—N^(s)Bu]-,(^(i)PrO)₂-M-C₅NH₄-4-[(CH₂)₂—N^(s)Bu]-,(^(n)BuO)₂-M-C₅NH₄-4-[(CH₂)₂—N^(s)Bu]-,(^(i)BuO)₂-M-C₅NH₄-4-[(CH₂)₂—N^(s)Bu]-,(^(s)BuO)₂-M-C₅NH₄-4-[(CH₂)₂—N^(s)Bu]-,(^(t)BuO)₂-M-C₅NH₄-4-[(CH₂)₂—N^(s)Bu]-,(H₂N)₂-M-C₅NH₄-4-[(CH₂)₂—N^(t)Bu]-, (Me₂N)₂-M-C₅NH₄-4-[(CH₂)₂—N^(t)Bu]-,(Et₂N)₂-M-C₅NH₄-4-[(CH₂)₂—N^(t)Bu]-,(^(n)Pr₂N)₂-M-C₅NH₄-4-[(CH₂)₂—N^(t)Bu]-,(^(i)Pr₂N)₂-M-C₅NH₄-4-[(CH₂)₂—N^(t)Bu]-,(Bu₂N)₂-M-C₅NH₄-4-[(CH₂)₂—N^(t)Bu]-,(^(i)Bu₂N)₂-M-C₅NH₄-4-[(CH₂)₂—N^(t)Bu]-,(^(s)Bu₂N)₂-M-C₅NH₄-4-[(CH₂)₂—N^(t)Bu]-,(^(t)Bu₂N)₂-M-C₅NH₄-4-[(CH₂)₂—N^(t)Bu]-,(H₂N)(Cp)-M-C₅NH₄-4-[(CH₂)₂—N^(t)Bu]-,(Me₂N)(Cp)-M-C₅NH₄-4-[(CH₂)₂—N^(t)Bu]-,(Et₂N)(Cp)-M-C₅NH₄-4-[(CH₂)₂—N^(t)Bu]-,(^(n)Pr₂N)(Cp)-M-C₅NH₄-4-[(CH₂)₂—N^(t)Bu]-,(^(i)Pr₂N)(Cp)-M-C₅NH₄-4-[(CH₂)₂—N^(t)Bu]-,(^(n)Bu₂N)(Cp)-M-C₅NH₄-4-[(CH₂)₂—N^(t)Bu]-,(^(i)Bu₂N)(Cp)-M-C₅NH₄-4-[(CH₂)₂—N^(t)Bu]-,(^(s)Bu₂N)(Cp)-M-C₅NH₄-4-[(CH₂)₂—N^(t)Bu]-,(^(t)Bu₂N)(Cp)-M-C₅NH₄-4-[(CH₂)₂—N^(t)Bu]-,(MeO)₂-M-C₅NH₄-4-[(CH₂)₂—N^(t)Bu]-, (EtO)₂-M-C₅NH₄-4-[(CH₂)₂—N^(t)Bu]-,(^(n)PrO)₂-M-C₅NH₄-4-[(CH₂)₂—N^(t)Bu]-,(^(i)PrO)₂-M-C₅NH₄-4-[(CH₂)₂—N^(t)Bu]-,(^(n)BuO)₂-M-C₅NH₄-4-[(CH₂)₂—N^(t)Bu]-,(^(i)BuO)₂-M-C₅NH₄-4-[(CH₂)₂—N^(t)Bu]-,(^(s)BuO)₂-M-C₅NH₄-4-[(CH₂)₂—N^(t)Bu]-,(^(t)BuO)₂-M-C₅NH₄-4-[(CH₂)₂—N^(t)Bu]-, (H₂N)₂-M-C₅NH₄-4-[(CH₂)₂—O]—,(Me₂N)₂-M-C₅NH₄-4-[(CH₂)₂—O]—, (Et₂N)₂-M-C₅NH₄-4-[(CH₂)₂—O]—,(^(n)Pr₂N)₂-M-C₅NH₄-4-[(CH₂)₂—O]—, (^(i)Pr₂N)₂-M-C₅NH₄-4-[(CH₂)₂—O]—,(^(n)Bu₂N)₂-M-C₅NH₄-4-[(CH₂)₂—O]—, (^(i)Bu₂N)₂-M-C₅NH₄-4-[(CH₂)₂—O]—,(^(s)Bu₂N)₂-M-C₅NH₄-4-[(CH₂)₂—O]—, (^(t)Bu₂N)₂-M-C₅NH₄-4-[(CH₂)₂—O]—,(H₂N)(Cp)-M-C₅NH₄-4-[(CH₂)₂—O]—, (Me₂N)(Cp)-M-C₅NH₄-4-[(CH₂)₂—O]—,(Et₂N)(Cp)-M-C₅NH₄-4-[(CH₂)₂—O]—, (^(n)Pr₂N)(Cp)-M-C₅NH₄-4-[(CH₂)₂—O]—,(^(i)Pr₂N)(Cp)-M-C₅NH₄-4-[(CH₂)₂—O]—,(^(n)Bu₂N)(Cp)-M-C₅NH₄-4-[(CH₂)₂—O]—,(^(i)Bu₂N)(Cp)-M-C₅NH₄-4-[(CH₂)₂—O]—,(^(s)Bu₂N)(Cp)-M-C₅NH₄-4-[(CH₂)₂—O]—,(^(t)Bu₂N)(Cp)-M-C₅NH₄-4-[(CH₂)₂—O]—, (MeO)₂-M-C₅NH₄-4-[(CH₂)₂—O]—,(EtO)₂-M-C₅NH₄-4-[(CH₂)₂—O]—, (^(n)PrO)₂-M-C₅NH₄-4-[(CH₂)₂—O]—,(^(i)PrO)₂-M-C₅NH₄-4-[(CH₂)₂—O]—, (^(n)BuO)₂-M-C₅NH₄-4-[(CH₂)₂—O]—,(^(i)BuO)₂-M-C₅NH₄-4-[(CH₂)₂—O]—, (^(s)BuO)₂-M-C₅NH₄-4-[(CH₂)₂—O]—,(^(t)BuO)₂-M-C₅NH₄-4-[(CH₂)₂—O]—, (Me₂N)₂-M-C₅NH₄-4-[(CMe₂)₂-NMe]-,(Et₂N)₂-M-C₅NH₄-4-[(CMe₂)₂-NMe]-, (^(n)Pr₂N)₂-M-C₅NH₄-4-[(CMe₂)₂-NMe]-,(^(i)Pr₂N)₂-M-C₅NH₄-4-[(CMe₂)₂-NMe]-,(^(n)Bu₂N)₂-M-C₅NH₄-4-[(CMe₂)₂-NMe]-,(^(i)Bu₂N)₂-M-C₅NH₄-4-[(CMe₂)₂-NMe]-,(^(s)Bu₂N)₂-M-C₅NH₄-4-[(CMe₂)₂-NMe]-,(^(t)Bu₂N)₂-M-C₅NH₄-4-[(CMe₂)₂-NMe]-,(H₂N)(Cp)-M-C₅NH₄-4-[(CMe₂)₂-NMe]-, (Me₂N)(Cp)-M-C₅NH₄-4-[(CMe₂)₂-NMe]-,(Et₂N)(Cp)-M-C₅NH₄-4-[(CMe₂)₂-NMe]-,(^(n)Pr₂N)(Cp)-M-C₅NH₄-4-[(CMe₂)₂-NMe]-,(^(i)Pr₂N)(Cp)-M-C₅NH₄-4-[(CMe₂)₂-NMe]-,(^(n)Bu₂N)(Cp)-M-C₅NH₄-4-[(CMe₂)₂-NMe]-,(^(i)Bu₂N)(Cp)-M-C₅NH₄-4-[(CMe₂)₂-NMe]-,(^(s)Bu₂N)(Cp)-M-C₅NH₄-4-[(CMe₂)₂-NMe]-,(^(t)Bu₂N)(Cp)-M-C₅NH₄-4-[(CMe₂)₂-NMe]-,(MeO)₂-M-C₅NH₄-4-[(CMe₂)₂-NMe]-, (EtO)₂-M-C₅NH₄-4-[(CMe₂)₂-NMe]-,(^(n)PrO)₂-M-C₅NH₄-4-[(CMe₂)₂-NMe]-,(^(i)PrO)₂-M-C₅NH₄-4-[(CMe₂)₂-NMe]-,(^(n)BuO)₂-M-C₅NH₄-4-[(CMe₂)₂-NMe]-,(^(i)BuO)₂-M-C₅NH₄-4-[(CMe₂)₂-NMe]-,(^(s)BuO)₂-M-C₅NH₄-4-[(CMe₂)₂-NMe]-,(^(t)BuO)₂-M-C₅NH₄-4-[(CMe₂)₂-NMe]-, (H₂N)₂-M-C₅NH₄-4-[(CMe₂)₂-NEt]-,(Me₂N)₂-M-C₅NH₄-4-[(CMe₂)₂-NEt]-, (Et₂N)₂-M-C₅NH₄-4-[(CMe₂)₂-NEt]-,(^(n)Pr₂N)₂-M-C₅NH₄-4-[(CMe₂)₂-NEt]-,(^(i)Pr₂N)₂-M-C₅NH₄-4-[(CMe₂)₂-NEt]-,(^(n)Bu₂N)₂M-C₅NH₄-4-[(CMe₂)₂-NEt]-,(^(i)Bu₂N)₂-M-C₅NH₄-4-[(CMe₂)₂-NEt]-,(^(s)Bu₂N)₂-M-C₅NH₄-4-[(CMe₂)₂-NEt]-,(^(t)Bu₂N)₂-M-C₅NH₄-4-[(CMe₂)₂-NEt]-,(H₂N)(Cp)-M-C₅NH₄-4-[(CMe₂)₂-NEt]-, (Me₂N)(Cp)-M-C₅NH₄-4-[(CMe₂)₂-NEt]-,(Et₂N)(Cp)-M-C₅NH₄-4-[(CMe₂)₂-NEt]-,(^(n)Pr₂N)(Cp)-M-C₅NH₄-4-[(CMe₂)₂-NEt]-,(^(i)Pr₂N)(Cp)-M-C₅NH₄-4-[(CMe₂)₂-NEt]-,(^(n)Bu₂N)(Cp)-M-C₅NH₄-4-[(CMe₂)₂-NEt]-,(^(i)Bu₂N)(Cp)-M-C₅NH₄-4-[(CMe₂)₂-NEt]-,(^(s)Bu₂N)(Cp)-M-C₅NH₄-4-[(CMe₂)₂-NEt]-,(^(t)Bu₂N)(Cp)-M-C₅NH₄-4-[(CMe₂)₂-NEt]-,(MeO)₂-M-C₅NH₄-4-[(CMe₂)₂-NEt]-, (EtO)₂-M-C₅NH₄-4-[(CMe₂)₂-NEt]-,(^(n)PrO)₂-M-C₅NH₄-4-[(CMe₂)₂-NEt]-,(^(i)PrO)₂-M-C₅NH₄-4-[(CMe₂)₂-NEt]-,(^(n)BuO)₂-M-C₅NH₄-4-[(CMe₂)₂-NEt]-,(^(i)BuO)₂-M-C₅NH₄-4-[(CMe₂)₂-NEt]-, (^(s)BuO)₂M-C₅NH₄-4-[(CMe₂)₂-NEt]-,(^(t)BuO)₂-M-C₅NH₄-4-[(CMe₂)₂-NEt]-,(H₂N)₂-M-C₅NH₄-4-[(CMe₂)₂-N^(n)Pr]—,(Me₂N)₂-M-C₅NH₄-4-[(CMe₂)₂-N^(n)Pr]—,(Et₂N)₂-M-C₅NH₄-4-[(CMe₂)₂-N^(n)Pr]—,(^(n)Pr₂N)₂-M-C₅NH₄-4-[(CMe₂)₂-N^(n)Pr]—,(^(i)Pr₂N)₂-M-C₅NH₄-4-[(CMe₂)₂-N^(n)Pr]—,(^(n)Bu₂N)₂-M-C₅NH₄-4-[(CMe₂)₂-N^(n)Pr]—,(^(i)Bu₂N)₂-M-C₅NH₄-4-[(CMe₂)₂-N^(n)Pr]—,(^(s)Bu₂N)₂-M-C₅NH₄-4-[(CMe₂)₂-N^(n)Pr]—,(^(t)Bu₂N)₂-M-C₅NH₄-4-[(CMe₂)₂-N^(n)Pr]—,(H₂N)(Cp)-M-C₅NH₄-4-[(CMe₂)₂-N^(n)Pr]—,(Me₂N)(Cp)-M-C₅NH₄-4-[(CMe₂)₂-N^(n)Pr]—,(Et₂N)(Cp)-M-C₅NH₄-4-[(CMe₂)₂-N^(n)Pr]—,(^(n)Pr₂N)(Cp)-M-C₅NH₄-4-[(CMe₂)₂-N^(n)Pr]—,(^(i)Pr₂N)(Cp)-M-C₅NH₄-4-[(CMe₂)₂-N^(n)Pr]—,(^(n)Bu₂N)(Cp)-M-C₅NH₄-4-[(CMe₂)₂-N^(n)Pr]—,(^(i)Bu₂N)(Cp)-M-C₅NH₄-4-[(CMe₂)₂-N^(n)Pr]—,(^(s)Bu₂N)(Cp)-M-C₅NH₄-4-[(CMe₂)₂-N^(n)Pr]—,(^(t)Bu₂N)(Cp)-M-C₅NH₄-4-[(CMe₂)₂-N^(n)Pr]—,(MeO)₂-M-C₅NH₄-4-[(CMe₂)₂-N^(n)Pr]—, (EtO)₂M-C₅NH₄-4-[(CMe₂)₂-N^(n)Pr]—,(^(n)PrO)₂-M-C₅NH₄-4-[(CMe₂)₂-N^(n)Pr]—,(^(i)PrO)₂-M-C₅NH₄-4-[(CMe₂)₂-N^(n)Pr]—,(^(n)BuO)₂-M-C₅NH₄-4-[(CMe₂)₂-N^(n)Pr]—,(^(i)BuO)₂-M-C₅NH₄-4-[(CMe₂)₂-N^(n)Pr]—,(^(s)BuO)₂-M-C₅NH₄-4-[(CMe₂)₂-N^(n)Pr]—,(^(t)BuO)₂-M-C₅NH₄-4-[(CMe₂)₂-N^(n)Pr]—,(H₂N)₂-M-C₅NH₄-4-[(CMe₂)₂-N^(i)Pr]—,(Me₂N)₂M-C₅NH₄-4-[(CMe₂)₂-N^(i)Pr]—,(Et₂N)₂M-C₅NH₄-4-[(CMe₂)₂-N^(i)Pr]—,(^(n)Pr₂N)₂-M-C₅NH₄-4-[(CMe₂)₂-N^(i)Pr]—,(^(i)Pr₂N)₂M-C₅NH₄-4-[(CMe₂)₂-N^(i)Pr]—,(^(n)Bu₂N)₂-M-C₅NH₄-4-[(CMe₂)₂-N^(i)Pr]—,(^(i)Bu₂N)₂-M-C₅NH₄-4-[(CMe₂)₂-N^(i)Pr]—,(^(s)Bu₂N)₂-M-C₅NH₄-4-[(CMe₂)₂-N^(i)Pr]—,(^(t)Bu₂N)₂-M-C₅NH₄-4-[(CMe₂)₂-N^(i)Pr]—,(H₂N)(Cp)-M-C₅NH₄-4-[(CMe₂)₂-N^(i)Pr]—,(Me₂N)(Cp)-M-C₅NH₄-4-[(CMe₂)₂-N^(i)Pr]—,(Et₂N)(Cp)-M-C₅NH₄-4-[(CMe₂)₂-N^(i)Pr]—,(^(n)Pr₂N)(Cp)-M-C₅NH₄-4-[(CMe₂)₂-N^(i)Pr]—,(^(i)Pr₂N)(Cp)-M-C₅NH₄-4-[(CMe₂)₂-N^(i)Pr]—,(^(n)Bu₂N)(Cp)-M-C₅NH₄-4-[(CMe₂)₂-N^(i)Pr]—,(^(i)Bu₂N)(Cp)-M-C₅NH₄-4-[(CMe₂)₂-N^(i)Pr]—,(^(s)Bu₂N)(Cp)-M-C₅NH₄-4-[(CMe₂)₂-N^(i)Pr]—,(^(t)Bu₂N)(Cp)-M-C₅NH₄-4-[(CMe₂)₂-N^(i)Pr]—,(MeO)₂-M-C₅NH₄-4-[(CMe₂)₂-N^(i)Pr]—, (EtO)₂M-C₅NH₄-4-[(CMe₂)₂-N^(i)Pr]—,(^(n)PrO)₂M-C₅NH₄-4-[(CMe₂)₂-N^(i)Pr]—,(^(i)PrO)₂-M-C₅NH₄-4-[(CMe₂)₂-N^(i)Pr]—,(^(n)BuO)₂-M-C₅NH₄-4-[(CMe₂)₂-N^(i)Pr]—,(^(i)BuO)₂-M-C₅NH₄-4-[(CMe₂)₂-N^(i)Pr]—,(^(s)BuO)₂-M-C₅NH₄-4-[(CMe₂)₂-N^(i)Pr]—,(^(t)BuO)₂-M-C₅NH₄-4-[(CMe₂)₂-N^(i)Pr]—,(H₂N)₂-M-C₅NH₄-4-[(CMe₂)₂-N^(n)Bu]-,(Me₂N)₂-M-C₅NH₄-4-[(CMe₂)₂-N^(n)Bu]-,(Et₂N)₂-M-C₅NH₄-4-[(CMe₂)₂-N^(n)Bu]-,(^(n)Pr₂N)₂-M-C₅NH₄-4-[(CMe₂)₂-N^(n)Bu]-,(^(i)Pr₂N)₂-M-C₅NH₄-4-[(CMe₂)₂-N^(n)Bu]-,(^(n)Bu₂N)₂-M-C₅NH₄-4-[(CMe₂)₂-N^(n)Bu]-,(^(i)Bu₂N)₂-M-C₅NH₄-4-[(CMe₂)₂-N^(n)Bu]-,(^(s)Bu₂N)₂-M-C₅NH₄-4-[(CMe₂)₂-N^(n)Bu]-,(^(t)Bu₂N)₂-M-C₅NH₄-4-[(CMe₂)₂-N^(n)Bu]-,(H₂N)(Cp)-M-C₅NH₄-4-[(CMe₂)₂-N^(n)Bu]-,(Me₂N)(Cp)-M-C₅NH₄-4-[(CMe₂)₂-N^(n)Bu]-,(Et₂N)(Cp)-M-C₅NH₄-4-[(CMe₂)₂-N^(n)Bu]-,(^(n)Pr₂N)(Cp)-M-C₅NH₄-4-[(CMe₂)₂-N^(n)Bu]-,(^(i)Pr₂N)(Cp)-M-C₅NH₄-4-[(CMe₂)₂-N^(n)Bu]-,(^(n)Bu₂N)(Cp)-M-C₅NH₄-4-[(CMe₂)₂-N^(n)Bu]-,(^(i)Bu₂N)(Cp)-M-C₅NH₄-4-[(CMe₂)₂-N^(n)Bu]-,(^(s)Bu₂N)(Cp)-M-C₅NH₄-4-[(CMe₂)₂-N^(n)Bu]-,(^(t)Bu₂N)(Cp)-M-C₅NH₄-4-[(CMe₂)₂-N^(n)Bu]-,(MeO)₂-M-C₅NH₄-4-[(CMe₂)₂-N^(n)Bu]-,(EtO)₂-M-C₅NH₄-4-[(CMe₂)₂-N^(n)Bu]-,(^(n)PrO)₂-M-C₅NH₄-4-[(CMe₂)₂-N^(n)Bu]-,(^(i)PrO)₂-M-C₅NH₄-4-[(CMe₂)₂-N^(n)Bu]-,(^(n)BuO)₂-M-C₅NH₄-4-[(CMe₂)₂-N^(n)Bu]-,(^(i)BuO)₂-M-C₅NH₄-4-[(CMe₂)₂-N^(n)Bu]-,(^(s)BuO)₂-M-C₅NH₄-4-[(CMe₂)₂-N^(n)Bu]-,(^(t)BuO)₂-M-C₅NH₄-4-[(CMe₂)₂-N^(n)Bu]-,(H₂N)₂-M-C₅NH₄-4-[(CMe₂)₂-N^(i)Bu]-,(Me₂N)₂-M-C₅NH₄-4-[(CMe₂)₂-N^(i)Bu]-,(Et₂N)₂-M-C₅NH₄-4-[(CMe₂)₂-N^(i)Bu]-,(^(n)Pr₂N)₂-M-C₅NH₄-4-[(CMe₂)₂-N^(i)Bu]-,(^(i)Pr₂N)₂-M-C₅NH₄-4-[(CMe₂)₂-N^(i)Bu]-,(^(n)Bu₂N)₂-M-C₅NH₄-4-[(CMe₂)₂-N^(i)Bu]-,(^(i)Bu₂N)₂-M-C₅NH₄-4-[(CMe₂)₂-N^(i)Bu]-,(^(s)Bu₂N)₂-M-C₅NH₄-4-[(CMe₂)₂-N^(i)Bu]-,(^(t)Bu₂N)₂-M-C₅NH₄-4-[(CMe₂)₂-N^(i)Bu]-,(H₂N)(Cp)-M-C₅NH₄-4-[(CMe₂)₂-N^(i)Bu]-,(Me₂N)(Cp)-M-C₅NH₄-4-[(CMe₂)₂-N^(i)Bu]-,(Et₂N)(Cp)-M-C₅NH₄-4-[(CMe₂)₂-N^(i)Bu]-,(^(n)Pr₂N)(Cp)-M-C₅NH₄-4-[(CMe₂)₂-N^(i)Bu]-,(^(i)Pr₂N)(Cp)-M-C₅NH₄-4-[(CMe₂)₂-N^(i)Bu]-,(^(n)Bu₂N)(Cp)-M-C₅NH₄-4-[(CMe₂)₂-N^(i)Bu]-,(^(i)Bu₂N)(Cp)-M-C₅NH₄-4-[(CMe₂)₂-N^(i)Bu]-,(^(s)Bu₂N)(Cp)-M-C₅NH₄-4-[(CMe₂)₂-N^(i)Bu]-,(^(t)Bu₂N)(Cp)-M-C₅NH₄-4-[(CMe₂)₂-N^(i)Bu]-,(MeO)₂M-C₅NH₄-4-[(CMe₂)₂-N^(i)Bu]-, (EtO)₂M-C₅NH₄-4-[(CMe₂)₂-N^(i)Bu]-,(^(n)PrO)₂-M-C₅NH₄-4-[(CMe₂)₂-N^(i)Bu]-,(^(i)PrO)₂-M-C₅NH₄-4-[(CMe₂)₂-N^(i)Bu]-,(^(n)BuO)₂-M-C₅NH₄-4-[(CMe₂)₂-N^(i)Bu]-,(^(i)BuO)₂-M-C₅NH₄-4-[(CMe₂)₂-N^(i)Bu]-,(^(s)BuO)₂-M-C₅NH₄-4-[(CMe₂)₂-N^(i)Bu]-,(^(t)BuO)₂-M-C₅NH₄-4-[(CMe₂)₂-N^(i)Bu]-,(H₂N)₂-M-C₅NH₄-4-[(CMe₂)₂-N^(s)Bu]-,(Me₂N)₂-M-C₅NH₄-4-[(CMe₂)₂-N^(s)Bu]-,(Et₂N)₂-M-C₅NH₄-4-[(CMe₂)₂-N^(s)Bu]-,(^(n)Pr₂N)₂-M-C₅NH₄-4-[(CMe₂)₂-N^(s)Bu]-,(^(i)Pr₂N)₂-M-C₅NH₄-4-[(CMe₂)₂-N^(s)Bu]-,(^(n)Bu₂N)₂-M-C₅NH₄-4-[(CMe₂)₂-N^(s)Bu]-,(^(i)Bu₂N)₂-M-C₅NH₄-4-[(CMe₂)₂-N^(s)Bu]-,(^(s)Bu₂N)₂-M-C₅NH₄-4-[(CMe₂)₂-N^(s)Bu]-,(^(t)Bu₂N)₂-M-C₅NH₄-4-[(CMe₂)₂-N^(s)Bu]-,(H₂N)(Cp)-M-C₅NH₄-4-[(CMe₂)₂-N^(s)Bu]-,(Me₂N)(Cp)-M-C₅NH₄-4-[(CMe₂)₂-N^(s)Bu]-,(Et₂N)(Cp)-M-C₅NH₄-4-[(CMe₂)₂-N^(s)Bu]-,(^(n)Pr₂N)(Cp)-M-C₅NH₄-4-[(CMe₂)₂-N^(s)Bu]-,(^(i)Pr₂N)(Cp)-M-C₅NH₄-4-[(CMe₂)₂-N^(s)Bu]-,(^(n)Bu₂N)(Cp)-M-C₅NH₄-4-[(CMe₂)₂-N^(s)Bu]-,(^(i)Bu₂N)(Cp)-M-C₅NH₄-4-[(CMe₂)₂-N^(s)Bu]-,(^(s)Bu₂N)(Cp)-M-C₅NH₄-4-[(CMe₂)₂-N^(s)Bu]-,(^(t)Bu₂N)(Cp)-M-C₅NH₄-4-[(CMe₂)₂-N^(s)Bu]-,(MeO)₂-M-C₅NH₄-4-[(CMe₂)₂-N^(s)Bu]-,(EtO)₂-M-C₅NH₄-4-[(CMe₂)₂-N^(s)Bu]-,(^(n)PrO)₂-M-C₅NH₄-4-[(CMe₂)₂-N^(s)Bu]-,(^(i)PrO)₂-M-C₅NH₄-4-[(CMe₂)₂-N^(s)Bu]-,(^(n)BuO)₂-M-C₅NH₄-4-[(CMe₂)₂-N^(s)Bu]-,(^(i)BuO)₂-M-C₅NH₄-4-[(CMe₂)₂-N^(s)Bu]-,(^(s)BuO)₂-M-C₅NH₄-4-[(CMe₂)₂-N^(s)Bu]-,(^(t)BuO)₂-M-C₅NH₄-4-[(CMe₂)₂-N^(s)Bu]-,(H₂N)₂-M-C₅NH₄-4-[(CMe₂)₂-N^(t)Bu]-,(Me₂N)₂-M-C₅NH₄-4-[(CMe₂)₂-N^(t)Bu]-,(Et₂N)₂-M-C₅NH₄-4-[(CMe₂)₂-N^(t)Bu]-,(^(n)Pr₂N)₂-M-C₅NH₄-4-[(CMe₂)₂-N^(t)Bu]-,(^(i)Pr₂N)₂-M-C₅NH₄-4-[(CMe₂)₂-N^(t)Bu]-,(^(n)Bu₂N)₂-M-C₅NH₄-4-[(CMe₂)₂-N^(t)Bu]-,(^(i)Bu₂N)₂-M-C₅NH₄-4-[(CMe₂)₂-N^(t)Bu]-,(^(s)Bu₂N)₂-M-C₅NH₄-4-[(CMe₂)₂-N^(t)Bu]-,(Bu₂N)₂-M-C₅NH₄-4-[(CMe₂)₂-N^(t)Bu]-,(H₂N)(Cp)-M-C₅NH₄-4-[(CMe₂)₂-N^(t)Bu]-,(Me₂N)(Cp)-M-C₅NH₄-4-[(CMe₂)₂-N^(t)Bu]-,(Et₂N)(Cp)-M-C₅NH₄-4-[(CMe₂)₂-N^(t)Bu]-,(^(n)Pr₂N)(Cp)-M-C₅NH₄-4-[(CMe₂)₂-N^(t)Bu]-,(^(i)Pr₂N)(Cp)-M-C₅NH₄-4-[(CMe₂)₂-N^(t)Bu]-,(^(n)Bu₂N)(Cp)-M-C₅NH₄-4-[(CMe₂)₂-N^(t)Bu]-,(^(i)Bu₂N)(Cp)-M-C₅NH₄-4-[(CMe₂)₂-N^(t)Bu]-,(^(s)Bu₂N)(Cp)-M-C₅NH₄-4-[(CMe₂)₂-N^(t)Bu]-,(^(t)Bu₂N)(Cp)-M-C₅NH₄-4-[(CMe₂)₂-N^(t)Bu]-, (MeO)₂-M-C₅NH₄-4-[(CMe₂)₂-N^(t)Bu]-, (EtO)₂M-C₅NH₄-4-[(CMe₂)₂-N^(t)Bu]-,(^(n)PrO)₂M-C₅NH₄-4-[(CMe₂)₂-N^(t)Bu]-,(^(i)PrO)₂-M-C₅NH₄-4-[(CMe₂)₂-N^(t)Bu]-,(^(n)BuO)₂-M-C₅NH₄-4-[(CMe₂)₂-N^(t)Bu]-,(^(i)BuO)₂-M-C₅NH₄-4-[(CMe₂)₂-N^(t)Bu]-,(^(s)BuO)₂-M-C₅NH₄-4-[(CMe₂)₂-N^(t)Bu]-,(^(t)BuO)₂-M-C₅NH₄-4-[(CMe₂)₂-N^(t)Bu]-, (H₂N)₂-M-C₅NH₄-4-[(CMe₂)₂-O]—,(Me₂N)₂-M-C₅NH₄-4-[(CMe₂)₂-O]—, (Et₂N)₂-M-C₅NH₄-4-[(CMe₂)₂-O]—,(^(n)Pr₂N)₂-M-C₅NH₄-4-[(CMe₂)₂-O]—, (^(i)Pr₂N)₂-M-C₅NH₄-4-[(CMe₂)₂-O]—,(^(n)Bu₂N)₂-M-C₅NH₄-4-[(CMe₂)₂-O]—, (^(i)Bu₂N)₂-M-C₅NH₄-4-[(CMe₂)₂-O]—,(^(s)Bu₂N)₂-M-C₅NH₄-4-[(CMe₂)₂-O]—, (^(t)Bu₂N)₂-M-C₅NH₄-4-[(CMe₂)₂-O]—,(H₂N)(Cp)-M-C₅NH₄-4-[(CMe₂)₂-O]—, (Me₂N)(Cp)-M-C₅NH₄-4-[(CMe₂)₂-O]—,(Et₂N)(Cp)-M-C₅NH₄-4-[(CMe₂)₂-O]—,(^(n)Pr₂N)(Cp)-M-C₅NH₄-4-[(CMe₂)₂-O]—,(^(i)Pr₂N)(Cp)-M-C₅NH₄-4-[(CMe₂)₂-O]—,(^(n)Bu₂N)(Cp)-M-C₅NH₄-4-[(CMe₂)₂-O]—,(^(i)Bu₂N)(Cp)-M-C₅NH₄-4-[(CMe₂)₂-O]—,(^(s)Bu₂N)(Cp)-M-C₅NH₄-4-[(CMe₂)₂-O]—,(^(t)Bu₂N)(Cp)-M-C₅NH₄-4-[(CMe₂)₂-O]—, (MeO)₂-M-C₅NH₄-4-[(CMe₂)₂-O]—,(EtO)₂-M-C₅NH₄-4-[(CMe₂)₂-O]—, (^(n)PrO)₂-M-C₅NH₄-4-[(CMe₂)₂-O]—,(^(i)PrO)₂-M-C₅NH₄-4-[(CMe₂)₂-O]—, (^(n)BuO)₂-M-C₅NH₄-4-[(CMe₂)₂-O]—,(^(i)BuO)₂-M-C₅NH₄-4-[(CMe₂)₂-O]—, (^(s)BuO)₂-M-C₅NH₄-4-[(CMe₂)₂-O]—,(^(t)BuO)₂-M-C₅NH₄-4-[(CMe₂)₂-O]—, (Me₂N)₂-M-C₅NMe₄-4-[(CH₂)₂—NMe]-,(Et₂N)₂-M-C₅NMe₄-4-[(CH₂)₂—NMe]-, (^(n)Pr₂N)₂-M-C₅NMe₄-4-[(CH₂)₂—NMe]-,(^(i)Pr₂N)₂-M-C₅NMe₄-4-[(CH₂)₂—NMe]-,(^(n)Bu₂N)₂-M-C₅NMe₄-4-[(CH₂)₂—NMe]-,(^(i)Bu₂N)₂-M-C₅NMe₄-4-[(CH₂)₂—NMe]-,(^(s)Bu₂N)₂-M-C₅NMe₄-4-[(CH₂)₂—NMe]-,(^(t)Bu₂N)₂-M-C₅NMe₄-4-[(CH₂)₂—NMe]-,(H₂N)(Cp)-M-C₅NMe₄-4-[(CH₂)₂—NMe]-, (Me₂N)(Cp)-M-C₅NMe₄-4-[(CH₂)₂—NMe]-,(Et₂N)(Cp)-M-C₅NMe₄-4-[(CH₂)₂—NMe]-,(^(n)Pr₂N)(Cp)-M-C₅NMe₄-4-[(CH₂)₂—NMe]-,(^(i)Pr₂N)(Cp)-M-C₅NMe₄-4-[(CH₂)₂—NMe]-,(^(n)Bu₂N)(Cp)-M-C₅NMe₄-4-[(CH₂)₂—NMe]-,(^(i)Bu₂N)(Cp)-M-C₅NMe₄-4-[(CH₂)₂—NMe]-,(^(s)Bu₂N)(Cp)-M-C₅NMe₄-4-[(CH₂)₂—NMe]-,(^(t)Bu₂N)(Cp)-M-C₅NMe₄-4-[(CH₂)₂—NMe]-,(MeO)₂-M-C₅NMe₄-4-[(CH₂)₂—NMe]-, (EtO)₂-M-C₅NMe₄-4-[(CH₂)₂—NMe]-,(^(n)PrO)₂-M-C₅NMe₄-4-[(CH₂)₂—NMe]-,(^(i)PrO)₂-M-C₅NMe₄-4-[(CH₂)₂—NMe]-,(^(n)BuO)₂-M-C₅NMe₄-4-[(CH₂)₂—NMe]-,(^(i)BuO)₂-M-C₅NMe₄-4-[(CH₂)₂—NMe]-,(^(s)BuO)₂-M-C₅NMe₄-4-[(CH₂)₂—NMe]-,(^(t)BuO)₂-M-C₅NMe₄-4-[(CH₂)₂—NMe]-, (H₂N)₂-M-C₅NMe₄-4-[(CH₂)₂—NEt]-,(Me₂N)₂-M-C₅NMe₄-4-[(CH₂)₂—NEt]-, (Et₂N)₂-M-C₅NMe₄-4-[(CH₂)₂—NEt]-,(^(n)Pr₂N)₂-M-C₅NMe₄-4-[(CH₂)₂—NEt]-,(^(i)Pr₂N)₂-M-C₅NMe₄-4-[(CH₂)₂—NEt]-,(^(n)Bu₂N)₂-M-C₅NMe₄-4-[(CH₂)₂—NEt]-,(^(i)Bu₂N)₂-M-C₅NMe₄-4-[(CH₂)₂—NEt]-,(^(s)Bu₂N)₂-M-C₅NMe₄-4-[(CH₂)₂—NEt]-,(^(t)Bu₂N)₂-M-C₅NMe₄-4-[(CH₂)₂—NEt]-,(H₂N)(Cp)-M-C₅NMe₄-4-[(CH₂)₂—NEt]-, (Me₂N)(Cp)-M-C₅NMe₄-4-[(CH₂)₂—NEt]-,(Et₂N)(Cp)-M-C₅NMe₄-4-[(CH₂)₂—NEt]-,(^(n)Pr₂N)(Cp)-M-C₅NMe₄-4-[(CH₂)₂—NEt]-,(^(i)Pr₂N)(Cp)-M-C₅NMe₄-4-[(CH₂)₂—NEt]-,(^(n)Bu₂N)(Cp)-M-C₅NMe₄-4-[(CH₂)₂—NEt]-,(^(i)Bu₂N)(Cp)-M-C₅NMe₄-4-[(CH₂)₂—NEt]-,(^(s)Bu₂N)(Cp)-M-C₅NMe₄-4-[(CH₂)₂—NEt]-,(^(t)Bu₂N)(Cp)-M-C₅NMe₄-4-[(CH₂)₂—NEt]-,(MeO)₂-M-C₅NMe₄-4-[(CH₂)₂—NEt]-, (EtO)₂-M-C₅NMe₄-4-[(CH₂)₂—NEt]-,(^(n)PrO)₂-M-C₅NMe₄-4-[(CH₂)₂—NEt]-,(^(i)PrO)₂-M-C₅NMe₄-4-[(CH₂)₂—NEt]-,(^(n)BuO)₂-M-C₅NMe₄-4-[(CH₂)₂—NEt]-,(^(i)BuO)₂-M-C₅NMe₄-4-[(CH₂)₂—NEt]-,(^(s)BuO)₂-M-C₅NMe₄-4-[(CH₂)₂—NEt]-,(^(t)BuO)₂-M-C₅NMe₄-4-[(CH₂)₂—NEt]-,(H₂N)₂-M-C₅NMe₄-4-[(CH₂)₂—N^(n)Pr]—,(Me₂N)₂-M-C₅NMe₄-4-[(CH₂)₂—N^(n)Pr]—,(Et₂N)₂-M-C₅NMe₄-4-[(CH₂)₂—N^(n)Pr]—,(^(n)Pr₂N)₂-M-C₅NMe₄-4-[(CH₂)₂—N^(n)Pr]—,(^(i)Pr₂N)₂-M-C₅NMe₄-4-[(CH₂)₂—N^(n)Pr]—,(^(n)Bu₂N)₂-M-C₅NMe₄-4-[(CH₂)₂—N^(n)Pr]—,(^(i)Bu₂N)₂-M-C₅NMe₄-4-[(CH₂)₂—N^(n)Pr]—,(^(s)Bu₂N)₂-M-C₅NMe₄-4-[(CH₂)₂—N^(n)Pr]—,(^(t)Bu₂N)₂-M-C₅NMe₄-4-[(CH₂)₂—N^(n)Pr]—,(H₂N)(Cp)-M-C₅NMe₄-4-[(CH₂)₂—N^(n)Pr]—,(Me₂N)(Cp)-M-C₅NMe₄-4-[(CH₂)₂—N^(n)Pr]—,(Et₂N)(Cp)-M-C₅NMe₄-4-[(CH₂)₂—N^(n)Pr]—,(^(n)Pr₂N)(Cp)-M-C₅NMe₄-4-[(CH₂)₂—N^(n)Pr]—,(^(i)Pr₂N)(Cp)-M-C₅NMe₄-4-[(CH₂)₂—N^(n)Pr]—,(^(n)Bu₂N)(Cp)-M-C₅NMe₄-4-[(CH₂)₂—N^(n)Pr]—,(^(i)Bu₂N)(Cp)-M-C₅NMe₄-4-[(CH₂)₂—N^(n)Pr]—,(^(s)Bu₂N)(Cp)-M-C₅NMe₄-4-[(CH₂)₂—N^(n)Pr]—,(^(t)Bu₂N)(Cp)-M-C₅NMe₄-4-[(CH₂)₂—N^(n)Pr]—,(MeO)₂-M-C₅NMe₄-4-[(CH₂)₂—N^(n)Pr]—,(EtO)₂-M-C₅NMe₄-4-[(CH₂)₂—N^(n)Pr]—,(^(n)PrO)₂-M-C₅NMe₄-4-[(CH₂)₂—N^(n)Pr]—,(^(i)PrO)₂-M-C₅NMe₄-4-[(CH₂)₂—N^(n)Pr]—,(^(n)BuO)₂-M-C₅NMe₄-4-[(CH₂)₂—N^(n)Pr]—,(^(i)BuO)₂-M-C₅NMe₄-4-[(CH₂)₂—N^(n)Pr]—,(^(s)BuO)₂-M-C₅NMe₄-4-[(CH₂)₂—N^(n)Pr]—,(^(t)BuO)₂-M-C₅NMe₄-4-[(CH₂)₂—N^(n)Pr]—,(H₂N)₂-M-C₅NMe₄-4-[(CH₂)₂—N^(i)Pr]—,(Me₂N)₂-M-C₅NMe₄-4-[(CH₂)₂—N^(i)Pr]—,(Et₂N)₂-M-C₅NMe₄-4-[(CH₂)₂—N^(i)Pr]—,(^(n)Pr₂N)₂-M-C₅NMe₄-4-[(CH₂)₂—N^(i)Pr]—,(^(i)Pr₂N)₂-M-C₅NMe₄-4-[(CH₂)₂—N^(i)Pr]—,(^(n)Bu₂N)₂-M-C₅NMe₄-4-[(CH₂)₂—N^(i)Pr]—,(^(i)Bu₂N)₂-M-C₅NMe₄-4-[(CH₂)₂—N^(i)Pr]—,(^(s)Bu₂N)₂-M-C₅NMe₄-4-[(CH₂)₂—N^(i)Pr]—,(^(i)Bu₂N)₂-M-C₅NMe₄-4-[(CH₂)₂—N^(i)Pr]—,(H₂N)(Cp)-M-C₅NMe₄-4-[(CH₂)₂—N^(i)Pr]—,(Me₂N)(Cp)-M-C₅NMe₄-4-[(CH₂)₂—N^(i)Pr]—,(Et₂N)(Cp)-M-C₅NMe₄-4-[(CH₂)₂—N^(i)Pr]—,(^(n)Pr₂N)(Cp)-M-C₅NMe₄-4-[(CH₂)₂—N^(i)Pr]—,(^(i)Pr₂N)(Cp)-M-C₅NMe₄-4-[(CH₂)₂—N^(i)Pr]—,(^(n)Bu₂N)(Cp)-M-C₅NMe₄-4-[(CH₂)₂—N^(i)Pr]—,(^(i)Bu₂N)(Cp)-M-C₅NMe₄-4-[(CH₂)₂—N^(i)Pr]—,(^(s)Bu₂N)(Cp)-M-C₅NMe₄-4-[(CH₂)₂—N^(i)Pr]—,(^(i)Bu₂N)(Cp)-M-C₅NMe₄-4-[(CH₂)₂—N^(i)Pr]—,(MeO)₂-M-C₅NMe₄-4-[(CH₂)₂—N^(i)Pr]—,(EtO)₂-M-C₅NMe₄-4-[(CH₂)₂—N^(i)Pr]—,(^(n)PrO)₂-M-C₅NMe₄-4-[(CH₂)₂—N^(i)Pr]—,(^(i)PrO)₂-M-C₅NMe₄-4-[(CH₂)₂—N^(i)Pr]—,(^(n)BuO)₂-M-C₅NMe₄-4-[(CH₂)₂—N^(i)Pr]—,(^(i)BuO)₂-M-C₅NMe₄-4-[(CH₂)₂—N^(i)Pr]—,(^(s)BuO)₂-M-C₅NMe₄-4-[(CH₂)₂—N^(i)Pr]—,(^(t)BuO)₂-M-C₅NMe₄-4-[(CH₂)₂—N^(i)Pr]—,(H₂N)₂-M-C₅NMe₄-4-[(CH₂)₂—N^(n)Bu]-,(Me₂N)₂-M-C₅NMe₄-4-[(CH₂)₂—N^(n)Bu]-,(Et₂N)₂-M-C₅NMe₄-4-[(CH₂)₂—N^(n)Bu]-,(^(n)Pr₂N)₂-M-C₅NMe₄-4-[(CH₂)₂—N^(n)Bu]-,(^(i)Pr₂N)₂-M-C₅NMe₄-4-[(CH₂)₂—N^(n)Bu]-,(^(n)Bu₂N)₂-M-C₅NMe₄-4-[(CH₂)₂—N^(n)Bu]-,(^(i)Bu₂N)₂-M-C₅NMe₄-4-[(CH₂)₂—N^(n)Bu]-,(^(s)Bu₂N)₂-M-C₅NMe₄-4-[(CH₂)₂—N^(n)Bu]-,(^(t)Bu₂N)₂-M-C₅NMe₄-4-[(CH₂)₂—N^(n)Bu]-,(H₂N)(Cp)-M-C₅NMe₄-4-[(CH₂)₂—N^(n)Bu]-,(Me₂N)(Cp)-M-C₅NMe₄-4-[(CH₂)₂—N^(n)Bu]-,(Et₂N)(Cp)-M-C₅NMe₄-4-[(CH₂)₂—N^(n)Bu]-,(^(n)Pr₂N)(Cp)-M-C₅NMe₄-4-[(CH₂)₂—N^(n)Bu]-,(^(i)Pr₂N)(Cp)-M-C₅NMe₄-4-[(CH₂)₂—N^(n)Bu]-,(^(n)Bu₂N)(Cp)-M-C₅NMe₄-4-[(CH₂)₂—N^(n)Bu]-,(^(i)Bu₂N)(Cp)-M-C₅NMe₄-4-[(CH₂)₂—N^(n)Bu]-,(^(s)Bu₂N)(Cp)-M-C₅NMe₄-4-[(CH₂)₂—N^(n)Bu]-,(^(t)Bu₂N)(Cp)-M-C₅NMe₄-4-[(CH₂)₂—N^(n)Bu]-,(MeO)₂-M-C₅NMe₄-4-[(CH₂)₂—N^(n)Bu]-,(EtO)₂-M-C₅NMe₄-4-[(CH₂)₂—N^(n)Bu]-,(^(n)PrO)₂-M-C₅NMe₄-4-[(CH₂)₂—N^(n)Bu]-,(^(i)PrO)₂-M-C₅NMe₄-4-[(CH₂)₂—N^(n)Bu]-,(^(n)BuO)₂-M-C₅NMe₄-4-[(CH₂)₂—N^(n)Bu]-,(^(i)BuO)₂-M-C₅NMe₄-4-[(CH₂)₂—N^(n)Bu]-,(^(s)BuO)₂-M-C₅NMe₄-4-[(CH₂)₂—N^(n)Bu]-,(^(t)BuO)₂-M-C₅NMe₄-4-[(CH₂)₂—N^(n)Bu]-,(H₂N)₂-M-C₅NMe₄-4-[(CH₂)₂—N^(i)Bu],(Me₂N)₂-M-C₅NMe₄-4-[(CH₂)₂—N^(i)Bu]-,(Et₂N)₂-M-C₅NMe₄-4-[(CH₂)₂—N^(i)Bu],(^(n)Pr₂N)₂-M-C₅NMe₄-4-[(CH₂)₂—N^(i)Bu],(^(i)Pr₂N)₂-M-C₅NMe₄-4-[(CH₂)₂—N^(i)Bu]-,(^(n)Bu₂N)₂-M-C₅NMe₄-4-[(CH₂)₂—N^(i)Bu],(^(i)Bu₂N)₂-M-C₅NMe₄-4-[(CH₂)₂—N^(i)Bu]-,(^(s)Bu₂N)₂-M-C₅NMe₄-4-[(CH₂)₂—N^(i)Bu],(^(t)Bu₂N)₂-M-C₅NMe₄-4-[(CH₂)₂—N^(i)Bu],(H₂N)(Cp)-M-C₅NMe₄-4-[(CH₂)₂—N^(i)Bu],(Me₂N)(Cp)-M-C₅NMe₄-4-[(CH₂)₂—N^(i)Bu],(Et₂N)(Cp)-M-C₅NMe₄-4-[(CH₂)₂—N^(i)Bu]-,(^(n)Pr₂N)(Cp)-M-C₅NMe₄-4-[(CH₂)₂—N^(i)Bu],(^(i)Pr₂N)(Cp)-M-C₅NMe₄-4-[(CH₂)₂—N^(i)Bu]-,(^(n)Bu₂N)(Cp)-M-C₅NMe₄-4-[(CH₂)₂—N^(i)Bu],(^(i)Bu₂N)(Cp)-M-C₅NMe₄-4-[(CH₂)₂—N^(i)Bu]-,(^(s)Bu₂N)(Cp)-M-C₅NMe₄-4-[(CH₂)₂—N^(i)Bu],(^(t)Bu₂N)(Cp)-M-C₅NMe₄-4-[(CH₂)₂—N^(i)Bu],(MeO)₂-M-C₅NMe₄-4-[(CH₂)₂—N^(i)Bu], (EtO)₂-M-C₅NMe₄-4-[(CH₂)₂—N^(i)Bu],(^(n)PrO)₂-M-C₅NMe₄-4-[(CH₂)₂—N^(i)Bu],(^(i)PrO)₂-M-C₅NMe₄-4-[(CH₂)₂—N^(i)Bu]-,(^(n)BuO)₂-M-C₅NMe₄-4-[(CH₂)₂—N^(i)Bu]-,(^(i)BuO)₂-M-C₅NMe₄-4-[(CH₂)₂—N^(i)Bu]-,(^(s)BuO)₂-M-C₅NMe₄-4-[(CH₂)₂—N^(i)Bu]-,(^(t)BuO)₂-M-C₅NMe₄-4-[(CH₂)₂—N^(i)Bu]-,(H₂N)₂-M-C₅NMe₄-4-[(CH₂)₂—N^(s)Bu]-,(Me₂N)₂-M-C₅NMe₄-4-[(CH₂)₂—N^(s)Bu]-,(Et₂N)₂-M-C₅NMe₄-4-[(CH₂)₂—N^(s)Bu]-,(^(n)Pr₂N)₂-M-C₅NMe₄-4-[(CH₂)₂—N^(s)Bu]-,(^(i)Pr₂N)₂-M-C₅NMe₄-4-[(CH₂)₂—N^(s)Bu]-,(^(n)Bu₂N)₂-M-C₅NMe₄-4-[(CH₂)₂—N^(s)Bu]-,(^(i)Bu₂N)₂-M-C₅NMe₄-4-[(CH₂)₂—N^(s)Bu]-,(^(s)Bu₂N)₂-M-C₅NMe₄-4-[(CH₂)₂—N^(s)Bu]-,(^(i)Bu₂N)₂-M-C₅NMe₄-4-[(CH₂)₂—N^(s)Bu]-,(H₂N)(Cp)-M-C₅NMe₄-4-[(CH₂)₂—N^(s)Bu]-,(Me₂N)(Cp)-M-C₅NMe₄-4-[(CH₂)₂—N^(s)Bu]-,(Et₂N)(Cp)-M-C₅NMe₄-4-[(CH₂)₂—N^(s)Bu]-,(^(n)Pr₂N)(Cp)-M-C₅NMe₄-4-[(CH₂)₂—N^(s)Bu]-,(^(i)Pr₂N)(Cp)-M-C₅NMe₄-4-[(CH₂)₂—N^(s)Bu]-,(^(n)Bu₂N)(Cp)-M-C₅NMe₄-4-[(CH₂)₂—N^(s)Bu]-,(^(i)Bu₂N)(Cp)-M-C₅NMe₄-4-[(CH₂)₂—N^(s)Bu]-,(^(s)Bu₂N)(Cp)-M-C₅NMe₄-4-[(CH₂)₂—N^(s)Bu]-,(^(t)Bu₂N)(Cp)-M-C₅NMe₄-4-[(CH₂)₂—N^(s)Bu]-,(MeO)₂-M-C₅NMe₄-4-[(CH₂)₂—N^(s)Bu]-,(EtO)₂-M-C₅NMe₄-4-[(CH₂)₂—N^(s)Bu]-,(^(n)PrO)₂-M-C₅NMe₄-4-[(CH₂)₂—N^(s)Bu]-,(^(i)PrO)₂-M-C₅NMe₄-4-[(CH₂)₂—N^(s)Bu]-,(^(n)BuO)₂-M-C₅NMe₄-4-[(CH₂)₂—N^(s)Bu]-,(^(i)BuO)₂-M-C₅NMe₄-4-[(CH₂)₂—N^(s)Bu]-,(^(s)BuO)₂-M-C₅NMe₄-4-[(CH₂)₂—N^(s)Bu]-,(^(t)BuO)₂-M-C₅NMe₄-4-[(CH₂)₂—N^(s)Bu]-,(H₂N)₂-M-C₅NMe₄-4-[(CH₂)₂—N^(t)Bu]-,(Me₂N)₂-M-C₅NMe₄-4-[(CH₂)₂—N^(t)Bu]-,(Et₂N)₂-M-C₅NMe₄-4-[(CH₂)₂—N^(t)Bu]-,(^(n)Pr₂N)₂-M-C₅NMe₄-4-[(CH₂)₂—N^(t)Bu]-,(^(i)Pr₂N)₂-M-C₅NMe₄-4-[(CH₂)₂—N^(t)Bu]-,(^(n)Bu₂N)₂-M-C₅NMe₄-4-[(CH₂)₂—N^(t)Bu]-,(^(i)Bu₂N)₂-M-C₅NMe₄-4-[(CH₂)₂—N^(t)Bu]-,(^(s)Bu₂N)₂-M-C₅NMe₄-4-[(CH₂)₂—N^(t)Bu]-,(^(t)Bu₂N)₂-M-C₅NMe₄-4-[(CH₂)₂—N^(t)Bu]-,(H₂N)(Cp)-M-C₅NMe₄-4-[(CH₂)₂—N^(t)Bu]-,(Me₂N)(Cp)-M-C₅NMe₄-4-[(CH₂)₂—N^(t)Bu]-,(Et₂N)(Cp)-M-C₅NMe₄-4-[(CH₂)₂—N^(t)Bu]-,(^(n)Pr₂N)(Cp)-M-C₅NMe₄-4-[(CH₂)₂—N^(t)Bu]-,(^(i)Pr₂N)(Cp)-M-C₅NMe₄-4-[(CH₂)₂—N^(t)Bu]-,(^(n)Bu₂N)(Cp)-M-C₅NMe₄-4-[(CH₂)₂—N^(t)Bu]-,(^(i)Bu₂N)(Cp)-M-C₅NMe₄-4-[(CH₂)₂—N^(t)Bu]-,(^(s)Bu₂N)(Cp)-M-C₅NMe₄-4-[(CH₂)₂—N^(t)Bu]-,(^(t)Bu₂N)(Cp)-M-C₅NMe₄-4-[(CH₂)₂—N^(t)Bu]-,(MeO)₂-M-C₅NMe₄-4-[(CH₂)₂—N^(t)Bu]-,(EtO)₂-M-C₅NMe₄-4-[(CH₂)₂—N^(t)Bu]-,(^(n)PrO)₂-M-C₅NMe₄-4-[(CH₂)₂—N^(t)Bu]-,(^(i)PrO)₂-M-C₅NMe₄-4-[(CH₂)₂—N^(t)Bu]-,(^(n)BuO)₂-M-C₅NMe₄-4-[(CH₂)₂—N^(t)Bu]-,(^(i)BuO)₂-M-C₅NMe₄-4-[(CH₂)₂—N^(t)Bu]-,(^(s)BuO)₂-M-C₅NMe₄-4-[(CH₂)₂—N^(t)Bu]-,(^(t)BuO)₂-M-C₅NMe₄-4-[(CH₂)₂—N^(t)Bu]-, (H₂N)₂-M-C₅NMe₄-4-[(CH₂)₂—O]—,(Me₂N)₂-M-C₅NMe₄-4-[(CH₂)₂—O]—, (Et₂N)₂-M-C₅NMe₄-4-[(CH₂)₂—O]—,(^(n)Pr₂N)₂-M-C₅NMe₄-4-[(CH₂)₂—O]—, (^(i)Pr₂N)₂-M-C₅NMe₄-4-[(CH₂)₂—O]—,(^(n)Bu₂N)₂-M-C₅NMe₄-4-[(CH₂)₂—O]—, (^(i)Bu₂N)₂-M- C₅NMe₄-4-[(CH₂)₂—O]—,(^(s)Bu₂N)₂-M-C₅NMe₄-4-[(CH₂)₂—O]—, (^(t)Bu₂N)₂-M-C₅NMe₄-4-[(CH₂)₂—O]—,(H₂N)(Cp)-M-C₅NMe₄-4-[(CH₂)₂—O]—, (Me₂N)(Cp)-M-C₅NMe₄-4-[(CH₂)₂—O]—,(Et₂N)(Cp)-M-C₅NMe₄-4-[(CH₂)₂—O]—,(^(n)Pr₂N)(Cp)-M-C₅NMe₄-4-[(CH₂)₂—O]—,(^(i)Pr₂N)(Cp)-M-C₅NMe₄-4-[(CH₂)₂—O]—,(^(n)Bu₂N)(Cp)-M-C₅NMe₄-4-[(CH₂)₂—O]—,(^(i)Bu₂N)(Cp)-M-C₅NMe₄-4-[(CH₂)₂—O]—,(^(s)Bu₂N)(Cp)-M-C₅NMe₄-4-[(CH₂)₂—O]—,(^(t)Bu₂N)(Cp)-M-C₅NMe₄-4-[(CH₂)₂—O]—, (MeO)₂-M-C₅NMe₄-4-[(CH₂)₂—O]—,(EtO)₂-M-C₅NMe₄-4-[(CH₂)₂—O]—, (^(n)PrO)₂-M-C₅NMe₄-4-[(CH₂)₂—O]—,(^(i)PrO)₂-M-C₅NMe₄-4-[(CH₂)₂—O]—, (^(n)BuO)₂-M-C₅NMe₄-4-[(CH₂)₂—O]—,(^(i)BuO)₂-M-C₅NMe₄-4-[(CH₂)₂—O]—, (^(s)BuO)₂-M-C₅NMe₄-4-[(CH₂)₂—O]—,(^(t)BuO)₂-M-C₅NMe₄-4-[(CH₂)₂—O]—, (Me₂N)₂-M-C₅NMe₄-4-[(CMe₂)₂-NMe]-,(Et₂N)₂-M-C₅NMe₄-4-[(CMe₂)₂-NMe]-,(^(n)Pr₂N)₂-M-C₅NMe₄-4-[(CMe₂)₂-NMe]-,(^(i)Pr₂N)₂-M-C₅NMe₄-4-[(CMe₂)₂-NMe]-,(^(n)Bu₂N)₂-M-C₅NMe₄-4-[(CMe₂)₂-NMe]-,(^(i)Bu₂N)₂-M-C₅NMe₄-4-[(CMe₂)₂-NMe]-,(^(s)Bu₂N)₂-M-C₅NMe₄-4-[(CMe₂)₂-NMe]-,(^(t)Bu₂N)₂-M-C₅NMe₄-4-[(CMe₂)₂-NMe]-,(H₂N)(Cp)-M-C₅NMe₄-4-[(CMe₂)₂-NMe]-,(Me₂N)(Cp)-M-C₅NMe₄-4-[(CMe₂)₂-NMe]-,(Et₂N)(Cp)-M-C₅NMe₄-4-[(CMe₂)₂-NMe]-,(^(n)Pr₂N)(Cp)-M-C₅NMe₄-4-[(CMe₂)₂-NMe]-,(^(i)Pr₂N)(Cp)-M-C₅NMe₄-4-[(CMe₂)₂-NMe]-,(^(n)Bu₂N)(Cp)-M-C₅NMe₄-4-[(CMe₂)₂-NMe]-,(^(i)Bu₂N)(Cp)-M-C₅NMe₄-4-[(CMe₂)₂-NMe]-,(^(s)Bu₂N)(Cp)-M-C₅NMe₄-4-[(CMe₂)₂-NMe]-,(^(t)Bu₂N)(Cp)-M-C₅NMe₄-4-[(CMe₂)₂-NMe]-,(MeO)₂-M-C₅NMe₄-4-[(CMe₂)₂-NMe]-, (EtO)₂-M-C₅NMe₄-4-[(CMe₂)₂-NMe]-,(^(n)PrO)₂-M-C₅NMe₄-4-[(CMe₂)₂-NMe]-,(^(i)PrO)₂-M-C₅NMe₄-4-[(CMe₂)₂-NMe]-,(^(n)BuO)₂-M-C₅NMe₄-4-[(CMe₂)₂-NMe]-,(^(i)BuO)₂-M-C₅NMe₄-4-[(CMe₂)₂-NMe]-,(^(s)BuO)₂-M-C₅NMe₄-4-[(CMe₂)₂-NMe]-,(^(t)BuO)₂-M-C₅NMe₄-4-[(CMe₂)₂-NMe]-, (H₂N)₂-M-C₅NMe₄-4-[(CMe₂)₂-NEt]-,(Me₂N)₂-M-C₅NMe₄-4-[(CMe₂)₂-NEt]-, (Et₂N)₂-M-C₅NMe₄-4-[(CMe₂)₂-NEt]-,(^(n)Pr₂N)₂-M-C₅NMe₄-4-[(CMe₂)₂-NEt]-,(^(i)Pr₂N)₂-M-C₅NMe₄-4-[(CMe₂)₂-NEt]-,(^(n)Bu₂N)₂-M-C₅NMe₄-4-[(CMe₂)₂-NEt]-,(^(i)Bu₂N)₂-M-C₅NMe₄-4-[(CMe₂)₂-NEt]-,(^(s)Bu₂N)₂-M-C₅NMe₄-4-[(CMe₂)₂-NEt]-,(^(i)Bu₂N)₂-M-C₅NMe₄-4-[(CMe₂)₂-NEt]-,(H₂N)(Cp)-M-C₅NMe₄-4-[(CMe₂)₂-NEt]-,(Me₂N)(Cp)-M-C₅NMe₄-4-[(CMe₂)₂-NEt]-,(Et₂N)(Cp)-M-C₅NMe₄-4-[(CMe₂)₂-NEt]-,(^(n)Pr₂N)(Cp)-M-C₅NMe₄-4-[(CMe₂)₂-NEt]-,(^(i)Pr₂N)(Cp)-M-C₅NMe₄-4-[(CMe₂)₂-NEt]-,(^(n)Bu₂N)(Cp)-M-C₅NMe₄-4-[(CMe₂)₂-NEt]-,(^(i)Bu₂N)(Cp)-M-C₅NMe₄-4-[(CMe₂)₂-NEt]-,(^(s)Bu₂N)(Cp)-M-C₅NMe₄-4-[(CMe₂)₂-NEt]-,(^(t)Bu₂N)(Cp)-M-C₅NMe₄-4-[(CMe₂)₂-NEt]-,(MeO)₂-M-C₅NMe₄-4-[(CMe₂)₂-NEt]-, (EtO)₂-M-C₅NMe₄-4-[(CMe₂)₂-NEt]-,(^(n)PrO)₂-M-C₅NMe₄-4-[(CMe₂)₂-NEt]-,(^(i)PrO)₂-M-C₅NMe₄-4-[(CMe₂)₂-NEt]-,(^(n)BuO)₂-M-C₅NMe₄-4-[(CMe₂)₂-NEt]-,(^(i)BuO)₂-M-C₅NMe₄-4-[(CMe₂)₂-NEt]-,(^(s)BuO)₂-M-C₅NMe₄-4-[(CMe₂)₂-NEt]-,(^(t)BuO)₂-M-C₅NMe₄-4-[(CMe₂)₂-NEt]-,(H₂N)₂-M-C₅NMe₄-4-[(CMe₂)₂-N^(n)Pr]—,(Me₂N)₂-M-C₅NMe₄-4-[(CMe₂)₂-N^(n)Pr]—,(Et₂N)₂-M-C₅NMe₄-4-[(CMe₂)₂-N^(n)Pr]—,(^(n)Pr₂N)₂-M-C₅NMe₄-4-[(CMe₂)₂-N^(n)Pr]—,(^(i)Pr₂N)₂-M-C₅NMe₄-4-[(CMe₂)₂-N^(n)Pr]—,(^(n)Bu₂N)₂-M-C₅NMe₄-4-[(CMe₂)₂-N^(n)Pr]—,(^(t)Bu₂N)₂-M-C₅NMe₄-4-[(CMe₂)₂-N^(n)Pr]—,(^(s)Bu₂N)₂-M-C₅NMe₄-4-[(CMe₂)₂-N^(n)Pr]—,(^(t)Bu₂N)₂-M-C₅NMe₄-4-[(CMe₂)₂-N^(n)Pr]—,(H₂N)(Cp)-M-C₅NMe₄-4-[(CMe₂)₂-N^(n)Pr]—,(Me₂N)(Cp)-M-C₅NMe₄-4-[(CMe₂)₂-N^(n)Pr]—,(Et₂N)(Cp)-M-C₅NMe₄-4-[(CMe₂)₂-N^(n)Pr]—,(^(n)Pr₂N)(Cp)-M-C₅NMe₄-4-[(CMe₂)₂-N^(n)Pr]—,(^(i)Pr₂N)(Cp)-M-C₅NMe₄-4-[(CMe₂)₂-N^(n)Pr]—,(^(n)Bu₂N)(Cp)-M-C₅NMe₄-4-[(CMe₂)₂-N^(n)Pr]—,(^(i)Bu₂N)(Cp)-M-C₅NMe₄-4-[(CMe₂)₂-N^(n)Pr]—,(^(s)Bu₂N)(Cp)-M-C₅NMe₄-4-[(CMe₂)₂-N^(n)Pr]—,(^(t)Bu₂N)(Cp)-M-C₅NMe₄-4-[(CMe₂)₂-N^(n)Pr]—,(MeO)₂-M-C₅NMe₄-4-[(CMe₂)₂-N^(n)Pr]—,(EtO)₂-M-C₅NMe₄-4-[(CMe₂)₂-N^(n)Pr]—,(^(n)PrO)₂-M-C₅NMe₄-4-[(CMe₂)₂-N^(n)Pr]—,(^(i)PrO)₂-M-C₅NMe₄-4-[(CMe₂)₂-N^(n)Pr]—,(^(n)BuO)₂-M-C₅NMe₄-4-[(CMe₂)₂-N^(n)Pr]—,(^(i)BuO)₂-M-C₅NMe₄-4-[(CMe₂)₂-N^(n)Pr]—,(^(s)BuO)₂-M-C₅NMe₄-4-[(CMe₂)₂-N^(n)Pr]—,(^(t)BuO)₂-M-C₅NMe₄-4-[(CMe₂)₂-N^(n)Pr]—,(H₂N)₂-M-C₅NMe₄-4-[(CMe₂)₂-N^(i)Pr]—,(Me₂N)₂-M-C₅NMe₄-4-[(CMe₂)₂-N^(i)Pr]—,(Et₂N)₂-M-C₅NMe₄-4-[(CMe₂)₂-N^(i)Pr]—,(^(n)Pr₂N)₂-M-C₅NMe₄-4-[(CMe₂)₂-N^(i)Pr]—,(^(i)Pr₂N)₂-M-C₅NMe₄-4-[(CMe₂)₂-N^(i)Pr]—,(^(n)Bu₂N)₂-M-C₅NMe₄-4-[(CMe₂)₂-N^(i)Pr]—,(^(i)Bu₂N)₂-M-C₅NMe₄-4-[(CMe₂)₂-N^(i)Pr]—,(^(s)Bu₂N)₂-M-C₅NMe₄-4-[(CMe₂)₂-N^(i)Pr]—,(^(t)Bu₂N)₂-M-C₅NMe₄-4-[(CMe₂)₂-N^(i)Pr]—,(H₂N)(Cp)-M-C₅NMe₄-4-[(CMe₂)₂-N^(i)Pr]—,(Me₂N)(Cp)-M-C₅NMe₄-4-[(CMe₂)₂-N^(i)Pr]—,(Et₂N)(Cp)-M-C₅NMe₄-4-[(CMe₂)₂-N^(i)Pr]—,(^(n)Pr₂N)(Cp)-M-C₅NMe₄-4-[(CMe₂)₂-N^(i)Pr]—,(^(i)Pr₂N)(Cp)-M-C₅NMe₄-4-[(CMe₂)₂-N^(i)Pr]—,(^(n)Bu₂N)(Cp)-M-C₅NMe₄-4-[(CMe₂)₂-N^(i)Pr]—,(^(i)Bu₂N)(Cp)-M-C₅NMe₄-4-[(CMe₂)₂-N^(i)Pr]—,(^(s)Bu₂N)(Cp)-M-C₅NMe₄-4-[(CMe₂)₂-N^(i)Pr]—,(^(t)Bu₂N)(Cp)-M-C₅NMe₄-4-[(CMe₂)₂-N^(i)Pr]—,(MeO)₂-M-C₅NMe₄-4-[(CMe₂)₂-N^(i)Pr]—,(EtO)₂-M-C₅NMe₄-4-[(CMe₂)₂-N^(i)Pr]—,(^(n)PrO)₂-M-C₅NMe₄-4-[(CMe₂)₂-N^(i)Pr]—,(^(i)PrO)₂-M-C₅NMe₄-4-[(CMe₂)₂-N^(i)Pr]—,(^(n)BuO)₂-M-C₅NMe₄-4-[(CMe₂)₂-N^(i)Pr]—,(^(i)BuO)₂-M-C₅NMe₄-4-[(CMe₂)₂-N^(i)Pr]—,(^(s)BuO)₂-M-C₅NMe₄-4-[(CMe₂)₂-N^(i)Pr]—,(^(t)BuO)₂-M-C₅NMe₄-4-[(CMe₂)₂-N^(i)Pr]—,(H₂N)₂-M-C₅NMe₄-4-[(CMe₂)₂-N^(n)Bu]-,(Me₂N)₂-M-C₅NMe₄-4-[(CMe₂)₂-N^(n)Bu]-,(Et₂N)₂-M-C₅NMe₄-4-[(CMe₂)₂-N^(n)Bu]-,(^(n)Pr₂N)₂-M-C₅NMe₄-4-[(CMe₂)₂-N^(n)Bu]-,(^(i)Pr₂N)₂-M-C₅NMe₄-4-[(CMe₂)₂-N^(n)Bu]-,(^(n)Bu₂N)₂-M-C₅NMe₄-4-[(CMe₂)₂-N^(n)Bu]-,(^(i)Bu₂N)₂-M-C₅NMe₄-4-[(CMe₂)₂-N^(n)Bu]-,(^(s)Bu₂N)₂-M-C₅NMe₄-4-[(CMe₂)₂-N^(n)Bu]-,(^(t)Bu₂N)₂-M-C₅NMe₄-4-[(CMe₂)₂-N^(n)Bu]-,(H₂N)(Cp)-M-C₅NMe₄-4-[(CMe₂)₂-N^(n)Bu]-,(Me₂N)(Cp)-M-C₅NMe₄-4-[(CMe₂)₂-N^(n)Bu]-,(Et₂N)(Cp)-M-C₅NMe₄-4-[(CMe₂)₂-N^(n)Bu]-,(^(n)Pr₂N)(Cp)-M-C₅NMe₄-4-[(CMe₂)₂-N^(n)Bu]-,(^(i)Pr₂N)(Cp)-M-C₅NMe₄-4-[(CMe₂)₂-N^(n)Bu]-,(^(n)Bu₂N)(Cp)-M-C₅NMe₄-4-[(CMe₂)₂-N^(n)Bu]-,(^(i)Bu₂N)(Cp)-M-C₅NMe₄-4-[(CMe₂)₂-N^(n)Bu]-,(^(s)Bu₂N)(Cp)-M-C₅NMe₄-4-[(CMe₂)₂-N^(n)Bu]-,(^(t)Bu₂N)(Cp)-M-C₅NMe₄-4-[(CMe₂)₂-N^(n)Bu]-,(MeO)₂-M-C₅NMe₄-4-[(CMe₂)₂-N^(n)Bu]-,(EtO)₂-M-C₅NMe₄-4-[(CMe₂)₂-N^(n)Bu]-,(^(n)PrO)₂-M-C₅NMe₄-4-[(CMe₂)₂-N^(n)Bu]-,(^(i)PrO)₂-M-C₅NMe₄-4-[(CMe₂)₂-N^(n)Bu]-,(^(n)BuO)₂-M-C₅NMe₄-4-[(CMe₂)₂-N^(n)Bu]-,(^(i)BuO)₂-M-C₅NMe₄-4-[(CMe₂)₂-N^(n)Bu]-,(^(s)BuO)₂-M-C₅NMe₄-4-[(CMe₂)₂-N^(n)Bu]-,(^(t)BuO)₂-M-C₅NMe₄-4-[(CMe₂)₂-N^(n)Bu]-,(H₂N)₂-M-C₅NMe₄-4-[(CMe₂)₂-N^(i)Bu]-,(Me₂N)₂-M-C₅NMe₄-4-[(CMe₂)₂-N^(i)Bu]-,(Et₂N)₂-M-C₅NMe₄-4-[(CMe₂)₂-N^(i)Bu]-,(^(n)Pr₂N)₂-M-C₅NMe₄-4-[(CMe₂)₂-N^(i)Bu]-,(^(i)Pr₂N)₂-M-C₅NMe₄-4-[(CMe₂)₂-N^(i)Bu]-,(^(n)Bu₂N)₂-M-C₅NMe₄-4-[(CMe₂)₂-N^(i)Bu]-,(^(t)Bu₂N)₂-M-C₅NMe₄-4-[(CMe₂)₂-N^(i)Bu]-,(^(s)Bu₂N)₂-M-C₅NMe₄-4-[(CMe₂)₂-N^(i)Bu]-,(^(t)Bu₂N)₂-M-C₅NMe₄-4-[(CMe₂)₂-N^(i)Bu]-,(H₂N)(Cp)-M-C₅NMe₄-4-[(CMe₂)₂-N^(i)Bu]-,(Me₂N)(Cp)-M-C₅NMe₄-4-[(CMe₂)₂-N^(i)Bu]-,(Et₂N)(Cp)-M-C₅NMe₄-4-[(CMe₂)₂-N^(i)Bu]-,(^(n)Pr₂N)(Cp)-M-C₅NMe₄-4-[(CMe₂)₂-N^(i)Bu]-,(^(i)Pr₂N)(Cp)-M-C₅NMe₄-4-[(CMe₂)₂-N^(i)Bu]-,(^(n)Bu₂N)(Cp)-M-C₅NMe₄-4-[(CMe₂)₂-N^(i)Bu]-,(^(i)Bu₂N)(Cp)-M-C₅NMe₄-4-[(CMe₂)₂-N^(i)Bu]-,(^(s)Bu₂N)(Cp)-M-C₅NMe₄-4-[(CMe₂)₂-N^(i)Bu]-,(^(t)Bu₂N)(Cp)-M-C₅NMe₄-4-[(CMe₂)₂-N^(i)Bu]-,(MeO)₂-M-C₅NMe₄-4-[(CMe₂)₂-N^(i)Bu]-,(EtO)₂-M-C₅NMe₄-4-[(CMe₂)₂-N^(i)Bu]-,(^(n)PrO)₂-M-C₅NMe₄-4-[(CMe₂)₂-N^(i)Bu]-,(^(i)PrO)₂-M-C₅NMe₄-4-[(CMe₂)₂-N^(i)Bu]-,(^(n)BuO)₂-M-C₅NMe₄-4-[(CMe₂)₂-N^(i)Bu]-,(^(i)BuO)₂-M-C₅NMe₄-4-[(CMe₂)₂-N^(i)Bu]-,(^(s)BuO)₂-M-C₅NMe₄-4-[(CMe₂)₂-N^(i)Bu]-,(^(t)BuO)₂-M-C₅NMe₄-4-[(CMe₂)₂-N^(i)Bu]-,(H₂N)₂M-C₅NMe₄-4-[(CMe₂)₂-N^(s)Bu]-,(Me₂N)₂-M-C₅NMe₄-4-[(CMe₂)₂-N^(s)Bu]-,(Et₂N)₂-M-C₅NMe₄-4-[(CMe₂)₂-N^(s)Bu]-,(^(n)Pr₂N)₂-M-C₅NMe₄-4-[(CMe₂)₂-N^(s)Bu]-,(^(i)Pr₂N)₂-M-C₅NMe₄-4-[(CMe₂)₂-N^(s)Bu]-,(^(n)Bu₂N)₂-M-C₅NMe₄-4-[(CMe₂)₂-N^(s)Bu]-,(^(i)Bu₂N)₂-M-C₅NMe₄-4-[(CMe₂)₂-N^(s)Bu]-,(^(s)Bu₂N)₂-M-C₅NMe₄-4-[(CMe₂)₂-N^(s)Bu]-,(^(t)Bu₂N)₂-M-C₅NMe₄-4-[(CMe₂)₂-N^(s)Bu]-,(H₂N)(Cp)-M-C₅NMe₄-4-[(CMe₂)₂-N^(s)Bu]-,(Me₂N)(Cp)-M-C₅NMe₄-4-[(CMe₂)₂-N^(s)Bu]-,(Et₂N)(Cp)-M-C₅NMe₄-4-[(CMe₂)₂-N^(s)Bu]-,(^(n)Pr₂N)(Cp)-M-C₅NMe₄-4-[(CMe₂)₂-N^(s)Bu]-,(^(i)Pr₂N)(Cp)-M-C₅NMe₄-4-[(CMe₂)₂-N^(s)Bu]-,(^(n)Bu₂N)(Cp)-M-C₅NMe₄-4-[(CMe₂)₂-N^(s)Bu]-,(^(i)Bu₂N)(Cp)-M-C₅NMe₄-4-[(CMe₂)₂-N^(s)Bu]-,(^(s)Bu₂N)(Cp)-M-C₅NMe₄-4-[(CMe₂)₂-N^(s)Bu]-,(^(t)Bu₂N)(Cp)-M-C₅NMe₄-4-[(CMe₂)₂-N^(s)Bu]-,(MeO)₂-M-C₅NMe₄-4-[(CMe₂)₂-N^(s)Bu]-,(EtO)₂-M-C₅NMe₄-4-[(CMe₂)₂-N^(s)Bu]-,(^(n)PrO)₂-M-C₅NMe₄-4-[(CMe₂)₂-N^(s)Bu]-,(^(i)PrO)₂-M-C₅NMe₄-4-[(CMe₂)₂-N^(s)Bu]-,(^(n)BuO)₂-M-C₅NMe₄-4-[(CMe₂)₂-N^(s)Bu]-,(^(i)BuO)₂-M-C₅NMe₄-4-[(CMe₂)₂-N^(s)Bu]-,(^(s)BuO)₂-M-C₅NMe₄-4-[(CMe₂)₂-N^(s)Bu]-,(^(t)BuO)₂-M-C₅NMe₄-4-[(CMe₂)₂-N^(s)Bu]-,(H₂N)₂-M-C₅NMe₄-4-[(CMe₂)₂-N^(t)Bu]-,(Me₂N)₂-M-C₅NMe₄-4-[(CMe₂)₂-N^(t)Bu]-,(Et₂N)₂-M-C₅NMe₄-4-[(CMe₂)₂-N^(t)Bu]-,(^(n)Pr₂N)₂-M-C₅NMe₄-4-[(CMe₂)₂-N^(t)Bu]-,(^(i)Pr₂N)₂-M-C₅NMe₄-4-[(CMe₂)₂-N^(t)Bu]-,(^(n)Bu₂N)₂-M-C₅NMe₄-4-[(CMe₂)₂-N^(t)Bu]-,(^(i)Bu₂N)₂-M-C₅NMe₄-4-[(CMe₂)₂-N^(t)Bu]-,(^(s)Bu₂N)₂-M-C₅NMe₄-4-[(CMe₂)₂-N^(t)Bu]-,(^(t)Bu₂N)₂-M-C₅NMe₄-4-[(CMe₂)₂-N^(t)Bu]-,(H₂N)(Cp)-M-C₅NMe₄-4-[(CMe₂)₂-N^(t)Bu]-,(Me₂N)(Cp)-M-C₅NMe₄-4-[(CMe₂)₂-N^(t)Bu]-,(Et₂N)(Cp)-M-C₅NMe₄-4-[(CMe₂)₂-N^(t)Bu]-,(^(n)Pr₂N)(Cp)-M-C₅NMe₄-4-[(CMe₂)₂-N^(t)Bu]-,(^(i)Pr₂N)(Cp)-M-C₅NMe₄-4-[(CMe₂)₂-N^(t)Bu]-,(^(n)Bu₂N)(Cp)-M-C₅NMe₄-4-[(CMe₂)₂-N^(t)Bu]-,(^(i)Bu₂N)(Cp)-M-C₅NMe₄-4-[(CMe₂)₂-N^(t)Bu]-,(^(s)Bu₂N)(Cp)-M-C₅NMe₄-4-[(CMe₂)₂-N^(t)Bu]-,(^(t)Bu₂N)(Cp)-M-C₅NMe₄-4-[(CMe₂)₂-N^(t)Bu]-,(MeO)₂-M-C₅NMe₄-4-[(CMe₂)₂-N^(t)Bu]-,(EtO)₂-M-C₅NMe₄-4-[(CMe₂)₂-N^(t)Bu]-,(^(n)PrO)₂-M-C₅NMe₄-4-[(CMe₂)₂-N^(t)Bu]-,(^(i)PrO)₂-M-C₅NMe₄-4-[(CMe₂)₂-N^(t)Bu]-,(^(n)BuO)₂-M-C₅NMe₄-4-[(CMe₂)₂-N^(t)Bu]-,(^(i)BuO)₂-M-C₅NMe₄-4-[(CMe₂)₂-N^(t)Bu]-,(^(s)BuO)₂-M-C₅NMe₄-4-[(CMe₂)₂-N^(t)Bu]-,(^(t)BuO)₂-M-C₅NMe₄-4-[(CMe₂)₂-N^(t)Bu]-,(H₂N)₂-M-C₅NMe₄-4-[(CMe₂)₂-O]—, (Me₂N)₂-M-C₅NMe₄-4-[(CMe₂)₂-O]—,(Et₂N)₂-M-C₅NMe₄-4-[(CMe₂)₂-O]—, (^(n)Pr₂N)₂-M-C₅NMe₄-4-[(CMe₂)₂-O]—,(^(i)Pr₂N)₂-M-C₅NMe₄-4-[(CMe₂)₂-O]—,(^(n)Bu₂N)₂-M-C₅NMe₄-4-[(CMe₂)₂-O]—,(^(i)Bu₂N)₂-M-C₅NMe₄-4-[(CMe₂)₂-O]—,(^(s)Bu₂N)₂-M-C₅NMe₄-4-[(CMe₂)₂-O]—,(^(t)Bu₂N)₂-M-C₅NMe₄-4-[(CMe₂)₂-O]—, (H₂N)(Cp)-M-C₅NMe₄-4-[(CMe₂)₂-O]—,(Me₂N)(Cp)-M-C₅NMe₄-4-[(CMe₂)₂-O]—, (Et₂N)(Cp)-M-C₅NMe₄-4-[(CMe₂)₂-O]—,(^(n)Pr₂N)(Cp)-M-C₅NMe₄-4-[(CMe₂)₂-O]—,(^(i)Pr₂N)(Cp)-M-C₅NMe₄-4-[(CMe₂)₂-O]—,(^(n)Bu₂N)(Cp)-M-C₅NMe₄-4-[(CMe₂)₂-O]—,(^(i)Bu₂N)(Cp)-M-C₅NMe₄-4-[(CMe₂)₂-O]—,(^(s)Bu₂N)(Cp)-M-C₅NMe₄-4-[(CMe₂)₂-O]—,(^(t)Bu₂N)(Cp)-M-C₅NMe₄-4-[(CMe₂)₂-O]—, (MeO)₂-M-C₅NMe₄-4-[(CMe₂)₂-O]—,(EtO)₂-M-C₅NMe₄-4-[(CMe₂)₂-O]—, (^(n)PrO)₂-M-C₅NMe₄-4-[(CMe₂)₂-O]—,(^(i)PrO)₂-M-C₅NMe₄-4-[(CMe₂)₂-O]—, (^(n)BuO)₂-M-C₅NMe₄-4-[(CMe₂)₂-O]—,(^(i)BuO)₂-M-C₅NMe₄-4-[(CMe₂)₂-O]—, (^(s)BuO)₂-M-C₅NMe₄-4-[(CMe₂)₂-O]—,(^(t)BuO)₂-M-C₅NMe₄-4-[(CMe₂)₂-O]—,(Me₂N)₂-M-C₄(m-N₂)H₃-4-[(CH₂)₂—NMe]-,(Et₂N)₂-M-C₄(m-N₂)H₃-4-[(CH₂)₂—NMe]-,(^(n)Pr₂N)₂-M-C₄(m-N₂)H₃-4-[(CH₂)₂—NMe]-,(^(i)Pr₂N)₂-M-C₄(m-N₂)H₃-4-[(CH₂)₂—NMe]-,(^(n)Bu₂N)₂-M-C₄(m-N₂)H₃-4-[(CH₂)₂—NMe]-,(^(i)Bu₂N)₂-M-C₄(m-N₂)H₃-4-[(CH₂)₂—NMe]-,(^(s)Bu₂N)₂-M-C₄(m-N₂)H₃-4-[(CH₂)₂—NMe]-,(^(t)Bu₂N)₂-M-C₄(m-N₂)H₃-4-[(CH₂)₂—NMe]-,(H₂N)(Cp)-M-C₄(m-N₂)H₃-4-[(CH₂)₂—NMe]-,(Me₂N)(Cp)-M-C₄(m-N₂)H₃-4-[(CH₂)₂—NMe]-,(Et₂N)(Cp)-M-C₄(m-N₂)H₃-4-[(CH₂)₂—NMe]-,(^(n)Pr₂N)(Cp)-M-C₄(m-N₂)H₃-4-[(CH₂)₂—NMe]-,(^(i)Pr₂N)(Cp)-M-C₄(m-N₂)H₃-4-[(CH₂)₂—NMe]-,(^(n)Bu₂N)(Cp)-M-C₄(m-N₂)H₃-4-[(CH₂)₂—NMe]-,(^(i)Bu₂N)(Cp)-M-C₄(m-N₂)H₃-4-[(CH₂)₂—NMe]-,(^(s)Bu₂N)(Cp)-M-C₄(m-N₂)H₃-4-[(CH₂)₂—NMe]-,(^(t)Bu₂N)(Cp)-M-C₄(m-N₂)H₃-4-[(CH₂)₂—NMe]-,(MeO)₂-M-C₄(m-N₂)H₃-4-[(CH₂)₂—NMe]-,(EtO)₂-M-C₄(m-N₂)H₃-4-[(CH₂)₂—NMe]-,(^(n)PrO)₂-M-C₄(m-N₂)H₃-4-[(CH₂)₂—NMe]-,(^(i)PrO)₂-M-C₄(m-N₂)H₃-4-[(CH₂)₂—NMe]-,(^(n)BuO)₂-M-C₄(m-N₂)H₃-4-[(CH₂)₂—NMe]-,(^(i)BuO)₂-M-C₄(m-N₂)H₃-4-[(CH₂)₂—NMe]-,(^(s)BuO)₂-M-C₄(m-N₂)H₃-4-[(CH₂)₂—NMe]-,(^(t)BuO)₂-M-C₄(m-N₂)H₃-4-[(CH₂)₂—NMe]-,(H₂N)₂-M-C₄(m-N₂)H₃-4-[(CH₂)₂—NEt]-,(Me₂N)₂-M-C₄(m-N₂)H₃-4-[(CH₂)₂—NEt]-,(Et₂N)₂-M-C₄(m-N₂)H₃-4-[(CH₂)₂—NEt]-,(^(n)Pr₂N)₂-M-C₄(m-N₂)H₃-4-[(CH₂)₂—NEt]-,(^(i)Pr₂N)₂-M-C₄(m-N₂)H₃-4-[(CH₂)₂—NEt]-,(^(n)Bu₂N)₂-M-C₄(m-N₂)H₃-4-[(CH₂)₂—NEt]-,(^(i)Bu₂N)₂-M-C₄(m-N₂)H₃-4-[(CH₂)₂—NEt]-,(^(s)Bu₂N)₂-M-C₄(m-N₂)H₃-4-[(CH₂)₂—NEt]-,(^(t)Bu₂N)₂-M-C₄(m-N₂)H₃-4-[(CH₂)₂—NEt]-,(H₂N)(Cp)-M-C₄(m-N₂)H₃-4-[(CH₂)₂—NEt]-,(Me₂N)(Cp)-M-C₄(m-N₂)H₃-4-[(CH₂)₂—NEt]-,(Et₂N)(Cp)-M-C₄(m-N₂)H₃-4-[(CH₂)₂—NEt]-,(^(n)Pr₂N)(Cp)-M-C₄(m-N₂)H₃-4-[(CH₂)₂—NEt]-,(^(i)Pr₂N)(Cp)-M-C₄(m-N₂)H₃-4-[(CH₂)₂—NEt]-,(^(n)Bu₂N)(Cp)-M-C₄(m-N₂)H₃-4-[(CH₂)₂—NEt]-,(^(i)Bu₂N)(Cp)-M-C₄(m-N₂)H₃-4-[(CH₂)₂—NEt]-,(^(s)Bu₂N)(Cp)-M-C₄(m-N₂)H₃-4-[(CH₂)₂—NEt]-,(^(t)Bu₂N)(Cp)-M-C₄(m-N₂)H₃-4-[(CH₂)₂—NEt]-,(MeO)₂-M-C₄(m-N₂)H₃-4-[(CH₂)₂—NEt]-,(EtO)₂-M-C₄(m-N₂)H₃-4-[(CH₂)₂—NEt]-,(^(n)PrO)₂-M-C₄(m-N₂)H₃-4-[(CH₂)₂—NEt]-,(^(i)PrO)₂-M-C₄(m-N₂)H₃-4-[(CH₂)₂—NEt]-,(^(n)BuO)₂-M-C₄(m-N₂)H₃-4-[(CH₂)₂—NEt]-,(^(i)BuO)₂-M-C₄(m-N₂)H₃-4-[(CH₂)₂—NEt]-,(^(s)BuO)₂-M-C₄(m-N₂)H₃-4-[(CH₂)₂—NEt]-,(^(t)BuO)₂-M-C₄(m-N₂)H₃-4-[(CH₂)₂—NEt]-,(H₂N)₂M-C₄(m-N₂)H₃-4-[(CH₂)₂—N^(n)Pr]—,(Me₂N)₂-M-C₄(m-N₂)H₃-4-[(CH₂)₂—N^(n)Pr]—,(Et₂N)₂M-C₄(m-N₂)H₃-4-[(CH₂)₂—N^(n)Pr]—,(^(n)Pr₂N)₂-M-C₄(m-N₂)H₃-4-[(CH₂)₂—N^(n)Pr]—,(^(i)Pr₂N)₂M-C₄(m-N₂)H₃-4-[(CH₂)₂—N^(n)Pr]—,(^(n)Bu₂N)₂-M-C₄(m-N₂)H₃-4-[(CH₂)₂—N^(n)Pr]—,(^(i)Bu₂N)₂-M-C₄(m-N₂)H₃-4-[(CH₂)₂—N^(n)Pr]—,(^(s)Bu₂N)₂-M-C₄(m-N₂)H₃-4-[(CH₂)₂—N^(n)Pr]—,(^(t)Bu₂N)₂-M-C₄(m-N₂)H₃-4-[(CH₂)₂—N^(n)Pr]—,(H₂N)(Cp)-M-C₄(m-N₂)H₃-4-[(CH₂)₂—N^(n)Pr]—,(Me₂N)(Cp)-M-C₄(m-N₂)H₃-4-[(CH₂)₂—N^(n)Pr]—,(Et₂N)(Cp)-M-C₄(m-N₂)H₃-4-[(CH₂)₂—N^(n)Pr]—,(^(n)Pr₂N)(Cp)-M-C₄(m-N₂)H₃-4-[(CH₂)₂—N^(n)Pr]—,(^(i)Pr₂N)(Cp)-M-C₄(m-N₂)H₃-4-[(CH₂)₂—N^(n)Pr]—,(^(n)Bu₂N)(Cp)-M-C₄(m-N₂)H₃-4-[(CH₂)₂—N^(n)Pr]—,(^(i)Bu₂N)(Cp)-M-C₄(m-N₂)H₃-4-[(CH₂)₂—N^(n)Pr]—,(^(s)Bu₂N)(Cp)-M-C₄(m-N₂)H₃-4-[(CH₂)₂—N^(n)Pr]—,(^(t)Bu₂N)(Cp)-M-C₄(m-N₂)H₃-4-[(CH₂)₂—N^(n)Pr]—,(MeO)₂-M-C₄(m-N₂)H₃-4-[(CH₂)₂—N^(n)Pr]—,(EtO)₂-M-C₄(m-N₂)H₃-4-[(CH₂)₂—N^(n)Pr]—,(^(n)PrO)₂-M-C₄(m-N₂)H₃-4-[(CH₂)₂—N^(n)Pr]—,(^(i)PrO)₂-M-C₄(m-N₂)H₃-4-[(CH₂)₂—N^(n)Pr]—,(^(n)BuO)₂-M-C₄(m-N₂)H₃-4-[(CH₂)₂—N^(n)Pr]—,(^(i)BuO)₂-M-C₄(m-N₂)H₃-4-[(CH₂)₂—N^(n)Pr]—,(^(s)BuO)₂-M-C₄(m-N₂)H₃-4-[(CH₂)₂—N^(n)Pr]—,(^(t)BuO)₂-M-C₄(m-N₂)H₃-4-[(CH₂)₂—N^(n)Pr]—,(H₂N)₂-M-C₄(m-N₂)H₃-4-[(CH₂)₂—N^(i)Pr]—,(Me₂N)₂-M-C₄(m-N₂)H₃-4-[(CH₂)₂—N^(i)Pr]—,(Et₂N)₂-M-C₄(m-N₂)H₃-4-[(CH₂)₂—N^(i)Pr]—,(^(n)Pr₂N)₂-M-C₄(m-N₂)H₃-4-[(CH₂)₂—N^(i)Pr]—,(^(i)Pr₂N)₂-M-C₄(m-N₂)H₃-4-[(CH₂)₂—N^(i)Pr]—,(^(n)Bu₂N)₂-M-C₄(m-N₂)H₃-4-[(CH₂)₂—N^(i)Pr]—,(^(i)Bu₂N)₂-M-C₄(m-N₂)H₃-4-[(CH₂)₂—N^(i)Pr]—,(^(s)Bu₂N)₂-M-C₄(m-N₂)H₃-4-[(CH₂)₂—N^(i)Pr]—,(^(t)Bu₂N)₂-M-C₄(m-N₂)H₃-4-[(CH₂)₂—N^(i)Pr]—,(H₂N)(Cp)-M-C₄(m-N₂)H₃-4-[(CH₂)₂—N^(i)Pr]—,(Me₂N)(Cp)-M-C₄(m-N₂)H₃-4-[(CH₂)₂—N^(i)Pr]—,(Et₂N)(Cp)-M-C₄(m-N₂)H₃-4-[(CH₂)₂—N^(i)Pr]—,(^(n)Pr₂N)(Cp)-M-C₄(m-N₂)H₃-4-[(CH₂)₂—N^(i)Pr]—,(^(i)Pr₂N)(Cp)-M-C₄(m-N₂)H₃-4-[(CH₂)₂—N^(i)Pr]—,(^(n)Bu₂N)(Cp)-M-C₄(m-N₂)H₃-4-[(CH₂)₂—N^(i)Pr]—,(^(i)Bu₂N)(Cp)-M-C₄(m-N₂)H₃-4-[(CH₂)₂—N^(i)Pr]—,(^(s)Bu₂N)(Cp)-M-C₄(m-N₂)H₃-4-[(CH₂)₂—N^(i)Pr]—,(^(t)Bu₂N)(Cp)-M-C₄(m-N₂)H₃-4-[(CH₂)₂—N^(i)Pr]—,(MeO)₂-M-C₄(m-N₂)H₃-4-[(CH₂)₂—N^(i)Pr]—,(EtO)₂-M-C₄(m-N₂)H₃-4-[(CH₂)₂—N^(i)Pr]—,(^(n)PrO)₂-M-C₄(m-N₂)H₃-4-[(CH₂)₂—N^(i)Pr]—,(^(i)PrO)₂-M-C₄(m-N₂)H₃-4-[(CH₂)₂—N^(i)Pr]—,(^(n)BuO)₂-M-C₄(m-N₂)H₃-4-[(CH₂)₂—N^(i)Pr]—,(^(i)BuO)₂-M-C₄(m-N₂)H₃-4-[(CH₂)₂—N^(i)Pr]—,(^(s)BuO)₂-M-C₄(m-N₂)H₃-4-[(CH₂)₂—N^(i)Pr]—,(^(t)BuO)₂-M-C₄(m-N₂)H₃-4-[(CH₂)₂—N^(i)Pr]—,(H₂N)₂-M-C₄(m-N₂)H₃-4-[(CH₂)₂—N^(n)Bu]-,(Me₂N)₂-M-C₄(m-N₂)H₃-4-[(CH₂)₂—N^(n)Bu]-,(Et₂N)₂-M-C₄(m-N₂)H₃-4-[(CH₂)₂—N^(n)Bu]-,(^(n)Pr₂N)₂-M-C₄(m-N₂)H₃-4-[(CH₂)₂—N^(n)Bu]-,(^(i)Pr₂N)₂-M-C₄(m-N₂)H₃-4-[(CH₂)₂—N^(n)Bu]-,(^(n)Bu₂N)₂-M-C₄(m-N₂)H₃-4-[(CH₂)₂—N^(n)Bu]-,(^(i)Bu₂N)₂-M-C₄(m-N₂)H₃-4-[(CH₂)₂—N^(n)Bu]-,(^(s)Bu₂N)₂-M-C₄(m-N₂)H₃-4-[(CH₂)₂—N^(n)Bu]-,(^(t)Bu₂N)₂-M-C₄(m-N₂)H₃-4-[(CH₂)₂—N^(n)Bu]-,(H₂N)(Cp)-M-C₄(m-N₂)H₃-4-[(CH₂)₂—N^(n)Bu]-,(Me₂N)(Cp)-M-C₄(m-N₂)H₃-4-[(CH₂)₂—N^(n)Bu]-,(Et₂N)(Cp)-M-C₄(m-N₂)H₃-4-[(CH₂)₂—N^(n)Bu]-,(^(n)Pr₂N)(Cp)-M-C₄(m-N₂)H₃-4-[(CH₂)₂—N^(n)Bu]-,(^(i)Pr₂N)(Cp)-M-C₄(m-N₂)H₃-4-[(CH₂)₂—N^(n)Bu]-,(Bu₂N)(Cp)-M-C₄(m-N₂)H₃-4-[(CH₂)₂—N^(n)Bu]-,(^(i)Bu₂N)(Cp)-M-C₄(m-N₂)H₃-4-[(CH₂)₂—N^(n)Bu]-,(^(s)Bu₂N)(Cp)-M-C₄(m-N₂)H₃-4-[(CH₂)₂—N^(n)Bu]-,(^(t)Bu₂N)(Cp)-M-C₄(m-N₂)H₃-4-[(CH₂)₂—N^(n)Bu]-,(MeO)₂-M-C₄(m-N₂)H₃-4-[(CH₂)₂—N^(n)Bu]-,(EtO)₂-M-C₄(m-N₂)H₃-4-[(CH₂)₂—N^(n)Bu]-,(^(n)PrO)₂-M-C₄(m-N₂)H₃-4-[(CH₂)₂—N^(n)Bu]-,(^(i)PrO)₂-M-C₄(m-N₂)H₃-4-[(CH₂)₂—N^(n)Bu]-,(^(n)BuO)₂-M-C₄(m-N₂)H₃-4-[(CH₂)₂—N^(n)Bu]-,(^(i)BuO)₂-M-C₄(m-N₂)H₃-4-[(CH₂)₂—N^(n)Bu]-,(^(s)BuO)₂-M-C₄(m-N₂)H₃-4-[(CH₂)₂—N^(n)Bu]-,(^(t)BuO)₂-M-C₄(m-N₂)H₃-4-[(CH₂)₂—N^(n)Bu]-,(H₂N)₂-M-C₄(m-N₂)H₃-4-[(CH₂)₂—N^(i)Bu]-,(Me₂N)₂-M-C₄(m-N₂)H₃-4-[(CH₂)₂—N^(i)Bu]-,(Et₂N)₂-M-C₄(m-N₂)H₃-4-[(CH₂)₂—N^(i)Bu]-,(^(n)Pr₂N)₂-M-C₄(m-N₂)H₃-4-[(CH₂)₂—N^(i)Bu]-,(^(i)Pr₂N)₂-M-C₄(m-N₂)H₃-4-[(CH₂)₂—N^(i)Bu]-,(^(n)Bu₂N)₂-M-C₄(m-N₂)H₃-4-[(CH₂)₂—N^(i)Bu]-,(^(i)Bu₂N)₂-M-C₄(m-N₂)H₃-4-[(CH₂)₂—N^(i)Bu]-,(^(s)Bu₂N)₂-M-C₄(m-N₂)H₃-4-[(CH₂)₂—N^(i)Bu]-,(^(t)Bu₂N)₂-M-C₄(m-N₂)H₃-4-[(CH₂)₂—N^(i)Bu]-,(H₂N)(Cp)-M-C₄(m-N₂)H₃-4-[(CH₂)₂—N^(i)Bu]-,(Me₂N)(Cp)-M-C₄(m-N₂)H₃-4-[(CH₂)₂—N^(i)Bu]-,(Et₂N)(Cp)-M-C₄(m-N₂)H₃-4-[(CH₂)₂—N^(i)Bu]-,(^(n)Pr₂N)(Cp)-M-C₄(m-N₂)H₃-4-[(CH₂)₂—N^(i)Bu]-,(^(i)Pr₂N)(Cp)-M-C₄(m-N₂)H₃-4-[(CH₂)₂—N^(i)Bu]-,(^(n)Bu₂N)(Cp)-M-C₄(m-N₂)H₃-4-[(CH₂)₂—N^(i)Bu]-,(^(i)Bu₂N)(Cp)-M-C₄(m-N₂)H₃-4-[(CH₂)₂—N^(i)Bu]-,(^(s)Bu₂N)(Cp)-M-C₄(m-N₂)H₃-4-[(CH₂)₂—N^(i)Bu]-,(^(t)Bu₂N)(Cp)-M-C₄(m-N₂)H₃-4-[(CH₂)₂—N^(i)Bu]-,(MeO)₂-M-C₄(m-N₂)H₃-4-[(CH₂)₂—N^(i)Bu]-,(EtO)₂-M-C₄(m-N₂)H₃-4-[(CH₂)₂—N^(i)Bu]-,(^(n)PrO)₂-M-C₄(m-N₂)H₃-4-[(CH₂)₂—N^(i)Bu]-,(^(i)PrO)₂-M-C₄(m-N₂)H₃-4-[(CH₂)₂—N^(i)Bu]-,(^(n)BuO)₂-M-C₄(m-N₂)H₃-4-[(CH₂)₂—N^(i)Bu]-,(^(i)BuO)₂-M-C₄(m-N₂)H₃-4-[(CH₂)₂—N^(i)Bu]-,(^(s)BuO)₂-M-C₄(m-N₂)H₃-4-[(CH₂)₂—N^(i)Bu]-,(^(t)BuO)₂-M-C₄(m-N₂)H₃-4-[(CH₂)₂—N^(i)Bu]-,(H₂N)₂-M-C₄(m-N₂)H₃-4-[(CH₂)₂—N^(s)Bu]-,(Me₂N)₂-M-C₄(m-N₂)H₃-4-[(CH₂)₂—N^(s)Bu]-,(Et₂N)₂-M-C₄(m-N₂)H₃-4-[(CH₂)₂—N^(s)Bu]-,(^(n)Pr₂N)₂M-C₄(m-N₂)H₃-4-[(CH₂)₂—N^(s)Bu]-,(^(i)Pr₂N)₂M-C₄(m-N₂)H₃-4-[(CH₂)₂—N^(s)Bu]-,(^(n)Bu₂N)₂-M-C₄(m-N₂)H₃-4-[(CH₂)₂—N^(s)Bu]-,(^(i)Bu₂N)₂-M-C₄(m-N₂)H₃-4-[(CH₂)₂—N^(s)Bu]-,(^(s)Bu₂N)₂-M-C₄(m-N₂)H₃-4-[(CH₂)₂—N^(s)Bu]-,(^(i)Bu₂N)₂-M-C₄(m-N₂)H₃-4-[(CH₂)₂—N^(s)Bu]-,(H₂N)(Cp)-M-C₄(m-N₂)H₃-4-[(CH₂)₂—N^(s)Bu]-,(Me₂N)(Cp)-M-C₄(m-N₂)H₃-4-[(CH₂)₂—N^(s)Bu]-,(Et₂N)(Cp)-M-C₄(m-N₂)H₃-4-[(CH₂)₂—N^(s)Bu]-,(^(n)Pr₂N)(Cp)-M-C₄(m-N₂)H₃-4-[(CH₂)₂—N^(s)Bu]-,(^(i)Pr₂N)(Cp)-M-C₄(m-N₂)H₃-4-[(CH₂)₂—N^(s)Bu]-,(^(n)Bu₂N)(Cp)-M-C₄(m-N₂)H₃-4-[(CH₂)₂—N^(s)Bu]-,(^(i)Bu₂N)(Cp)-M-C₄(m-N₂)H₃-4-[(CH₂)₂—N^(s)Bu]-,(^(s)Bu₂N)(Cp)-M-C₄(m-N₂)H₃-4-[(CH₂)₂—N^(s)Bu]-,(^(t)Bu₂N)(Cp)-M-C₄(m-N₂)H₃-4-[(CH₂)₂—N^(s)Bu]-,(MeO)₂-M-C₄(m-N₂)H₃-4-[(CH₂)₂—N^(s)Bu]-,(EtO)₂-M-C₄(m-N₂)H₃-4-[(CH₂)₂—N^(s)Bu]-,(^(n)PrO)₂M-C₄(m-N₂)H₃-4-[(CH₂)₂—N^(s)Bu]-,(^(i)PrO)₂M-C₄(m-N₂)H₃-4-[(CH₂)₂—N^(s)Bu]-,(^(n)BuO)₂-M-C₄(m-N₂)H₃-4-[(CH₂)₂—N^(s)Bu]-,(^(i)BuO)₂-M-C₄(m-N₂)H₃-4-[(CH₂)₂—N^(s)Bu]-,(^(s)BuO)₂-M-C₄(m-N₂)H₃-4-[(CH₂)₂—N^(s)Bu]-,(^(t)BuO)₂-M-C₄(m-N₂)H₃-4-[(CH₂)₂—N^(s)Bu]-,(H₂N)₂-M-C₄(m-N₂)H₃-4-[(CH₂)₂—N^(t)Bu]-,(Me₂N)₂-M-C₄(m-N₂)H₃-4-[(CH₂)₂—N^(t)Bu]-,(Et₂N)₂-M-C₄(m-N₂)H₃-4-[(CH₂)₂—N^(t)Bu]-,(^(n)Pr₂N)₂-M-C₄(m-N₂)H₃-4-[(CH₂)₂—N^(t)Bu]-,(^(i)Pr₂N)₂-M-C₄(m-N₂)H₃-4-[(CH₂)₂—N^(t)Bu]-,(^(n)Bu₂N)₂-M-C₄(m-N₂)H₃-4- [(CH₂)₂—N^(t)Bu]-,(^(i)Bu₂N)₂-M-C₄(m-N₂)H₃-4-[(CH₂)₂—N^(t)Bu]-,(^(s)Bu₂N)₂-M-C₄(m-N₂)H₃-4- [(CH₂)₂—N^(t)Bu]-,(^(t)Bu₂N)₂-M-C₄(m-N₂)H₃-4-[(CH₂)₂—N^(t)Bu]-,(H₂N)(Cp)-M-C₄(m-N₂)H₃-4-[(CH₂)₂—N^(t)Bu]-,(Me₂N)(Cp)-M-C₄(m-N₂)H₃-4-[(CH₂)₂—N^(t)Bu]-,(Et₂N)(Cp)-M-C₄(m-N₂)H₃-4-[(CH₂)₂—N^(t)Bu]-,(^(n)Pr₂N)(Cp)-M-C₄(m-N₂)H₃-4-[(CH₂)₂—N^(t)Bu]-,(^(i)Pr₂N)(Cp)-M-C₄(m-N₂)H₃-4-[(CH₂)₂—N^(t)Bu]-,(^(n)Bu₂N)(Cp)-M-C₄(m-N₂)H₃-4-[(CH₂)₂—N^(t)Bu]-,(^(i)Bu₂N)(Cp)-M-C₄(m-N₂)H₃-4-[(CH₂)₂—N^(t)Bu]-,(^(s)Bu₂N)(Cp)-M-C₄(m-N₂)H₃-4-[(CH₂)₂—N^(t)Bu]-,(^(t)Bu₂N)(Cp)-M-C₄(m-N₂)H₃-4-[(CH₂)₂—N^(t)Bu]-,(MeO)₂-M-C₄(m-N₂)H₃-4-[(CH₂)₂—N^(t)Bu]-,(EtO)₂-M-C₄(m-N₂)H₃-4-[(CH₂)₂—N^(t)Bu]-,(^(n)PrO)₂-M-C₄(m-N₂)H₃-4-[(CH₂)₂—N^(t)Bu]-,(^(i)PrO)₂-M-C₄(m-N₂)H₃-4-[(CH₂)₂—N^(t)Bu]-,(^(n)BuO)₂-M-C₄(m-N₂)H₃-4-[(CH₂)₂—N^(t)Bu]-,(^(i)BuO)₂-M-C₄(m-N₂)H₃-4-[(CH₂)₂—N^(t)Bu]-,(^(s)BuO)₂-M-C₄(m-N₂)H₃-4-[(CH₂)₂—N^(t)Bu]-,(^(t)BuO)₂-M-C₄(m-N₂)H₃-4-[(CH₂)₂—N^(t)Bu]-,(H₂N)₂-M-C₄(m-N₂)H₃-4-[(CH₂)₂—O]—, (Me₂N)₂-M-C₄(m-N₂)H₃-4-[(CH₂)₂—O]—,(Et₂N)₂-M-C₄(m-N₂)H₃-4-[(CH₂)₂—O]—,(^(n)Pr₂N)₂-M-C₄(m-N₂)H₃-4-[(CH₂)₂—O]—,(^(i)Pr₂N)₂-M-C₄(m-N₂)H₃-4-[(CH₂)₂—O]—,(^(n)Bu₂N)₂-M-C₄(m-N₂)H₃-4-[(CH₂)₂—O]—,(^(i)Bu₂N)₂-M-C₄(m-N₂)H₃-4-[(CH₂)₂—O]—,(^(s)Bu₂N)₂-M-C₄(m-N₂)H₃-4-[(CH₂)₂—O]—,(^(t)Bu₂N)₂-M-C₄(m-N₂)H₃-4-[(CH₂)₂—O]—,(H₂N)(Cp)-M-C₄(m-N₂)H₃-4-[(CH₂)₂—O]—,(Me₂N)(Cp)-M-C₄(m-N₂)H₃-4-[(CH₂)₂—O]—,(Et₂N)(Cp)-M-C₄(m-N₂)H₃-4-[(CH₂)₂—O]—,(^(n)Pr₂N)(Cp)-M-C₄(m-N₂)H₃-4-[(CH₂)₂—O]—,(^(i)Pr₂N)(Cp)-M-C₄(m-N₂)H₃-4-[(CH₂)₂—O]—,(^(n)Bu₂N)(Cp)-M-C₄(m-N₂)H₃-4-[(CH₂)₂—O]—,(^(i)Bu₂N)(Cp)-M-C₄(m-N₂)H₃-4-[(CH₂)₂—O]—,(^(s)Bu₂N)(Cp)-M-C₄(m-N₂)H₃-4-[(CH₂)₂—O]—,(^(t)Bu₂N)(Cp)-M-C₄(m-N₂)H₃-4-[(CH₂)₂—O]—,(MeO)₂-M-C₄(m-N₂)H₃-4-[(CH₂)₂—O]—, (EtO)₂-M-C₄(m-N₂)H₃-4-[(CH₂)₂—O]—,(^(n)PrO)₂-M-C₄(m-N₂)H₃-4-[(CH₂)₂—O]—,(^(i)PrO)₂-M-C₄(m-N₂)H₃-4-[(CH₂)₂—O]—,(^(n)BuO)₂-M-C₄(m-N₂)H₃-4-[(CH₂)₂—O]—,(^(i)BuO)₂-M-C₄(m-N₂)H₃-4-[(CH₂)₂—O]—,(^(s)BuO)₂-M-C₄(m-N₂)H₃-4-[(CH₂)₂—O]—,(^(t)BuO)₂-M-C₄(m-N₂)H₃-4-[(CH₂)₂—O]—,(Me₂N)₂-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-NMe]-,(Et₂N)₂-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-NMe]-,(^(n)Pr₂N)₂-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-NMe]-,(^(i)Pr₂N)₂-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-NMe]-,(^(n)Bu₂N)₂-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-NMe]-,(^(i)Bu₂N)₂-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-NMe]-,(^(s)Bu₂N)₂-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-NMe]-,(^(t)Bu₂N)₂-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-NMe]-,(H₂N)(Cp)-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-NMe]-,(Me₂N)(Cp)-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-NMe]-,(Et₂N)(Cp)-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-NMe]-,(^(n)Pr₂N)(Cp)-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-NMe]-,(^(i)Pr₂N)(Cp)-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-NMe]-,(^(n)Bu₂N)(Cp)-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-NMe]-,(^(i)Bu₂N)(Cp)-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-NMe]-,(^(s)Bu₂N)(Cp)-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-NMe]-,(^(t)Bu₂N)(Cp)-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-NMe]-,(MeO)₂-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-NMe]-,(EtO)₂-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-NMe]-,(^(n)PrO)₂-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-NMe]-,(^(i)PrO)₂-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-NMe]-,(^(n)BuO)₂-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-NMe]-,(^(i)BuO)₂-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-NMe]-,(^(s)BuO)₂-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-NMe]-,(^(t)BuO)₂-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-NMe]-,(H₂N)₂-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-NEt]-,(Me₂N)₂-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-NEt]-,(Et₂N)₂-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-NEt]-,(^(n)Pr₂N)₂-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-NEt]-,(^(i)Pr₂N)₂-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-NEt]-,(^(n)Bu₂N)₂-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-NEt]-,(^(i)Bu₂N)₂-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-NEt]-,(^(s)Bu₂N)₂-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-NEt]-,(^(t)Bu₂N)₂-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-NEt]-,(H₂N)(Cp)-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-NEt]-,(Me₂N)(Cp)-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-NEt]-,(Et₂N)(Cp)-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-NEt]-,(^(n)Pr₂N)(Cp)-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-NEt]-,(^(i)Pr₂N)(Cp)-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-NEt]-,(^(n)Bu₂N)(Cp)-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-NEt]-,(^(i)Bu₂N)(Cp)-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-NEt]-,(^(s)Bu₂N)(Cp)-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-NEt]-,(^(t)Bu₂N)(Cp)-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-NEt]-,(MeO)₂-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-NEt]-,(EtO)₂-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-NEt]-,(^(n)PrO)₂-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-NEt]-,(^(i)PrO)₂-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-NEt]-,(^(n)BuO)₂-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-NEt]-,(^(i)BuO)₂-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-NEt]-,(^(s)BuO)₂-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-NEt]-,(^(t)BuO)₂-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-NEt]-,(H₂N)₂-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-N^(n)Pr]—,(Me₂N)₂-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-N^(n)Pr]—,(Et₂N)₂-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-N^(n)Pr]—,(^(n)Pr₂N)₂-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-N^(n)Pr]—,(^(i)Pr₂N)₂-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-N^(n)Pr]—,(^(n)Bu₂N)₂-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-N^(n)Pr]—,(^(i)Bu₂N)₂-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-N^(n)Pr]—,(^(s)Bu₂N)₂-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-N^(n)Pr]—,(^(t)Bu₂N)₂-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-N^(n)Pr]—,(H₂N)(Cp)-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-N^(n)Pr]—,(Me₂N)(Cp)-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-N^(n)Pr]—,(Et₂N)(Cp)-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-N^(n)Pr]—,(^(n)Pr₂N)(Cp)-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-N^(n)Pr]—,(^(i)Pr₂N)(Cp)-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-N^(n)Pr]—,(^(n)Bu₂N)(Cp)-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-N^(n)Pr]—,(^(i)Bu₂N)(Cp)-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-N^(n)Pr]—,(^(s)Bu₂N)(Cp)-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-N^(n)Pr]—,(^(t)Bu₂N)(Cp)-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-N^(n)Pr]—,(MeO)₂-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-N^(n)Pr]—,(EtO)₂-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-N^(n)Pr]—,(^(n)PrO)₂-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-N^(n)Pr]—,(^(i)PrO)₂-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-N^(n)Pr]—,(^(n)BuO)₂-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-N^(n)Pr]—,(^(i)BuO)₂-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-N^(n)Pr]—,(^(s)BuO)₂-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-N^(n)Pr]—,(^(t)BuO)₂-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-N^(n)Pr]—,(H₂N)₂-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-N^(i)Pr]—,(Me₂N)₂-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-N^(i)Pr]—,(Et₂N)₂-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-N^(i)Pr]—,(^(n)Pr₂N)₂-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-N^(i)Pr]—,(^(i)Pr₂N)₂-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-N^(i)Pr]—,(^(n)Bu₂N)₂-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-N^(i)Pr]—,(^(i)Bu₂N)₂-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-N^(i)Pr]—,(^(s)Bu₂N)₂-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-N^(i)Pr]—,(^(t)Bu₂N)₂-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-N^(i)Pr]—,(H₂N)(Cp)-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-N^(i)Pr]—,(Me₂N)(Cp)-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-N^(i)Pr]—,(Et₂N)(Cp)-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-N^(i)Pr]—,(^(n)Pr₂N)(Cp)-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-N^(i)Pr]—,(^(i)Pr₂N)(Cp)-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-N^(i)Pr]—,(^(n)Bu₂N)(Cp)-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-N^(i)Pr]—,(^(i)Bu₂N)(Cp)-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-N^(i)Pr]—,(^(s)Bu₂N)(Cp)-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-N^(i)Pr]—,(^(t)Bu₂N)(Cp)-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-N^(i)Pr]—,(MeO)₂-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-N^(i)Pr]—,(EtO)₂-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-N^(i)Pr]—,(^(n)PrO)₂-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-N^(i)Pr]—,(^(i)PrO)₂-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-N^(i)Pr]—,(^(n)BuO)₂-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-N^(i)Pr]—,(^(i)BuO)₂-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-N^(i)Pr]—,(^(s)BuO)₂-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-N^(i)Pr]—,(^(t)BuO)₂-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-N^(i)Pr]—,(H₂N)₂-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-N^(n)Bu]-,(Me₂N)₂-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-N^(n)Bu]-,(Et₂N)₂-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-N^(n)Bu]-,(^(n)Pr₂N)₂-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-N^(n)Bu]-,(^(i)Pr₂N)₂-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-N^(n)Bu]-,(^(n)Bu₂N)₂-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-N^(n)Bu]-,(^(i)Bu₂N)₂-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-N^(n)Bu]-,(^(s)Bu₂N)₂-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-N^(n)Bu]-,(^(t)Bu₂N)₂-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-N^(n)Bu]-,(H₂N)(Cp)-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-N^(n)Bu]-,(Me₂N)(Cp)-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-N^(n)Bu]-,(Et₂N)(Cp)-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-N^(n)Bu]-,(^(n)Pr₂N)(Cp)-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-N^(n)Bu]-,(^(i)Pr₂N)(Cp)-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-N^(n)Bu]-,(^(n)Bu₂N)(Cp)-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-N^(n)Bu]-,(^(i)Bu₂N)(Cp)-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-N^(n)Bu]-,(^(s)Bu₂N)(Cp)-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-N^(n)Bu]-,(^(t)Bu₂N)(Cp)-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-N^(n)Bu]-,(MeO)₂-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-N^(n)Bu]-,(EtO)₂-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-N^(n)Bu]-,(^(n)PrO)₂-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-N^(n)Bu]-,(^(i)PrO)₂-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-N^(n)Bu]-,(^(n)BuO)₂-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-N^(n)Bu]-,(^(i)BuO)₂-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-N^(n)Bu]-,(^(s)BuO)₂-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-N^(n)Bu]-,(^(t)BuO)₂-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-N^(n)Bu]-,(H₂N)₂-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-N^(i)Bu]-,(Me₂N)₂-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-N^(i)Bu]-,(Et₂N)₂-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-N^(i)Bu]-,(^(n)Pr₂N)₂-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-N^(i)Bu]-,(^(i)Pr₂N)₂M-C₄(m-N₂)H₃-4-[(CMe₂)₂-N^(i)Bu]-,(^(n)Bu₂N)₂-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-N^(i)Bu]-,(^(i)Bu₂N)₂-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-N^(i)Bu]-,(^(s)Bu₂N)₂-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-N^(i)Bu]-,(^(t)Bu₂N)₂-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-N^(i)Bu]-,(H₂N)(Cp)-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-N^(i)Bu]-,(Me₂N)(Cp)-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-N^(i)Bu]-,(Et₂N)(Cp)-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-N^(i)Bu]-,(^(n)Pr₂N)(Cp)-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-N¹Bu]-,(^(i)Pr₂N)(Cp)-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-N^(i)Bu]-,(^(n)Bu₂N)(Cp)-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-N^(i)Bu]-,(^(i)Bu₂N)(Cp)-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-N^(i)Bu]-,(^(s)Bu₂N)(Cp)-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-N^(i)Bu]-,(^(t)Bu₂N)(Cp)-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-N^(i)Bu]-,(MeO)₂-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-N^(i)Bu]-,(EtO)₂-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-N^(i)Bu]-,(^(n)PrO)₂-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-N^(i)Bu]-,(^(i)PrO)₂-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-N^(i)Bu]-,(^(n)BuO)₂-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-N^(i)Bu]-,(^(i)BuO)₂-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-N^(i)Bu]-,(^(s)BuO)₂-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-N^(i)Bu]-,(^(t)BuO)₂-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-N^(i)Bu]-,(H₂N)₂-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-N^(s)Bu]-,(Me₂N)₂-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-N^(s)Bu]-,(Et₂N)₂-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-N^(s)Bu]-,(^(n)Pr₂N)₂-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-N^(s)Bu]-,(^(i)Pr₂N)₂-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-N^(s)Bu]-,(^(n)Bu₂N)₂-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-N^(s)Bu]-,(^(i)Bu₂N)₂-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-N^(s)Bu]-,(^(s)Bu₂N)₂-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-N^(s)Bu]-,(^(t)Bu₂N)₂-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-N^(s)Bu]-,(H₂N)(Cp)-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-N^(s)Bu]-,(Me₂N)(Cp)-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-N^(s)Bu]-,(Et₂N)(Cp)-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-N^(s)Bu]-,(^(n)Pr₂N)(Cp)-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-N^(s)Bu]-,(^(i)Pr₂N)(Cp)-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-N^(s)Bu]-,(^(n)Bu₂N)(Cp)-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-N^(s)Bu]-,(^(i)Bu₂N)(Cp)-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-N^(s)Bu]-,(^(s)Bu₂N)(Cp)-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-N^(s)Bu]-,(^(t)Bu₂N)(Cp)-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-N^(s)Bu]-,(MeO)₂-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-N^(s)Bu]-,(EtO)₂-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-N^(s)Bu]-,(^(n)PrO)₂-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-N^(s)Bu]-,(^(i)PrO)₂-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-N^(s)Bu]-,(^(n)BuO)₂-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-N^(s)Bu]-,(^(i)BuO)₂-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-N^(s)Bu]-,(^(s)BuO)₂-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-N^(s)Bu]-,(^(t)BuO)₂-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-N^(s)Bu]-,(H₂N)₂-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-N^(t)Bu]-,(Me₂N)₂-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-N^(t)Bu]-,(Et₂N)₂-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-N^(t)Bu]-,(^(n)Pr₂N)₂-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-N^(t)Bu]-,(^(i)Pr₂N)₂-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-N^(t)Bu]-,(^(n)Bu₂N)₂-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-N^(t)Bu]-,(^(i)Bu₂N)₂-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-N^(t)Bu]-,(^(s)Bu₂N)₂-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-N^(t)Bu]-,(^(t)Bu₂N)₂-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-N^(t)Bu]-,(H₂N)(Cp)-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-N^(t)Bu]-,(Me₂N)(Cp)-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-N^(t)Bu]-,(Et₂N)(Cp)-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-N^(t)Bu]-,(^(n)Pr₂N)(Cp)-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-N^(t)Bu]-,(^(i)Pr₂N)(Cp)-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-N^(t)Bu]-,(^(n)Bu₂N)(Cp)-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-N^(t)Bu]-,(^(i)Bu₂N)(Cp)-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-N^(t)Bu]-,(^(s)Bu₂N)(Cp)-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-N^(t)Bu]-,(^(t)Bu₂N)(Cp)-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-N^(t)Bu]-,(HO)₂-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-N^(t)Bu]-,(MeO)₂-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-N^(t)Bu]-,(EtO)₂-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-N^(t)Bu]-,(^(n)PrO)₂-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-N^(t)Bu]-,(^(i)PrO)₂-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-N^(t)Bu]-,(^(n)BuO)₂-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-N^(t)Bu]-,(^(i)BuO)₂-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-N^(t)Bu]-,(^(s)BuO)₂M-C₄(m-N₂)H₃-4-[(CMe₂)₂-N^(t)Bu]-,(^(t)BuO)₂M-C₄(m-N₂)H₃-4-[(CMe₂)₂-N^(t)Bu]-,(H₂N)₂-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-O]—, (Me₂N)₂-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-O]—,(Et₂N)₂-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-O]—,(^(n)Pr₂N)₂-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-O]—,(^(i)Pr₂N)₂-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-O]—,(^(n)Bu₂N)₂-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-O]—,(^(i)Bu₂N)₂-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-O]—,(^(s)Bu₂N)₂-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-O]—,(^(t)Bu₂N)₂-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-O]—,(H₂N)(Cp)-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-O]—,(Me₂N)(Cp)-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-O]—,(^(i)Pr₂N)(Cp)-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-O]—,(^(n)Pr₂N)(Cp)-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-O]—,(^(i)Pr₂N)(Cp)-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-O]—,(^(n)Bu₂N)(Cp)-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-O]—,(^(i)Bu₂N)(Cp)-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-O]—,(^(s)Bu₂N)(Cp)-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-O]—,(^(t)Bu₂N)(Cp)-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-O]—,(HO)₂-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-O]—, (MeO)₂-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-O]—,(EtO)₂-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-O]—,(^(n)PrO)₂-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-O]—,(^(i)PrO)₂-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-O]—,(^(n)BuO)₂-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-O]—,(^(i)BuO)₂-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-O]—,(^(s)BuO)₂-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-O]—,(^(t)BuO)₂-M-C₄(m-N₂)H₃-4-[(CMe₂)₂-O]—,(Me₂N)₂-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—NMe]-,(Et₂N)₂-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—NMe]-,(^(n)Pr₂N)₂-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—NMe]-,(^(i)Pr₂N)₂-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—NMe]-,(^(n)Bu₂N)₂-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—NMe]-,(^(i)Bu₂N)₂-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—NMe]-,(^(s)Bu₂N)₂-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—NMe]-,(^(t)Bu₂N)₂-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—NMe]-,(H₂N)(Cp)-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—NMe]-,(Me₂N)(Cp)-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—NMe]-,(Et₂N)(Cp)-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—NMe]-,(^(n)Pr₂N)(Cp)-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—NMe]-,(^(i)Pr₂N)(Cp)-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—NMe]-,(^(n)Bu₂N)(Cp)-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—NMe]-,(^(i)Bu₂N)(Cp)-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—NMe]-,(^(s)Bu₂N)(Cp)-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—NMe]-,(^(t)Bu₂N)(Cp)-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—NMe]-,(HO)₂-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—NMe]-,(MeO)₂-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—NMe]-,(EtO)₂-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—NMe]-,(^(n)PrO)₂-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—NMe]-,(^(i)PrO)₂-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—NMe]-,(^(n)BuO)₂-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—NMe]-,(^(i)BuO)₂-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—NMe]-,(^(s)BuO)₂-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—NMe]-,(^(t)BuO)₂-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—NMe]-,(H₂N)₂-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—NEt]-,(Me₂N)₂-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—NEt]-,(Et₂N)₂-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—NEt]-,(^(n)Pr₂N)₂-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—NEt]-,(^(i)Pr₂N)₂-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—NEt]-,(^(n)Bu₂N)₂-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—NEt]-,(^(i)Bu₂N)₂-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—NEt]-,(^(s)Bu₂N)₂-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—NEt]-,(^(t)Bu₂N)₂-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—NEt]-,(H₂N)(Cp)-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—NEt]-,(Me₂N)(Cp)-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—NEt]-,(Et₂N)(Cp)-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—NEt]-,(^(n)Pr₂N)(Cp)-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—NEt]-,(^(i)Pr₂N)(Cp)-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—NEt]-,(^(n)Bu₂N)(Cp)-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—NEt]-,(^(i)Bu₂N)(Cp)-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—NEt]-,(^(s)Bu₂N)(Cp)-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—NEt]-,(^(t)Bu₂N)(Cp)-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—NEt]-,(HO)₂-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—NEt]-,(MeO)₂-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—NEt]-,(EtO)₂-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—NEt]-,(^(n)PrO)₂-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—NEt]-,(^(i)PrO)₂-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—NEt]-,(^(n)BuO)₂-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—NEt]-,(^(i)BuO)₂-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—NEt]-,(^(s)BuO)₂-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—NEt]-,(^(t)BuO)₂-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—NEt]-,(H₂N)₂-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—N^(n)Pr]—,(Me₂N)₂-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—N^(n)Pr]—,(Et₂N)₂-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—N^(n)Pr]—,(^(n)Pr₂N)₂-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—N^(n)Pr]—,(^(i)Pr₂N)₂-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—N^(n)Pr]—,(^(n)Bu₂N)₂-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—N^(n)Pr]—,(^(i)Bu₂N)₂-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—N^(n)Pr]—,(^(s)Bu₂N)₂-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—N^(n)Pr]—,(^(t)Bu₂N)₂-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—N^(n)Pr]—,(H₂N)(Cp)-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—N^(n)Pr]—,(Me₂N)(Cp)-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—N^(n)Pr]—,(Et₂N)(Cp)-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—N^(n)Pr]—,(^(n)Pr₂N)(Cp)-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—N^(n)Pr]—,(^(i)Pr₂N)(Cp)-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—N^(n)Pr]—,(^(n)Bu₂N)(Cp)-M-C₄(m-N₂)Me₃-4-[CH₂)₂—N^(n)Pr]—,(^(i)Bu₂N)(Cp)-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—N^(n)Pr]—,(^(s)Bu₂N)(Cp)-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—N^(n)Pr]—,(^(t)Bu₂N)(Cp)-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—N^(n)Pr]—,(HO)₂-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—N^(n)Pr]—,(MeO)₂-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—N^(n)Pr]—,(EtO)₂-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—N^(n)Pr]—,(^(n)PrO)₂-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—N^(n)Pr]—,(^(i)PrO)₂-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—N^(n)Pr]—,(^(n)BuO)₂-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—N^(n)Pr]—,(^(i)BuO)₂-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—N^(n)Pr]—,(^(s)BuO)₂-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—N^(n)Pr]—,(^(t)BuO)₂-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—N^(n)Pr]—,(H₂N)₂-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—N^(i)Pr]—,(Me₂N)₂-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—N^(i)Pr]—,(Et₂N)₂-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—N^(i)Pr]—,(^(n)Pr₂N)₂-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—N^(i)Pr]—,(^(i)Pr₂N)₂-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—N^(i)Pr]—,(^(n)Bu₂N)₂-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—N^(i)Pr]—,(^(i)Bu₂N)₂-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—N^(i)Pr]—,(^(s)Bu₂N)₂-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—N^(i)Pr]—,(^(t)Bu₂N)₂-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—N^(i)Pr]—,(H₂N)(Cp)-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—N^(i)Pr]—,(Me₂N)(Cp)-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—N^(i)Pr]—,(Et₂N)(Cp)-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—N^(i)Pr]—,(^(n)Pr₂N)(Cp)-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—N^(i)Pr]—,(^(i)Pr₂N)(Cp)-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—N^(i)Pr]—,(^(n)Bu₂N)(Cp)-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—N^(i)Pr]—,(^(i)Bu₂N)(Cp)-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—N^(i)Pr]—,(^(s)Bu₂N)(Cp)-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—N^(i)Pr]—,(^(t)Bu₂N)(Cp)-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—N^(i)Pr]—,(HO)₂-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—N^(i)Pr]—,(MeO)₂-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—N^(i)Pr]—,(EtO)₂-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—N^(i)Pr]—,(^(n)PrO)₂-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—N^(i)Pr]—,(^(i)PrO)₂-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—N^(i)Pr]—,(^(n)BuO)₂-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—N^(i)Pr]—,(^(i)BuO)₂-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—N^(i)Pr]—,(^(s)BuO)₂-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—N^(i)Pr]—,(^(t)BuO)₂-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—N^(i)Pr]—,(H₂N)₂-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—N^(n)Bu]-,(Me₂N)₂-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—N^(n)Bu]-,(Et₂N)₂-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—N^(n)Bu]-,(^(n)Pr₂N)₂-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—N^(n)Bu]-,(^(i)Pr₂N)₂-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—N^(n)Bu]-,(^(n)Bu₂N)₂-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—N^(n)Bu]-,(^(i)Bu₂N)₂-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—N^(n)Bu]-,(^(s)Bu₂N)₂-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—N^(n)Bu]-,(^(t)Bu₂N)₂-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—N^(n)Bu]-,(H₂N)(Cp)-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—N^(n)Bu]-,(Me₂N)(Cp)-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—N^(n)Bu]-,(Et₂N)(Cp)-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—N^(n)Bu]-,(^(n)Pr₂N)(Cp)-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—N^(n)Bu]-,(^(i)Pr₂N)(Cp)-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—N^(n)Bu]-,(^(n)Bu₂N)(Cp)-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—N^(n)Bu]-,(^(i)Bu₂N)(Cp)-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—N^(n)Bu]-,(^(s)Bu₂N)(Cp)-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—N^(n)Bu]-,(^(i)Bu₂N)(Cp)-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—N^(n)Bu]-,(HO)₂-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—N^(n)Bu]-,(MeO)₂-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—N^(n)Bu]-,(EtO)₂-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—N^(n)Bu]-,(^(n)PrO)₂-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—N^(n)Bu]-,(^(i)PrO)₂-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—N^(n)Bu]-,(^(n)BuO)₂-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—N^(n)Bu]-,(^(i)BuO)₂-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—N^(n)Bu]-,(^(s)BuO)₂-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—N^(n)Bu]-,(^(t)BuO)₂-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—N^(n)Bu]-,(H₂N)₂-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—N^(i)Bu]-,(Me₂N)₂-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—N^(i)Bu]-,(Et₂N)₂-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—N^(i)Bu],(^(n)Pr₂N)₂-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—N^(i)Bu],(^(i)Pr₂N)₂-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—N^(i)Bu]-,(^(n)Bu₂N)₂-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—N^(i)Bu]-,(^(i)Bu₂N)₂-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—N^(i)Bu]-,(^(s)Bu₂N)₂M-C₄(m-N₂)Me₃-4-[(CH₂)₂—N^(i)Bu]-,(^(t)Bu₂N)₂M-C₄(m-N₂)Me₃-4-[(CH₂)₂—N^(i)Bu]-,(H₂N)(Cp)-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—N^(i)Bu]-,(Me₂N)(Cp)-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—N^(i)Bu]-,(Et₂N)(Cp)-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—N^(i)Bu],(^(n)Pr₂N)(Cp)-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—N^(i)Bu],(^(i)Pr₂N)(Cp)-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—N^(i)Bu]-,(^(n)Bu₂N)(Cp)-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—N^(i)Bu]-,(^(i)Bu₂N)(Cp)-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—N^(i)Bu]-,(^(s)Bu₂N)(Cp)-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—N^(i)Bu],(^(t)Bu₂N)(Cp)-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—N^(i)Bu]-,(HO)₂-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—N^(i)Bu]-,(MeO)₂-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—N^(i)Bu]-,(EtO)₂-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—N^(i)Bu],(^(n)PrO)₂-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—N^(i)Bu],(^(i)PrO)₂-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—N^(i)Bu],(^(n)BuO)₂-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—N^(i)Bu],(^(i)BuO)₂-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—N^(i)Bu],(^(s)BuO)₂-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—N^(i)Bu],(^(t)BuO)₂-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—N^(i)Bu]-,(H₂N)₂-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—N^(s)Bu]-,(Me₂N)₂-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—N^(s)Bu]-,(Et₂N)₂-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—N^(s)Bu]-,(^(n)Pr₂N)₂-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—N^(s)Bu]-,(^(i)Pr₂N)₂-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—N^(s)Bu]-,(^(n)Bu₂N)₂-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—N^(s)Bu]-,(^(i)Bu₂N)₂-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—N^(s)Bu]-,(^(s)Bu₂N)₂-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—N^(s)Bu]-,(^(i)Bu₂N)₂-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—N^(s)Bu]-,(H₂N)(Cp)-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—N^(s)Bu]-,(Me₂N)(Cp)-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—N^(s)Bu]-,(Et₂N)(Cp)-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—N^(s)Bu]-,(^(n)Pr₂N)(Cp)-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—N^(s)Bu]-,(^(i)Pr₂N)(Cp)-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—N^(s)Bu]-,(^(n)Bu₂N)(Cp)-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—N^(s)Bu]-,(^(i)Bu₂N)(Cp)-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—N^(s)Bu]-,(^(s)Bu₂N)(Cp)-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—N^(s)Bu]-,(^(t)Bu₂N)(Cp)-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—N^(s)Bu]-,(HO)₂-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—N^(s)Bu]-,(MeO)₂-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—N^(s)Bu]-,(EtO)₂-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—N^(s)Bu]-,(^(n)PrO)₂-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—N^(s)Bu]-,(^(i)PrO)₂-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—N^(s)Bu]-,(^(n)BuO)₂-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—N^(s)Bu]-,(^(i)BuO)₂-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—N^(s)Bu]-,(^(s)BuO)₂-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—N^(s)Bu]-,(^(t)BuO)₂-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—N^(s)Bu]-,(H₂N)₂-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—N^(t)Bu]-,(Me₂N)₂-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—N^(t)Bu]-,(Et₂N)₂-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—N^(t)Bu]-,(^(n)Pr₂N)₂-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—N^(t)Bu]-,(^(i)Pr₂N)₂-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—N^(t)Bu]-,(^(n)Bu₂N)₂-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—N^(t)Bu]-,(Bu₂N)₂-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—N^(t)Bu]-,(^(s)Bu₂N)₂-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—N^(t)Bu]-,(^(t)Bu₂N)₂-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—N^(t)Bu]-,(H₂N)(Cp)-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—N^(t)Bu]-,(Me₂N)(Cp)-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—N^(t)Bu]-,(Et₂N)(Cp)-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—N^(t)Bu]-,(^(n)Pr₂N)(Cp)-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—N^(t)Bu]-,(^(i)Pr₂N)(Cp)-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—N^(t)Bu]-,(^(n)Bu₂N)(Cp)-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—N^(t)Bu]-,(^(i)Bu₂N)(Cp)-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—N^(t)Bu]-,(^(s)Bu₂N)(Cp)-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—N^(t)Bu]-,(^(t)Bu₂N)(Cp)-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—N^(t)Bu]-,(HO)₂-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—N^(t)Bu]-,(MeO)₂-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—N^(t)Bu]-,(EtO)₂-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—N^(t)Bu]-,(^(n)PrO)₂-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—N^(t)Bu]-,(^(i)PrO)₂-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—N^(t)Bu]-,(^(n)BuO)₂-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—N^(t)Bu]-,(^(i)BuO)₂-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—N^(t)Bu]-,(^(s)BuO)₂-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—N^(t)Bu]-,(^(t)BuO)₂-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—N^(t)Bu]-,(H₂N)₂-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—O]—, (Me₂N)₂-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—O]—,(Et₂N)₂-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—O]—,(^(n)Pr₂N)₂-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—O]—,(^(i)Pr₂N)₂-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—O]—,(^(n)Bu₂N)₂-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—O]—,(^(i)Bu₂N)₂-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—O]—,(^(s)Bu₂N)₂-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—O]—,(^(t)Bu₂N)₂-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—O]—,(H₂N)(Cp)-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—O]—,(Me₂N)(Cp)-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—O]—,(Et₂N)(Cp)-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—O]—,(^(n)Pr₂N)(Cp)-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—O]—,(^(i)Pr₂N)(Cp)-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—O]—,(^(n)Bu₂N)(Cp)-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—O]—,(^(i)Bu₂N)(Cp)-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—O]—,(^(s)Bu₂N)(Cp)-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—O]—,(^(t)Bu₂N)(Cp)-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—O]—,(HO)₂-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—O]—, (MeO)₂-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—O]—,(EtO)₂-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—O]—,(^(n)PrO)₂-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—O]—,(^(i)PrO)₂-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—O]—,(^(n)BuO)₂-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—O]—,(^(i)BuO)₂-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—O]—,(^(s)BuO)₂-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—O]—,(^(t)BuO)₂-M-C₄(m-N₂)Me₃-4-[(CH₂)₂—O]—,(Me₂N)₂-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-NMe]-,(Et₂N)₂-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-NMe]-,(^(n)Pr₂N)₂-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-NMe]-,(^(i)Pr₂N)₂-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-NMe]-,(^(n)Bu₂N)₂-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-NMe]-,(^(i)Bu₂N)₂-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-NMe]-,(^(s)Bu₂N)₂-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-NMe]-,(^(t)Bu₂N)₂-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-NMe]-,(H₂N)(Cp)-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-NMe]-,(Me₂N)(Cp)-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-NMe]-,(Et₂N)(Cp)-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-NMe]-,(^(n)Pr₂N)(Cp)-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-NMe]-,(^(i)Pr₂N)(Cp)-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-NMe]-,(^(n)Bu₂N)(Cp)-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-NMe]-,(^(i)Bu₂N)(Cp)-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-NMe]-,(^(s)Bu₂N)(Cp)-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-NMe]-,(^(t)Bu₂N)(Cp)-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-NMe]-,(HO)₂-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-NMe]-,(MeO)₂-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂—NMe]-,(EtO)₂-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-NMe]-,(^(n)PrO)₂-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-NMe]-,(^(i)PrO)₂-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-NMe]-,(^(n)BuO)₂-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-NMe]-,(^(i)BuO)₂-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-NMe]-,(^(s)BuO)₂-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-NMe]-,(^(t)BuO)₂-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-NMe]-,(H₂N)₂-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-NEt]-,(Me₂N)₂-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-NEt]-,(Et₂N)₂-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-NEt]-,(^(n)Pr₂N)₂-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-NEt]-,(^(i)Pr₂N)₂-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-NEt]-,(^(n)Bu₂N)₂-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-NEt]-,(^(i)Bu₂N)₂-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-NEt]-,(^(s)Bu₂N)₂-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-NEt]-,(^(t)Bu₂N)₂-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-NEt]-,(H₂N)(Cp)-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-NEt]-,(Me₂N)(Cp)-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-NEt]-,(Et₂N)(Cp)-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-NEt]-,(^(n)Pr₂N)(Cp)-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-NEt]-,(^(i)Pr₂N)(Cp)-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-NEt]-,(^(n)Bu₂N)(Cp)-M-C₄(m-N₂)Me-4-[(CMe₂)₂-NEt]-,(^(i)Bu₂N)(Cp)-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-NEt]-,(^(s)Bu₂N)(Cp)-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-NEt]-,(^(t)Bu₂N)(Cp)-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-NEt]-,(HO)₂-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-NEt]-,(MeO)₂-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-NEt]-,(EtO)₂-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-NEt]-,(^(n)PrO)₂-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-NEt]-,(^(i)PrO)₂-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-NEt]-,(^(n)BuO)₂-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-NEt]-,(^(i)BuO)₂-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-NEt]-,(^(s)BuO)₂-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-NEt]-,(^(t)BuO)₂-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-NEt]-,(H₂N)₂-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-N^(n)Pr]—,(Me₂N)₂-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-N^(n)Pr]—,(Et₂N)₂-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-N^(n)Pr]—,(^(n)Pr₂N)₂-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-N^(n)Pr]—,(^(i)Pr₂N)₂-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-N^(n)Pr]—,(^(n)Bu₂N)₂-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-N^(n)Pr]—,(^(i)Bu₂N)₂-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-N^(n)Pr]—,(^(s)Bu₂N)₂-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-N^(n)Pr]—,(^(t)Bu₂N)₂-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-N^(n)Pr]—,(H₂N)(Cp)-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-N^(n)Pr]—,(Me₂N)(Cp)-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-N^(n)Pr]—,(Et₂N)(Cp)-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-N^(n)Pr]—,(^(n)Pr₂N)(Cp)-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-N^(n)Pr]—,(^(i)Pr₂N)(Cp)-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-N^(n)Pr]—,(^(n)Bu₂N)(Cp)-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-N^(n)Pr]—,(^(i)Bu₂N)(Cp)-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-N^(n)Pr]—,(^(s)Bu₂N)(Cp)-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-N^(n)Pr]—,(^(t)Bu₂N)(Cp)-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-N^(n)Pr]—,(HO)₂-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-N^(n)Pr]—,(MeO)₂-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-N^(n)Pr]—,(EtO)₂-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-N^(n)Pr]—,(^(n)PrO)₂-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-N^(n)Pr]—,(^(i)PrO)₂-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-N^(n)Pr]—,(^(n)BuO)₂-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-N^(n)Pr]—,(^(i)BuO)₂M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-N^(n)Pr]—,(^(s)BuO)₂M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-N^(n)Pr]—,(^(t)BuO)₂-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-N^(n)Pr]—,(H₂N)₂-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-N^(i)Pr]—,(Me₂N)₂-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-N^(i)Pr]—,(Et₂N)₂-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-N^(i)Pr]—,(^(n)Pr₂N)₂-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-N^(i)Pr]—,(^(i)Pr₂N)₂-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-N^(i)Pr]—,(^(n)Bu₂N)₂-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-N^(i)Pr]—,(^(i)Bu₂N)₂-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-N^(i)Pr]—,(^(s)Bu₂N)₂-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-N^(i)Pr]—,(^(t)Bu₂N)₂-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-N^(i)Pr]—,(H₂N)(Cp)-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-N^(i)Pr]—,(Me₂N)(Cp)-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-N^(i)Pr]—,(Et₂N)(Cp)-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-N^(i)Pr]—,(^(n)Pr₂N)(Cp)-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-N^(i)Pr]—,(^(i)Pr₂N)(Cp)-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-N^(i)Pr]—,(^(n)Bu₂N)(Cp)-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-N^(i)Pr]—,(^(i)Bu₂N)(Cp)-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-N^(i)Pr]—,(^(s)Bu₂N)(Cp)-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-N^(i)Pr]—,(^(t)Bu₂N)(Cp)-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-N^(i)Pr]—,(HO)₂-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-N^(i)Pr]—,(MeO)₂-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-N^(i)Pr]—,(EtO)₂-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-N^(i)Pr]—,(^(n)PrO)₂-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-N^(i)Pr]—,(^(i)PrO)₂-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-N^(i)Pr]—,(^(n)BuO)₂-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-N^(i)Pr]—,(^(i)BuO)₂-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-N^(i)Pr]—,(^(s)BuO)₂-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-N^(i)Pr]—,(^(t)BuO)₂-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-N^(i)Pr]—,(H₂N)₂-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-N^(n)Bu]-,(Me₂N)₂-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-N^(n)Bu]-,(Et₂N)₂-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-N^(n)Bu]-,(^(n)Pr₂N)₂-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-N^(n)Bu]-,(^(i)Pr₂N)₂-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-N^(n)Bu]-,(^(n)Bu₂N)₂-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-N^(n)Bu]-,(^(i)Bu₂N)₂-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-N^(n)Bu]-,(^(s)Bu₂N)₂-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-N^(n)Bu]-,(^(t)Bu₂N)₂-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-N^(n)Bu]-,(H₂N)(Cp)-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-N^(n)Bu]-,(Me₂N)(Cp)-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-N^(n)Bu]-,(Et₂N)(Cp)-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-N^(n)Bu]-,(^(n)Pr₂N)(Cp)-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-N^(n)Bu]-,(^(i)Pr₂N)(Cp)-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-N^(n)Bu]-,(^(n)Bu₂N)(Cp)-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-N^(n)Bu]-,(^(i)Bu₂N)(Cp)-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-N^(n)Bu]-,(^(s)Bu₂N)(Cp)-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-N^(n)Bu]-,(^(t)Bu₂N)(Cp)-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-N^(n)Bu]-,(HO)₂-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-N^(n)Bu]-,(MeO)₂-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-N^(n)Bu]-,(EtO)₂-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-N^(n)Bu]-,(^(n)PrO)₂-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-N^(n)Bu]-,(^(i)PrO)₂-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-N^(n)Bu]-,(^(n)BuO)₂-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-N^(n)Bu]-,(^(i)BuO)₂-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-N^(n)Bu]-,(^(s)BuO)₂-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-N^(n)Bu]-,(^(t)BuO)₂-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-N^(n)Bu]-,(H₂N)₂-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-N^(i)Bu]-,(Me₂N)₂-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-N^(i)Bu]-,(Et₂N)₂-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-N^(i)Bu]-,(^(n)Pr₂N)₂-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-N^(i)Bu]-,(^(i)Pr₂N)₂-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-N^(i)Bu]-,(^(n)Bu₂N)₂-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-N^(i)Bu]-,(^(i)Bu₂N)₂-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-N^(i)Bu]-,(^(s)Bu₂N)₂-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-N^(i)Bu]-,(^(t)Bu₂N)₂-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-N^(i)Bu]-,(H₂N)(Cp)-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-N^(i)Bu]-,(Me₂N)(Cp)-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-N^(i)Bu]-,(Et₂N)(Cp)-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-N^(i)Bu]-,(^(n)Pr₂N)(Cp)-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-N^(i)Bu]-,(^(i)Pr₂N)(Cp)-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-N^(i)Bu]-,(^(n)Bu₂N)(Cp)-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-N^(i)Bu]-,(^(i)Bu₂N)(Cp)-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-N^(i)Bu]-,(^(s)Bu₂N)(Cp)-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-N^(i)Bu]-,(^(i)Bu₂N)(Cp)-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-N^(i)Bu]-,(HO)₂-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-N^(i)Bu]-,(MeO)₂-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-N^(i)Bu]-,(EtO)₂-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-N^(i)Bu]-,(^(n)PrO)₂-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-N^(i)Bu]-,(^(i)PrO)₂-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-N^(i)Bu]-,(^(n)BuO)₂-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-N^(i)Bu]-,(^(i)BuO)₂-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-N^(i)Bu]-,(^(s)BuO)₂-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-N^(i)Bu]-,(^(t)BuO)₂-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-N^(i)Bu]-,(H₂N)₂-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-N^(s)Bu]-,(Me₂N)₂-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-N^(s)Bu]-,(Et₂N)₂-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-N^(s)Bu]-,(^(n)Pr₂N)₂-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-N^(s)Bu]-,(^(i)Pr₂N)₂-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-N^(s)Bu]-,(^(n)Bu₂N)₂-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-N^(s)Bu]-,(^(i)Bu₂N)₂-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-N^(s)Bu]-,(^(s)Bu₂N)₂-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-N^(s)Bu]-,(^(i)Bu₂N)₂-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-N^(s)Bu]-,(H₂N)(Cp)-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-N^(s)Bu]-,(Me₂N)(Cp)-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-N^(s)Bu]-,(Et₂N)(Cp)-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-N^(s)Bu]-,(^(n)Pr₂N)(Cp)-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-N^(s)Bu]-,(^(i)Pr₂N)(Cp)-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-N^(s)Bu]-,(^(n)Bu₂N)(Cp)-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-N^(s)Bu]-,(^(i)Bu₂N)(Cp)-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-N^(s)Bu]-,(^(s)Bu₂N)(Cp)-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-N^(s)Bu]-,(^(t)Bu₂N)(Cp)-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-N^(s)Bu]-,(HO)₂-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-N^(s)Bu]-,(MeO)₂-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-N^(s)Bu]-,(EtO)₂-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-N^(s)Bu]-,(^(n)PrO)₂-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-N^(s)Bu]-,(^(i)PrO)₂-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-N^(s)Bu]-,(^(n)BuO)₂-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-N^(s)Bu]-,(^(t)BuO)₂-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-N^(s)Bu]-,(^(s)BuO)₂M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-N^(s)Bu]-,(^(t)BuO)₂-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-N^(s)Bu]-,(H₂N)₂-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-N^(t)Bu]-,(Me₂N)₂-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-N^(t)Bu]-,(Et₂N)₂-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-N^(t)Bu]-,(^(n)Pr₂N)₂-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-N^(t)Bu]-,(^(i)Pr₂N)₂-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-N^(t)Bu]-,(^(n)Bu₂N)₂-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-N^(t)Bu]-,(^(i)Bu₂N)₂-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-N^(t)Bu]-,(^(s)Bu₂N)₂-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-N^(t)Bu]-,(^(t)Bu₂N)₂-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-N^(t)Bu]-,(H₂N)(Cp)-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-N^(t)Bu]-,(Me₂N)(Cp)-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-N^(t)Bu]-,(Et₂N)(Cp)-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-N^(t)Bu]-,(^(n)Pr₂N)(Cp)-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-N^(t)Bu]-,(H₂N)(Cp)-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-N^(t)Bu]-,(^(n)Bu₂N)(Cp)-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-N^(t)Bu]-,(^(i)Bu₂N)(Cp)-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-N^(t)Bu]-,(^(s)Bu₂N)(Cp)-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-N^(t)Bu]-,(^(t)Bu₂N)(Cp)-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-N^(t)Bu]-,(HO)₂-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-N^(t)Bu]-,(MeO)₂-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-N^(t)Bu]-,(EtO)₂-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-N^(t)Bu]-,(^(n)PrO)₂-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-N^(t)Bu]-,(^(i)PrO)₂-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-N^(t)Bu]-,(^(n)BuO)₂-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-N^(t)Bu]-,(^(i)BuO)₂-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-N^(t)Bu]-,(^(s)BuO)₂-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-N^(t)Bu]-,(^(t)BuO)₂-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-N^(t)Bu]-,(H₂N)₂-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-O]—,(Me₂N)₂-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-O]—,(Et₂N)₂-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-O]—,(^(n)Pr₂N)₂-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-O]—,(^(i)Pr₂N)₂-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-O]—,(^(n)Bu₂N)₂-M-C₄(M-N₂)Me₃-4-[(CMe₂)₂-O]—,(^(i)Bu₂N)₂-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-O]—,(^(s)Bu₂N)₂-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-O]—,(^(t)Bu₂N)₂-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-O]—,(H₂N)(Cp)-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-O]—,(Me₂N)(Cp)-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-O]—,(Et₂N)(Cp)-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-O]—,(^(n)Pr₂N)(Cp)-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-O]—,(H₂N)(Cp)-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-O]—,(^(n)Bu₂N)(Cp)-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-O]—,(^(i)Bu₂N)(Cp)-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-O]—,(^(s)Bu₂N)(Cp)-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-O]—,(^(t)Bu₂N)(Cp)-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-O]—,(HO)₂-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-O]—, (MeO)₂-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-O]—,(EtO)₂-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-O]—,(^(n)PrO)₂-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-O]—,(^(i)PrO)₂-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-O]—,(^(n)BuO)₂-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-O]—,(^(i)BuO)₂-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-O]—,(^(s)BuO)₂-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-O]—, and(^(t)BuO)₂-M-C₄(m-N₂)Me₃-4-[(CMe₂)₂-O]—, wherein M is Ti, Zr or Hfbonded in an η⁵ or η⁶ if bonding mode to the five- or six-memberedaromatic group; N may be replaced with Si, B, P or O; and carbons otherthan those in the five- or six-membered aromatic group may be replacewith Si, B or P.

One of ordinary skill in the art would recognize the five- orsix-membered aromatic group may have carbon replacements (i.e., hereinA=N, Si, B, P, or O) at 1,2 positions (i.e., ortho- or o-). One ofordinary skill in the art would also recognize the five- or six-memberedaromatic group may have an Et, or ^(i)Pr substitution bonded to a carbonin the five- or six-aromatic group.

Preferred Group 4 transition metal precursors include but not limited to(NMe₂)₂-Ti-Pyrrole-(CH₂—CH₂—NMe)-, (NMe₂)₂-Ti-Pyrazole-(CH₂—CH₂—NMe)-,(NMe₂)₂-Ti-Imdazole-(CH₂—CH₂—NMe)-,(NMe₂)(Cp)-Ti-Pyrrole-(CH₂—CH₂—NMe)-,(NMe₂)(Cp)-Ti-Pyrazole-(CH₂—CH₂—NMe)-,(NMe₂)(Cp)-Ti-Imdazole-(CH₂—CH₂—NMe)-,(NMe₂)₂-Zr-Pyrrole-(CH₂—CH₂—NMe)-, (NMe₂)₂-Zr-Pyrazole-(CH₂—CH₂—NMe)-,(NMe₂)₂-Zr-Imdazole-(CH₂—CH₂—NMe)-,(NMe₂)(Cp)-Zr-Pyrrole-(CH₂—CH₂—NMe)-,(NMe₂)(Cp)-Zr-Pyrazole-(CH₂—CH₂—NMe)-,(NMe₂)(Cp)-Zr-Imdazole-(CH₂—CH₂—NMe)-,(NMe₂)₂-Hf-Pyrrole-(CH₂—CH₂—NMe)-, (NMe₂)₂-Hf-Pyrazole-(CH₂—CH₂—NMe)-,(NMe₂)₂-Hf-Imdazole-(CH₂—CH₂—NMe)-,(NMe₂)(Cp)-Hf-Pyrrole-(CH₂—CH₂—NMe)-,(NMe₂)(Cp)-Hf-Pyrazole-(CH₂—CH₂—NMe)-, and(NMe₂)(Cp)-Hf-Imdazole-(CH₂—CH₂—NMe)-.

The inventors recognize that the disclosed Group 4 transition metalprecursors having the above structures, i.e., having bridge between theheterocyclic aromatic group (i.e., the aromatic group contains one ortwo N, Si, B or P atoms) and the Group 4 transition metal, and onenitrogen or oxygen in the bridge, may provide similar or even higherthermal stability than the Cp-amino bridged precursors of U.S. Pat. No.8,946,096, for example, having stable thermal stability and high vaporpressure. In addition, the liquid state of the disclosed Group 4transition metal precursors may be used in direct liquid injection (DLI)where the precursor is fed in a liquid state and then vaporized beforeit is introduced into a reactor.

The Group 4 transition metal precursors may exhibit (i) sufficientvolatility to provide a rapid and reproducible delivery into thereaction chamber from the vessel in which they are stored, (ii) highthermal stability to avoid decomposition during the storage in thecanister and to enable self limiting growth in ALD mode at hightemperature, typically >275° C., (iii) appropriate reactivity toward thesubstrate terminal functions and with the reacting gas to an easyconversion into the desired film, and (iv) high purity to obtain a filmwith low impurities.

While precursors are ideally liquids and vaporized in bubblers or directliquid injection systems, the use of solid precursors for ALD and CVDprecursor vaporization is also possible using sublimators such as onesdisclosed in PCT Publication WO2009/087609 to Xu et al. Alternatively,solid precursors may be mixed or dissolved in a solvent to reach ausable melting point and viscosity for usage by Direct Liquid Injectionsystems.

Preferably, the R in the Group 4 transition metal precursors is H or Meon the aromatic group because of their excellent vaporization results inatmospheric thermogravimetric analysis, leaving a small amount of finalresidue.

The disclosed Group 4 transition metal precursors may be synthesized byreacting at low temperature the corresponding halogenated Group 4transition metal-containing R group compound (i.e., RMX₃, wherein R andM are defined above and X is Cl, Br, or I) with the correspondingalkanolamine and alkylamine in a suitable solvent, such asdichloromethane, THF or ether. The RMX₃, alkanolamine, and alkylamineare commercially available. After completion of the addition, themixture warms to room temperature with stirring. The solvent is removedunder vacuum. The residue is dissolved in a solvent, such as toluene.The resulting mixture is filtered. Removal of the solvent produces thecrude Group 4 transition metal-containing precursor.

Alternatively, the disclosed Group 4 transition metal precursors may besynthesized by reacting at low temperature the corresponding Group 4transition metal-containing alkoxy and R group compound (i.e.,RM(OR″)₃), wherein R and M are defined above and R″ is a C₁-C₆ alkylgroup) with the corresponding alkanolamine in a suitable solvent, suchas heptanes, dichloromethane, THF or ether. The RM(OR″)₃ andalkanolamine are commercially available. After completion of theaddition, the mixture warms to room temperature with stirring. Thesolvent is removed under vacuum to produce the crude Group 4 transitionmetal-containing precursor.

In another alternative, the disclosed Group 4 transition metalprecursors may be synthesized by reacting at low temperature thecorresponding Group 4 transition metal-containing amide and R groupcompound (i.e., RM(NR′″₂)₃), wherein R and M are defined above and R′″is a C₁-C₆ alkyl group) with the corresponding alkanolamine in asuitable solvent, such as heptanes, dichloromethane, THF or ether. TheRM(NR′″₂)₃ and alkanolamine are commercially available. After completionof the addition, the mixture warms to room temperature with stirring.The solvent is removed under vacuum to produce the crude Group 4transition metal-containing precursor.

In another alternative, the disclosed Group 4 transition metalprecursors may be synthesized by reacting at low temperature thecorresponding Group 4 transition metal-containing amide (i.e.,M(NR′″₂)₄), wherein M is defined above and R′″ is a C1-C4 alkyl group)with the corresponding Cp-containing amine or Cp*-containing amine in asuitable solvent, such as toluene, heptanes, dichloromethane, THF orether. The M(NR′″₂)₄ and Cp-containing amine or Cp*-containing amine arecommercially available. After completion of the addition, the mixturewarms to room temperature with stirring. The solvent is removed undervacuum to produce the crude Group 4 transition metal-containingprecursor.

In another alternative, the disclosed Group 4 transition metalprecursors may be synthesized by reacting at low temperature thecorresponding Group 4 transition metal-containing amide (i.e.,M(NR′″₂)₄), wherein M is defined above and R′″ is a C1-C4 alkyl group)with the corresponding A-containing aromatic amine or heterocyclic aminein a suitable solvent, such as toluene, heptanes, dichloromethane, THFor ether, wherein A is defined above. The M(NR′″₂)₄ and A-containingaromatic amine are commercially available. After completion of theaddition, the mixture warms to room temperature with stirring. Thesolvent is removed under vacuum to produce the crude Group 4 transitionmetal-containing precursor.

In another alternative, the disclosed Group 4 transition metalprecursors may be synthesized by reacting at low temperature M(RCp)₃X(X=Cl, Br or I) with the corresponding alkanolamine and/or alkylamine ina suitable solvent, such as dichloromethane, THF or ether, wherein M andR are defined above. The alkanolamine and/or alkylamine are commerciallyavailable. After completion of the addition, the mixture warms to roomtemperature with stirring. The solvent is removed under vacuum toproduce the crude Group 4 transition metal-containing precursor.

In another alternative, the disclosed Group 4 transition metalprecursors may be synthesized by reacting at low temperature M(R¹Cp)₄(where X=Cl, Br or I) with the corresponding alkanolamine and/oralkylamine in a suitable solvent, such as dichloromethane, THF or ether,wherein M and R are defined above. The alkanolamine and/or alkylamineare commercially available. After completion of the addition, themixture warms to room temperature with stirring. The solvent is removedunder vacuum to produce the crude Group 4 transition metal-containingprecursor.

To ensure process reliability, the Group 4 transition metal-containingfilm forming compositions may be purified by continuous or fractionalbatch distillation or sublimation prior to use to a purity ranging fromapproximately 93% w/w to approximately 100% w/w, preferably ranging fromapproximately 99% w/w to approximately 100% w/w. The Group 4 transitionmetal-containing film forming compositions may contain any of thefollowing impurities: undesired congeneric species; solvents;chlorinated metal compounds; or other reaction products. In onealternative, the total quantity of these impurities is below 0.1% w/w.

The concentration of each of hexane, pentane, dimethyl ether, or anisolein the purified Group 4 transition metal-containing film formingcompositions may range from approximately 0% w/w to approximately 5%w/w, preferably from approximately 0% w/w to approximately 0.1% w/w.Solvents may be used in the composition's synthesis. Separation of thesolvents from the precursor may be difficult if both have similarboiling points. Cooling the mixture may produce solid precursor inliquid solvent, which may be separated by filtration. Vacuumdistillation may also be used, provided the precursor product is notheated above approximately its decomposition point.

In one alternative, the disclosed Group 4 transition metal-containingfilm forming compositions contain less than 5% v/v, preferably less than1% v/v, more preferably less than 0.1% v/v, and even more preferablyless than 0.01% v/v of any of its undesired congeneric species,reactants, or other reaction products. This alternative may providebetter process repeatability. This alternative may be produced bydistillation of the Group 4 transition metal precursors.

In another alternative, the disclosed Group 4 transitionmetal-containing film forming compositions may contain between 5% v/vand 50% v/v of one or more of cogeneric Group 4 transition metalprecursors, reactants, or other reaction products, particularly when themixture provides improved process parameters or isolation of the targetcompound is too difficult or expensive. For example, a mixture of twoGroup 4 transition metal precursors may produce a stable, liquid mixturesuitable for vapor deposition.

The concentration of trace metals and metalloids in the purified Group 4transition metal-containing film forming compositions may each rangefrom approximately 0 ppb to approximately 100 ppb, and more preferablyfrom approximately 0 ppb to approximately 10 ppb. These metal impuritiesinclude, but are not limited to, Aluminum (Al), Arsenic (As), Barium(Ba), Beryllium (Be), Bismuth (Bi), Cadmium (Cd), Calcium (Ca), Chromium(Cr), Cobalt (Co), Copper (Cu), Gallium (Ga), Germanium (Ge), Hafnium(Hf), Zirconium (Zr), Indium (In), Iron (Fe), Lead (Pb), Lithium (Li),Magnesium (Mg), Manganese (Mn), Tungsten (W), Nickel (Ni), Potassium(K), Sodium (Na), Strontium (Sr), Thorium (Th), Tin (Sn), Titanium (Ti),Uranium (U), Vanadium (V) and Zinc (Zn).

Also disclosed are methods for forming Group 4 transitionmetal-containing layers on a substrate using a vapor deposition process.The method may be useful in the manufacture of semiconductor,photovoltaic, LCD-TFT, or flat panel type devices. The disclosed Group 4transition metal-containing film forming compositions may be used todeposit thin Group 4 transition metal-containing films using anydeposition methods known to those of skill in the art. Examples ofsuitable vapor deposition methods include chemical vapor deposition(CVD) or atomic layer deposition (ALD). Exemplary CVD methods includethermal CVD, plasma enhanced CVD (PECVD), pulsed CVD (PCVD), lowpressure CVD (LPCVD), sub-atmospheric CVD (SACVD) or atmosphericpressure CVD (APCVD), hot-wire CVD (HWCVD, also known as cat-CVD, inwhich a hot wire serves as an energy source for the deposition process),radicals incorporated CVD, and combinations thereof. Exemplary ALDmethods include thermal ALD, plasma enhanced ALD (PEALD), spatialisolation ALD, hot-wire ALD (HWALD), radicals incorporated ALD, andcombinations thereof. Super critical fluid deposition may also be used.The deposition method is preferably ALD, spatial ALD, or PE-ALD toprovide suitable step coverage and film thickness control. Additionally,the disclosed Group 4 transition metal-containing film formingcompositions are particularly suitable for ALD processes because theirthermal stability enables perfect self-limited growth.

Applicants believe the N-M bond of the disclosed Group 4 transitionmetal precursors may stabilize the precursor making it thermally robust,which may help during conformal ALD deposition in high aspect ratiostructures. The O-M bond may provide good reactivity to any hydroxylgroups on the substrate surface, permitting the required physi- orchemi-sorption desired in ALD deposition. Finally, when R is Cp(substituted or not), Applicants believe that the Cp may remain like anumbrella over the M atom on the surface and ensure perfect self ALDgrowth.

The disclosed Group 4 transition metal-containing film formingcomposition may be supplied either neat or may further comprise asuitable solvent, such as ethyl benzene, xylene, mesitylene, decane,and/or dodecane. The disclosed Group 4 transition metal precursors maybe present in varying concentrations in the solvent.

The neat or blended Group 4 transition metal-containing film formingcompositions are introduced into a reactor in vapor form by conventionalmeans, such as tubing and/or flow meters. The vapor form may be producedby vaporizing the neat or blended composition through a conventionalvaporization step such as direct vaporization, distillation, or bybubbling, or by using a sublimator such as the one disclosed in PCTPublication WO2009/087609 to Xu et al. The composition may be fed in aliquid state to a vaporizer (direct liquid injection or “DLI”) where itis vaporized before it is introduced into the reactor. Alternatively,the composition may be vaporized by passing a carrier gas into acontainer containing the compound or by bubbling the carrier gas intothe compound. The carrier gas may include, but is not limited to, Ar,He, N₂, and mixtures thereof. Bubbling with a carrier gas may alsoremove any dissolved oxygen present in the neat or blended compoundsolution. The carrier gas and vapor form of the composition are thenintroduced into the reactor as a vapor.

If necessary, the container may be heated to a temperature that permitsthe composition to be in its liquid phase and to have a sufficient vaporpressure. The container may be maintained at temperatures in the rangeof, for example, approximately 50° C. to approximately 180° C. Thoseskilled in the art recognize that the temperature of the container maybe adjusted in a known manner to control the amount of compositionvaporized.

The Group 4 transition metal-containing film forming compositions may bedelivered to a semiconductor processing tool by the disclosed Group 4transition metal-containing film forming composition delivery devices.FIGS. 1 and 2 show two embodiments of the disclosed delivery devices 1.

FIG. 1 is a side view of one embodiment of the Group 4 transitionmetal-containing film forming composition delivery device 1. In FIG. 1,the disclosed Group 4 transition metal-containing film formingcomposition 11 is contained within a container 2 having at least twoconduits, an inlet conduit 3 and an outlet conduit 4. One of ordinaryskill in the precursor art will recognize that the container 2, inletconduit 3, and outlet conduit 4 are manufactured to prevent the escapeof the gaseous form of the Group 4 transition metal-containing filmforming composition 11, even at elevated temperature and pressure.

Suitable valves include spring-loaded or tied diaphragm valves. Thevalve may further comprise a restrictive flow orifice (RFO). Thedelivery device 1 should be connected to a gas manifold and in anenclosure. The gas manifold should permit the safe evacuation andpurging of the piping that may be exposed to air when the deliverydevice 1 is replaced so that any residual amount of the material doesnot react.

The delivery device 1 must be leak tight and be equipped with valvesthat do not permit escape of even minute amounts of the material whenclosed. The delivery device 1 fluidly connects to other components ofthe semiconductor processing tool, such as the gas cabinet disclosedabove, via valves 6 and 7. Preferably, the container 2, inlet conduit 3,valve 6, outlet conduit 4, and valve 7 are typically made of 316L EPstainless steel.

In FIG. 1, the end 8 of inlet conduit 3 is located above the surface ofthe Group 4 transition metal-containing film forming composition 11,whereas the end 9 of the outlet conduit 4 is located below the surfaceof the Group 4 transition metal-containing film forming composition 11.In this embodiment, the Group 4 transition metal-containing film formingcomposition 11 is preferably in liquid form. An inert gas, including butnot limited to nitrogen, argon, helium, and mixtures thereof, may beintroduced into the inlet conduit 3. The inert gas pressurizes thecontainer 2 so that the liquid Group 4 transition metal-containing filmforming composition 11 is forced through the outlet conduit 4 and tocomponents in the semiconductor processing tool (not shown). Thesemiconductor processing tool may include a vaporizer which transformsthe liquid Group 4 transition metal-containing film forming composition11 into a vapor, with or without the use of a carrier gas such ashelium, argon, nitrogen or mixtures thereof, in order to deliver thevapor to a chamber where a wafer to be repaired is located and treatmentoccurs in the vapor phase. Alternatively, the liquid Group 4 transitionmetal-containing film forming composition 11 may be delivered directlyto the wafer surface as a jet or aerosol.

FIG. 2 is a side view of a second embodiment of the Group 4 transitionmetal-containing film forming composition delivery device 1. In FIG. 2,the end 8 of inlet conduit 3 is located below the surface of the Group 4transition metal-containing film forming composition 11, whereas the end9 of the outlet conduit 4 is located above the surface of the Group 4transition metal-containing film forming composition 11. FIG. 2 alsoincludes an optional heating element 14, which may increase thetemperature of the Group 4 transition metal-containing film formingcomposition 11. The Group 4 transition metal-containing film formingcomposition 11 may be in solid or liquid form. An inert gas, includingbut not limited to nitrogen, argon, helium, and mixtures thereof, isintroduced into the inlet conduit 3. The inert gas flows through theGroup 4 transition metal-containing film forming composition 11 andcarries a mixture of the inert gas and vaporized Group 4 transitionmetal-containing film forming composition 11 to the outlet conduit 4 andto the components in the semiconductor processing tool.

Both FIGS. 1 and 2 include valves 6 and 7. One of ordinary skill in theart will recognize that valves 6 and 7 may be placed in an open orclosed position to allow flow through conduits 3 and 4, respectively.Either delivery device 1 in FIG. 1 or 2, or a simpler delivery devicehaving a single conduit terminating above the surface of any solid orliquid present, may be used if the Group 4 transition metal-containingfilm forming composition 11 is in vapor form or if sufficient vaporpressure is present above the solid/liquid phase. In this case, theGroup 4 transition metal-containing film forming composition 11 isdelivered in vapor form through the conduit 3 or 4 simply by opening thevalve 6 in FIG. 1 or 7 in FIG. 2, respectively. The delivery device 1may be maintained at a suitable temperature to provide sufficient vaporpressure for the Group 4 transition metal-containing film formingcomposition 11 to be delivered in vapor form, for example by the use ofan optional heating element 14.

While FIGS. 1 and 2 disclose two embodiments of the Group 4 transitionmetal-containing film forming composition delivery device 1, one ofordinary skill in the art will recognize that the inlet conduit 3 andoutlet conduit 4 may both be located above the surface of the Group 4transition metal-containing film forming composition 11 withoutdeparting from the disclosure herein. Furthermore, inlet conduit 3 maybe a filling port.

When the Group 4 transition metal-containing film forming compositionsare solids, their vapors may be delivered to the reactor using asublimator. FIG. 3 shows one embodiment of a suitable sublimator 100.The sublimator 100 comprises a container 33. Container 33 may be acylindrical container, or alternatively, may be any shape, withoutlimitation. The container 33 is constructed of materials such asstainless steel, nickel and its alloys, quartz, glass, and otherchemically compatible materials, without limitation. In certaininstances, the container 33 is constructed of another metal or metalalloy, without limitation. In certain instances, the container 33 has aninternal diameter from about 8 centimeters to about 55 centimeters and,alternatively, an internal diameter from about 8 centimeters to about 30centimeters. As understood by one skilled in the art, alternateconfigurations may have different dimensions.

Container 33 comprises a sealable top 15, sealing member 18, and gasket20. Sealable top 15 is configured to seal container 33 from the outerenvironment. Sealable top 15 is configured to allow access to thecontainer 33. Additionally, sealable top 15 is configured for passage ofconduits into container 33. Alternatively, sealable top 15 is configuredto permit fluid flow into container 33. Sealable top 15 is configured toreceive and pass through a conduit comprising a dip tube 92 to remain influid contact with container 33. Dip tube 92 having a control valve 90and a fitting 95 is configured for flowing carrier gas into container33. In certain instances, dip tube 92 extends down the center axis ofcontainer 33. Further, sealable top 15 is configured to receive and passthrough a conduit comprising outlet tube 12. The carrier gas and vaporof the Group 4 transition metal-containing film forming composition isremoved from container 33 through the outlet tube 12. Outlet tube 12comprises a control valve 10 and fitting 5. In certain instances, outlettube 12 is fluidly coupled to a gas delivery manifold, for conductingcarrier gas from the sublimator 100 to a film deposition chamber.

Container 33 and sealable top 15 are sealed by at least two sealingmembers 18; alternatively, by at least about four sealing members. Incertain instance, sealable top 15 is sealed to container 33 by at leastabout eight sealing members 18. As understood by one skilled in the art,sealing member 18 releasably couples sealable top 15 to container 33,and forms a gas resistant seal with gasket 20. Sealing member 18 maycomprise any suitable means known to one skilled in the art for sealingcontainer 33. In certain instances, sealing member 18 comprises athumbscrew.

As illustrated in FIG. 3, container 33 further comprises at least onedisk disposed therein. The disk comprises a shelf, or horizontalsupport, for solid material. In certain embodiments, an interior disk 30is disposed annularly within the container 33, such that the disk 30includes an outer diameter or circumference that is less than the innerdiameter or circumference of the container 33, forming an opening 31. Anexterior disk 86 is disposed circumferentially within the container 33,such that the disk 86 comprises an outer diameter or circumference thatis the same, about the same, or generally coincides with the innerdiameter of the container 33. Exterior disk 86 forms an opening 87disposed at the center of the disk. A plurality of disks is disposedwithin container 33. The disks are stacked in an alternating fashion,wherein interior disks 30, 34, 36, 44 are vertically stacked within thecontainer with alternating exterior disks 62, 78, 82, 86. Inembodiments, interior disks 30, 34, 36, 44 extend annularly outward, andexterior disks 62, 78, 82, 86 extend annularly toward the center ofcontainer 33. As illustrated in the embodiment of FIG. 3, interior disks30, 34, 36, 44 are not in physical contact with exterior disks 62, 78,82, 86.

The assembled sublimator 100 comprises interior disks 30, 34, 36, 44comprising aligned and coupled support legs 50, interior passage 51,concentric walls 40, 41, 42, and concentric slots 47, 48, 49. Theinterior disks 30, 34, 36, 44 are vertically stacked, and annularlyoriented about the dip tube 92. Additionally, the sublimator comprisesexterior disks 62, 78, 82, 86. As illustrated in FIG. 3, the exteriordisks 62, 78, 82, 86 should be tightly fit into the container 33 for agood contact for conducting heat from the container 33 to the disks 62,78, 82, 86. Preferably, the exterior disks 62, 78, 82, 86 are coupledto, or in physical contact with, the inner wall of the container 33.

As illustrated, exterior disks 62, 78, 82, 86 and interior disks 30, 34,36, 44 are stacked inside the container 33. When assembled in container33 to form sublimator 100, the interior disks 30, 34, 36, 44 form outergas passages 31, 35, 37, 45 between the assembled exterior disks 62, 78,82, 86. Further, exterior disks 62, 78, 82, 86 form inner gas passages56, 79, 83, 87 with the support legs of the interior disks 30, 34, 36,44. The walls 40, 41, 42 of interior disks 30, 34, 36, 44 form thegrooved slots for holding solid precursors. Exterior disks 62, 78, 82,86 comprise walls 68, 69, 70 for holding solid precursors. Duringassembly, the solid precursors are loaded into the annular slots 47, 48,49 of interior disks 30, 34, 36, 44 and annular slots 64, 65, 66 ofexterior disks 62, 78, 82, 86.

While FIG. 3 discloses one embodiment of a sublimator capable ofdelivering the vapor of any solid Group 4 transition metal-containingfilm forming composition to the reactor, one of ordinary skill in theart will recognize that other sublimator designs may also be suitable,without departing from the teachings herein. Finally, one of ordinaryskill in the art will recognize that the disclosed Group 4 transitionmetal-containing film forming composition 11 may be delivered tosemiconductor processing tools using other delivery devices, such as theampoules disclosed in WO 2006/059187 to Jurcik et al., without departingfrom the teachings herein.

The reaction chamber may be any enclosure or chamber of a device inwhich deposition methods take place, such as, without limitation, aparallel-plate type reactor, a cold-wall type reactor, a hot-wall typereactor, a single-wafer reactor, a multi-wafer reactor, or other suchtypes of deposition systems. All of these exemplary reaction chambersare capable of serving as an ALD reaction chamber. The reaction chambermay be maintained at a pressure ranging from about 0.5 mTorr to about 20Torr, preferably between about 0.1 Torr and about 5 Torr. In addition,the temperature within the reaction chamber may range from about 50° C.to about 600° C. One of ordinary skill in the art will recognize thatthe optimal deposition temperature range for each Group 4 transitionmetal precursors may be determined experimentally to achieve the desiredresult.

The reactor contains one or more substrates onto which the thin filmswill be deposited. A substrate is generally defined as the material onwhich a process is conducted. The substrates may be any suitablesubstrate used in semiconductor, photovoltaic, flat panel, or LCD-TFTdevice manufacturing. Examples of suitable substrates include wafers,such as silicon, SiGe, silica, glass, or Ge. Plastic substrates, such aspoly(3,4-ethylenedioxythiophene)poly (styrenesulfonte) [PEDOT:PSS], mayalso be used. The substrate may also have one or more layers ofdiffering materials already deposited upon it from a previousmanufacturing step. For example, the wafers may include silicon layers(crystalline, amorphous, porous, etc.), silicon oxide layers, siliconnitride layers, silicon oxy nitride layers, carbon doped silicon oxide(SiCOH) layers, or combinations thereof. Additionally, the wafers mayinclude copper, cobalt, ruthenium, tungsten and/or other metal layers(e.g. platinum, palladium, nickel, ruthenium, or gold). The wafers mayinclude barrier layers or electrodes, such as tantalum, tantalumnitride, etc. Plastic layers, such aspoly(3,4-ethylenedioxythiophene)poly (styrenesulfonate) [PEDOT:PSS] mayalso be used. The layers may be planar or patterned. The substrate maybe an organic patterened photoresist film. The substrate may includelayers of oxides which are used as dielectric materials in MIM, DRAM, orFeRam technologies (for example, ZrO₂ based materials, HfO₂ basedmaterials, TiO₂ based materials, rare earth oxide based materials,ternary oxide based materials, etc.) or from nitride-based films (forexample, TaN, TiN, NbN) that are used as electrodes. The disclosedprocesses may deposit the Group IV-containing layer directly on thewafer or directly on one or more than one (when patterned layers formthe substrate) of the layers on top of the wafer. Furthermore, one ofordinary skill in the art will recognize that the terms “film” or“layer” used herein refer to a thickness of some material laid on orspread over a surface and that the surface may be a trench or a line.Throughout the specification and claims, the wafer and any associatedlayers thereon are referred to as substrates. The actual substrateutilized may also depend upon the specific precursor embodimentutilized. In many instances though, the preferred substrate utilizedwill be selected from TiN, NbN, Ru, Si, and SiGe type substrates, suchas polysilicon or crystalline silicon substrates. For example, a Group 4metal oxide film may be deposited onto a TiN substrate. In subsequentprocessing, a TiN layer may be deposited on the Group 4 metal oxidelayer, forming a TiN/Group 4 metal oxide/TiN stack used as DRAMcapacitor. The Metal Oxide layer itself may be made of a stack ofseveral layers of various metal oxides, generally selected from Group 4metal oxide, Group 5 metal oxide, Al₂O₃, SiO₂, and MoO₂.

The temperature and the pressure within the reactor are held atconditions suitable for vapor depositions. In other words, afterintroduction of the vaporized composition into the chamber, conditionswithin the chamber are such that at least part of the vaporized Group 4transition metal precursor is deposited onto the substrate to form aGroup 4 transition metal-containing film. For instance, the pressure inthe reactor may be held between about 1 Pa and about 10⁵ Pa, morepreferably between about 25 Pa and about 10³ Pa, as required per thedeposition parameters. Likewise, the temperature in the reactor may beheld between about 100° C. and about 500° C., preferably between about200° C. and about 450° C. One of ordinary skill in the art willrecognize that “at least part of the vaporized Group 4 transition metalprecursor is deposited” means that some or all of the precursor reactswith or adheres to the substrate.

The temperature of the reactor may be controlled by either controllingthe temperature of the substrate holder or controlling the temperatureof the reactor wall. Devices used to heat the substrate are known in theart. The reactor wall is heated to a sufficient temperature to obtainthe desired film at a sufficient growth rate and with desired physicalstate and composition. A non-limiting exemplary temperature range towhich the reactor wall may be heated includes from approximately 100° C.to approximately 500° C. When a plasma deposition process is utilized,the deposition temperature may range from approximately 50° C. toapproximately 400° C. Alternatively, when a thermal process isperformed, the deposition temperature may range from approximately 200°C. to approximately 450° C.

In addition to the disclosed Group 4 transition metal-containing filmforming composition, a reactant may also be introduced into the reactor.The reactant may be an oxidizing gas such as one of O₂, O₃, H₂O, H₂O₂,NO, N₂O, NO₂, a diol (such as ethylene glycol or hydratedhexafluoroacetone), oxygen containing radicals such as O. or OH., NO,NO₂, carboxylic acids, formic acid, acetic acid, propionic acid, andmixtures thereof. Preferably, the oxidizing gas is selected from thegroup consisting of O₂, O₃, H₂O, H₂O₂, oxygen containing radicalsthereof such as O. or OH., and mixtures thereof.

Alternatively, the reactant may be H₂, NH₃, hydrazines (such as N₂H₄,MeHNNH₂, Me₂NNH₂, MeHNNHMe, phenyl hydrazine), organic amines (such asNMeH₂, NEtH₂, NMe₂H, NEt₂H, NMe₃, NEt₃, (SiMe₃)₂NH, cyclic amines likepyrrolidine or pyrimidine), diamines (such as ethylene diamine,dimethylethylene diamine, tetramethylethylene diamine), aminoalcohols(such as ethanolamine [HO—CH₂—CH₂—NH₂], bis ethanolamine [HN(C₂H₅OH)₂]or tris ethanolamine[N(C₂H₅OH)₃]), pyrazoline, pyridine, radicalsthereof, or mixtures thereof. Preferably the reactant is H₂, NH₃,radicals thereof, or mixtures thereof.

In another alternative, the reactant may be (SiH₃)₃N, hydridosilanes(such as SiH₄, Si₂H₆, Si₃H₈, Si₄H₁₀, Si₅H₁₀, or Si₆H₁₂), chlorosilanesand chloropolysilanes (such as SiHCl₃, SiH₂Cl₂, SiH₃Cl, Si₂Cl₆, Si₂HCl₅,or Si₃Cl₈), alkylsilanes (such as Me₂SiH₂, Et₂SiH₂, MeSiH₃, EtSiH₃, orphenyl silane), and aminosilanes (such as tris-dimethylaminosilane,bis-diethylaminosilane, di-isopropylaminosilane or other mono, dis ortris aminosilanes), radicals thereof, or mixtures thereof. Preferably,the reactant is (SiH₃)₃N or an aminosilane.

The reactant may be treated by a plasma, in order to decompose thereactant into its radical form. N₂ may also be utilized as a reducinggas when treated with plasma. For instance, the plasma may be generatedwith a power ranging from about 50 W to about 2500 W, preferably fromabout 100 W to about 400 W. The plasma may be generated or presentwithin the reactor itself. Alternatively, the plasma may generally be ata location removed from the reactor, for instance, in a remotely locatedplasma system. One of skill in the art will recognize methods andapparatus suitable for such plasma treatment.

For example, the reactant may be introduced into a direct plasmareactor, which generates plasma in the reaction chamber, to produce theplasma-treated reactant in the reaction chamber. Exemplary direct plasmareactors include the Titan™ PECVD System produced by Trion Technologies.The reactant may be introduced and held in the reaction chamber prior toplasma processing. Alternatively, the plasma processing may occursimultaneously with the introduction of the reactant. In-situ plasma istypically a 13.56 MHz RF inductively coupled plasma that is generatedbetween the showerhead and the substrate holder. The substrate or theshowerhead may be the powered electrode depending on whether positiveion impact occurs. Typical applied powers in in-situ plasma generatorsare from approximately 30 W to approximately 1000 W. Preferably, powersfrom approximately 30 W to approximately 600 W are used in the disclosedmethods. More preferably, the powers range from approximately 100 W toapproximately 500 W. The disassociation of the reactant using in-situplasma is typically less than achieved using a remote plasma source forthe same power input and is therefore not as efficient in reactantdisassociation as a remote plasma system, which may be beneficial forthe deposition of Group 4 transition metal-containing films onsubstrates easily damaged by plasma.

Alternatively, the plasma-treated reactant may be produced outside ofthe reaction chamber. The MKS Instruments' ASTRONi® reactive gasgenerator may be used to treat the reactant prior to passage into thereaction chamber. Operated at 2.45 GHz, 7 kW plasma power, and apressure ranging from approximately 0.5 Torr to approximately 10 Torr,the reactant O₂ may be decomposed into two O^(▪); radicals. Preferably,the remote plasma may be generated with a power ranging from about 1 kWto about 10 kW, more preferably from about 2.5 kW to about 7.5 kW.

The vapor deposition conditions within the chamber allow the disclosedGroup 4 transition metal-containing film forming composition and thereactant to react and form a Group 4 transition metal-containing film onthe substrate. In some embodiments, Applicants believe thatplasma-treating the reactant may provide the reactant with the energyneeded to react with the disclosed composition.

Depending on what type of film is desired to be deposited, an additionalprecursor compound may be introduced into the reactor. The precursor maybe used to provide additional elements to the Group 4 transitionmetal-containing film. The additional elements may include lanthanides(e.g., Ytterbium, Erbium, Dysprosium, Gadolinium, Praseodymium, Cerium,Lanthanum, Yttrium), germanium, silicon, aluminum, boron, phosphorous, aGroup 3 element (i.e., Sc, Y, La, or Ac), a different Group 4 element,or a Group 5 element (i.e., V, Nb, or Ta), or mixtures of these. When anadditional precursor compound is utilized, the resultant film depositedon the substrate contains the Group 4 transition metal in combinationwith at least one additional element.

The Group 4 transition metal-containing film forming compositions andreactants may be introduced into the reactor either simultaneously(chemical vapor deposition), sequentially (atomic layer deposition) ordifferent combinations thereof. The reactor may be purged with an inertgas between the introduction of the composition and the introduction ofthe reactant. Alternatively, the reactant and the composition may bemixed together to form a reactant/compound mixture, and then introducedto the reactor in mixture form. Another example is to introduce thereactant continuously and to introduce the Group 4 transitionmetal-containing film forming composition by pulse (pulsed chemicalvapor deposition).

The vaporized composition and the reactant may be pulsed sequentially orsimultaneously (e.g. pulsed CVD) into the reactor. Each pulse ofcomposition may last for a time period ranging from about 0.01 secondsto about 100 seconds, alternatively from about 0.3 seconds to about 30seconds, alternatively from about 0.5 seconds to about 10 seconds. Thereactant may also be pulsed into the reactor. In such embodiments, thepulse of each gas may last from about 0.01 seconds to about 100 seconds,alternatively from about 0.3 seconds to about 30 seconds, alternativelyfrom about 0.5 seconds to about 10 seconds. In another alternative, thevaporized composition and one or more reactants may be simultaneouslysprayed from a shower head under which a susceptor holding severalwafers is spun (spatial ALD).

Depending on the particular process parameters, deposition may takeplace for a varying length of time. Generally, deposition may be allowedto continue as long as desired or necessary to produce a film with thenecessary properties. Typical film thicknesses may vary from severalangstroms to several hundreds of microns, depending on the specificdeposition process. The deposition process may also be performed as manytimes as necessary to obtain the desired film.

In one non-limiting exemplary CVD type process, the vapor phase of thedisclosed Group 4 transition metal-containing film forming compositionand a reactant are simultaneously introduced into the reactor. The tworeact to form the resulting Group 4 transition metal-containing thinfilm. When the reactant in this exemplary CVD process is treated with aplasma, the exemplary CVD process becomes an exemplary PECVD process.The reactant may be treated with plasma prior or subsequent tointroduction into the chamber.

In one non-limiting exemplary ALD type process, the vapor phase of thedisclosed Group 4 transition metal-containing film forming compositionis introduced into the reactor, where the Group 4 transition metalprecursor physi- or chemisorbs on the substrate. Excess composition maythen be removed from the reactor by purging and/or evacuating thereactor. A desired gas (for example, O₃) is introduced into the reactorwhere it reacts with the physi- or chemisorped precursor in aself-limiting manner. Any excess reducing gas is removed from thereactor by purging and/or evacuating the reactor. If the desired film isa Group 4 transition metal film, this two-step process may provide thedesired film thickness or may be repeated until a film having thenecessary thickness has been obtained.

Alternatively, if the desired film contains Group 4 transition metal anda second element, the two-step process above may be followed byintroduction of the vapor of an additional precursor compound into thereactor. The additional precursor compound will be selected based on thenature of the Group 4 transition metal film being deposited. Afterintroduction into the reactor, the additional precursor compound iscontacted with the substrate. Any excess precursor compound is removedfrom the reactor by purging and/or evacuating the reactor. Once again, adesired gas may be introduced into the reactor to react with theprecursor compound. Excess gas is removed from the reactor by purgingand/or evacuating the reactor. If a desired film thickness has beenachieved, the process may be terminated. However, if a thicker film isdesired, the entire four-step process may be repeated. By alternatingthe provision of the Group 4 transition metal-containing compound,additional precursor compound, and reactant, a film of desiredcomposition and thickness can be deposited.

When the reactant in this exemplary ALD process is treated with aplasma, the exemplary ALD process becomes an exemplary PEALD process.The reactant may be treated with plasma prior or subsequent tointroduction into the chamber.

In a second non-limiting exemplary ALD type process, the vapor phase ofone of the disclosed Zr-containing precursors, for exampleMe₅CpZr((—O—CH₂—CH₂—)₃N), is introduced into the reactor, where it iscontacted with a TiN substrate. Excess Zr-containing precursor may thenbe removed from the reactor by purging and/or evacuating the reactor. Adesired gas (for example, O₃) is introduced into the reactor where itreacts with the absorbed Zr-containing precursor in a self-limitingmanner to form a ZrO₂ film. Any excess oxidizing gas is removed from thereactor by purging and/or evacuating the reactor. These two steps may berepeated until the ZrO₂ film obtains a desired thickness. The resultingTiN/ZrO₂/TiN stack may be used in DRAM capacitors. The ZrO₂ metal oxidefilm may be included within a more complex stack containing a laminateof various metal oxides. Typically, ZrO₂/Al₂O₃/ZrO₂ stacks are used, butalso TiO₂/ZrO₂/Al₂O₃/ZrO₂, ZrO₂/Nb₂O₃/ZrO₂, ZrO₂/HfO₂/TiO₂/ZrO₂, etc.

The Group 4 transition metal-containing films resulting from theprocesses discussed above may include a Group 4 transition metal oxide(MM′_(i)O_(x), wherein i ranges from 0 to 1; x ranges from 1 to 6; and Mis selected from a Group 3 element, a different Group 4 element (i.e.,M≠M′), a Group 5 element, a lanthanide, Si, Al, B, P or Ge) or a Group 4transition metal oxynitride (MM′_(i)N_(y)O_(x), wherein i ranges from 0to 1; x and y range from 1 to 6; and M′ is selected from a Group 3element, a different Group 4 element (i.e., M≠M′), a Group 5 element, alanthanide, Si, Al, B, P or Ge). One of ordinary skill in the art willrecognize that by judicial selection of the appropriate disclosedcompound, optional precursor compounds, and reactant species, thedesired film composition may be obtained.

Upon obtaining a desired film thickness, the film may be subject tofurther processing, such as thermal annealing, furnace-annealing, rapidthermal annealing, UV or e-beam curing, and/or plasma gas exposure.Those skilled in the art recognize the systems and methods utilized toperform these additional processing steps. For example, the Group 4transition metal-containing film may be exposed to a temperature rangingfrom approximately 200° C. and approximately 1000° C. for a time rangingfrom approximately 0.1 second to approximately 7200 seconds under aninert atmosphere, a H-containing atmosphere, a N-containing atmosphere,an O-containing atmosphere, or combinations thereof. Most preferably,the temperature is 400° C. for 3600 seconds under an H-containingatmosphere or an O-containing atmosphere. The resulting film may containfewer impurities and therefore may have an improved density resulting inimproved leakage current. The annealing step may be performed in thesame reaction chamber in which the deposition process is performed.Alternatively, the substrate may be removed from the reaction chamber,with the annealing/flash annealing process being performed in a separateapparatus. Any of the above post-treatment methods, but especiallythermal annealing, has been found effective to reduce carbon andnitrogen contamination of the Group 4 transition metal-containing film.This in turn tends to improve the resistivity of the film.

It will be understood that many additional changes in the details,materials, steps, and arrangement of parts, which have been hereindescribed and illustrated in order to explain the nature of theinvention, may be made by those skilled in the art within the principleand scope of the invention as expressed in the appended claims. Thus,the present invention is not intended to be limited to the specificembodiments in the examples given above and/or the attached drawings.

We claim:
 1. A Group 4 transition metal-containing film formingcomposition comprising a Group 4 transition metal precursor of formula:L₂-M-C₄AR₃-3-[(ER₂)_(m)-(ER₂)_(n)-L′]-, referring to the followingstructure:

wherein M is Zr bonded in an η⁵ or η⁶ bonding mode to the five-memberedaromatic group; each A is independently N, Si, B or P; each E isindependently C, Si, B or P; m and n is independently 0, 1 or 2; m+n>1;each R is independently H or a C₁-C₄ hydrocarbon group; each L isindependently selected from the group consisting of NR′2, OR′, Cp,amidinate, β-diketonate, and keto-iminate, wherein R′ is a H or a C1-C4hydrocarbon group and adjacent R′s may be joined to form a hydrocarbylring; and L′ is NR″ or O, wherein R″ is H or a C₁-C₄ hydrocarbon group.2. The Group 4 transition metal-containing film forming composition ofclaim 1, wherein A is N and E is C.
 3. The Group 4 transitionmetal-containing film forming composition of claim 2, wherein the Group4 transitional metal precursor is selected from(NMe₂)₂-Zr-Pyrrole-(CH₂—CH₂—NMe) or (NMe₂)(Cp)-Zr-Pyrrole-(CH₂—CH₂—NMe).4. A method of depositing of a Group 4 transition metal-containing filmon a substrate, comprising the steps of: introducing a vapor of theGroup 4 transition metal-containing film forming composition of claim 1to into a reactor having a substrate disposed therein and depositing atleast part of the Group 4 transition metal precursor onto the substrate.5. The method of claim 4, further comprising introducing at least onereactant into the reactor.
 6. The method of claim 5, wherein thereactant is selected from the group consisting of: O₂, O₃, H₂O, H₂O₂,NO, N₂O, NO₂, oxygen radicals thereof, and mixtures thereof.
 7. Themethod of claim 5, wherein the reactant is a M′-containing precursor andthe Group 4 transition metal-containing film is MM′_(i)O_(x), wherein iranges from 0 to 1; x ranges from 1 to 6; and M′ is selected from aGroup 3 element, a different Group 4 element, a Group 5 element, alanthanide, Si, Al, B, P or Ge.
 8. The method of claim 5, wherein theGroup 4 transition metal-containing film forming composition and thereactant are introduced into the reactor simultaneously and the reactoris configured for chemical vapor deposition.
 9. The method of claim 5,wherein the Group 4 transition metal-containing film forming compositionand the reactant are introduced into the chamber sequentially and thereactor is configured for atomic layer deposition.
 10. The method ofclaim 5, wherein the Group 4 transition metal-containing film formingcomposition is used to form a DRAM capacitor.
 11. The method of claim 8,wherein the chemical vapor deposition is plasma enhanced.
 12. The methodof claim 9, wherein the atomic layer deposition is plasma enhanced. 13.A Group 4 transition metal-containing film forming compositioncomprising a Group 4 transition metal precursor of formula:L₂-M-C₅AR₄-4-[(ER₂)_(m)-(ER₂)_(n)-L′]-, referring to the followingstructure:

wherein M is Zr bonded in an η⁵ or η⁶ bonding mode to the six-memberedaromatic group; each A is independently N, Si, B or P; each E isindependently C, Si, B or P; m and n is independently 0, 1 or 2; m+n >1; each R is independently H or a C₁-C₄ hydrocarbon group; each L isindependently selected from the group consisting of NR′2, OR′, Cp,amidinate, β-diketonate, and keto-iminate, wherein R′ is a H or a C1-C4hydrocarbon group and adjacent R's may be joined to form a hydrocarbylring; and L′ is NR″ or O, wherein R″ is H or a C₁-C₄ hydrocarbon group.14. The Group 4 transition metal-containing film forming composition ofclaim 13, wherein A is N and E is C.
 15. The Group 4 transitionmetal-containing film forming composition of claim 14, wherein the Group4 transitional metal precursor is selected from the group consisting of(R₂N)₂-M-C₅NH₄-4-[(CH₂)₂-NR]—, (R₂N)Cp-M-C₅NH₄-4-[(CH₂)₂-NR]—,(RO)₂-M-C₅NH₄-4-[(CH₂)₂-NR]—, (R₂N)₂-M-C₅NH₄-4-[(CH₂)₂—O]—,(R₂N)Cp-M-C₅NH₄-4-[(CH₂)₂—O]—, and (RO)₂-M-C₅NH₄-4-[(CH₂)₂-O]—, witheach R independently Me, Et, iPr, nPr, nBu, iBu, sBu, or tBu.
 16. TheGroup 4 transition metal-containing film forming composition of claim15, wherein the Group 4 transitional metal precursor is(R₂N)₂-M-C₅NH₄-4-[(CH₂)₂—NR]—.
 17. A method of depositing of a Group 4transition metal-containing film on a substrate, comprising the stepsof: introducing a vapor of the Group 4 transition metal-containing filmforming composition of claim 13 to into a reactor having a substratedisposed therein and depositing at least part of the Group 4 transitionmetal precursor onto the substrate.
 18. The method of claim 17, furthercomprising introducing at least one reactant into the reactor.
 19. Themethod of claim 18, wherein the reactant is selected from the groupconsisting of: O₂, O₃, H₂O, H₂O₂, NO, N₂O, NO₂, oxygen radicals thereof,and mixtures thereof.
 20. The method of claim 17, wherein the Group 4transition metal-containing film forming composition is used to form aDRAM capacitor.